Data line layout in semiconductor memory device and method of forming the same
    51.
    发明授权
    Data line layout in semiconductor memory device and method of forming the same 有权
    半导体存储器件中的数据线布局及其形成方法

    公开(公告)号:US07385834B2

    公开(公告)日:2008-06-10

    申请号:US11444355

    申请日:2006-06-01

    IPC分类号: G11C5/06

    摘要: In one aspect, a semiconductor device is provided which includes a data block including M parallel and sequentially arranged data lines numbered {0, 1, 2, . . . n, n+1, . . . , m−1, m}, where M, n and m are positive integers, and where n

    摘要翻译: 在一个方面,提供了一种半导体器件,其包括数据块,该数据块包括M个并行且顺序排列的数字线,编号为{0,1,2。 。 。 n,n + 1,。 。 。 ,m-1,m},其中M,n和m是正整数,并且其中n

    Non-volatile memory devices including dummy word lines and related structures and methods
    52.
    发明申请
    Non-volatile memory devices including dummy word lines and related structures and methods 有权
    包括虚拟字线和相关结构和方法的非易失性存储器件

    公开(公告)号:US20080013377A1

    公开(公告)日:2008-01-17

    申请号:US11729169

    申请日:2007-03-28

    IPC分类号: G11C16/04

    CPC分类号: G11C16/0483 G11C16/3427

    摘要: A non-volatile memory device may include a semiconductor substrate including an active region at a surface thereof, a first memory cell string on the active region, and a second memory cell string on the active region. The first memory cell string may include a first plurality of word lines crossing the active region between a first ground select line and a first string select line, and about a same first spacing may be provided between adjacent ones of the first plurality of word lines. The second memory cell string may include a second plurality of word lines crossing the active region between a second ground select line and a second string select line, and about the same first spacing may be provided between adjacent ones of the second plurality of word lines. Moreover, the first ground select line may be between the second ground select line and the first plurality of word lines, and the second ground select line may be between the first ground select line and the second plurality of word lines. Moreover, portions of the active region between the first and second ground select lines may be free of word lines, and a second spacing between the first and second ground select lines may be at least about 3 times greater than the first spacing. Related methods are also discussed.

    摘要翻译: 非易失性存储器件可以包括半导体衬底,其包括其表面处的有源区,有源区上的第一存储单元串和有源区上的第二存储单元串。 第一存储单元串可以包括与第一地选择线和第一串选择线之间的有源区域交叉的第一多个字线,并且可以在第一多个字线中相邻的字线之间提供约相同的第一间隔。 第二存储单元串可以包括与第二接地选择线和第二串选择线之间的有源区域交叉的第二多个字线,并且可以在相邻的第二多个字线之间提供约相同的第一间隔。 此外,第一接地选择线可以在第二接地选择线和第一多个字线之间,并且第二接地选择线可以在第一接地选择线和第二多个字线之间。 此外,第一和第二接地选择线之间的有源区域的部分可以没有字线,并且第一和第二接地选择线之间的第二间隔可以比第一间隔大至少约3倍。 还讨论了相关方法。

    Flash memory devices having shared sub active regions and methods of fabricating the same
    54.
    发明申请
    Flash memory devices having shared sub active regions and methods of fabricating the same 有权
    具有共享子有源区的闪存器件及其制造方法

    公开(公告)号:US20070075336A1

    公开(公告)日:2007-04-05

    申请号:US11376371

    申请日:2006-03-15

    IPC分类号: H01L27/10

    摘要: Flash memory devices include a pair of elongated, closely spaced-apart main active regions in a substrate. A sub active region is also provided in the substrate, extending between the pair of elongated, closely spaced-apart main active regions. A bit line contact plug is provided on, and electrically contacting, the sub active region and being at least as wide as the sub active region. An elongated bit line is provided on, and electrically contacting, the bit line contact plug remote from the sub active region.

    摘要翻译: 闪存器件包括在衬底中的一对细长的,紧密间隔的主要有源区。 亚基活性区域还设置在基底中,在一对细长的,紧密间隔开的主活性区域之间延伸。 位线接触插头设置在子有源区上并且电接触,并且至少与次有源区一样宽。 在远离副有源区域的位线接触插头上提供细长的位线并且电接触。

    Nonvolatile memory devices and methods of forming the same
    55.
    发明申请
    Nonvolatile memory devices and methods of forming the same 有权
    非易失存储器件及其形成方法

    公开(公告)号:US20060208338A1

    公开(公告)日:2006-09-21

    申请号:US11375983

    申请日:2006-03-15

    IPC分类号: H01L29/00

    摘要: Methods of forming a memory device include forming a device isolation layer in a semiconductor substrate including a cell array region and a resistor region, the device isolation layer extending into the resistor region and defining an active region in the semiconductor substrate. A first conductive layer is formed on the device isolation layer in the resistor region. The semiconductor substrate is exposed in the cell array region. A cell insulation layer is formed on a portion of the semiconductor substrate including the exposed cell array region, the active region and the device isolation layer in the resistor region. A second conductive layer is formed on the cell insulation layer in the portion of the semiconductor substrate including the exposed cell array region, the active region and the device isolation layer in the resistor region. The second conductive layer is etched to form a cell gate electrode in the cell array region and to concurrently remove the second conductive layer from the resistor region and the first conductive layer is etched in the resistor region to form a resistor.

    摘要翻译: 形成存储器件的方法包括在包括单元阵列区域和电阻器区域的半导体衬底中形成器件隔离层,器件隔离层延伸到电阻器区域中并在半导体衬底中限定有源区域。 在电阻器区域中的器件隔离层上形成第一导电层。 半导体衬底暴露在电池阵列区域中。 在半导体衬底的包括电阻器区域中的暴露的电池阵列区域,有源区域和器件隔离层的部分上形成电池绝缘层。 在半导体衬底的包括电阻器区域中的暴露的电池阵列区域,有源区域和器件隔离层的部分中的单元绝缘层上形成第二导电层。 蚀刻第二导电层以在电池阵列区域中形成电池栅电极,并且同时从电阻器区域去除第二导电层,并且在电阻器区域中蚀刻第一导电层以形成电阻器。

    Non-volatile memory device having charge trap layer and method of fabricating the same
    56.
    发明申请
    Non-volatile memory device having charge trap layer and method of fabricating the same 审中-公开
    具有电荷陷阱层的非易失性存储器件及其制造方法

    公开(公告)号:US20060208302A1

    公开(公告)日:2006-09-21

    申请号:US11354535

    申请日:2006-02-15

    IPC分类号: H01L29/76

    CPC分类号: H01L29/66833 H01L29/792

    摘要: A non-volatile memory device having a charge trap layer and a method of fabricating the same are provided. The non-volatile memory device includes a semiconductor substrate having an active region and a field region in contact with the active region. A trench isolation layer is formed within the semiconductor substrate field region to define the active region and has a protrusion higher than a top surface of the semiconductor substrate active region. A memory storage pattern is formed which crosses and extends from the semiconductor substrate active region to cover sidewalls of the protrusion of the trench isolation layer. A gate electrode is formed on the memory storage pattern and extends upward from the trench isolation layer.

    摘要翻译: 提供了具有电荷陷阱层的非易失性存储器件及其制造方法。 非易失性存储器件包括具有有源区和与有源区接触的场区的半导体衬底。 沟槽隔离层形成在半导体衬底场区内,以限定有源区,并具有高于半导体衬底有源区的顶表面的突起。 形成存储器存储图案,其跨越并从半导体衬底有源区域延伸以覆盖沟槽隔离层的突起的侧壁。 栅电极形成在存储器存储图案上并从沟槽隔离层向上延伸。

    Semiconductor memory devices having dummy active regions

    公开(公告)号:US06806518B2

    公开(公告)日:2004-10-19

    申请号:US10794508

    申请日:2004-03-05

    IPC分类号: H01L2710

    摘要: A semiconductor memory device having a dummy active region is provided, which includes a plurality of parallel main active regions and a dummy active region coupled to ends of the main active regions. The main preferably active regions are arranged in a main memory cell array region and extend to or through a dummy cell array region surrounding the main memory cell array region. Further, the dummy active region is perpendicular to the main active regions. A redundancy cell array region may intervene between the main memory cell array region and the dummy cell array region. In this case, the main active regions are extended to the dummy cell array region through the redundancy cell array region.

    Nonvolatile memory devices and methods of forming the same
    60.
    发明授权
    Nonvolatile memory devices and methods of forming the same 失效
    非易失存储器件及其形成方法

    公开(公告)号:US07572684B2

    公开(公告)日:2009-08-11

    申请号:US11646217

    申请日:2006-12-27

    IPC分类号: H01L21/335

    摘要: Nonvolatile memory devices, and methods of forming the same are disclosed. A memory device includes a substrate having a cell region, a low voltage region and a high voltage region. A ground selection transistor, a string selection transistor and a cell transistor are in the cell region, a low voltage transistor is in the low voltage region, and a high voltage transistor is in the high voltage region. A common source contact is on the ground selection transistor and a low voltage contact is on the low voltage transistor. A bit line contact is on the string selection transistor, a high voltage contact is on the high voltage transistor, and a bit line is on the bit line contact. A first insulating layer is on the substrate, and a second insulating layer is on the first insulating layer. The common source contact and the first low voltage contact extend to a height of the first insulating layer, and the bit line contact and the first high voltage contact extend to a height of the second insulating layer.

    摘要翻译: 公开了非易失性存储器件及其形成方法。 存储器件包括具有单元区域,低电压区域和高电压区域的衬底。 接地选择晶体管,串选择晶体管和单元晶体管在单元区域中,低电压晶体管处于低电压区域,高压晶体管处于高电压区域。 公共源触点位于接地选择晶体管上,低压触点位于低压晶体管上。 串行选择晶体管上有一个位线接点,高电压晶体管上有高压触点,位线接触位线。 第一绝缘层在基板上,第二绝缘层位于第一绝缘层上。 共源极接触和第一低电压接触延伸到第一绝缘层的高度,并且位线接触和第一高电压接触延伸到第二绝缘层的高度。