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公开(公告)号：US20050264134A1
公开(公告)日：2005-12-01
申请号：US11136891
申请日：2005-05-25
IPC分类号： G03F7/00 , G03F7/20 , H01L21/302 , H01L41/08
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00 , G03F7/707
摘要： The present method and system features an active compliant pin chuck to hold a substrate, having opposed first and second surfaces, and compensates for non-planarity in one of the surfaces of the substrate. To that end, the support system includes a chuck having a plurality of piezo pins and reference pins, with the piezo pins being coupled to piezo actuators to undergo relative movement with respect to said reference pins. These and other embodiments are discussed more fully below.
摘要翻译： 本发明的方法和系统具有主动柔性销卡盘以保持具有相对的第一和第二表面的基板，并且补偿基板的一个表面中的非平面性。 为此，支撑系统包括具有多个压电销和参考销的卡盘，压电销耦合到压电致动器以相对于所述参考销进行相对运动。 以下将更全面地讨论这些和其它实施例。
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52.发明申请Full-wafer or large area imprinting with multiple separated sub-fields for high throughput lithography 审中-公开全面或大面积印刷多个分离的子场，用于高通量光刻公开(公告)号：US20050189676A1
公开(公告)日：2005-09-01
申请号：US10788700
申请日：2004-02-27
申请人： Sidlgata Sreenivasan
发明人： Sidlgata Sreenivasan
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00 , H01L21/76817
摘要： The present invention is directed to a method of forming a layer on a substrate comprising forming a plurality of flowable regions on the substrate and contacting the flowable regions with a plurality of molds disposed on a template. Thereafter, the plurality of flowable regions is solidified. In a further embodiment, the method further includes spreading each of the plurality of flowable regions to an area.
摘要翻译： 本发明涉及一种在基材上形成层的方法，包括在基材上形成多个可流动区域，并将可流动区域与设置在模板上的多个模具接触。 此后，多个可流动区域被固化。 在另一实施例中，该方法还包括将多个可流动区域中的每一个扩展到一个区域。
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公开(公告)号：US20050098534A1
公开(公告)日：2005-05-12
申请号：US10706537
申请日：2003-11-12
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00 , C03C17/3417 , C03C2217/77 , C03C2218/31 , C03C2218/328
摘要： The present invention is directed to a method forming conductive templates that includes providing a substrate; forming a mesa on the substrate; and forming a plurality of recessions and projections on the mesa with a nadir of the recessions comprising electrically conductive material and the projections comprising electrically insulative material. It is desired that the mesa be substantially transparent to a predetermined wavelength of radiation, for example ultraviolet radiation. As a result, it is desired to form the electrically conductive material from a material that allows ultraviolet radiation to propagate therethrough. In the present invention indium tin oxide is a suitable material from which to form the electrical conductive material.
摘要翻译： 本发明涉及一种形成导电模板的方法，其包括提供衬底; 在基板上形成台面; 以及在所述台面上形成多个凹陷和突出部，其中所述凹陷的最低点包括导电材料，并且所述突起包括电绝缘材料。 期望台面对于预定波长的辐射例如紫外线辐射基本上是透明的。 结果，期望由允许紫外线辐射传播的材料形成导电材料。 在本发明中，氧化铟锡是形成导电材料的合适材料。
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公开(公告)号：US20050067379A1
公开(公告)日：2005-03-31
申请号：US10670980
申请日：2003-09-25
CPC分类号： B82Y10/00 , B82Y40/00 , G03F7/0002 , G03F9/00
摘要： The present invention is directed to providing a template with alignment marks that are opaque to selective wavelength of light. In one embodiment, a template is provided having patterning areas and a template, with the template mark being formed from metal and disposed outside of the patterning areas. The alignment marks may be surrounded by a moat to prevent curable liquid from being in superimposition therewith during imprinting. In this manner, opaque alignment marks may be employed without degrading the quality of the pattern formed during imprinting.
摘要翻译： 本发明旨在提供一种具有对选择性波长的光不透明的对准标记的模板。 在一个实施例中，提供具有图案化区域和模板的模板，其中模板标记由金属形成并且设置在图案化区域的外部。 对准标记可以由护城河包围，以防止可印刷过程中可固化液体与其重叠。 以这种方式，可以使用不透明的对准标记而不降低在压印期间形成的图案的质量。
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公开(公告)号：US20050061773A1
公开(公告)日：2005-03-24
申请号：US10645306
申请日：2003-08-21
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00 , C23F1/08
摘要： The present invention provides a method for patterning a substrate with a template having a mold that features positioning conformable material between the substrate and the mold and filling a volume defined between the mold and the substrate with the conformable material through capillary action between the conformable material and one of the mold and the substrate. Thereafter, the conformable material is solidified. Specifically, the distance between the mold and the substrate is controlled to a sufficient degree to attenuate, if not avoid, compressive forces between the mold and the substrate. As a result, upon initial contact of the mold with the conformable material, spontaneous capillary filling of the volume between the mold and the substrate occurs.
摘要翻译： 本发明提供了一种用模板图案化模板的方法，该模板具有在基板和模具之间具有定位适形材料的模具，并且通过适形材料之间的毛细管作用在适形材料之间填充限定在模具和基板之间的体积， 模具和基材之一。 此后，使适形材料固化。 具体地说，模具和基板之间的距离被控制到足够的程度以减小模具和基板之间的压缩力（如果不是避免的话）。 结果，在模具与适形材料初次接触时，发生模具和基板之间的体积的自发毛细管填充。
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公开(公告)号：US20050051698A1
公开(公告)日：2005-03-10
申请号：US10614716
申请日：2003-07-07
申请人： Sidlgata Sreenivasan , Byung Choi , Ronald Voisin
发明人： Sidlgata Sreenivasan , Byung Choi , Ronald Voisin
CPC分类号： B29C43/003 , B29C2043/025 , B82Y10/00 , B82Y40/00 , G03F7/0002 , Y10S977/887
摘要： The present invention includes a conforming template for patterning liquids disposed on substrates. The template includes a body having opposed first and second surfaces. The first surface includes a plurality of recessed regions with a patterning region being disposed between adjacent recessed regions. Specifically, the recessed regions define flexure regions about which each patterning region may move independent of the remaining patterning regions of the template. In one embodiment the template is mounted to a fluid chamber having an inlet and a throughway. The template is connected to the throughway and the inlet is connected to a fluid source to facilitate deformation of the template to conform to a profile of a surface adjacent thereto.
摘要翻译： 本发明包括用于图案化液体配置在基板上的一致性模板。 模板包括具有相对的第一和第二表面的主体。 第一表面包括多个凹陷区域，其中图案化区域设置在相邻的凹陷区域之间。 具体地，凹陷区域限定挠曲区域，每个图案化区域围绕该弯曲区域可独立于模板的剩余图案形成区域移动。 在一个实施例中，模板安装到具有入口和通道的流体室。 模板连接到通道，并且入口连接到流体源以便于模板的变形以符合与其相邻的表面的轮廓。
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57.发明申请Systems for magnification and distortion correction for imprint lithography processes 有权用于压印光刻工艺的放大和失真校正系统公开(公告)号：US20050006343A1
公开(公告)日：2005-01-13
申请号：US10616294
申请日：2003-07-09
申请人： Byung Choi , Sidlgata Sreenivasan , Mario Meissl
发明人： Byung Choi , Sidlgata Sreenivasan , Mario Meissl
IPC分类号： G01L21/30 , G03F20060101 , G03F7/00
CPC分类号： G03F7/0002 , B29C43/003 , B29C2043/025 , B82Y10/00 , B82Y40/00
摘要： The present invention is directed toward a system to vary dimensions of a template in order to attenuate if not prevent distortions in an underlying pattern formed by the template. To that end, the system features a compression device that includes a pair of spaced-apart contact members to compress a perimeter surface of the template between the pair of spaced-apart contact members. The compression device includes first and second bodies, each has a contact member and an actuator arm. One of the actuator arms is coupled to the first body to reciprocate about an axis in response to variations of a volume of a bladder disposed adjacent to the actuator arm. In this manner, the distance between the two contact members may be varied.
摘要翻译： 本发明涉及一种改变模板尺寸的系统，以便衰减如果不是防止由模板形成的底层图案的失真。 为此，该系统具有压缩装置，该压缩装置包括一对间隔开的接触构件，以在一对间隔开的接触构件之间压缩模板的周边表面。 压缩装置包括第一和第二主体，每个具有接触构件和致动器臂。 致动器臂中的一个联接到第一主体以响应于邻近致动器臂设置的气囊的体积的变化而围绕轴线往复运动。 以这种方式，可以改变两个接触构件之间的距离。
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