公开(公告)号：US20090051874A1

公开(公告)日：2009-02-26

申请号：US12188018

申请日：2008-08-07

申请人： Kei Masunishi ,  Akihiro Koga ,  Ryo Furukawa ,  Osamu Nishimura ,  Akio Kobayashi ,  Hiroyuki Kawashima

发明人： Kei Masunishi ,  Akihiro Koga ,  Ryo Furukawa ,  Osamu Nishimura ,  Akio Kobayashi ,  Hiroyuki Kawashima

IPC分类号： A61B3/10 ,  G02B7/188

CPC分类号： A61B3/12 ,  G02B26/06

摘要： A deformable mirror device includes a substrate; a plurality of electrodes provided on the substrate; a spacer disposed on the substrate; a support member disposed above the spacer and having an opening passing through from a first face of the support member facing to the substrate to a second face of the support member opposite from the first face; a deformable electrode film formed below the first face of the support member so as to be opposed to the electrodes with a distance and so as to cover the opening; an insulation film provided between the deformable electrode film and the support member; a reflection film provided on a face of the deformable electrode film opposite from the electrodes so as to overlap the opening; and a plurality of through holes passing through the reflection film and the deformable electrode film and disposed so as to overlap the opening.

摘要翻译： 可变形反射镜装置包括：基板; 设置在所述基板上的多个电极; 设置在基板上的间隔件; 支撑构件，设置在所述间隔件上方，并且具有从所述支撑构件的面向所述基板的第一面穿过到与所述第一面相对的所述支撑构件的第二面的开口; 可变电极膜，形成在所述支撑构件的所述第一面的下方，以与所述电极相对并且覆盖所述开口; 设置在所述可变形电极膜和所述支撑构件之间的绝缘膜; 反射膜，设置在与电极相对的可变形电极膜的表面上以与开口重叠; 以及穿过反射膜和可变形电极膜并且设置成与开口重叠的多个通孔。

公开(公告)号：US20080225230A1

公开(公告)日：2008-09-18

申请号：US12048095

申请日：2008-03-13

申请人： Noriko Saito ,  Akio Kobayashi ,  Hiroyuki Kawashima

发明人： Noriko Saito ,  Akio Kobayashi ,  Hiroyuki Kawashima

IPC分类号： A61B3/14 ,  G02B7/188 ,  A61B3/10

CPC分类号： G02B26/06 ,  A61B3/1015 ,  A61B3/14 ,  G02B26/0825

摘要： A wavefront aberration compensating apparatus, which includes: a deformable mirror having electrodes and a thin-film mirror; an optical system provided with the deformable mirror and including an object; a wavefront sensor which measures a wavefront aberration of a light flux; and a controller configured to: calculate a first voltage value applied to each of the electrodes, on the basis of differences between application points on the thin-film mirror and target points both corresponding to the electrodes respectively; determine a superposition amplitude value of each expansion mode according to a polynomial of wavefront aberration, and calculate a second voltage value applied to each of the electrodes by using voltage templates previously stored, such that the wavefront aberration obtained by the wavefront sensor becomes a desired aberration; determine the voltage value applied to each of the electrodes, by mainly using the second voltage value in an initial stage of compensation of the configuration of the thin-film mirror and by mainly using the first voltage value in an end stage of the compensation; and repeat the compensation on the basis of the determined voltage value, such that the wavefront aberration of the light flux is suppressed.

摘要翻译： 一种波前像差补偿装置，包括：具有电极和薄膜反射镜的可变形反射镜; 设置有可变形反射镜并包括物体的光学系统; 测量光通量的波前像差的波前传感器; 以及控制器，其被配置为：基于薄膜反射镜上的应用点和分别对应于电极的目标点​​之间的差异来计算施加到每个电极的第一电压值; 根据波前像差的多项式确定每个扩展模式的叠加振幅值，并且通过使用预先存储的电压模板来计算施加到每个电极的第二电压值，使得由波前传感器获得的波前像差成为期望的像差 ; 通过在补偿薄膜反射镜的构造的初始阶段主要使用第二电压值，并且主要在补偿的最后阶段使用第一电压值来确定施加到每个电极的电压值; 并根据确定的电压值重复补偿，从而抑制光通量的波前像差。

公开(公告)号：US20080204661A1

公开(公告)日：2008-08-28

申请号：US11955044

申请日：2007-12-12

申请人： Akihiro Koga ,  Masayuki Sekimura ,  Kei Masunishi ,  Akio Kobayashi ,  Hiroyuki Kawashima ,  Hirotake Maruyama

发明人： Akihiro Koga ,  Masayuki Sekimura ,  Kei Masunishi ,  Akio Kobayashi ,  Hiroyuki Kawashima ,  Hirotake Maruyama

IPC分类号： A61B3/10 ,  G02B7/188

CPC分类号： A61B3/12 ,  A61B3/0091 ,  A61B3/1015 ,  A61B3/152 ,  G02B26/0841

摘要： It is made possible to improve the variations in the “generated force (load)—deflection characteristics”. A deformable mirror device includes: a substrate; a plurality of electrodes provided on the substrate; a spacer disposed on the substrate; a support member disposed above the spacer and having an opening passing through from a first face of the support member facing to the substrate to a second face of the support member facing opposite from the first face; a first insulation film provided around the opening on the first face of the support member; and a deformable electrode film disposed so as to be opposed to the electrodes at a spacing, formed so as to cover the opening, and supported by the support member with sandwiching the first insulation film. The electrode film includes a reflection portion on a face opposite to the electrodes.

摘要翻译： 可以改善“生成力（负载） - 偏转特性”的变化。 可变形反射镜装置包括：基板; 设置在所述基板上的多个电极; 设置在基板上的间隔件; 支撑构件，其设置在所述间隔件上方，并具有从所述支撑构件的面向所述基板的第一面穿过所述支撑构件的与所述第一面相对的第二面的开口; 设置在所述支撑构件的第一面上的所述开口周围的第一绝缘膜; 以及可变形电极膜，其以间隔形成为与所述电极相对的方式设置，以覆盖所述开口，并且由所述支撑构件夹持所述第一绝缘膜。 电极膜在与电极相反的面上具有反射部。

公开(公告)号：US20080180634A1

公开(公告)日：2008-07-31

申请号：US11958725

申请日：2007-12-18

申请人： Akihiro Koga ,  Masayuki Sekimura ,  Kei Masunishi ,  Akio Kobayashi ,  Hiroyuki Kawashima ,  Hirotake Maruyama

发明人： Akihiro Koga ,  Masayuki Sekimura ,  Kei Masunishi ,  Akio Kobayashi ,  Hiroyuki Kawashima ,  Hirotake Maruyama

IPC分类号： A61B3/10 ,  G02B7/188

CPC分类号： A61B3/12 ,  G02B26/0825

摘要： It is made possible to improve the variations in the “generated force (load)—deflection characteristics”. A deformable mirror device includes: a substrate; a plurality of electrodes provided on the substrate; a spacer disposed on the substrate; a support member disposed above the spacer and having an opening passing through from a first face of the support member facing to the substrate to a second face of the support member facing opposite from the first face; a first insulation film provided on the first face of the support member; a second insulation film provided on the second face of the support member; and a deformable electrode film disposed so as to be opposed to the electrodes at a spacing, formed so as to cover the opening, and supported by the support member with sandwiching the first insulation film. The electrode film includes a reflection portion on a face opposite from the electrodes, and the support member is disposed on the substrate with sandwiching the electrode film, the first insulation film and the spacer.

摘要翻译： 可以改善“生成力（负载） - 偏转特性”的变化。 可变形反射镜装置包括：基板; 设置在所述基板上的多个电极; 设置在基板上的间隔件; 支撑构件，其设置在所述间隔件上方，并具有从所述支撑构件的面向所述基板的第一面穿过所述支撑构件的与所述第一面相对的第二面的开口; 设置在所述支撑构件的第一面上的第一绝缘膜; 设置在所述支撑构件的第二面上的第二绝缘膜; 以及可变形电极膜，其以间隔形成为与所述电极相对的方式设置，以覆盖所述开口，并且由所述支撑构件夹持所述第一绝缘膜。 电极膜在与电极相对的面上具有反射部分，并且支撑部件设置在基板上，夹着电极膜，第一绝缘膜和间隔物。

公开(公告)号：US20070019159A1

公开(公告)日：2007-01-25

申请号：US11430204

申请日：2006-05-09

申请人： Michiko Nakanishi ,  Hiroyuki Kawashima ,  Noriko Saito

发明人： Michiko Nakanishi ,  Hiroyuki Kawashima ,  Noriko Saito

IPC分类号： A61B3/14

CPC分类号： A61B3/12 ,  A61B3/15 ,  G02B7/182 ,  G02B26/0825

摘要： A deforming method for a deformable mirror having plural electrodes and a reflective membrane which are distorted by static voltages. The Zernike voltage template used to deform a deformable mirror is adapted for aberration correction by calibrating each component template according to the specificity of the mirror. The voltages applied to the electrodes to form a surface profile of the reflective membrane are measured based on the reflection light from the membrane. A certain number of voltage-by-electrode patterns each of which corresponds to a different reference profile of the reflective membrane and specifies each set of a voltage and an electrode to which the voltage is to be applied are stored preliminarily. The reflective membrane is deformed to a desired profile by superposing preliminarily stored voltage-by-electrode patterns. The deformation of the mirror is corrected by calibrating each template according to the operational environment.

摘要翻译： 一种可变形反射镜的变形方法，具有由静电压变形的多个电极和反射膜。 用于使可变形反射镜变形的Zernike电压模板适于通过根据反射镜的特异性校准每个部件模板来进行像差校正。 基于来自膜的反射光测量施加到电极以形成反射膜的表面轮廓的电压。 预先存储一定数量的逐个电压图案，每个电压对应于反射膜的不同参考分布，并且指定每组电压和施加电压的电极。 通过叠加预先存储的逐个电压图案将反射膜变形到所需的轮廓。 通过根据操作环境校准每个模板来校正反射镜的变形。

公开(公告)号：US20060208767A1

公开(公告)日：2006-09-21

申请号：US11089053

申请日：2005-03-24

申请人： Hiroyuki Kawashima ,  Kazushige Yamamoto ,  Satoshi Shimoyama

发明人： Hiroyuki Kawashima ,  Kazushige Yamamoto ,  Satoshi Shimoyama

IPC分类号： H03K5/19

CPC分类号： G01R31/31813

摘要： It is an object to properly control timing of opening and closing a switch by a circuit of simple constitution. A switch control apparatus for controlling a switch is provided, the switch control apparatus including a sequence memory for recording a sequence pattern includes open/close instruction data which instruct to open/close the switch thereon; an address control module for sequentially retrieving each of the open/close instruction data of the sequence pattern from the sequence memory; and an open/close state storage module for storing an open/close state instructed by changed open/close instruction data when the open/close instruction data retrieved by the address control module is changed, wherein the switch opens or closes in response to the open/close state stored by the open/close state storage module.

摘要翻译： 本发明的目的是通过简单结构的电路适当地控制开关的开闭定时。 提供了一种用于控制开关的开关控制装置，所述开关控制装置包括用于记录序列模式的序列存储器，包括指示在其上打开/关闭开关的打开/关闭指令数据; 地址控制模块，用于从序列存储器顺序地检索序列模式的打开/关闭指令数据; 以及打开/关闭状态存储模块，用于当由所述地址控制模块检索到的所述打开/关闭指令数据改变时存储由改变的打开/关闭指令数据指示的打开/关闭状态，其中所述开关响应于打开状态而打开或关闭 /关闭状态由开/关状态存储模块存储。

公开(公告)号：US20060186548A1

公开(公告)日：2006-08-24

申请号：US11346890

申请日：2006-02-03

申请人： Yoshiyuki Enomoto ,  Hiroyuki Kawashima ,  Masaki Okamoto

发明人： Yoshiyuki Enomoto ,  Hiroyuki Kawashima ,  Masaki Okamoto

IPC分类号： H01L23/52

CPC分类号： H01L23/53295 ,  H01L21/76808 ,  H01L21/76811 ,  H01L21/76813 ,  H01L21/76814 ,  H01L21/76829 ,  H01L21/76832 ,  H01L21/76835 ,  H01L21/76838 ,  H01L23/5226 ,  H01L23/53238 ,  H01L23/5329 ,  H01L2924/0002 ,  H01L2924/00

摘要： The present invention provides a method of manufacturing a semiconductor device and a semiconductor device that allow use of interlayer and interconnect insulating films having a low dielectric constant in forming a dual damascene structure. A first insulating film, a second insulating film, a first-mask forming layer, a second-mask forming layer, a third-mask forming layer, and a fourth-mask forming layer are sequentially deposited over a substrate. The fourth-mask forming layer is patterned to form a fourth mask having an interconnect trench pattern. After a resist mask is formed on the fourth mask, the layers to the second insulating film are etched to open via holes. The third-mask forming layer is etched through the fourth mask to thereby form a third mask having the interconnect trench pattern and to extend the via holes downward partway across the first insulating film. The second-mask forming layer is etched through the fourth mask to thereby form a second mask having the interconnect trench pattern, and the first insulating film that remains under the bottoms of the via holes is removed. Subsequently, the second insulating film is etched through the second mask to thereby form an interconnect trench, and then the second mask is removed.

摘要翻译： 本发明提供一种制造半导体器件和半导体器件的方法，该半导体器件和半导体器件允许在形成双镶嵌结构时使用具有低介电常数的中间层和互连绝缘膜。 第一绝缘膜，第二绝缘膜，第一掩模形成层，第二掩模形成层，第三掩模形成层和第四掩模形成层依次沉积在衬底上。 图案化第四掩模形成层以形成具有互连沟槽图案的第四掩模。 在第四掩模上形成抗蚀剂掩模之后，蚀刻到第二绝缘膜的层以打开通孔。 通过第四掩模蚀刻第三掩模形成层，从而形成具有互连沟槽图案的第三掩模，并且在第一绝缘膜上向下延伸通孔。 通过第四掩模蚀刻第二掩模形成层，从而形成具有互连沟槽图案的第二掩模，并且去除留在通孔底部的第一绝缘膜。 随后，通过第二掩模蚀刻第二绝缘膜，从而形成互连沟槽，然后去除第二掩模。

公开(公告)号：US06406606B1

公开(公告)日：2002-06-18

申请号：US09531157

申请日：2000-03-17

申请人： Atsushi Betto ,  Tetsu Otsuji ,  Katsuhiko Sawamura ,  Hiroyuki Kawashima

发明人： Atsushi Betto ,  Tetsu Otsuji ,  Katsuhiko Sawamura ,  Hiroyuki Kawashima

IPC分类号： B41M520

CPC分类号： C09D11/02 ,  B41C1/105

摘要： An electrocoagulation printing ink contains electrolytically coagulable polymer, soluble electrolyte, coloring agent, and liquid medium, where electrocoagulability is obtained by an electric circuit comprised of capacitor and resistor under constant voltage with the time constant of 0.02 seconds and the electrocoagulability obtained with the time constant of 0.09 seconds have a ratio from 1:1.5 to 1:3.0, hence improving the gradation reproducibility. Further, bisphenol sulfonic acid polymer can be used as a dispersant, and/or, a pigment in which the particle size of the pigment at 50% of the volume accumulation is 0.3 to 2 &mgr;m when dispersed in the ink and a ratio of particles with a particle size equal to or less than 0.2 &mgr;m is equal to or less than 25% by weight in the particle size distribution of the pigment, thereby producing a print free of undesirable background in its non-image region and high of quality.

摘要翻译： 电凝印刷油墨含有可电解凝固的聚合物，可溶性电解质，着色剂和液体介质，其中电容器由电容器和电阻器组成的电路在恒定电压下获得，时间常数为0.02秒，电凝率随时间常数 0.09秒的比例为1:1.5〜1:3.0，因此提高了灰度再现性。 此外，双酚磺酸聚合物可以用作分散剂，和/或其中分散在油墨中的体积累积的50％时颜料的粒径为0.3-2μm的颜料和颗粒与 粒径等于或小于0.2μm的粒子在颜料的粒度分布中等于或小于25重量％，从而产生在其非图像区域中没有不期望的背景和高质量的印刷品。

公开(公告)号：US5453833A

公开(公告)日：1995-09-26

申请号：US61558

申请日：1993-05-17

申请人： Hiroyuki Kawashima ,  Fumio Ohtomo ,  Susumu Saito ,  Isao Minegishi

发明人： Hiroyuki Kawashima ,  Fumio Ohtomo ,  Susumu Saito ,  Isao Minegishi

IPC分类号： H01S5/068 ,  G01B9/02 ,  H01S3/13 ,  H01S5/0687

CPC分类号： H01S3/1303 ,  G01J9/0246 ,  H01S5/0687

摘要： A wavelength stabilizing light source apparatus comprising a light source, a beam splitter, a scanning mirror, a reflector, a first and a second light receiver, a phase detector and a wavelength stabilizer. The first light receiver receives a first interference signal formed from the interference between the coherent light coming from the scanning mirror and coherent light reflected by the first reflecting surface. The second light receiver receives a second interference signal formed from the interference between the coherent light coming from the scanning mirror and the coherent light reflected by the second reflecting surface. The phase detector detects the difference in phase between the first and the second interference signal. The wavelength stabilizer stabilizes the wavelength of the light source by keeping constant the phase difference detected by the phase detector. The apparatus also includes an optical path length difference forming device for keeping a constant difference in length between the first optical path of its first member and the second optical path of its second member despite changes in temperature.

摘要翻译： 一种波长稳定光源装置，包括光源，分束器，扫描镜，反射器，第一和第二光接收器，相位检测器和波长稳定器。 第一光接收器接收由来自扫描反射镜的相干光和由第一反射表面反射的相干光之间的干涉形成的第一干涉信号。 第二光接收器接收由来自扫描反射镜的相干光与由第二反射面反射的相干光之间的干涉而形成的第二干涉信号。 相位检测器检测第一和第二干涉信号之间的相位差。 波长稳定器通过将相位检测器检测到的相位差保持恒定来稳定光源的波长。 该装置还包括光路长度差形成装置，尽管温度有变化，但仍保持其第一构件的第一光路与其第二构件的第二光路之间的长度上的恒定差。

公开(公告)号：US4199577A

公开(公告)日：1980-04-22

申请号：US939043

申请日：1978-09-01

申请人： Toru Takeshita ,  Takao Niki ,  Hiroyuki Kawashima ,  Kiyoshi Bannai

发明人： Toru Takeshita ,  Takao Niki ,  Hiroyuki Kawashima ,  Kiyoshi Bannai

IPC分类号： A61K31/59 ,  A61P3/02 ,  C07C67/00 ,  C07C401/00 ,  C07J9/00 ,  C07J17/00 ,  C07J51/00

CPC分类号： C07J17/00 ,  C07J51/00 ,  C07J9/00 ,  Y02P20/55

摘要： Novel 1.alpha.,3.beta.-dihydroxy-24-oxocholesta-5,7-diene and the hydroxyl group-protected derivatives thereof.Said novel 1.alpha.-hydroxy-24-oxovitamin D.sub.3 and said novel intermediates are also useful as the intermediates of 1.alpha.,24-dihydroxyvitamin D.sub.3.1.alpha.,3.beta.-Dihydroxy-24-oxocholesta-5,7-diene and the hydroxyl group-protected derivatives thereof are prepared from fucosterol via 1.alpha.,3.beta.-diprotected hydroxy-24(24)-ethylenedioxycholest-5-ene. 1.alpha.-hydroxy-24-oxovitamin D.sub.3 is prepared by irradiation with ultraviolet rays to 1.alpha.,3.beta.-dihydroxy-24-oxocholesta-5,7-diene or a hydroxyl group-protected derivatives thereof, isomerization using heat energy, and, when necessary, elimination of the protecting groups.

摘要翻译： 新的1α，3β-二羟基-24-氧代胆甾-5,7-二烯及其羟基保护的衍生物。 所述新型1α-羟基-24-氧维生素D3和所述新型中间体也可用作1α，24-二羟基维生素D3的中间体。 1α，3β-二羟基-24-氧代胆甾烯-5,7-二烯及其羟基保护的衍生物通过1α，3β-双保护的羟基-24（24） - 亚乙基二氧胆甾-5-烯由岩藻甾醇制备。 1α-羟基-24-氧代维生素D3通过用1α，3β-二羟基-24-氧代胆甾烯-5,7-二烯或其羟基受保护的衍生物用紫外线照射制备，使用热能异构化， 必要时消除保护基团。