公开(公告)号：US20110301765A1

公开(公告)日：2011-12-08

申请号：US12796565

申请日：2010-06-08

申请人： Liji Huang ,  Jiliang Ruan ,  Jian Luo ,  Chih-Chang Chen

发明人： Liji Huang ,  Jiliang Ruan ,  Jian Luo ,  Chih-Chang Chen

IPC分类号： G05D7/00 ,  G05D23/00 ,  G01N25/00

CPC分类号： G01N33/2888 ,  G01N25/18

摘要： An apparatus integrated with micromachined (a.k.a. MEMS, Micro Electro Mechanical Systems) silicon thermal sensor as a proximity switch sensor in air/oil Lubricators is disclosed in the present invention. The present invention relates to mass flow sensing and measurement for both gas and liquid phase and relates to air/oil lubrication process for multi-point lubrication machine. The invented apparatus is utilized as an alarm device to prevent mechanical system failures caused by the discontinuity of oil lubrication. The MEMS silicon thermal sensor is distinguished with a variety of advantages of small size, low power consumption, high reliability and high accuracy. In addition to the above benefits, the most significant and critical advantage is its fast response time of less than 20 msec, which makes the proximity switch control become viable for preventing equipment damage from oil lubricants discontinuity.

摘要翻译： 本发明公开了一种与微加工（即微机电MEMS机械系统）硅热传感器集成的装置，作为空气/油中的接近开关传感器。 本发明涉及气相和液相的质量流量感测和测量，涉及多点润滑机的空气/油润滑过程。 本发明的装置用作报警装置，以防止油润滑不连续引起的机械系统故障。 MEMS硅热传感器具有体积小，功耗低，可靠性高，精度高等优点。 除了上述优点之外，最重要和最关键的优点是其快速响应时间小于20毫秒，这使得接近开关控制变得可行，以防止油润滑剂不连续的设备损坏。

公开(公告)号：US20110283811A1

公开(公告)日：2011-11-24

申请号：US12782521

申请日：2010-05-18

申请人： Liji Huang ,  Jialuo Jack Xuan ,  Chih-Chang Chen

发明人： Liji Huang ,  Jialuo Jack Xuan ,  Chih-Chang Chen

IPC分类号： G01F1/44

CPC分类号： G01F1/6845 ,  F41G1/40 ,  G01F1/692

摘要： A wind or gas velocity profiler integrated with micromachined (a.k.a. MEMS, Micro Electro Mechanical Systems) silicon sensors in an open or enclosed space is disclosed in the present invention. There are three main embodiments disclosed in the present invention. Through the preambles of the independent claims, the advantages and merits of such measurement apparatus with MEMS flow sensor will be demonstrated as well. A silicon-based MEMS flow sensor can greatly reduce the sensor fabrication cost by a batch production. The integration with MEMS flow sensor makes the invented anemometer operate in the ways of better measurement accuracy, lower power consumption, higher reliability and a compact dimension compared to traditional anemometers such as cup anemometer, thermal anemometer and ultrasonic anemometer.

摘要翻译： 在本发明中公开了与开放式或封闭空间中的微机械（微机电，微机电系统）硅传感器集成的风或气体速度分析仪。 在本发明中公开了三个主要实施例。 通过独立权利要求的前序，也将证明具有MEMS流量传感器的这种测量装置的优点和优点。 硅基MEMS流量传感器可以通过批量生产大大降低传感器制造成本。 与传统的风速计，比如杯式风速计，热风速计和超声波风速计相比，与MEMS流量传感器的集成使得本发明的风速计以更好的测量精度，更低的功耗，更高的可靠性和紧凑的尺寸运行。

公开(公告)号：US20180347759A1

公开(公告)日：2018-12-06

申请号：US15609518

申请日：2017-05-31

申请人： Liji Huang ,  Chih-Chang Chen

发明人： Liji Huang ,  Chih-Chang Chen

IPC分类号： F17C13/02 ,  F17C13/04 ,  G01F1/684 ,  G01F1/696 ,  A61M16/10 ,  A61M16/16

CPC分类号： F17C13/02 ,  A61M16/1005 ,  A61M16/16 ,  A61M2016/0033 ,  A61M2202/0208 ,  A61M2205/0244 ,  A61M2205/3334 ,  A61M2205/3584 ,  A61M2205/50 ,  F17C13/04 ,  F17C2201/0109 ,  F17C2201/032 ,  F17C2205/0329 ,  F17C2205/0338 ,  F17C2221/011 ,  F17C2250/032 ,  F17C2250/034 ,  F17C2250/0426 ,  F17C2250/0443 ,  F17C2250/0491 ,  F17C2250/0495 ,  F17C2265/06 ,  F17C2270/025 ,  F17C2270/05 ,  G01F1/6845 ,  G01F1/696

摘要： The design and structure of a regulated digital dispense apparatus is exhibited in this disclosure. The MEMS mass flow meter embedded with a Bluetooth communication device and powered by a battery pack is designed to replace the mechanical low pressure gauge in a conventional gas dispense regulator such that the dispensed gas flowrate as well as totalized dispensed gas volume in each session or in consequent sessions can be continuously and precisely registered. The measured data are further relayed to local users via the local display or physical data port as well as via a paired smart device running a customized APP that can further relay the data to a designated cloud for cloud data processing, and the data can be streamed reversely. This disclosure shall assist and realize the ultimate optimized management for the users, distributors and/or gas manufacturers in the gas dispensing industry.

公开(公告)号：US20180172532A1

公开(公告)日：2018-06-21

申请号：US15380035

申请日：2016-12-15

申请人： Liji Huang ,  Chih-Chang Chen

发明人： Liji Huang ,  Chih-Chang Chen

IPC分类号： G01L9/00

CPC分类号： G01L9/0051

摘要： The design and manufacture method of a pressure sensor utilizing thermal field sensing with a thermal isolated membrane of a diaphragm structure is disclosed in the present invention. This device is made with silicon micromachining (a.k.a. MEMS, Micro Electro Mechanical Systems) process for applications of pressure measurement with large dynamic range, high accuracy and high stability during temperature variation. This device is applicable for all types of pressure metrology. The said thermal field pressure sensing device operates with thermistors on a membrane of the diaphragm structure made of silicon nitride with a heat isolation cavity underneath or a single side thermal isolated silicon nitride membrane with a reference cavity. This device can be seamlessly integrated with a thermal flow sensor with the same process.

公开(公告)号：US20160238257A1

公开(公告)日：2016-08-18

申请号：US14621043

申请日：2015-02-12

申请人： Liji Huang ,  Chih-Chang Chen

发明人： Liji Huang ,  Chih-Chang Chen

IPC分类号： F24C3/12 ,  F23N1/00

CPC分类号： F24C3/126 ,  F23N5/242 ,  F23N2025/06 ,  F23N2031/00 ,  F23N2041/08 ,  F23N2900/01001

摘要： The design and assembly of a smart device constituent of a micro-machined (a.k.a. MEMS, Micro Electro Mechanical Systems) mass flow sensor and an electrically controllable valve for applications in safety enhancement and intermit connectivity for residential or commercial gas range is disclosed in the present invention. The said smart device detects the gas flow at the unattended situations and sends information to the destined mobile devices of the use via the network such that it enables the users to remotely execute actions of either shutting off the gas supply or call for relevant party's immediate attention. The said smart device shall also automatically shut off the gas supply should the transmitted signal to users failed to send feedback signal such that it can prevent the safety incidents due to leakage or overheating or even fires. The capability of the MEMS mass flow sensor shall also provide the thermal value measurement of the supplied gases and enable the user to program the gas range for making complete tasks of cooking substances in the unattended situation.

摘要翻译： 本发明公开了微加工（也称为MEMS，微机电系统）质量流量传感器和用于住宅或商业气体范围的安全增强和间歇连接应用的电控阀的智能装置构件的设计和组装 发明。 所述智能设备在无人值守的情况下检测气体流量，并通过网络向目的地的移动设备发送信息，使得用户能够远程执行关闭气体供应或呼叫相关方立即关注的动作 。 所述智能设备还应自动关闭供气，如果发送信号给用户未能发送反馈信号，以防止由于泄漏或过热甚至火灾引起的安全事故。 MEMS质量流量传感器的能力还应提供所供应气体的热值测量，使用户能够在无人值守情况下对烹饪物质的完整任务进行气体范围的编程。

公开(公告)号：US20140283595A1

公开(公告)日：2014-09-25

申请号：US13847045

申请日：2013-03-19

申请人： Liji Huang ,  Chih-Chang Chen

发明人： Liji Huang ,  Chih-Chang Chen

IPC分类号： G01F1/699 ,  G01F1/684

CPC分类号： G01F1/699 ,  G01F1/6845 ,  G01F1/692

摘要： The design and manufacture method of a silicon mass flow sensor made with silicon Micromachining MEMS, Micro Electro Mechanical Systems) process for applications of gas flow measurement with highly humidified or liquid vapors is disclosed in the present invention. The said silicon mass flow sensor operates with an embedded heater and an adjacent control temperature sensor beneath the integrated calorimetric and thermal dissipative sensing thermistors. When the condensation takes place at the surface of the said silicon mass flow sensor, the embedded heater shall be turned on to elevate the temperature of the supporting membrane or substrate for the sensing thermistors. The elevated temperature shall be adjusted to above the vaporization temperature with the feedback data of the adjacent temperature sensor such that the surface condensation due to the presence of the liquid vapors in a gas flow can be effectively eliminated.

摘要翻译： 在本发明中公开了用硅微米加工MEMS制造的硅质量流量传感器的设计和制造方法，微机电系统）用于具有高度加湿或液体蒸气的气流测量的应用过程。 所述硅质量流量传感器使用嵌入式加热器和在集成的量热和热耗散感测热敏电阻之下的相邻控制温度传感器来操作。 当冷凝发生在所述硅质量流量传感器的表面时，嵌入式加热器应被打开以升高感测热敏电阻的支撑膜或基底的温度。 应使用相邻温度传感器的反馈数据将升高的温度调节到高于蒸发温度，以便能够有效地消除气流中存在液体蒸汽的表面冷凝。

公开(公告)号：US20140190252A1

公开(公告)日：2014-07-10

申请号：US13736941

申请日：2013-01-08

申请人： Liji Huang ,  Chih-Chang Chen

发明人： Liji Huang ,  Chih-Chang Chen

IPC分类号： G01F1/69

CPC分类号： G01F1/69 ,  G01F1/684 ,  G01F1/6845 ,  G01F1/692

摘要： A silicon mass flow sensor manufacture process that enables the backside contacts and eliminates the conventional front side wire binding process, and the assembly of such a mass flow sensor is disclosed in the present invention. The achieved assembly enhances the reliability by eliminating the binding wire exposure to the flow medium that may lead to detrimental failure due to the wire shortage or breakage while the miniature footprint could be maintained. The assembly further reduces flow instability from the flow sensor package including the bump of wire sealing. The invented mass flow sensor assembly can be a flow sensor module if the supporting sensor carrier is pre-designed with the control electronics. Without the control electronics, the said mass flow sensor assembly is easy to install into desired flow channels and connect to the external control electronics.

摘要翻译： 硅质量流量传感器制造方法，其能够实现背面接触并消除常规的前侧线束粘合过程，并且在本发明中公开了这种质量流量传感器的组装。 实现的组件通过消除可能导致由于电线短缺或断裂而导致有害故障的流动介质的接合线而增强了可靠性，同时可以保持微小的占地面积。 该组件进一步减少了流量传感器封装的流动不稳定性，包括电线密封凸块。 如果支撑传感器载体与控制电子装置预先设计，则本发明的质量流量传感器组件可以是流量传感器模块。 没有控制电子器件，所述质量流量传感器组件易于安装到期望的流动通道中并连接到外部控制电子装置。

公开(公告)号：US20140190251A1

公开(公告)日：2014-07-10

申请号：US13737784

申请日：2013-01-09

申请人： Liji Huang ,  Chih-Chang Chen

发明人： Liji Huang ,  Chih-Chang Chen

IPC分类号： G01F1/688

CPC分类号： G01F1/6888 ,  G01F1/6845 ,  G01F1/692 ,  G01F1/696

摘要： This invention is related to a microfabricated microelectromechanical systems (a.k.a. MEMS) silicon thermal mass flow sensor integrated with a micromachined thermopile temperature sensor as a flow inception detection sensor. The micromachined thermopile sensor is used to detect the inception of mass flow and therefore to trigger the operation of mass flow sensor from its hibernating mode. By this method, the battery-operated flow speed measuring apparatus can save great deal of electricity and significantly extend the life span of battery. A new design of micromachined thermopile sensor with serpentine shape is used to reduce the complexity of microfabrication process and to increase the flexibility and options for material selection. In order to enhance the sensitivity of the thermopile temperature sensor, a method to maximize the quantity of the junctions is provided as well.

摘要翻译： 本发明涉及与微加热热电堆温度传感器集成的微加工微机电系统（即MEMS）硅热质量流量传感器，作为流入口检测传感器。 微加工热电堆传感器用于检测质量流量的开始，从而触发质量流量传感器从其休眠模式的操作。 通过这种方法，电池操作的流速测量装置可以节省大量的电力并显着延长电池的使用寿命。 使用具有蛇形形状的微加工热电堆传感器的新设计来降低微细加工过程的复杂性，并增加材料选择的灵活性和选择。 为了提高热电堆温度传感器的灵敏度，还提供了使接点数量最大化的方法。

公开(公告)号：US08336392B2

公开(公告)日：2012-12-25

申请号：US12787268

申请日：2010-05-25

申请人： Liji Huang ,  Jian Luo ,  Changming Jiang ,  Yenan Liu ,  Wenhong Deng ,  Jialuo Jack Xuan ,  Chih-Chang Chen

发明人： Liji Huang ,  Jian Luo ,  Changming Jiang ,  Yenan Liu ,  Wenhong Deng ,  Jialuo Jack Xuan ,  Chih-Chang Chen

IPC分类号： G01F1/56

CPC分类号： G01F1/6845

摘要： Nowadays many electronic devices, such as LCD projector, computer servers, and air fresher etc. require reliable air cooling system to reduce the risk of electronics damage caused by overheating. The present invention disclosed an apparatus integrated with air flow sensor as an alarm apparatus for air flow clog detection. The major prior approach for air flow circulation failure detection is based on an indirect measurement method of temperature monitoring on surrounding environments, which method is suffering from the slow response and poor identification of real-time situation. The present invention will demonstrate the advantages by directly monitoring air flow over by indirectly monitoring the surrounding temperature as for the purpose of preventing air flow path clog.

摘要翻译： 如今，诸如液晶投影仪，电脑服务器和空气清新器等电子设备需要可靠的空气冷却系统，以减少过热引起的电子设备损坏的风险。 本发明公开了一种与空气流量传感器集成的装置，作为气流堵塞检测的报警装置。 气流循环故障检测的主要方法是基于对周围环境进行温度监测的间接测量方法，该方法受到响应缓慢和实时状况识别不良。 本发明将通过间接地监测周围温度来直接监测气流的优点，以防止气流通道堵塞。

公开(公告)号：US20120001273A1

公开(公告)日：2012-01-05

申请号：US12830237

申请日：2010-07-02

申请人： Chih-Chang Chen ,  Liji Huang

发明人： Chih-Chang Chen ,  Liji Huang

IPC分类号： H01L29/66

CPC分类号： G01F1/6842 ,  G01F1/6845

摘要： The current invention disclosed a micro-package design for packaging of micromachining liquid flow sensor. The package in present invention is fabricated with micromachining or micro-molding approach, which can greatly reduce the manufacturing cost due to the batch production. The micro-package design provides packaging solution for general micromachining liquid flow sensors that can enable various microfluidic applications while reaching the cost threshold for a disposable unit.

摘要翻译： 本发明公开了一种用于微加工液体流量传感器的包装的微封装设计。 本发明的封装采用微加工或微型成型方法制造，这可以大大降低由于批量生产而产生的制造成本。 微封装设计提供了一般微加工液体流量传感器的封装解决方案，可以实现各种微流体应用，同时达到一次性单元的成本阈值。