摘要:
A device for generating radiation source based on a discharge includes a cathode and an anode. The cathode and anode material are supplied in fluid state. The material forms a plasma pinch when the device is in use. Optionally, nozzles may be used to supply the material. The cathode and/or anode may form a flat surface. The trajectories of the material may be elongated. A laser may be used to cause the discharge more easily. The laser may be directed on the anode of cathode or on a separate material located in between the anode and cathode.
摘要:
A radiation source unit is provided that includes an anode and a cathode that are configured and arranged to create a discharge in a substance in a space between said anode and cathode and to form a plasma so as to generate electromagnetic radiation. The substance may comprise xenon, indium, lithium, tin or any suitable material. To improve conversion efficiency, the source unit may be constructed to have a low inductance, and operated with a minimum of plasma. To, for example, improve heat dissipation, a fluid circulation system can be created within the source volume and a wick by using a fluid in both its vapor and liquid states. To, for example, prevent contamination from entering a lithographic projection apparatus, the source unit can be constructed to minimize the production of contamination, and a trap can be employed to capture the contamination without interfering with the emitted radiation.
摘要:
A lithographic apparatus is disclosed. The lithographic apparatus includes an illumination system that provides a beam of radiation, and a support structure that supports a patterning structure. The patterning structure is configured to impart the beam of radiation with a pattern in its cross-section. The apparatus also includes a substrate support that supports a substrate, and a projection system that projects the patterned beam onto a target portion of the substrate. The illumination system includes a radiation-production system that produces extreme ultra-violet radiation, and a radiation-collection system that collects extreme ultra-violet radiation. Particles that are produced as a by-product of extreme ultra-violet radiation production move substantially in a particle-movement direction. The radiation-collection system is arranged to collect extreme ultra-violet radiation which radiates in a collection-direction, which is substantially different from the particle-movement direction.
摘要:
A plasma stream is formed by plural plasma-forming gas through which electric currents are passed and on which a magnetic field is superposed a physical parameter of the plasma stream is monitored. The magnitude of force acting on one of the jets is varied until a required result is obtained. Plural plasma burners arranged at an angle to each other are connected to a power supply and a plasma-forming gas source. Each burner incudes an open magnetic circuit with a solenoid connected to another power supply. The physical parameters of the plasma stream are recorded. The recorder is connected to a processor having connected to both power supplies and plasma-forming gas source. The burners include a drive also connected to the processing unit.
摘要:
A system and method for processing a 3-dimensional landmark providing a 3-dimensional representation of a 3-dimensional real world object located at a predefined geographic location is provided. The method includes the steps of providing a data set containing the 3-dimensional landmark, determining a largest continuous horizontal surface of the 3-dimensional landmark, and storing the determined largest horizontal surface as road traffic area of a road network used by a user when moving on the object.
摘要:
A navigation device comprises a processing device and a database. The database may store first data defining, for a plurality of objects, respectively a three-dimensional representation of the object. The database may store second data including, for at least a subset of the plurality of objects, an icon representation of the respective object, coordinates of the respective object and a pointer to a portion of the first data which is associated with the respective object. The processing device is coupled to the database and is configured to control an optical output device to display an object based on the first data or based on the second data.
摘要:
A navigation system may display a map element represented by a spline including a plurality of vertices. Label coordinate values derived from coordinate values of the plurality of vertices may be retrieved from a database. A label assigned to the map element may be displayed based on the stored label coordinate values. The assigned label may be adapted to the geometric form of at least a portion of the map element.
摘要:
Techniques and mechanisms for controlling execution of an instruction sequence in a data stream processing engine. In an embodiment, a control unit of the data stream processing engine detects that execution of a first instruction in an instruction sequence has ended. In another embodiment, the control unit determines information regarding a next instruction of the instruction sequence which is to be executed. Control signals may be sent from the control unit to form a data path set for execution of the next instruction in the instruction sequence.
摘要:
A method for device configuration is described comprising storing information about whether a mobile communication system comprising a mobile communication device operates correctly when a configuration is applied in a context of a configuration history to the mobile communication device; receiving a request for a configuration to be applied to mobile communication devices; and determining a configuration to be applied to the mobile communication devices based on the stored information.
摘要:
A navigation system includes a display for displaying at least a part of a digital map. The navigation system includes a navigation database which stores any text and/or symbol(s) associated with a signpost independently from a background of the signpost. The text and/or symbol(s) and the background may be retrieved from the navigation database and displayed as a signpost image in the displayed part of the digital map.