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公开(公告)号：US11081845B2
公开(公告)日：2021-08-03
申请号：US16469794
申请日：2017-12-08
发明人： Yanbin Sun , Kengo Saegusa , Yoshiyuki Sakaguchi , Hideki Omori
摘要： A vacuum pump has a hermetic connector disposed on a base of a body of the vacuum pump. The hermetic connector has a plurality of pins connected to a plurality of electrical cables leading to the inside of the pump body. The connector is longer in a lateral direction than in an axial direction so that the connector is horizontally long in a circumferential direction of the pump body.
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公开(公告)号：US20210010479A1
公开(公告)日：2021-01-14
申请号：US17040799
申请日：2019-03-20
IPC分类号： F04D19/04 , F04D29/58 , F04D29/048
摘要： A vacuum pump capable of suppressing the solidification of gas in a normal operation of a pump is provided. Provided is a vacuum pump including a casing that has an inlet port for sucking gas from outside and an outlet port for exhausting the gas to the outside; a turbo-molecular-pump mechanism that is disposed in the casing and includes rotor blades and stator blades alternately arranged in multiple stages in an axial direction; a thread-groove-pump mechanism that is disposed in the casing and is connectedly disposed on an exhaust side of the turbo-molecular-pump mechanism; first temperature regulating means that is configured to regulate cooling of the turbo-molecular-pump mechanism; and second temperature regulating means that is configured to regulate heating of the thread-groove-pump mechanism.
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公开(公告)号：US20190309760A1
公开(公告)日：2019-10-10
申请号：US16467416
申请日：2017-12-08
发明人： Hideki Omori , Yanbin Sun , Kengo Saegusa , Yoshiyuki Sakaguchi
摘要： To realize a vacuum pump capable of improving the heat dissipation capability of a regenerative resistor with a simple configuration, and a control apparatus associated with the vacuum pump. The regenerative resistor is removed from the control apparatus and disposed in the vacuum pump. More specifically, the regenerative resistor is detached from a control board (control apparatus) on which a control circuit is mounted, and then disposed in a base of the vacuum pump via a wire. Further, a gap is provided between the base of the vacuum pump and the control apparatus. Moreover, a cover (outer covering body) is provided in the regenerative resistor disposed in the base part of the vacuum pump and the wire part. Since the regenerative resistor is provided in the base of the vacuum pump having a large heat capacity, a temperature increase of the control apparatus is reduced.
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公开(公告)号：US20190195238A1
公开(公告)日：2019-06-27
申请号：US16327154
申请日：2017-08-09
CPC分类号： F04D29/526 , F04D3/00 , F04D19/04 , F04D19/042 , F04D29/403
摘要： A vacuum pump reduces a stress without reducing the rotation speed of a rotating cylindrical body. In an outlet port-side lower portion of a rotor cylindrical portion included in the vacuum pump, a smaller diameter portion having an outer diameter smaller than that of an inlet port-side portion of the rotor cylindrical portion is provided. A lowermost end portion (outlet port-side end portion) of the rotor cylindrical portion is designed longer than a thread groove exhaust element to provide an extending portion. In the extending portion, a smaller diameter portion having an outer diameter smaller than that of the inlet port-side portion of the rotor cylindrical portion which is opposed to the thread groove exhaust element is provided.
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公开(公告)号：US20190032669A1
公开(公告)日：2019-01-31
申请号：US16071781
申请日：2016-02-12
摘要： The present invention provides a vacuum pump that prevents invasion of foreign matter, such as rust and particles caused by a process gas, during the process of manufacturing a semiconductor wafer, and a flexible cover and a rotor that are used in the vacuum pump. A vacuum pump has a casing that has a gas inlet port and a gas outlet port, a rotor that has a recessed portion opened toward the gas inlet port and is fastened to a rotor shaft by a bolt disposed in the recessed portion. The recessed portion is provided with a flexible cover that has an outer peripheral portion supported on an end surface of the rotor that opposes the gas inlet port, and a central portion caved in the recessed portion of the rotor, the flexible cover covering the recessed portion by elastically deforming into a convex shape toward the recessed portion.
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公开(公告)号：US20160160877A1
公开(公告)日：2016-06-09
申请号：US14905110
申请日：2014-06-06
发明人： Yoshiyuki Sakaguchi
摘要： An object is to provide a vacuum pump that enables, without being affected by a flow rate of gas to be discharged, concentrated and efficient heating of only a stator component of an exhaust side gas channel that needs to be heated in order to prevent deposition of products and that also enables prevention of deposition of products in the exhaust side gas channel as a result of the heating, and improvement of pump emission performance. The vacuum pump has a rotor rotatably arranged on a pump base and a gas channel through which gas sucked by rotation of the gas is guided to an outlet port, and further includes heat insulating means for thermally insulating a stator component, which forms an exhaust side gas channel in the gas channel, from other components and heating means for heating the thermally insulated stator component.
摘要翻译： 目的是提供一种真空泵，其能够在不受待排出的气体的流量的影响的情况下使集中且有效地加热仅需要加热的排气侧气体通道的定子部件，以防止沉积 产品，并且还能够防止由于加热而在废气侧气体通道中产物的沉积，并且提高泵排放性能。 真空泵具有可旋转地设置在泵基座上的转子和气体通过气体被旋转吸引的气体引导到出口的气体通道，并且还包括隔热装置，该绝热装置形成排气侧 来自其他部件和用于加热绝热定子部件的加热装置的气体通道中的气体通道。
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