Lithographic apparatus, illumination system and method for providing a projection beam of EUV radiation
    53.
    发明申请
    Lithographic apparatus, illumination system and method for providing a projection beam of EUV radiation 有权
    光刻设备,照明系统和提供EUV辐射投影光束的方法

    公开(公告)号:US20050121624A1

    公开(公告)日:2005-06-09

    申请号:US10727035

    申请日:2003-12-04

    CPC分类号: G03F7/70858 G03F7/70916

    摘要: A lithographic apparatus is disclosed. The lithographic apparatus includes an illumination system that provides a beam of radiation, and a support structure that supports a patterning structure. The patterning structure is configured to impart the beam of radiation with a pattern in its cross-section. The apparatus also includes a substrate support that supports a substrate, and a projection system that projects the patterned beam onto a target portion of the substrate. The illumination system includes a radiation-production system that produces extreme ultra-violet radiation, and a radiation-collection system that collects extreme ultra-violet radiation. Particles that are produced as a by-product of extreme ultra-violet radiation production move substantially in a particle-movement direction. The radiation-collection system is arranged to collect extreme ultra-violet radiation which radiates in a collection-direction, which is substantially different from the particle-movement direction.

    摘要翻译: 公开了一种光刻设备。 光刻设备包括提供辐射束的照明系统和支撑图形结构的支撑结构。 图案形成结构被配置为在其横截面中赋予辐射束图案。 该装置还包括支撑基板的基板支撑件和将图案化的光束投影到基板的目标部分上的投影系统。 照明系统包括产生极紫外辐射的辐射生产系统和收集极紫外辐射的辐射收集系统。 作为极紫外线辐射产物的副产物产生的颗粒基本上沿颗粒移动方向移动。 辐射采集系统被布置成收集与收集方向辐射的极微紫外辐射,其与颗粒运动方向基本上不同。

    Method of control of plasma stream and plasma apparatus
    54.
    发明授权
    Method of control of plasma stream and plasma apparatus 失效
    等离子体流和等离子体装置的控制方法

    公开(公告)号:US5489820A

    公开(公告)日:1996-02-06

    申请号:US16217

    申请日:1993-02-11

    摘要: A plasma stream is formed by plural plasma-forming gas through which electric currents are passed and on which a magnetic field is superposed a physical parameter of the plasma stream is monitored. The magnitude of force acting on one of the jets is varied until a required result is obtained. Plural plasma burners arranged at an angle to each other are connected to a power supply and a plasma-forming gas source. Each burner incudes an open magnetic circuit with a solenoid connected to another power supply. The physical parameters of the plasma stream are recorded. The recorder is connected to a processor having connected to both power supplies and plasma-forming gas source. The burners include a drive also connected to the processing unit.

    摘要翻译: 通过多个等离子体形成气体形成等离子体流,通过该等离子体形成气体通过电流,并且在其上重叠磁场,监测等离子体流的物理参数。 作用在一个射流上的力的大小变化,直到获得所需的结果。 将彼此成角度配置的多个等离子体燃烧器连接到电源和等离子体形成气体源。 每个燃烧器包括一个开放的磁路,电磁铁连接到另一个电源。 记录等离子体流的物理参数。 记录器连接到已经连接到电源和等离子体形成气体源的处理器。 燃烧器包括也连接到处理单元的驱动器。

    METHOD, DEVICE AND SYSTEM FOR CONTROLLING EXECUTION OF AN INSTRUCTION SEQUENCE IN A DATA STREAM ACCELERATOR
    58.
    发明申请
    METHOD, DEVICE AND SYSTEM FOR CONTROLLING EXECUTION OF AN INSTRUCTION SEQUENCE IN A DATA STREAM ACCELERATOR 审中-公开
    用于控制数据流加速器中指令序列执行的方法,装置和系统

    公开(公告)号:US20140195784A1

    公开(公告)日:2014-07-10

    申请号:US13993850

    申请日:2011-12-29

    申请人: Vladimir Ivanov

    发明人: Vladimir Ivanov

    IPC分类号: G06F9/38

    摘要: Techniques and mechanisms for controlling execution of an instruction sequence in a data stream processing engine. In an embodiment, a control unit of the data stream processing engine detects that execution of a first instruction in an instruction sequence has ended. In another embodiment, the control unit determines information regarding a next instruction of the instruction sequence which is to be executed. Control signals may be sent from the control unit to form a data path set for execution of the next instruction in the instruction sequence.

    摘要翻译: 用于控制数据流处理引擎中的指令序列的执行的技术和机制。 在一个实施例中,数据流处理引擎的控制单元检测到指令序列中的第一指令的执行已经结束。 在另一个实施例中,控制单元确定关于要被执行的指令序列的下一个指令的信息。 可以从控制单元发送控制信号以形成用于在指令序列中执行下一条指令的数据路径。

    METHOD FOR DEVICE CONFIGURATION, DATABASE, MOBILE COMMUNICATION DEVICE AND NETWORK ENTITY
    59.
    发明申请
    METHOD FOR DEVICE CONFIGURATION, DATABASE, MOBILE COMMUNICATION DEVICE AND NETWORK ENTITY 有权
    用于设备配置,数据库,移动通信设备和网络实体的方法

    公开(公告)号:US20140162617A1

    公开(公告)日:2014-06-12

    申请号:US13707649

    申请日:2012-12-07

    IPC分类号: H04W8/24

    CPC分类号: H04W8/245 H04W8/22

    摘要: A method for device configuration is described comprising storing information about whether a mobile communication system comprising a mobile communication device operates correctly when a configuration is applied in a context of a configuration history to the mobile communication device; receiving a request for a configuration to be applied to mobile communication devices; and determining a configuration to be applied to the mobile communication devices based on the stored information.

    摘要翻译: 描述了一种用于设备配置的方法,包括:当在配置历史的上下文中应用所述移动通信设备时,存储关于包括移动通信设备的移动通信系统是否正确地操作的信息; 接收对应用于移动通信设备的配置的请求; 以及基于所存储的信息确定要应用于所述移动通信设备的配置。

    DIGITAL MAP SIGNPOST SYSTEM
    60.
    发明申请
    DIGITAL MAP SIGNPOST SYSTEM 有权
    数字地图签名系统

    公开(公告)号:US20120245849A1

    公开(公告)日:2012-09-27

    申请号:US13426360

    申请日:2012-03-21

    IPC分类号: G01C21/36 G06T15/00

    摘要: A navigation system includes a display for displaying at least a part of a digital map. The navigation system includes a navigation database which stores any text and/or symbol(s) associated with a signpost independently from a background of the signpost. The text and/or symbol(s) and the background may be retrieved from the navigation database and displayed as a signpost image in the displayed part of the digital map.

    摘要翻译: 导航系统包括用于显示数字地图的至少一部分的显示器。 导航系统包括导航数据库,其存储与路标的背景独立的路标相关联的任何文本和/或符号。 可以从导航数据库检索文本和/或符号和背景,并且在数字地图的显示部分中作为路标图像显示。