公开(公告)号：US06371713B1

公开(公告)日：2002-04-16

申请号：US09143027

申请日：1998-08-28

Applicant: Joichi Nishimura ,  Masami Ohtani ,  Yasuhiko Hashimoto

Inventor： Joichi Nishimura ,  Masami Ohtani ,  Yasuhiko Hashimoto

IPC: B65G4907

CPC classification number: B25J18/025 ,  B25J18/04 ,  H01L21/68707 ,  Y10S414/139

Abstract: A substrate processing apparatus includes a transport robot (TR1) formed with a telescopic vertical movement mechanism of a so-called telescopically nestable multi-tier construction. A drive mechanism (D1) is initially driven to move a support member (48) upwardly to simultaneously elevate a vertical movement member (42d). As the vertical movement member (42d) rises, a pulley (47c) simultaneously moves upwardly. As the pulley (47c) moves upwardly, a vertical movement member (42c) is lifted upwardly by a belt (L1). Similar actions elevate a pair of transport arms (31a, 31b) provided on the top of a vertical movement member (42a). The increase in the number of tiers of the nestable multi-tier structure precludes the increase in height of the transport robot (TR1) in its retracted position. The substrate processing apparatus, if having an increased height, is capable of transporting a substrate to and from processing portions and eliminates the need to reassemble and adjust the transport robot (TR1) for transportation of the apparatus.

Abstract translation: 基板处理装置包括形成有所谓的可伸缩的多层结构的伸缩式垂直运动机构的输送机器人（TR1）。 驱动机构（D1）最初被驱动以向上移动支撑构件（48）以同时升高垂直运动构件（42d）。 当垂直运动构件（42d）升高时，滑轮（47c）同时向上移动。 当滑轮（47c）向上移动时，垂直运动构件（42c）被带（L1）向上提升。 类似的动作提升了设置在垂直运动件（42a）的顶部上的一对传送臂（31a，31b）。 可嵌套多层结构的层数的增加排除了运输机器人（TR1）处于缩回位置的高度增加。 基板处理装置如果具有增加的高度，则能够将基板输送到处理部分和从处理部分输送基板处理装置，并且不需要重新组装和调整运输机器人（TR1）以便运送装置。

公开(公告)号：US5926824A

公开(公告)日：1999-07-20

申请号：US557466

申请日：1995-11-14

Applicant: Yasuhiko Hashimoto

Inventor： Yasuhiko Hashimoto

IPC: G06F17/30

CPC classification number: G06F17/30265 ,  Y10S707/99933 ,  Y10S707/99934

Abstract: A document image is divided into areas of every various attributes such as composition, photograph, chart, title, and the like. The attribute of each area and information indicating to which page of which document image each area belongs are managed by the data base. When the user inputs a desired attribute, the document image including the area having the inputted attribute is retrieved.

Abstract translation: 文档图像被分成各种属性的区域，例如构图，照片，图表，标题等。 每个区域的属性和指示每个区域属于哪个文档图像的页面的信息由数据库管理。 当用户输入所需属性时，检索包括具有输入属性的区域的文档图像。

公开(公告)号：US5740028A

公开(公告)日：1998-04-14

申请号：US864903

申请日：1997-05-29

Applicant: Mitsumasa Sugiyama ,  Susumu Sugiura ,  Yoshikazu Yokomizo ,  Yoshinobu Mita ,  Makoto Takaoka ,  Shigetada Kobayashi ,  Junichi Shishizuka ,  Tsutomu Negishi ,  Osamu Yamada ,  Yukari Toda ,  Kazuhiro Saito ,  Masanari Toda ,  Yasuhiko Hashimoto ,  Yasuo Fukuda

Inventor： Mitsumasa Sugiyama ,  Susumu Sugiura ,  Yoshikazu Yokomizo ,  Yoshinobu Mita ,  Makoto Takaoka ,  Shigetada Kobayashi ,  Junichi Shishizuka ,  Tsutomu Negishi ,  Osamu Yamada ,  Yukari Toda ,  Kazuhiro Saito ,  Masanari Toda ,  Yasuhiko Hashimoto ,  Yasuo Fukuda

IPC: G06F3/12 ,  G06F13/00 ,  G06K15/00 ,  G06T1/00 ,  H04N1/00 ,  H04N1/32

CPC classification number: G06F3/1294 ,  G06F3/1297 ,  G06K15/00 ,  H04N1/00127 ,  H04N1/00915 ,  H04N1/32502 ,  H04N1/32512 ,  H04N1/32518 ,  H04N1/32609 ,  H04N1/32662 ,  G06K2215/0085 ,  H04N1/00204 ,  H04N2201/0015 ,  H04N2201/0034 ,  H04N2201/0049 ,  H04N2201/0081 ,  H04N2201/0082

Abstract: There is disclosed an information input/output control device and a method for controlling the same which supervises a working condition of an information terminal device connected to the information input/output control device under a network circumstance executing various functional operations, memorizes status informations in a manner enabling to be restarted and executes the functional operations in the information terminal devices other than the preceding one in response to an input of an operation cease information of the preceding information terminal device.

Abstract translation: 公开了一种在执行各种功能操作的网络环境下监视连接到信息输入/输出控制装置的信息终端装置的工作状态的信息输入/输出控制装置及其控制方法， 响应于前一信息终端设备的操作停止信息的输入，使得能够重新启动并执行除先前信息终端设备之外的信息终端设备中的功能操作。

公开(公告)号：US08555744B2

公开(公告)日：2013-10-15

申请号：US10586789

申请日：2005-01-21

Applicant: Yasuo Hirooka ,  Yasuhiko Hashimoto

Inventor： Yasuo Hirooka ,  Yasuhiko Hashimoto

IPC: B25J17/00 ,  F16H55/18 ,  F16H57/00 ,  F16H1/06

CPC classification number: F16H57/12 ,  B25J9/103 ,  F16H1/06 ,  F16H57/022 ,  F16H57/023 ,  F16H2057/0222 ,  F16H2057/125 ,  Y10T74/19502 ,  Y10T74/19623 ,  Y10T74/19628 ,  Y10T74/19647 ,  Y10T74/19898 ,  Y10T74/20305

Abstract: The present gear mechanism includes a base body member, a first gear supported on the base body member so as to rotate about a first rotational axis, a second gear capable of being meshed with the first gear, a support member supporting the second gear so as to rotate about a second rotational axis and placed on the base body member so as to be movable in approaching and leaving directions respectively toward and away from the first rotational axis, and a retaining member engaged in a threaded hole formed in the base body member and capable of being turned so as to move in the approaching and leaving directions, and directly or indirectly engaged with the support member to restrain the support member from moving in the leaving direction away from the first rotational axis.

Abstract translation: 本齿轮机构包括基体构件，支撑在基体构件上以围绕第一旋转轴线旋转的第一齿轮，能够与第一齿轮啮合的第二齿轮，支撑第二齿轮的支撑构件， 围绕第二旋转轴线旋转并且放置在基体本体构件上，使得能够分别朝向和远离第一旋转轴线接近和离开方向移动;以及保持构件，其接合在形成在基体构件中的螺纹孔中， 能够被转动以在接近和离开方向上移动，并且直接或间接地与支撑构件接合以限制支撑构件在离开方向上离开第一旋转轴线移动。

公开(公告)号：US20110218663A1

公开(公告)日：2011-09-08

申请号：US13124777

申请日：2008-10-22

Applicant: Yasuhiko Hashimoto

Inventor： Yasuhiko Hashimoto

IPC: G05D3/12

CPC classification number: H01L21/681 ,  H01L21/67748 ,  H01L21/68 ,  H01L21/68707 ,  H01L21/68742

Abstract: The apparatus includes a rotary mechanism for holding a semiconductor wafer and rotating the same, a detection mechanism for detecting a positioning cutout portion formed in the wafer, and a wafer transfer mechanism for lifting the wafer from a wafer mounting portion of the rotary mechanism or mounting the wafer on the same. The wafer transfer mechanism has a movable holding portion for holding the wafer at a position just above the wafer mounting portion and is constituted such that the movable holding portion moves up or down while avoiding the wafer held by the rotary mechanism.

Abstract translation: 该装置包括用于保持半导体晶片并使其旋转的旋转机构，用于检测形成在晶片中的定位切口部分的检测机构和用于从旋转机构的晶片安装部分提升晶片的晶片传送机构或安装 晶片在同一个。 晶片传送机构具有用于将晶片保持在刚好在晶片安装部分上方的位置的可移动保持部分，并且构造成使得可移动保持部分在移动的同时避免由旋转机构保持的晶片而上下移动。

公开(公告)号：US20110123300A1

公开(公告)日：2011-05-26

申请号：US13017552

申请日：2011-01-31

Applicant: Yasuhiko HASHIMOTO

Inventor： Yasuhiko HASHIMOTO

IPC: H01L21/677

CPC classification number: H01L21/67778 ,  H01L21/67775 ,  Y10S414/137

Abstract: An assembly method of assembling a substrate transfer device including: a transfer system unit forming step of fixing a robot and a substrate container retainer to a divided body which composes a part of the substrate transfer device and is formed separably on a main structural body as a residual part of the substrate transfer device, thereby forming a transfer system unit; an operation examination step of examining whether the robot fixed to the transfer system unit can operate as a part of the substrate transfer device or not; and a mounting step of mounting the transfer system unit on the main structural body of the substrate transfer device after the operation examination step.

Abstract translation: 一种组装基板输送装置的组装方法，包括：传送系统单元形成步骤，将机器人和基板容器保持器固定到构成基板传送装置的一部分的分割体上，并且可分离地形成在主结构体上， 从而形成传送系统单元; 检查固定到转印系统单元的机器人是否可以作为基板转印装置的一部分进行操作的操作检查步骤; 以及在操作检查步骤之后将传送系统单元安装在基板传送装置的主结构体上的安装步骤。

公开(公告)号：US20110054683A1

公开(公告)日：2011-03-03

申请号：US12990731

申请日：2009-04-27

Applicant: Yasuhiko Hashimoto ,  Toshiaki Yoshida ,  Tetsuya Yoshida

Inventor： Yasuhiko Hashimoto ,  Toshiaki Yoshida ,  Tetsuya Yoshida

IPC: B25J9/00

CPC classification number: B25J19/0025 ,  H01L21/67766 ,  H02G11/00

Abstract: An article carrier robot includes: a horizontal base; a horizontally movable unit supported by the horizontal base so as to be movable in a horizontal direction; a robot main body supported by the horizontally movable unit; at least one of wiring and piping introduced into the robot main body from the horizontal base; and a restriction unit supported by the horizontally movable unit so as to be swayable about a pivot provided to the horizontally movable unit. The restriction unit is configured to restrict deformation of a part of the at least one of wiring and piping.

Abstract translation: 物品载体机器人包括：水平底座; 水平移动单元，其由水平基座支撑，以便能够在水平方向上移动; 由水平移动单元支撑的机器人主体; 从水平底座引入机器人主体的布线和管道中的至少一个; 以及由水平移动单元支撑的限制单元，以便围绕设置在水平移动单元的枢轴摆动。 限制单元被配置为限制布线和管道中的至少一个的一部分的变形。

公开(公告)号：US07644968B2

公开(公告)日：2010-01-12

申请号：US10586654

申请日：2005-01-21

Applicant: Yasuo Hirooka ,  Yasuhiko Hashimoto ,  Kei Watanabe

Inventor： Yasuo Hirooka ,  Yasuhiko Hashimoto ,  Kei Watanabe

IPC: B25J15/00 ,  B65G49/07

CPC classification number: H01L21/68707 ,  Y10S294/902 ,  Y10S414/141

Abstract: A supporting structure is mounted on a hand body facing a circumferential edge of a substrate from below the substrate to support the substrate. First and second guiding members are mounted on the hand body, and having guiding surfaces in contact with an imaginary cylinder having an axis aligned with a reference axis of the hand body. First and second movable members are capable of moving in an imaginary plane perpendicular to the reference axis and are disposed on the radially outer-side of the circumferential edge of the substrate so as to face the circumferential edge. A driving unit simultaneously displaces the first and second movable members in the imaginary plane. The first and second guiding members and the first and second movable members are spaced apart on the circumference of the imaginary cylinder at intervals greater than the length of the arc of a segment in a substrate holding state.

Abstract translation: 支撑结构从基板的下方安装在面向基板的周缘的手体上以支撑基板。 第一引导构件和第二引导构件安装在手柄上，并且具有与具有与手柄的基准轴线对准的轴线的假想气缸接触的引导表面。 第一和第二可移动构件能够在垂直于参考轴线的虚拟平面中移动，并且设置在基板的周向边缘的径向外侧上以面向周向边缘。 驱动单元同时在假想平面中移动第一和第二可动构件。 第一和第二引导构件以及第一和第二可移动构件在假想圆柱的圆周上以基片保持状态下的段的弧的长度间隔开。

公开(公告)号：US07383751B2

公开(公告)日：2008-06-10

申请号：US10889079

申请日：2004-07-13

Applicant: Yasuhiko Hashimoto ,  Eiichi Yamaki

Inventor： Yasuhiko Hashimoto ,  Eiichi Yamaki

IPC: B25J17/00 ,  B66C23/00

CPC classification number: B25J9/06 ,  B25J9/042 ,  H01L21/67766 ,  Y10T74/20305

Abstract: An articulated robot is provided with first, second and third arms respectively having effective lengths substantially equal to each other and capable of turning respectively about first, second and third pivotal axes. The second and the third arm are interlocked by an interlocking mechanism such that the third arm turns about a third pivotal axis relative to the second arm in one of opposite directions through an angle twice as large as an angle through which the second arm turns about a second pivotal axis relative to the first arm in the other direction. The second arm 25 and the third arm 26 are moved in either of first and second working areas respectively extending on the opposite sides of an imaginary plane including a reference line and the first pivotal axis to move hand units along the reference line. Since the second and the third arm are necessarily only in one of the first and the second working region, the articulated robot is capable of operating in a narrow working area.

Abstract translation: 铰接机器人设置有分别具有彼此大致相等并且能够分别围绕第一，第二和第三枢转轴线转动的有效长度的第一臂，第二臂和第三臂。 第二臂和第三臂由互锁机构互锁，使得第三臂相对于第二臂绕相对于第二臂的第三枢转轴线在相反方向中的一个方向上旋转两倍于第二臂绕其旋转的角度的角度 相对于第一臂在另一个方向上的第二枢轴。 第二臂25和第三臂26在分别在包括基准线和第一枢转轴的假想平面的相对侧上延伸的第一和第二工作区域中的任一个中移动，以沿着参考线移动手单元。 由于第二臂和第三臂必须仅在第一和第二工作区域中的一个中，所以铰接机器人能够在狭窄的工作区域中操作。

公开(公告)号：US20070216179A1

公开(公告)日：2007-09-20

申请号：US10586654

申请日：2005-01-21

Applicant: Yasuo Hirooka ,  Yasuhiko Hashimoto ,  Kei Watanabe

Inventor： Yasuo Hirooka ,  Yasuhiko Hashimoto ,  Kei Watanabe

IPC: H01L21/687

CPC classification number: H01L21/68707 ,  Y10S294/902 ,  Y10S414/141

Abstract: The present device includes a supporting structure (23) mounted on a hand body (22) so as to face a circumferential edge of a substrate from below the substrate to support it, first and second guiding members (51a, 51b) mounted on the hand body (22) and respectively having guiding surfaces (53a, 53b) in contact with an imaginary cylinder having an axis aligned with a reference axis (L1) of the hand body (22and having a radius equal to that of the substrate, first and second movable members (24, 25) capable of moving in an imaginary plane perpendicular to the reference axis (L1) and disposed on the radially outer side of the circumferential edge of the substrate so as to face the circumferential edge thereof, and driving means (26) for simultaneously displacing the first and second movable members (24, 25) in the imaginary plane. The first and second guiding members (51a, 51b) and the first and second movable member (24, 25) are spaced apart on the circumference of the imaginary cylinder at circumferential intervals greater than the length of the arc of a segment cut to form a circumferential cut part in a substrate holding state where the substrate is held by at least either of the first and second guiding members (51a, 51b) and at least either of the first and second movable members (24, 25).

Abstract translation: 本装置包括安装在手柄（22）上的支撑结构（23），以从基板的下方面对基板的周缘，以支撑其;安装在基板上的第一和第二引导构件（51a，51b） 手体（22），并且分别具有与具有与手柄（22）的参考轴线（L 1）对准的轴线的虚拟圆筒接触的引导表面（53a，53b），其半径等于 基板，能够在与基准轴线（L1）垂直的虚拟平面中移动并且设置在基板的周向边缘的径向外侧上的基板，第一和第二可移动部件（24,25），以面对周缘 第一和第二引导构件（51a，51b）以及第一和第二可移动构件（24,25），用于将第一和第二可移动构件（24,25） 25）间隔开 假想圆柱体的圆周间隔大于切割成形成圆周切割部分的圆弧长度的圆周间隔的基底保持状态，其中基底由第一和第二引导部件（51a， 51b）和第一和第二可动构件（24,25）中的至少一个。