公开(公告)号：US07644968B2

公开(公告)日：2010-01-12

申请号：US10586654

申请日：2005-01-21

申请人： Yasuo Hirooka ,  Yasuhiko Hashimoto ,  Kei Watanabe

发明人： Yasuo Hirooka ,  Yasuhiko Hashimoto ,  Kei Watanabe

IPC分类号： B25J15/00 ,  B65G49/07

CPC分类号： H01L21/68707 ,  Y10S294/902 ,  Y10S414/141

摘要： A supporting structure is mounted on a hand body facing a circumferential edge of a substrate from below the substrate to support the substrate. First and second guiding members are mounted on the hand body, and having guiding surfaces in contact with an imaginary cylinder having an axis aligned with a reference axis of the hand body. First and second movable members are capable of moving in an imaginary plane perpendicular to the reference axis and are disposed on the radially outer-side of the circumferential edge of the substrate so as to face the circumferential edge. A driving unit simultaneously displaces the first and second movable members in the imaginary plane. The first and second guiding members and the first and second movable members are spaced apart on the circumference of the imaginary cylinder at intervals greater than the length of the arc of a segment in a substrate holding state.

摘要翻译： 支撑结构从基板的下方安装在面向基板的周缘的手体上以支撑基板。 第一引导构件和第二引导构件安装在手柄上，并且具有与具有与手柄的基准轴线对准的轴线的假想气缸接触的引导表面。 第一和第二可移动构件能够在垂直于参考轴线的虚拟平面中移动，并且设置在基板的周向边缘的径向外侧上以面向周向边缘。 驱动单元同时在假想平面中移动第一和第二可动构件。 第一和第二引导构件以及第一和第二可移动构件在假想圆柱的圆周上以基片保持状态下的段的弧的长度间隔开。

公开(公告)号：US20070216179A1

公开(公告)日：2007-09-20

申请号：US10586654

申请日：2005-01-21

申请人： Yasuo Hirooka ,  Yasuhiko Hashimoto ,  Kei Watanabe

发明人： Yasuo Hirooka ,  Yasuhiko Hashimoto ,  Kei Watanabe

IPC分类号： H01L21/687

CPC分类号： H01L21/68707 ,  Y10S294/902 ,  Y10S414/141

摘要： The present device includes a supporting structure (23) mounted on a hand body (22) so as to face a circumferential edge of a substrate from below the substrate to support it, first and second guiding members (51a, 51b) mounted on the hand body (22) and respectively having guiding surfaces (53a, 53b) in contact with an imaginary cylinder having an axis aligned with a reference axis (L1) of the hand body (22and having a radius equal to that of the substrate, first and second movable members (24, 25) capable of moving in an imaginary plane perpendicular to the reference axis (L1) and disposed on the radially outer side of the circumferential edge of the substrate so as to face the circumferential edge thereof, and driving means (26) for simultaneously displacing the first and second movable members (24, 25) in the imaginary plane. The first and second guiding members (51a, 51b) and the first and second movable member (24, 25) are spaced apart on the circumference of the imaginary cylinder at circumferential intervals greater than the length of the arc of a segment cut to form a circumferential cut part in a substrate holding state where the substrate is held by at least either of the first and second guiding members (51a, 51b) and at least either of the first and second movable members (24, 25).

摘要翻译： 本装置包括安装在手柄（22）上的支撑结构（23），以从基板的下方面对基板的周缘，以支撑其;安装在基板上的第一和第二引导构件（51a，51b） 手体（22），并且分别具有与具有与手柄（22）的参考轴线（L 1）对准的轴线的虚拟圆筒接触的引导表面（53a，53b），其半径等于 基板，能够在与基准轴线（L1）垂直的虚拟平面中移动并且设置在基板的周向边缘的径向外侧上的基板，第一和第二可移动部件（24,25），以面对周缘 第一和第二引导构件（51a，51b）以及第一和第二可移动构件（24,25），用于将第一和第二可移动构件（24,25） 25）间隔开 假想圆柱体的圆周间隔大于切割成形成圆周切割部分的圆弧长度的圆周间隔的基底保持状态，其中基底由第一和第二引导部件（51a， 51b）和第一和第二可动构件（24,25）中的至少一个。

公开(公告)号：US20070286711A1

公开(公告)日：2007-12-13

申请号：US11808358

申请日：2007-06-08

申请人： Yasuhiko Hashimoto ,  Masao Takatori ,  Yasuo Hirooka

发明人： Yasuhiko Hashimoto ,  Masao Takatori ,  Yasuo Hirooka

IPC分类号： H01L21/677

CPC分类号： H01L21/67772 ,  H01L21/67766 ,  H01L21/67775

摘要： In the present invention, a base 43 of a robot 27 is fixed to a fixing portion 53 of a frame divided body 50. The base 43 allows force exerted from a robot main body 27A to be transmitted to the fixing portion 53 of the frame divided body 50. Contrary, the fixing portion 53 of the frame divided body 50 has rigidity which can prevent the force exerted from the base 43 of the robot 27 from being transmitted to a main body constituting member 51. Accordingly, the base 43 of the robot 27 has only to possess a function for connecting the robot main body 27A and the frame divided body 50. Therefore, even though reducing its rigidity, transmission of vibration to the wafer processing apparatus can be prevented, as well as occurrence of malfunctioning in the substrate processing work can be prevented. In addition, increasing the rigidity of the frame divided body 50 can be achieved easier with a simpler construction and more effective than increasing the rigidity of the robot. Accordingly, more secured wafer processing can be provided.

摘要翻译： 在本发明中，机器人27的基座43固定在框架分割体50的固定部53上。 底座43允许从机器人主体部件27A施加的力传递到框架分割体50的固定部分53。 相反，框架分割体50的固定部分53具有能够防止从机器人27的基座43施加的力传递到主体构成构件51的刚性。 因此，机器人27的基座43仅具有连接机器人主体部27A和框架分割体50的功能。 因此，即使降低其刚性，也能够防止向晶片加工装置的振动传递，并且能够防止基板处理作业发生故障。 此外，通过更简单的构造可以更容易地实现框架分割体50的刚性的提高，并且比增加机器人的刚性更有效。 因此，可以提供更加牢固的晶片处理。

公开(公告)号：US07019817B2

公开(公告)日：2006-03-28

申请号：US10884989

申请日：2004-07-07

申请人： Yasuhiko Hashimoto ,  Yasuo Hirooka ,  Takao Yamaguchi ,  Hiroshi Kanda

发明人： Yasuhiko Hashimoto ,  Yasuo Hirooka ,  Takao Yamaguchi ,  Hiroshi Kanda

IPC分类号： G03B27/58 ,  G03B27/62

CPC分类号： G03B27/58

摘要： The angular position of a notch (17) is determined on the basis of data provided by second notch detectors (24a) and (24b) and an encoder (25). A controller (38) turns a rotational arm (22) for angular displacement such that holders (26) and (27) are displaced in a circumferential direction B from the notch (17), and then the holders (26) and (27) hold a wafer (19). Since the holders (26) and (27) are in touch with edges in which the notch (17) is not formed, the first notch detector (23) is able to detect the notch (17) without difficulty. Thus the position of the wafer (19) relative to the rotational arm (22) does not need to be changed several times depending on positions at which the holders (26) and (27) hold the wafer (19), which is necessary in the prior technology. The aligner (20) touches parts, not including the notch (17), of the wafer (19) and is capable of adjusting the position of the wafer (19) in a short time.

摘要翻译： 基于由第二陷波检测器（24a）和（24b）和编码器（25）提供的数据确定凹口（17）的角位置。 控制器（38）转动用于角位移的旋转臂（22），使得保持器（26）和（27）从凹口（17）沿圆周方向B移位，然后保持器（26）和（27） 握住晶片（19）。 由于保持器（26）和（27）与未形成切口（17）的边缘接触，所以第一切口检测器（23）能够毫无困难地检测凹口（17）。 因此，根据保持器（26）和（27）保持晶片（19）的位置，晶片（19）相对于旋转臂（22）的位置不需要改变几次，这是在 先前的技术。 对准器（20）接触不包括晶片（19）的凹口（17）的部分，并且能够在短时间内调节晶片（19）的位置。

公开(公告)号：US08555744B2

公开(公告)日：2013-10-15

申请号：US10586789

申请日：2005-01-21

申请人： Yasuo Hirooka ,  Yasuhiko Hashimoto

发明人： Yasuo Hirooka ,  Yasuhiko Hashimoto

IPC分类号： B25J17/00 ,  F16H55/18 ,  F16H57/00 ,  F16H1/06

CPC分类号： F16H57/12 ,  B25J9/103 ,  F16H1/06 ,  F16H57/022 ,  F16H57/023 ,  F16H2057/0222 ,  F16H2057/125 ,  Y10T74/19502 ,  Y10T74/19623 ,  Y10T74/19628 ,  Y10T74/19647 ,  Y10T74/19898 ,  Y10T74/20305

摘要： The present gear mechanism includes a base body member, a first gear supported on the base body member so as to rotate about a first rotational axis, a second gear capable of being meshed with the first gear, a support member supporting the second gear so as to rotate about a second rotational axis and placed on the base body member so as to be movable in approaching and leaving directions respectively toward and away from the first rotational axis, and a retaining member engaged in a threaded hole formed in the base body member and capable of being turned so as to move in the approaching and leaving directions, and directly or indirectly engaged with the support member to restrain the support member from moving in the leaving direction away from the first rotational axis.

摘要翻译： 本齿轮机构包括基体构件，支撑在基体构件上以围绕第一旋转轴线旋转的第一齿轮，能够与第一齿轮啮合的第二齿轮，支撑第二齿轮的支撑构件， 围绕第二旋转轴线旋转并且放置在基体本体构件上，使得能够分别朝向和远离第一旋转轴线接近和离开方向移动;以及保持构件，其接合在形成在基体构件中的螺纹孔中， 能够被转动以在接近和离开方向上移动，并且直接或间接地与支撑构件接合以限制支撑构件在离开方向上离开第一旋转轴线移动。

公开(公告)号：US20050110974A1

公开(公告)日：2005-05-26

申请号：US10884989

申请日：2004-07-07

申请人： Yasuhiko Hashimoto ,  Yasuo Hirooka ,  Takao Yamaguchi ,  Hiroshi Kanda

发明人： Yasuhiko Hashimoto ,  Yasuo Hirooka ,  Takao Yamaguchi ,  Hiroshi Kanda

IPC分类号： H01L21/68 ,  G03B27/58

CPC分类号： G03B27/58

摘要： The angular position of a notch 17 is determined on the basis of data provided by second notch detectors 24a and 24b and an encoder 25. A controller 38 turns a rotational arm 22 for angular displacement such that holders 26 and 27 are displaced in a circumferential direction B from the notch 17, and then the holders 26 and 27 hold a wafer 19. Since the holders 26 and 27 are in touch with edges in which the notch 17 is not formed, the first notch detector 23 is able to detect the notch 17 without difficulty. Thus the position of the wafer 19 relative to the rotational arm 22 does not need to be changed several times depending on positions at which the holders 26 and 27 hold the wafer 19, which is necessary in the prior technology. The aligner 20 touches parts, not including the notch 17, of the wafer 19 and is capable of adjusting the position of the wafer 19 in a short time.

摘要翻译： 基于由第二陷波检测器24a和24b以及编码器25提供的数据来确定凹口17的角度位置。 控制器38转动用于角位移的旋转臂22，使得保持器26和27从凹口17沿圆周方向B移位，然后保持器26和27保持晶片19。 由于保持器26和27与没有形成凹口17的边缘接触，所以第一陷波检测器23能够毫无困难地检测凹口17。 因此，晶片19相对于旋转臂22的位置不需要根据保持器26和27夹持晶片19的位置而改变多次，这在现有技术中是必需的。 对准器20接触晶片19的不包括凹口17的部分，并且能够在短时间内调节晶片19的位置。

公开(公告)号：US20080048090A1

公开(公告)日：2008-02-28

申请号：US10586789

申请日：2005-01-21

申请人： Yasuo Hirooka ,  Yasuhiko Hashimoto

发明人： Yasuo Hirooka ,  Yasuhiko Hashimoto

IPC分类号： F16M9/00 ,  F16H35/00

CPC分类号： F16H57/12 ,  B25J9/103 ,  F16H1/06 ,  F16H57/022 ,  F16H57/023 ,  F16H2057/0222 ,  F16H2057/125 ,  Y10T74/19502 ,  Y10T74/19623 ,  Y10T74/19628 ,  Y10T74/19647 ,  Y10T74/19898 ,  Y10T74/20305

摘要： The present gear mechanism includes a base body member (27), a first gear (21, 22) supported on the base body member (27) so as to rotate about a first rotational axis (L2, L3), a second gear (23) capable of being meshed with the first gear (21, 22), a support member (26) supporting the second gear (23) so as to rotate about a second rotational axis (L4) and placed on the base body member (27) so as to be movable in approaching and leaving directions respectively toward and away from the first rotational axis (L2, L3), and a retaining member (32) engaged in a threaded hole formed in the base body member (27) and capable of being turned so as to move in the approaching and leaving directions, and directly or indirectly engaged with the support member (26) to restrain the support member (26) from moving in the leaving direction away from the first rotational axis (L2, L3).

摘要翻译： 本齿轮机构包括基体部件（27），支撑在基体部件（27）上以围绕第一旋转轴线（L 2，L 3）旋转的第一齿轮（21,22），第二齿轮 （23），能够与第一齿轮（21,22）啮合的支撑构件（26），支撑构件（26），其支撑第二齿轮（23）以围绕第二旋转轴线（L 4）旋转并且放置在基体构件 （27），以能够分别朝向和远离第一旋转轴线（L 2，L 3）的接近和离开方向移动;以及保持构件（32），其接合在形成在基体构件（27）中的螺纹孔 ）并且能够被转动以在接近和离开方向上移动，并且直接或间接地与支撑构件（26）接合以限制支撑构件（26）在离开方向上移动远离第一旋转轴线（26） L 2，L 3）。

公开(公告)号：US07942619B2

公开(公告)日：2011-05-17

申请号：US11808358

申请日：2007-06-08

申请人： Yasuhiko Hashimoto ,  Masao Takatori ,  Yasuo Hirooka

发明人： Yasuhiko Hashimoto ,  Masao Takatori ,  Yasuo Hirooka

IPC分类号： H01L21/677

CPC分类号： H01L21/67772 ,  H01L21/67766 ,  H01L21/67775

摘要： In the present invention, a base 43 of a robot 27 is fixed to a fixing portion 53 of a frame divided body 50. The base 43 allows force exerted from a robot main body 27A to be transmitted to the fixing portion 53 of the frame divided body 50. Contrary, the fixing portion 53 of the frame divided body 50 has rigidity which can prevent the force exerted from the base 43 of the robot 27 from being transmitted to a main body constituting member 51. Accordingly, the base 43 of the robot 27 has only to possess a function for connecting the robot main body 27A and the frame divided body 50. Therefore, even though reducing its rigidity, transmission of vibration to the wafer processing apparatus can be prevented, as well as occurrence of malfunctioning in the substrate processing work can be prevented. In addition, increasing the rigidity of the frame divided body 50 can be achieved easier with a simpler construction and more effective than increasing the rigidity of the robot. Accordingly, more secured wafer processing can be provided.

摘要翻译： 在本发明中，机器人27的基座43被固定在框架分割体50的固定部53上。底座43允许从机器人主体27A施加的力传递到分割的框架的固定部53 相反，框架分割体50的固定部分53具有能够防止从机器人27的基部43施加的力被传递到主体构成构件51的刚性。因此，机器人的基座43 27仅具有连接机器人主体27A和框架分割体50的功能。因此，即使降低其刚性，也可以防止向晶片处理装置的振动传递，以及基板的故障发生 可以防止加工工作。 此外，通过更简单的构造可以更容易地实现框架分割体50的刚性的提高，并且比增加机器人的刚性更有效。 因此，可以提供更加牢固的晶片处理。

公开(公告)号：US20110166704A1

公开(公告)日：2011-07-07

申请号：US13062426

申请日：2008-09-30

申请人： Yasuhiko Hashimoto

发明人： Yasuhiko Hashimoto

IPC分类号： B25J13/08 ,  B25J15/06

CPC分类号： B25J15/0616 ,  B25J13/087 ,  B25J15/0052 ,  B25J19/0095 ,  B65G47/917 ,  B65G47/918 ,  B66C1/0218 ,  B66C1/0243

摘要： The invention is a monitoring apparatus for monitoring a condition of an end-effector of a robot having a vacuum absorption pad to hold an article. The pad is elastically supported by the end-effector. The apparatus includes a pad receiving part having a front surface and a through hole, the pad receiving part being movable in a direction perpendicular to the front surface; an elastically supporting unit for elastically supporting the pad receiving part in a direction perpendicular to the front surface; a movement detection unit for detecting a movement of the pad receiving part; a vacuum sensor connected to the through hole; and a judging unit for judging conditions of an elastic support of the pad and a vacuum absorption of the pad based on detection results of the movement detection unit and the vacuum sensor.

摘要翻译： 本发明是一种监测装置，用于监测具有真空吸附垫的机器人的末端执行器的状态以保持物品。 该垫由末端执行器弹性支撑。 该装置包括具有前表面和通孔的焊盘接收部分，该焊盘接收部分可在垂直于前表面的方向上移动; 弹性支撑单元，用于沿垂直于所述前表面的方向弹性地支撑所述垫接收部; 移动检测单元，用于检测所述垫接收部的移动; 连接到通孔的真空传感器; 以及判断单元，用于基于移动检测单元和真空传感器的检测结果来判断垫的弹性支撑的状态和垫的真空吸收。

公开(公告)号：US5357824A

公开(公告)日：1994-10-25

申请号：US972085

申请日：1992-11-05

申请人： Yasuhiko Hashimoto

发明人： Yasuhiko Hashimoto

IPC分类号： B25J9/06 ,  B25J9/04 ,  B25J9/10

CPC分类号： B25J9/047 ,  B25J9/1035 ,  B25J9/1065 ,  Y10S414/13 ,  Y10T74/20317

摘要： The industrial robot comprises two lower arms arranged parallel to each other and pivotably supported on a lower base member; an upper base member pivotably mounted on upper ends of these two lower arms, respectively so as to form a parallelogram together with the two lower arms; at least one first driving source for driving the parallelogrammic link; an upper arm pivotably supported on one side of the upper base member so as not to interfere with the parallelogrammic link and driven by a second driving source. Since the upper arm can be moved horizontally by inclination motion of the parallelogrammic link mechanism and further the upper arm is pivoted on one side of the upper base, the upper arm can be moved frontward, rearward and upward without any interference with the lower arms. Further, since a moment of the lower arm generated when a load is applied to the wrist of the upper arm is not subjected to the influence of the length and pivotal angle of the upper arm, the motor torque and reduction gear capacity for driving the lower arms can be reduced markedly.

摘要翻译： 工业机器人包括彼此平行布置并可枢转地支撑在下基部构件上的两个下臂; 分别可旋转地安装在这两个下臂的上端的上基部件，以便与两个下臂一起形成平行四边形; 至少一个驱动平行四边形连杆的第一驱动源; 上臂可枢转地支撑在所述上基座的一侧上，以便不与所述平行四边形连杆相干并由第二驱动源驱动。 由于上臂可以通过平行四边形连杆机构的倾斜运动水平移动，并且上臂在上基座的一侧枢转，所以上臂可以向前，向后和向上移动，而不会与下臂干涉。 此外，由于当负载施加到上臂的腕部时产生的下臂的力矩不受上臂的长度和枢转角度的影响，所以用于驱动下臂的电机扭矩和减速齿轮容量 武器可以显着减少。