公开(公告)号：US20050061973A1

公开(公告)日：2005-03-24

申请号：US10927536

申请日：2004-08-27

申请人： Masato Kazui ,  Mitsuji Ikeda ,  Atsushi Takane

发明人： Masato Kazui ,  Mitsuji Ikeda ,  Atsushi Takane

IPC分类号： G01B15/04 ,  H01J37/28

CPC分类号： G01B15/04 ,  H01J2237/2816

摘要： This invention is to provide a shape measuring device and a shape measuring method that can accurately measure a cross-sectional shape or a three-dimensional shape of a sample without using matching of characteristics. A shape measuring apparatus comprises a charged particle beam apparatus comprising a processor for measuring detected charged particles signal generated from the sample. The charged particle beam is irradiated to sample at first angle to generate a first signal and second angle to generate second signal. The processor selects a parameter indicating a relation between the first signal and a height of the sample or an inclination angle of the specimen until the first signal which achieves the second signal.

摘要翻译： 本发明提供一种形状测量装置和形状测量方法，其可以在不使用特性匹配的情况下精确地测量样品的横截面形状或三维形状。 一种形状测量装置包括带电粒子束装置，其包括用于测量从样本产生的检测到的带电粒子信号的处理器。 带电粒子束以第一角度照射到样品上以产生第一信号和第二角度以产生第二信号。 处理器选择指示第一信号和样本高度之间的关系的参数或样本的倾斜角，直到实现第二信号的第一信号为止。

公开(公告)号：US06265077B1

公开(公告)日：2001-07-24

申请号：US09260941

申请日：1999-03-02

申请人： Mitsuji Ikeda ,  Masao Nishioka ,  Naotaka Katoh

发明人： Mitsuji Ikeda ,  Masao Nishioka ,  Naotaka Katoh

IPC分类号： B32B904

CPC分类号： C04B41/5059 ,  C23C16/0236 ,  C23C16/325 ,  C23C16/4581 ,  Y10T428/1414 ,  Y10T428/1443

摘要： A ceramic article having a base made of an insulating ceramic material, the insulating ceramic material includes a metal element, and a conductive surface layer provided on the base, wherein the conductive surface layer includes carbon atoms as its main component, and wherein the conductive surface layer further includes silicon atoms and atoms of the metal element present in the insulating ceramic material.

摘要翻译： 一种陶瓷制品，其具有由绝缘陶瓷材料制成的基底，所述绝缘陶瓷材料包括金属元件和设置在所述基底上的导电表面层，其中所述导电表面层包括碳原子作为其主要成分，并且其中所述导电表面 层还包括存在于绝缘陶瓷材料中的金属元素的硅原子和原子。

公开(公告)号：US5410696A

公开(公告)日：1995-04-25

申请号：US32066

申请日：1993-03-16

申请人： Mitsuho Seki ,  Mitsuji Ikeda ,  Yoshikazu Kiyoshige

发明人： Mitsuho Seki ,  Mitsuji Ikeda ,  Yoshikazu Kiyoshige

IPC分类号： G06F15/16 ,  G06F9/44 ,  G06F9/50 ,  G06F15/177 ,  G06F9/38

CPC分类号： G06F8/45

摘要： In order to process a program by parallel processing using a plurality of processors, the program is divided into a plurality of partial programs. Then one or more expressions are derived, the or each expression expressing a relationship between the partial programs, such as which can be executed independently and which require the execution of another partial program. The expression or expressions can then be investigated to determine which has a desired characteristic, such as a characteristic corresponding to uniform loading of the processors. The expression can also be varied, to give more options for the selection of the expression with the desired characteristic. Then the partial programs can be distributed to the processors on the basis of the relationship corresponding to the expression which has the desired characteristic. Furthermore, when the partial programs are being executed by the processors, any processor which has completed its processing broadcasts a signal to the other processors, which may then re-assign one or more of their partial programs. In this way, parallel processing can be carried out quickly, with substantially uniform loading of the processors.

摘要翻译： 为了通过使用多个处理器的并行处理来处理程序，程序被分成多个部分程序。 然后导出一个或多个表达式，该表达式或每个表达式表示部分程序之间的关系，例如哪些可以独立执行，哪些需要执行另一个部分程序。 然后可以调查表达式或表达式以确定哪个具有期望的特性，例如对应于处理器的均匀加载的特性。 该表达式也可以变化，以给出具有所需特征的表达选择的更多选择。 然后，可以基于与具有期望特性的表达式对应的关系将部分程序分配给处理器。 此外，当处理器执行部分程序时，已经完成其处理的任何处理器向其他处理器广播信号，然后可以重新分配其部分程序中的一个或多个。 以这种方式，可以快速地执行并行处理，同时处理器的加载基本均匀。

公开(公告)号：US5136680A

公开(公告)日：1992-08-04

申请号：US719050

申请日：1991-06-21

申请人： Shoji Seike ,  Koichi Mori ,  Mitsuji Ikeda ,  Masayuki Nozaki ,  Hisakazu Okajima ,  Hiroyuki Katsukawa ,  Kazumi Nakanishi ,  Kenji Doi

发明人： Shoji Seike ,  Koichi Mori ,  Mitsuji Ikeda ,  Masayuki Nozaki ,  Hisakazu Okajima ,  Hiroyuki Katsukawa ,  Kazumi Nakanishi ,  Kenji Doi

IPC分类号： G02B6/44 ,  H01B17/00

CPC分类号： G02B6/4417 ,  G02B6/442 ,  G02B6/4471 ,  H01B17/005

摘要： An excellent optical fiber built-in type composite insulator including at least two insulator bodies each having a penetration bore, at least one optical fiber inserted in the penetration bores, and sealing structures for the penetration bores of the insulator bodies and for a joining layer of opposing end surfaces of adjacent insulator bodies, is provided, which effectively prevents leakage of inner silicone grease, bending and breakage of the optical fiber, leakage of electric current along the penetration bores, short circuited trouble, and destruction of the insulator bodies, improves joining strength of the opposing end surfaces of the insulator bodies, and maintains the joining strength for a long period, affords a change of numbers of the insulator bodies, and facilitates the production. A method of producing such composite insulator is also provided.

公开(公告)号：US09183450B2

公开(公告)日：2015-11-10

申请号：US11790883

申请日：2007-04-27

申请人： Yuichi Abe ,  Mitsuji Ikeda

发明人： Yuichi Abe ,  Mitsuji Ikeda

IPC分类号： G06K9/62 ,  G06K9/00 ,  G06K9/03 ,  G06T7/00

CPC分类号： G06K9/03 ,  G06K9/6253 ,  G06T7/001 ,  G06T2207/10048 ,  G06T2207/10056 ,  G06T2207/10116 ,  G06T2207/30128 ,  G06T2207/30148

摘要： An inspection apparatus and method are provided, wherein even when an image that cannot be processed by a current image processing algorithm is input to an image processing unit while a working line is in operation, the inspection can be continued by newly generating an image processing algorithm optimized in keeping with a particular image. The apparatus includes an erroneous recognition detector, a teacher data generator and a switching unit for switching the current image processing algorithm to a new image processing algorithm generated based on an updated teacher data group. As a result, the inspection can be continued without extremely decreasing the accuracy even when an unexpected image is input to the working line.

摘要翻译： 提供了一种检查装置和方法，其中即使在工作线处于运行中，当图像处理单元不能被当前图像处理算法处理的图像输入到图像处理单元时，也可以通过新生成图像处理算法来继续检查 根据特定图像进行优化。 该装置包括错误识别检测器，教师数据发生器和用于将当前图像处理算法切换到基于更新的教师数据组生成的新图像处理算法的切换单元。 结果，即使当意外的图像被输入到工作线路时，也可以继续检查，而不会极大地降低精度。

公开(公告)号：US08953894B2

公开(公告)日：2015-02-10

申请号：US13122151

申请日：2009-10-02

申请人： Yoshimichi Sato ,  Mitsuji Ikeda ,  Fumihiro Sasajima

发明人： Yoshimichi Sato ,  Mitsuji Ikeda ,  Fumihiro Sasajima

IPC分类号： G06K9/00 ,  G06K9/62 ,  H01J37/28 ,  G06T7/00 ,  H01J37/22

CPC分类号： H01J37/28 ,  G06K9/00127 ,  G06K2209/403 ,  G06T7/74 ,  G06T2207/10061 ,  G06T2207/30148 ,  H01J37/222 ,  H01J2237/24592

摘要： A pattern matching method for a scanning electron microscope comprises a step of performing pattern matching of only an upper layer pattern between an image (101) in which a pattern consisting of plural layers is represented and a template (104) in which the upper layer pattern of the plural layer pattern is selectively represented, thereby identifying the position of the pattern consisting of the plural layers. Then, information about the upper layer pattern is subtracted from the image (101), thus extracting shape information (108) about the lower layer pattern. Consequently, stable positioning or selective information extraction on a certain layer is enabled regardless of the state of the depths of a pattern formed in three dimensions or of the charge state of a sample.

摘要翻译： 用于扫描电子显微镜的图案匹配方法包括在表示由多个层组成的图案的图像（101）和仅具有上层图案的模板（104）之间执行仅上层图案的图案匹配的步骤， 选择性地表示多层图案，由此识别由多层组成的图案的位置。 然后，从图像（101）中减去关于上层图案的信息，从而提取关于下层图案的形状信息（108）。 因此，无论在三维或样品的充电状态中形成的图案的深度的状态如何，都能够使特定层上的稳定定位或选择性信息提取。

公开(公告)号：US08885950B2

公开(公告)日：2014-11-11

申请号：US13502823

申请日：2010-10-06

申请人： Wataru Nagatomo ,  Yuichi Abe ,  Mitsuji Ikeda

发明人： Wataru Nagatomo ,  Yuichi Abe ,  Mitsuji Ikeda

IPC分类号： G06K9/00 ,  G06K9/62 ,  G06T7/00 ,  G06K9/68

CPC分类号： G06K9/6203 ,  G06K9/6253 ,  G06K9/6255 ,  G06K9/6857 ,  G06T7/74 ,  G06T2207/10061 ,  G06T2207/20016 ,  G06T2207/30148 ,  H01J2237/221 ,  H01J2237/226

摘要： Provided is a template matching method and a template matching apparatus, where the degree of matching between a template and the actual image upon template matching is maintained at a high level, without depending on a partial appearance of a lower layer. Proposed as one embodiment, is a method and an apparatus for template matching, where either an area is set in which comparison of the template and the image is not conducted, or a second area is set inside the template where comparison different from comparison conducted in a first comparison area is to be conducted, and the template matching is conducted on the basis either of comparison excluding the non-comparison area, or of comparison using the first and second areas.

摘要翻译： 提供了一种模板匹配方法和模板匹配装置，其中模板匹配之间的模板和实际图像之间的匹配程度保持在高水平，而不依赖于较低层的部分外观。 作为一个实施例，提出了一种用于模板匹配的方法和装置，其中设置了不进行模板和图像的比较的区域，或者在模板内部设置第二区域，其中比较不同于进行比较 将进行第一比较区域，并且基于除非比较区域之外的比较或使用第一和第二区域的比较进行模板匹配。

公开(公告)号：US08200006B2

公开(公告)日：2012-06-12

申请号：US12434786

申请日：2009-05-04

申请人： Mitsuji Ikeda ,  Tatsuya Maeda ,  Osamu Nasu ,  Fumihiro Sasajima

发明人： Mitsuji Ikeda ,  Tatsuya Maeda ,  Osamu Nasu ,  Fumihiro Sasajima

IPC分类号： G09K9/00

CPC分类号： G06T7/001 ,  G01N21/95607 ,  G06T2207/30148

摘要： Information indicating the reason for a failure of template matching is provided. Difference information between a first image, which is referred to as a template, and a third image that is selected by the operator from a second image and that is larger than the template is displayed.

摘要翻译： 提供指示模板匹配失败的原因的信息。 显示被称为模板的第一图像与操作者从第二图像选择并且大于模板的第三图像之间的差异信息。

公开(公告)号：US20110262043A1

公开(公告)日：2011-10-27

申请号：US13122151

申请日：2009-10-02

申请人： Yoshimichi Sato ,  Mitsuji Ikeda ,  Fumihiro Sasajima

发明人： Yoshimichi Sato ,  Mitsuji Ikeda ,  Fumihiro Sasajima

IPC分类号： G06K9/62

CPC分类号： H01J37/28 ,  G06K9/00127 ,  G06K2209/403 ,  G06T7/74 ,  G06T2207/10061 ,  G06T2207/30148 ,  H01J37/222 ,  H01J2237/24592

摘要： A pattern matching method for a scanning electron microscope comprises a step of performing pattern matching of only an upper layer pattern between an image (101) in which a pattern consisting of plural layers is represented and a template (104) in which the upper layer pattern of the plural layer pattern is selectively represented, thereby identifying the position of the pattern consisting of the plural layers. Then, information about the upper layer pattern is subtracted from the image (101), thus extracting shape information (108) about the lower layer pattern. Consequently, stable positioning or selective information extraction on a certain layer is enabled regardless of the state of the depths of a pattern formed in three dimensions or of the charge state of a sample.

摘要翻译： 用于扫描电子显微镜的图案匹配方法包括在表示由多个层组成的图案的图像（101）和仅具有上层图案的模板（104）之间执行仅上层图案的图案匹配的步骤， 选择性地表示多层图案，由此识别由多层组成的图案的位置。 然后，从图像（101）中减去关于上层图案的信息，从而提取关于下层图案的形状信息（108）。 因此，无论在三维或样品的充电状态中形成的图案的深度的状态如何，都能够使特定层上的稳定定位或选择性信息提取。

公开(公告)号：US08019164B2

公开(公告)日：2011-09-13

申请号：US12010763

申请日：2008-01-29

申请人： Junichi Taguchi ,  Mitsuji Ikeda

发明人： Junichi Taguchi ,  Mitsuji Ikeda

IPC分类号： G06K9/68

CPC分类号： G06K9/6202 ,  G06K9/685

摘要： A similar image having a high correlation is selected through autocorrelation performs a template original image selected from an image photographed for a template, and a difference image between the similar image and template original image is formed. An image extracting a real difference is formed by removing noises and edges in unstable areas from the difference image. This image is added to the template original image to form a modified template. Template matching is performed by using the modified template as a template. The image extracting the real reference and added to the modified template functions to add an evaluation penalty to the similar image during matching evaluation to lower an evaluation value of the similar image so that a probability of erroneously recognizing the similar image as the image to be detected.

摘要翻译： 通过自相关选择具有高相关性的类似图像，执行从为模板拍摄的图像中选择的模板原始图像，并且形成相似图像和模板原始图像之间的差分图像。 通过从不同图像中去除不稳定区域中的噪声和边缘，形成提取真实差异的图像。 该图像被添加到模板原始图像以形成修改的模板。 通过使用修改的模板作为模板来执行模板匹配。 提取真实参考并添加到修改的模板的图像功能，以在匹配评估期间向相似图像添加评估代价以降低相似图像的评估值，使得错误地识别与要检测的图像相似的图像的概率 。