公开(公告)号：US20170093857A1

公开(公告)日：2017-03-30

申请号：US15270457

申请日：2016-09-20

申请人： Hiroshi HINOHARA ,  Naoki Umehara ,  Atsushi Miyamoto ,  Takeshi Horiuchi ,  Takuya Soneda

发明人： Hiroshi HINOHARA ,  Naoki Umehara ,  Atsushi Miyamoto ,  Takeshi Horiuchi ,  Takuya Soneda

IPC分类号： H04L29/06

CPC分类号： H04L63/0876 ,  G06F21/335 ,  H04L63/0807 ,  H04L63/102 ,  H04L67/42

摘要： A management system, a communication system, and a transmission control method. The management system includes a receiver to receive information of a predetermined attribute, circuitry to determine whether the predetermined attribute is associated with a client, and a transmitter to send the information received by the receiver to a communication terminal that is authenticated by a client when the predetermined attribute is associated with the client. The communication system includes an authentication system and a management system. The authentication system includes an acceptance unit to accept an authentication request from a client, and an authentication processing unit to authenticate the client. In the communication system, the authentication system and the management system communicate with each other through a communication network.

公开(公告)号：US09343264B2

公开(公告)日：2016-05-17

申请号：US13379042

申请日：2010-07-01

申请人： Go Kotaki ,  Atsushi Miyamoto ,  Ryoichi Matsuoka

发明人： Go Kotaki ,  Atsushi Miyamoto ,  Ryoichi Matsuoka

IPC分类号： G06K9/00 ,  G01N23/00 ,  G21K7/00 ,  H01J37/28 ,  H04N5/232 ,  H01J37/22 ,  H01L21/66

CPC分类号： H01J37/28 ,  H01J37/222 ,  H01J2237/2817 ,  H01L22/12 ,  H01L2924/0002 ,  H04N5/23238 ,  H01L2924/00

摘要： In a panoramic image construction technology a wide-range imaging area (EP) of semiconductor patterns is divided into a plurality of imaging areas (SEP), and joined a group of images, which are obtained by imaging the SEPs using an SEM, through image processing. Although a pattern serving as a key to joining is not contained in an overlap area between some of the SEPs, all the images can be joined in some cases is noted so that: although the number of patterns serving as keys to joining is small, SEPs whose images are all joined can be determined; or even if such SEPs cannot be determined, SEPs satisfying user's request items as many as possible can be determined. The cases are extracted by optimizing an SEP arrangement, whereby the number of cases in which SEPs whose images are all joined can be determined is increased.

摘要翻译： 在全景图像构造技术中，半导体图案的宽范围成像区域（EP）被分成多个成像区域（SEP），并且通过图像将通过使用SEM对SEP进行成像而获得的一组图像 处理。 虽然作为加入键的图案不包含在一些SEP之间的重叠区域中，但是在某些情况下可以连接所有图像，使得：尽管用作加入键的图案数量少，但是SEP 可以确定其图像全部连接; 或者即使不能确定这样的SEP，也可以确定尽可能多地满足用户请求项目的SEP。 通过优化SEP布置来提取情况，从而可以确定其中图像全部被连接的SEP的情况的数量。

公开(公告)号：US08725296B2

公开(公告)日：2014-05-13

申请号：US13023797

申请日：2011-02-09

申请人： Kenichiro Nagasaka ,  Toshimitsu Tsuboi ,  Atsushi Miyamoto ,  Yasunori Kawanami ,  Tetsuharu Fukushima ,  Kenta Kawamoto

发明人： Kenichiro Nagasaka ,  Toshimitsu Tsuboi ,  Atsushi Miyamoto ,  Yasunori Kawanami ,  Tetsuharu Fukushima ,  Kenta Kawamoto

IPC分类号： B25J13/08 ,  B25J15/08

CPC分类号： B25J9/1612

摘要： There is provided a gripping judgment apparatus including a plan unit that generates a target orbit for moving a gripping unit in a state in which an object as a gripping target is gripped by the gripping unit, an observation unit that measures movement of the gripping unit driven based on the target orbit, a gripping state judgment unit that judges whether or not an object as a gripping target is grippable based on a target value of the gripping unit derived from the target orbit and an actual measured value measured by the observation unit, and a gripping state change unit that changes a gripping state of an object gripped by the gripping unit based on a judgment result obtained by the gripping state judgment unit.

摘要翻译： 提供了一种夹持判断装置，包括：平面单元，其在作为夹持目标的物体被夹持单元夹持的状态下产生用于移动夹持单元的目标轨道;观察单元，其测量夹持单元驱动的运动 基于所述目标轨道的夹持状态判断单元，基于来自所述目标轨道的所述夹持单元的目标值和由所述观测单元测量的实际测量值，判断作为夹持目标的物体是否可抓握，以及 夹持状态改变单元，其基于由夹持状态判断单元获得的判断结果，改变由夹持单元夹持的物体的夹持状态。

公开(公告)号：US20130262027A1

公开(公告)日：2013-10-03

申请号：US13880429

申请日：2011-10-21

申请人： Chie Shishido ,  Maki Tanaka ,  Atsushi Miyamoto ,  Akira Hamamatsu ,  Manabu Yano

发明人： Chie Shishido ,  Maki Tanaka ,  Atsushi Miyamoto ,  Akira Hamamatsu ,  Manabu Yano

IPC分类号： G01B21/04

CPC分类号： G01B21/04 ,  G01B15/04 ,  H01L22/12

摘要： A model based measurement method is capable of estimating a cross-sectional shape by matching various pre-created cross-sectional shapes with a library of SEM signal waveforms. The present invention provides a function for determining whether or not it is appropriate to create a model of a cross-sectional shape or a function for verifying the accuracy of estimation results to a conventional model based measurement method, wherein a solution space (expected solution space) is obtained by matching library waveforms and is displayed before measuring the real pattern by means of model based measurement. Moreover, after the real pattern is measured by means of model based measurement, the solution space (real solution space) is obtained by matching the real waveforms with the library waveforms and is displayed.

摘要翻译： 基于模型的测量方法能够通过将各种预先创建的横截面形状与SEM信号波形的库进行匹配来估计横截面形状。 本发明提供一种功能，用于确定是否适于创建横截面形状的模型或用于验证估计结果的准确性的功能，以用于基于常规的基于模型的测量方法，其中，解空间（预期解空间 ）通过匹配库波形获得，并且在通过基于模型的测量测量实际图案之前显示。 此外，在通过基于模型的测量来测量实际模式之后，通过将实际波形与库波形相匹配来获得解空间（实解空间），并显示。

公开(公告)号：US08385799B2

公开(公告)日：2013-02-26

申请号：US12830624

申请日：2010-07-06

申请人： Atsushi Miyamoto

发明人： Atsushi Miyamoto

IPC分类号： G03G15/20

CPC分类号： G03G15/2025 ,  G03G2215/2093

摘要： A lubricating device includes an lubricant impregnation member to coat a surface of a target member with lubricant, an lubricant supply member to supply lubricant to the lubricant impregnation member, a subsidiary roller to feed the lubricant impregnation member out, a main roller to reel in the lubricant impregnation member fed by the subsidiary roller, a drive motor to drive the main roller, an encoder disc provided at a rotational shaft of the subsidiary roller, an encoder sensor to detect a rotational state of the encoder disc, and a controller unit to calculate an outer diameter of the main roller and a portion of the lubricant impregnation member reeled by the main roller, based on a number of drive steps of the drive motor during a detection interval of the encoder disc.

摘要翻译： 润滑装置包括用润滑剂涂覆目标构件的表面的润滑剂浸渍构件，向润滑剂浸渍构件供给润滑剂的润滑剂供给构件，用于将润滑剂浸渍构件输出的辅助辊，将主辊卷入 由辅助辊供给的润滑剂浸渍构件，用于驱动主辊的驱动马达，设置在辅助辊的旋转轴处的编码器盘，用于检测编码器盘的旋转状态的编码器传感器和用于计算 基于编码器盘的检测间隔期间驱动电动机的驱动步骤的数量，主辊的外径和由主辊卷绕的润滑剂浸渍部件的一部分。

公开(公告)号：US08357897B2

公开(公告)日：2013-01-22

申请号：US13146436

申请日：2010-01-26

申请人： Chie Shishido ,  Atsushi Miyamoto ,  Mayuka Iwasaki ,  Tomofumi Nishiura ,  Go Kotaki

发明人： Chie Shishido ,  Atsushi Miyamoto ,  Mayuka Iwasaki ,  Tomofumi Nishiura ,  Go Kotaki

IPC分类号： H01J37/26 ,  G01N23/00 ,  G06K9/00

CPC分类号： H01J37/3045 ,  G01B2210/56 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/24578 ,  H01J2237/24592 ,  H01J2237/2817 ,  H01J2237/2826

摘要： A charged particle beam device enabling prevention of degradation of reproducibility of measurement caused by an increase of the beam diameter attributed to an image shift and having a function of dealing with device-to-device variation. The charged particle beam device is used for measuring the dimensions of a pattern on a specimen using a line profile obtained by detecting secondary charged particles emitted from the specimen when the specimen is scanned with a primary charged particle beam converged on the specimen. A lookup table in which the position of image shift and the variation of the beam diameter are associated is prepared in advance by actual measurement or calculation and registered. When the dimensions are measured, image processing is carried out so as to correct the line profile for the variation of the beam diameter while the lookup table is referenced, and thereby the situation where the beam diameter is effectively equal is produced irrespective of the position of the image shift. Whit this, measurement by the charged particle beam excellent reproducibility can be carried out.

摘要翻译： 一种带电粒子束装置，其能够防止由于图像偏移引起的光束直径的增加而导致的测量再现性的劣化，并且具有处理器件到器件变化的功能。 带电粒子束装置用于通过使用聚集在样本上的初级带电粒子束扫描样本时检测从样本发射的二次带电粒子而获得的线轮廓来测量样品上的图案的尺寸。 通过实际测量或计算预先准备其中图像偏移的位置和光束直径的变化相关联的查找表并注册。 当测量尺寸时，执行图像处理，以便在参考查找表时校正用于变化光束直径的线轮廓，从而产生光束直径有效相等的情况，而与 图像偏移。 这样，可以进行通过带电粒子束测量的优异的再现性。

公开(公告)号：US08331651B2

公开(公告)日：2012-12-11

申请号：US13231394

申请日：2011-09-13

申请人： Tomofumi Nishiura ,  Atsushi Miyamoto ,  Chie Shishido ,  Takumichi Sutani

发明人： Tomofumi Nishiura ,  Atsushi Miyamoto ,  Chie Shishido ,  Takumichi Sutani

IPC分类号： G06K9/00

CPC分类号： G06T7/001 ,  G06K9/6255 ,  G06T2207/10056 ,  G06T2207/30148 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

摘要： An apparatus and method for inspecting a defect of a circuit pattern formed on a semiconductor wafer includes a defect classifier have a comparison shape forming section for forming a plurality of comparison shapes corresponding to an SEM image of an inspection region by deforming the shape of the circuit pattern in accordance with a plurality of shape deformation rules using design data corresponding to the circuit pattern within the inspection region and a shape similar to the SEM image of the inspection region out of the plurality of comparison shapes formed and selected as the comparison shape, and a shape comparing and classifying section for classifying the SEM image using information of the comparison shape selected in the comparison shape forming section and the inspection shape of the circuit pattern of the SEM image of the inspection region.

摘要翻译： 用于检查形成在半导体晶片上的电路图案的缺陷的装置和方法包括：缺陷分类器，具有比较形状形成部，用于通过使电路的形状变形来形成与检查区域的SEM图像对应的多个比较形状 使用与检查区域内的电路图案相对应的设计数据的多个形状变形规则的形状以及形成和选择为比较形状的多个比较形状中的检查区域的SEM图像的形状，以及 形状比较和分类部分，用于使用在比较形状形成部分中选择的比较形状的信息和检查区域的SEM图像的电路图案的检查形状来对SEM图像进行分类。

公开(公告)号：US20120310411A1

公开(公告)日：2012-12-06

申请号：US13466497

申请日：2012-05-08

申请人： Toshimitsu TSUBOI ,  Akichika Tanaka ,  Hirokazu Shirado ,  Yoshiaki Iwai ,  Atsushi Miyamoto

发明人： Toshimitsu TSUBOI ,  Akichika Tanaka ,  Hirokazu Shirado ,  Yoshiaki Iwai ,  Atsushi Miyamoto

IPC分类号： G06F19/00

CPC分类号： B25J9/1674 ,  B25J13/088 ,  G05B2219/34393 ,  G05B2219/34406

摘要： Provided is a robot apparatus including actuators for driving joint shafts and measuring at least one of a joint angle and a joint angle speed of each of the joint shafts, and a central control part for controlling each of the actuators, wherein the central control part performs a periodic communication at predetermined control periods and the periodic communication includes transmitting a desired control value from the central control part to each of the actuators and transmitting a measured value from each of the actuators to the central control part, the central control part stops the periodic communication in response to an occurrence of an actuator that has failed to receive the measured value during a given period of time, and each of the actuators performs a safety stop in response to an event where the actuator has not received the desired control value during a given period of time.

摘要翻译： 提供一种机器人装置，包括用于驱动关节轴并且测量每个关节轴的关节角度和关节角度速度中的至少一个的致动器和用于控制每个致动器的中央控制部件，其中中央控制部件执行 在预定的控制周期进行周期性通信，并且周期性通信包括从中央控制部分向每个致动器发送期望的控制值，并将测量值从每个致动器发送到中央控制部分，中央控制部分停止周期性 响应于在给定时间段期间未能接收测量值的致动器的发生的响应，并且每个致动器响应于执行器在一个时间段期间没有接收到期望的控制值的事件执行安全停止 给定一段时间。

公开(公告)号：US20120181426A1

公开(公告)日：2012-07-19

申请号：US13432176

申请日：2012-03-28

申请人： Atsushi Miyamoto ,  Wataru Nagatomo ,  Ryoichi Matsuoka ,  Hidetoshi Morokuma

发明人： Atsushi Miyamoto ,  Wataru Nagatomo ,  Ryoichi Matsuoka ,  Hidetoshi Morokuma

IPC分类号： G01N23/00

CPC分类号： G01N23/20 ,  H01J37/21 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/1532 ,  H01J2237/1536 ,  H01J2237/216 ,  H01J2237/2817

摘要： (1) part or all of the number, coordinates and size/shape and imaging sequence of imaging points each for observation, the imaging position change method and imaging conditions can be calculated automatically from CAD data, (2) a combination of input information and output information for imaging recipe creation can be set arbitrarily, and (3) decision is made of imaging or processing at an arbitrary imaging point as to whether to be successful/unsuccessful and in case a failure is determined, a relief process can be conducted in which the imaging point or imaging sequence is changed.

摘要翻译： （1）可以从CAD数据自动计算成像点的数量，坐标，成像顺序，成像位置的各部分，成像顺序，成像位置变化方法和成像条件，（2）输入信息和 用于成像配方创建的输出信息可以任意设定，并且（3）决定是否成功/成功的任意成像点的成像或处理，并且在确定失败的情况下，可以进行解除处理 成像点或成像序列改变。

公开(公告)号：US20120048628A1

公开(公告)日：2012-03-01

申请号：US13181741

申请日：2011-07-13

申请人： Yasunori KAWANAMI ,  Atsushi Miyamoto ,  Toshimitsu Tsuboi ,  Tetsuharu Fukushima ,  Kenta Kawamoto ,  Yasuhide Hosoda

发明人： Yasunori KAWANAMI ,  Atsushi Miyamoto ,  Toshimitsu Tsuboi ,  Tetsuharu Fukushima ,  Kenta Kawamoto ,  Yasuhide Hosoda

IPC分类号： B25J5/00 ,  B25J19/02 ,  G01L3/10

CPC分类号： B25J13/085 ,  B25J9/0003 ,  G01L3/1428

摘要： Provided is a torque detection apparatus including a base portion, a drive portion, and a detection portion. The drive portion includes a rotor having a main axis in a direction of a first axis, and a stator configured to rotate the rotor around the main axis. The detection portion includes a strain body and a detection element. The strain body includes a first end portion to be fixed to the base portion and a second end portion to be fixed to the rotor, and is arranged concentrically with the rotor. The detection element is provided to the strain body so as to detect a strain of the strain body around the first axis with respect to the base portion.

摘要翻译： 提供一种扭矩检测装置，其包括基部，驱动部和检测部。 驱动部分包括具有沿第一轴方向的主轴线的转子和构造成围绕主轴线旋转转子的定子。 检测部包括应变体和检测元件。 应变体包括固定到基部的第一端部和固定到转子的第二端部，并且与转子同心地设置。 将检测元件设置到应变体，以便相对于基部检测第一轴线周围的应变体的应变。