公开(公告)号：US07712207B2

公开(公告)日：2010-05-11

申请号：US11615818

申请日：2006-12-22

申请人： Aron Pentek ,  Yi Zheng ,  Howard Gordon Zolla

发明人： Aron Pentek ,  Yi Zheng ,  Howard Gordon Zolla

IPC分类号： G11B5/127 ,  H04R31/00

CPC分类号： G11B5/1278 ,  G11B5/3116 ,  G11B5/3146 ,  G11B5/315 ,  Y10T29/49021 ,  Y10T29/49032 ,  Y10T29/49043 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method for manufacturing a magnetic write pole and trailing wrap around magnetic shield for use in a perpendicular magnetic data recording system. The method includes the use of a hard mask structure with end point detection material embedded in a hard mask material. The novel hard mask structure provides the mill resistance of a hard mask, with the end point detection advantages of an end point detection layer.

摘要翻译： 用于制造用于垂直磁数据记录系统的磁性写入磁极和磁性屏蔽的尾部缠绕的方法。 该方法包括使用具有嵌入硬掩模材料中的端点检测材料的硬掩模结构。 新颖的硬掩模结构提供了硬掩模的磨机电阻，具有终点检测层的终点检测优点。

公开(公告)号：US07562437B2

公开(公告)日：2009-07-21

申请号：US11412038

申请日：2006-04-25

申请人： Aron Pentek ,  Yi Zheng

发明人： Aron Pentek ,  Yi Zheng

IPC分类号： G11B5/127 ,  H04R31/00

CPC分类号： G11B5/112 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/3146 ,  G11B5/315 ,  G11B5/3163 ,  Y10T29/49021 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method for constructing a magnetic write head for use in perpendicular magnetic recording, the write head having a write pole with a trailing shield that wraps around the write pole. The method allows the trailing shield to be constructed with a very well controlled trailing gap thickness and also allows the write pole to be constructed with a well controlled track width and a straight, flat trailing edge. The method includes depositing a magnetic write pole over a substrate and forming a mask structure over the write pole layer. The mask structure includes an end point detection layer that can be removed by reactive ion etching. An ion mill is performed to form a write pole by removing magnetic write pole material that is not covered by the mask layer. A layer of non-magnetic material is deposited and is ion milled to expose the end point detection layer.

摘要翻译： 一种用于构造用于垂直磁记录的磁写头的方法，所述写头具有带有围绕所述写柱的后屏蔽的写极。 该方法允许尾部屏蔽件构造得非常好地控制拖尾间隙厚度，并且还允许写极构造具有良好控制的轨道宽度和直的平坦后缘。 该方法包括在衬底上沉积磁性写入极，并在写入极层上形成掩模结构。 掩模结构包括可以通过反应离子蚀刻去除的端点检测层。 通过去除未被掩模层覆盖的磁性写入极材料来执行离子磨以形成写入极。 沉积一层非磁性材料，并将其离子研磨以露出终点检测层。

公开(公告)号：US08451562B2

公开(公告)日：2013-05-28

申请号：US12766769

申请日：2010-04-23

申请人： Aron Pentek ,  Yi Zheng

发明人： Aron Pentek ,  Yi Zheng

IPC分类号： G11B5/127

CPC分类号： G11B5/1278 ,  G11B5/3116 ,  G11B5/315 ,  G11B5/3163 ,  Y10T428/1171

摘要： A magnetic write head having write pole and a wrap-around-trailing magnetic shield having side portions that are separated from the write pole by tapered non-magnetic side gap layers. The tapered non-magnetic side gap layers provide a non-magnetic side gap width that increases with increasing distance from the ABS, thereby providing optimal protection against adjacent track interference at the ABS while minimizing write field loss to the shield in regions away from the ABS.

摘要翻译： 具有写磁极的磁写头和卷绕后磁屏蔽，其具有通过锥形非磁性侧间隙层与写极分离的侧部。 锥形非磁性侧间隙层提供随着与ABS的距离的增加而增加的非磁性侧间隙宽度，从而为ABS提供最佳保护，以防止相邻的轨道干涉，同时最小化远离ABS的区域对屏蔽的写入场损失 。

公开(公告)号：US08451560B2

公开(公告)日：2013-05-28

申请号：US12634480

申请日：2009-12-09

申请人： Liubo Hong ,  Aron Pentek ,  Yi Zheng

发明人： Liubo Hong ,  Aron Pentek ,  Yi Zheng

IPC分类号： G11B5/11 ,  G11B5/187 ,  G11B5/23

CPC分类号： G11B5/1278 ,  G11B5/23 ,  G11B5/3116 ,  G11B5/315 ,  G11B5/3163 ,  Y10T428/1171

摘要： Methods for fabrication of tapered magnetic poles with a non-magnetic front bump layer. A magnetic pole may have a tapered surface at or near an air bearing surface (ABS), wherein a thickness of the write pole increases in a direction away from the ABS. A non-magnetic front bump layer may be formed on the tapered surface of the magnetic pole and away from the ABS. The front bump layer may increase the separation distance between a shield layer and the magnetic pole near the tapered surface, thereby improving the performance of the write head.

摘要翻译： 用非磁性前凸块层制造锥形磁极的方法。 磁极可以在空气轴承表面（ABS）处或附近具有锥形表面，其中写入极的厚度在远离ABS的方向上增加。 可以在磁极的锥形表面上远离ABS形成非磁性前凸块层。 前凸块层可以增加在锥形表面附近的屏蔽层和磁极之间的间隔距离，从而提高写入头的性能。

公开(公告)号：US08189292B2

公开(公告)日：2012-05-29

申请号：US12343723

申请日：2008-12-24

申请人： Aron Pentek ,  Sue Siyang Zhang ,  Yi Zheng

发明人： Aron Pentek ,  Sue Siyang Zhang ,  Yi Zheng

IPC分类号： G11B5/127

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/3163

摘要： A method for manufacturing a magnetic write head having a write pole with a tapered, stepped trailing edge. The method includes depositing a magnetic write pole material over a substrate, and then forming a magnetic step structure over the magnetic write pole material. A mask structure is then formed, which includes a multilayer hard mask formed over the magnetic write pole material and the magnetic step structure. An ion milling process is then performed to remove a portion of the write pole material to define a write pole. A non-magnetic material can be deposited and ion milling performed to form non-magnetic side gap layer at the sides of the write pole. A multi-step reactive ion milling process can then be performed to remove the remaining hard mask from over the write pole.

摘要翻译： 一种用于制造磁头的方法，该写磁头具有带锥形的阶梯式后缘的写极。 该方法包括将磁性写入磁极材料沉积在衬底上，然后在磁性写入磁极材料上形成磁性阶梯结构。 然后形成掩模结构，其包括形成在磁性写入磁极材料和磁性步骤结构之上的多层硬掩模。 然后执行离子铣削工艺以去除写入极材料的一部分以限定写入极。 可以沉积非磁性材料并进行离子铣削以在写入极的两侧形成非磁性侧隙层。 然后可以执行多步反应离子研磨过程，以从写极上去除剩余的硬掩模。

公开(公告)号：US20110132869A1

公开(公告)日：2011-06-09

申请号：US12634490

申请日：2009-12-09

申请人： Liubo Hong ,  Aron Pentek ,  Yi Zheng

发明人： Liubo Hong ,  Aron Pentek ,  Yi Zheng

IPC分类号： G11B5/31

CPC分类号： G11B5/3163 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/3146 ,  G11B5/315 ,  Y10T29/49041 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method for manufacturing a magnetic write head having a non-magnetic step layer, non-magnetic bump at the front of the non-magnetic step layer and a write pole with a tapered trailing edge. The tapered portion of the trailing edge of the write pole is formed by a two step process that allows the write pole taper to be formed with greater accuracy and repeatability than would be possible using a single step taper process. An alternative method is also described on how to make a non-magnetic bump structure with adjustable bump throat height prior to Damascene side shield gap formation in a Damascene wrap around shield head.

摘要翻译： 一种用于制造具有非磁性步骤层，非磁性阶梯层前面的非磁性凸起和具有锥形后缘的写入磁极的磁性写入头的方法。 写柱的后缘的锥形部分通过两步法形成，其允许以比使用单步骤锥形工艺可能的更高的精度和重复性形成写柱锥度。 还描述了一种替代方法，该方法还描述了如何制造具有可调凸起喉部高度的非磁性凸块结构，然后在镶嵌在屏蔽头周围的大马士革侧面屏蔽间隙形成。

公开(公告)号：US20100155363A1

公开(公告)日：2010-06-24

申请号：US12343723

申请日：2008-12-24

申请人： Aron Pentek ,  Sue Siyang Zhang ,  Yi Zheng

发明人： Aron Pentek ,  Sue Siyang Zhang ,  Yi Zheng

IPC分类号： B44C1/22

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/3163

摘要： A method for manufacturing a magnetic write head having a write pole with a tapered, stepped trailing edge. The method includes depositing a magnetic write pole material over a substrate, and then forming a magnetic step structure over the magnetic write pole material. A mask structure is then formed, which includes a multilayer hard mask formed over the magnetic write pole material and the magnetic step structure. An ion milling process is then performed to remove a portion of the write pole material to define a write pole. A non-magnetic material can be deposited and ion milling performed to form non-magnetic side gap layer at the sides of the write pole. A multi-step reactive ion milling process can then be performed to remove the remaining hard mask from over the write pole.

摘要翻译： 一种用于制造磁头的方法，该写磁头具有带锥形的阶梯式后缘的写极。 该方法包括将磁性写入磁极材料沉积在衬底上，然后在磁性写入磁极材料上形成磁性阶梯结构。 然后形成掩模结构，其包括形成在磁性写入磁极材料和磁性步骤结构之上的多层硬掩模。 然后执行离子铣削工艺以去除写入极材料的一部分以限定写入极。 可以沉积非磁性材料并进行离子铣削以在写入极的两侧形成非磁性侧隙层。 然后可以执行多步反应离子研磨过程，以从写极上去除剩余的硬掩模。

公开(公告)号：US20070245545A1

公开(公告)日：2007-10-25

申请号：US11412038

申请日：2006-04-25

申请人： Aron Pentek ,  Yi Zheng

发明人： Aron Pentek ,  Yi Zheng

IPC分类号： G11B5/127

CPC分类号： G11B5/112 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/3146 ,  G11B5/315 ,  G11B5/3163 ,  Y10T29/49021 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method for constructing a magnetic write head for use in perpendicular magnetic recording, the write head having a write pole with a trailing shield that wraps around the write pole. The method allows the trailing shield to be constructed with a very well controlled trailing gap thickness and also allows the write pole to be constructed with a well controlled track width and a straight, flat trailing edge. The method includes depositing a magnetic write pole over a substrate and forming a mask structure over the write pole layer. The mask structure includes an end point detection layer that can be removed by reactive ion etching. An ion mill is performed to form a write pole by removing magnetic write pole material that is not covered by the mask layer. A layer of non-magnetic material such as alumina is deposited and is ion milled to expose the end point detection layer. The end point detection layer is then removed by reactive ion etch and a magnetic wrap around trailing shield is deposited.

摘要翻译： 一种用于构造用于垂直磁记录的磁写头的方法，该写头具有一个写磁极，带有围绕写磁极的后屏蔽。 该方法允许尾部屏蔽件构造得非常好地控制拖尾间隙厚度，并且还允许写极构造具有良好控制的轨道宽度和直的平坦后缘。 该方法包括在衬底上沉积磁性写入极，并在写入极层上形成掩模结构。 掩模结构包括可以通过反应离子蚀刻去除的端点检测层。 通过去除未被掩模层覆盖的磁性写入极材料来执行离子磨以形成写入极。 沉积一层非磁性材料如氧化铝，并将其离子研磨以露出终点检测层。 然后通过反应离子蚀刻除去端点检测层，并且沉积围绕后屏蔽的磁性卷。

公开(公告)号：US20070124917A1

公开(公告)日：2007-06-07

申请号：US11297228

申请日：2005-12-07

申请人： Hamid Balamame ,  Daniel Bedell ,  Mary Gutberlet ,  Clarence Hsieh ,  Aron Pentek ,  Yi Zheng

发明人： Hamid Balamame ,  Daniel Bedell ,  Mary Gutberlet ,  Clarence Hsieh ,  Aron Pentek ,  Yi Zheng

IPC分类号： G11B5/127 ,  H04R31/00

CPC分类号： G11B5/3163 ,  G11B5/3116 ,  Y10T29/49039 ,  Y10T29/49041 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method of manufacturing a magnetic write head that provides improved pole critical dimension control, such as improved track width control (improved sigma) and improved flare point control. The method involves a combination of several process improvements, such as photolithographically patterning a P2 pole tip defining photoresist frame using a zero print bias and also using a small flash field. The method also involves the use of a non-reactive ion etch to notch the first pole (P1) using the second pole (P2) as a mask.

摘要翻译： 一种制造磁写头的方法，其提供改进的极关键尺寸控制，例如改进的轨道宽度控制（改进的σ）和改进的闪点控制。 该方法涉及几个工艺改进的组合，例如使用零印刷偏压光刻地图案化限定光致抗蚀剂框架的P 2极尖端并且还使用小的闪光场。 该方法还涉及使用非反应性离子蚀刻来使用第二极（P 2）作为掩模将第一极（P1）切口。

公开(公告)号：US08568601B2

公开(公告)日：2013-10-29

申请号：US11947616

申请日：2007-11-29

申请人： Aron Pentek ,  Sue Siyang Zhang ,  Yi Zheng

发明人： Aron Pentek ,  Sue Siyang Zhang ,  Yi Zheng

IPC分类号： B44C1/22 ,  H01L21/00

CPC分类号： G03B31/00

摘要： A method for manufacturing a magnetic write head for perpendicular magnetic recording. The method includes forming a write pole using a mask that includes a hard mask layer deposited over the write pole laminate material, and a thick, physically robust image transfer layer. The image transfer layer can be a material such as AlTiO that can be patterned by a reactive ion etching process, but which also resists deformation during processing. This process allows a write pole and wrap-around trailing shield to be constructed at very narrow track widths without the mask deformation and fencing problems experienced by prior art methods.

摘要翻译： 一种用于制造用于垂直磁记录的磁写头的方法。 该方法包括使用掩模形成写入极，该掩模包括沉积在写磁极层压材料上的硬掩模层，以及厚的，物理上坚固的图像转印层。 图像转印层可以是诸如AlTiO的材料，其可以通过反应离子蚀刻工艺进行图案化，但也可以在加工过程中抵抗变形。 该过程允许在非常窄的轨道宽度上构造写极点和缠绕后挡板，而不会由现有技术方法遇到的掩模变形和围栏问题。