公开(公告)号：US5933718A

公开(公告)日：1999-08-03

申请号：US956822

申请日：1997-10-23

申请人： Badih El-Kareh ,  Jack A. Mandelman ,  James G. Ryan

发明人： Badih El-Kareh ,  Jack A. Mandelman ,  James G. Ryan

IPC分类号： H01L27/02 ,  H01L21/8238

CPC分类号： H01L27/0248

摘要： An ESD protective device is formed having a repeatable gap dimension for reliable protection by the formation of a discharge, using the materials of the gate stack for economy and a sacrificial dielectric formed between the plug and the other terminal for repeatable definition of a discharge gap.

摘要翻译： 形成具有可重复的间隙尺寸的ESD保护装置，用于通过用于经济的栅极堆叠的材料和形成在插塞和另一个端子之间的牺牲电介质形成放电来进行可靠的保护，以重复地定义放电间隙。

公开(公告)号：US5401675A

公开(公告)日：1995-03-28

申请号：US36224

申请日：1993-03-24

申请人： Pei-Ing P. Lee ,  Thomas J. Licata ,  Thomas L. McDevitt ,  Paul C. Parries ,  Scott L. Pennington ,  James G. Ryan ,  David C. Strippe

发明人： Pei-Ing P. Lee ,  Thomas J. Licata ,  Thomas L. McDevitt ,  Paul C. Parries ,  Scott L. Pennington ,  James G. Ryan ,  David C. Strippe

IPC分类号： C23C14/46 ,  C23C14/04 ,  H01L21/203 ,  H01L21/28 ,  H01L21/285 ,  H01L21/768 ,  H05K3/40 ,  H01L21/441

CPC分类号： C23C14/044 ,  H01L21/76877 ,  H05K3/4076

摘要： A process for sputter deposition wherein high aspect ratio apertures are coated with conductive films exhibiting low bulk resistivity, low impurity concentrations, and regular morphologies. A collimator is used having an aspect ratio that approximates the aspect ratio of the apertures.

摘要翻译： 用于溅射沉积的方法，其中高纵横比孔被涂覆有表现出低体积电阻率，低杂质浓度和规则形态的导电膜。 使用具有近似于孔的纵横比的纵横比的准直器。

公开(公告)号：US5326430A

公开(公告)日：1994-07-05

申请号：US164494

申请日：1993-12-07

申请人： John E. Cronin ,  Rosemary A. Previti-Kelly ,  James G. Ryan ,  Timothy D. Sullivan

发明人： John E. Cronin ,  Rosemary A. Previti-Kelly ,  James G. Ryan ,  Timothy D. Sullivan

IPC分类号： F04D25/08 ,  H02N1/00 ,  H01L21/306 ,  B44C1/22 ,  C03C15/00 ,  C23F1/00

CPC分类号： F04D25/08 ,  H02N1/004

摘要： A micro electrostatic cooling fan arrangement is provided which includes a heat source having a planar surface, a stator attached to the heat source, an axle attached to the heat source and spaced from the stator, a rotary element including a hub having an aperture therein and a fan blade, the axle passing through the aperture of the hub and the fan blade having a major surface thereof disposed at an angle with respect to the surface of the heat source and attached to the hub at one end, with the other end of the fan blade being adjacent to but spaced from the stator and a voltage source applied to the stator having sufficient voltage to charge the fan blade. Also, a process is provided for making a microfan which includes forming a strip of sacrificial material on a planar surface of a heat source, applying a spin on insulating layer over the heat source and the strip for producing a sloping surface extending from about the top of the strip toward the planar surface of the heat source, applying a layer of conductive material on the sloping surface and strip and defining from the layer of conductive material a fan blade on the sloping surface of the spin on insulating layer and a stator at one end of the fan blade.