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公开(公告)号：US08120125B2
公开(公告)日：2012-02-21
申请号：US13012538
申请日：2011-01-24
申请人： Teruo Sasagawa , SuryaPrakash Ganti , Mark W. Miles , Clarence Chui , Manish Kothari , Ming-Hau Tung
发明人： Teruo Sasagawa , SuryaPrakash Ganti , Mark W. Miles , Clarence Chui , Manish Kothari , Ming-Hau Tung
IPC分类号： H01L29/82
CPC分类号： G02B26/001 , B81B3/007 , B81B2201/047 , B81B2203/0307 , B81B2203/053
摘要： Embodiments of MEMS devices comprise a conductive movable layer spaced apart from a conductive fixed layer by a gap, and supported by rigid support structures, or rivets, overlying depressions in the conductive movable layer, or by posts underlying depressions in the conductive movable layer. In certain embodiments, portions of the rivet structures extend through the movable layer and contact underlying layers. In other embodiments, the material used to form the rigid support structures may also be used to passivate otherwise exposed electrical leads in electrical connection with the MEMS devices, protecting the electrical leads from damage or other interference.
摘要翻译： MEMS器件的实施例包括通过间隙与导电固定层间隔开的导电可移动层，并且由导电可移动层中的上凹部的刚性支撑结构或铆钉支撑，或由导电可移动层中的凹陷下方的柱支撑。 在某些实施例中，铆钉结构的部分延伸穿过可移动层并接触下面的层。 在其他实施例中，用于形成刚性支撑结构的材料也可以用于钝化与MEMS装置电连接的其它暴露的电引线，保护电引线免受损坏或其他干扰。
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公开(公告)号：US08094363B2
公开(公告)日：2012-01-10
申请号：US12544580
申请日：2009-08-20
申请人： Teruo Sasagawa , Lior Kogut , Ming-Hau Tung
发明人： Teruo Sasagawa , Lior Kogut , Ming-Hau Tung
CPC分类号： G02B26/001 , H01L27/142 , H01L31/072 , H01L31/0725 , Y02E10/50
摘要： Embodiments of the present invention relate to interferometric display devices comprising an interferometric modulator and a solar cell and methods of making thereof. In some embodiments, the solar cell is configured to provide energy to the interferometric modulator. The solar cell and the interferometric modulator may be formed above the same substrate. A layer of the solar cell may be shared with a layer of the interferometric modulator.
摘要翻译： 本发明的实施例涉及包括干涉式调制器和太阳能电池的干涉式显示装置及其制造方法。 在一些实施例中，太阳能电池被配置为向干涉式调制器提供能量。 太阳能电池和干涉式调制器可以形成在同一衬底上方。 太阳能电池的一层可以与干涉式调制器的一层共享。
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53.发明申请ELECTROMECHANICAL DEVICE WITH OPTICAL FUNCTION SEPARATED FROM MECHANICAL AND ELECTRICAL FUNCTION 失效具有从机械和电气功能分离的光学功能的机电装置公开(公告)号：US20110188109A1
公开(公告)日：2011-08-04
申请号：US13086113
申请日：2011-04-13
申请人： Clarence Chui , William Cummings , Brian Gally , Lior Kogut , Ming-Hau Tung , Yeh-Jiun Tung , Chih-Wei Chiang , Denis Endisch
发明人： Clarence Chui , William Cummings , Brian Gally , Lior Kogut , Ming-Hau Tung , Yeh-Jiun Tung , Chih-Wei Chiang , Denis Endisch
IPC分类号： G02B26/00
CPC分类号： G02B26/001 , B81B3/0051 , B81B2201/047 , G02B26/023 , G02B26/08 , G02F1/01 , G02F1/0128 , G02F1/133621 , G02F1/29 , G09G3/3466 , G09G3/3696 , Y10T29/42
摘要： A microelectromechanical (MEMS) device includes a substrate, a movable element over the substrate, and an actuation electrode above the movable element. The movable element includes a deformable layer and a reflective element. The deformable layer is spaced from the reflective element.
摘要翻译： 微机电（MEMS）装置包括衬底，在衬底上方的可移动元件以及可移动元件上方的致动电极。 可移动元件包括可变形层和反射元件。 可变形层与反射元件间隔开。
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公开(公告)号：US07933475B2
公开(公告)日：2011-04-26
申请号：US12544184
申请日：2009-08-19
CPC分类号： G02B26/001
摘要： Methods and apparatus for providing lighting in a display are provided. In one embodiment, a microelectromechanical system (MEMS) is provided that includes a transparent substrate and a plurality of interferometric modulators. The interferometric modulators include an optical stack coupled to the transparent substrate, a reflective layer over the optical stack, and one or more posts to support the reflective layer and to provide a path for light from a backlight for lighting the display.
摘要翻译： 提供了用于在显示器中提供照明的方法和装置。 在一个实施例中，提供了包括透明基板和多个干涉式调制器的微机电系统（MEMS）。 干涉式调制器包括耦合到透明衬底的光学叠层，光学叠层上的反射层，以及支撑反射层的一个或多个柱，以及为来自背光源的光提供用于点亮显示器的路径。
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55.发明授权Microelectromechanical device and method utilizing conducting layers separated by stops 失效微机电装置和方法利用通过停止分隔的导电层公开(公告)号：US07742220B2
公开(公告)日：2010-06-22
申请号：US11692734
申请日：2007-03-28
申请人： Lior Kogut , Ming-Hau Tung
发明人： Lior Kogut , Ming-Hau Tung
IPC分类号： G02B26/00
CPC分类号： B81B3/001 , B81B2201/047 , G02B26/001 , G02B26/0841 , Y10T29/49002
摘要： A microelectromechanical system (MEMS) device includes a reflective element that includes at least one stop member. The device also includes an electrode and an aperture that extends at least partially through the electrode. The aperture has a boundary. The device has an electrically nonconductive surface within the aperture or on a portion of the boundary of the aperture. A support structure separates the reflective element from the electrode. The reflective element can be moved between a first position and a second position. The stop member is spaced from the electrically nonconductive surface when the reflective element is in the first position. A portion of the stop member is in contact with the electrically nonconductive surface when the reflective element is in the second position. The reflective element and the electrode are electrically isolated from each other when the reflective element is in the second position.
摘要翻译： 微机电系统（MEMS）装置包括包括至少一个止动构件的反射元件。 该装置还包括至少部分延伸穿过电极的电极和孔。 光圈有一个边界。 该装置在孔的内部或孔的边界的一部分上具有非导电表面。 支撑结构将反射元件与电极分开。 反射元件可以在第一位置和第二位置之间移动。 当反射元件处于第一位置时，止动件与非导电表面间隔开。 当反射元件处于第二位置时，止动构件的一部分与非导电表面接触。 当反射元件处于第二位置时，反射元件和电极彼此电隔离。
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公开(公告)号：US07719747B2
公开(公告)日：2010-05-18
申请号：US12036958
申请日：2008-02-25
CPC分类号： G02B26/001
摘要： An interferometric modulator includes a post structure comprising an optical element. In a preferred embodiment, the optical element in the post structure is a reflective element, e.g., a mirror. In another embodiment, the optical element in the post structure is an etalon, e.g., a dark etalon. The optical element in the post structure may decrease the amount of light that would otherwise be retroreflected from the post structure. In various embodiments, the optical element in the post structure increases the brightness of the interferometric modulator by redirecting light into the interferometric cavity. For example, in certain embodiments, the optical element in the post structure increases the backlighting of the interferometric modulator.
摘要翻译： 干涉式调制器包括包括光学元件的柱结构。 在优选实施例中，柱结构中的光学元件是反射元件，例如反射镜。 在另一个实施例中，柱结构中的光学元件是标准具，例如黑色标准具。 柱结构中的光学元件可以减少否则将从柱结构回射的光的量。 在各种实施例中，后结构中的光学元件通过将光重定向到干涉式空腔来增加干涉式调制器的亮度。 例如，在某些实施例中，后结构中的光学元件增加了干涉式调制器的背光。
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公开(公告)号：US07715079B2
公开(公告)日：2010-05-11
申请号：US11952873
申请日：2007-12-07
申请人： Lior Kogut , Ming-Hau Tung , Yeh-Jiun Tung
发明人： Lior Kogut , Ming-Hau Tung , Yeh-Jiun Tung
IPC分类号： G02B26/08
CPC分类号： G02B26/001 , B81B3/0021 , B81B2201/042
摘要： MEMS devices such as interferometric modulators are described having movable layers that are mechanically isolated. The movable layers are electrically attractable such that they can be selectively moved between a top and bottom electrode through application of a voltage. In interferometric modulators, the movable layers are reflective such that an optically resonant cavity is formed between the layer and a partially reflective layer, thereby providing a display pixel that can be turned on or off depending on the distance between the reflective layers in the resonant cavity.
摘要翻译： 描述了诸如干涉式调制器的MEMS器件具有机械隔离的可移动层。 可移动层是电吸引的，使得它们可以通过施加电压而选择性地在顶部和底部电极之间移动。 在干涉式调制器中，可移动层是反射性的，使得在该层和部分反射层之间形成光学谐振腔，从而提供可根据谐振腔中的反射层之间的距离而导通或截止的显示像素 。
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58.发明授权Methods for etching layers within a MEMS device to achieve a tapered edge 失效用于蚀刻MEMS器件内的层以实现锥形边缘的方法公开(公告)号：US07660058B2
公开(公告)日：2010-02-09
申请号：US11506770
申请日：2006-08-18
申请人： Chengbin Qiu , Teruo Sasagawa , Ming-Hau Tung , Chun-Ming Wang , Stephen Zee
发明人： Chengbin Qiu , Teruo Sasagawa , Ming-Hau Tung , Chun-Ming Wang , Stephen Zee
IPC分类号： H01L21/302 , B44C1/22
CPC分类号： G02B26/0841 , B81B3/0072 , B81B2201/047 , B81B2203/0163 , B81B2203/019 , B81B2203/0307 , B81B2203/053 , B81C1/00142 , B81C1/00666 , B81C2201/0167 , G02B26/001 , Y10S359/90
摘要： Certain MEMS devices include layers patterned to have tapered edges. One method for forming layers having tapered edges includes the use of an etch leading layer. Another method for forming layers having tapered edges includes the deposition of a layer in which the upper portion is etchable at a faster rate than the lower portion. Another method for forming layers having tapered edges includes the use of multiple iterative etches. Another method for forming layers having tapered edges includes the use of a liftoff mask layer having an aperture including a negative angle, such that a layer can be deposited over the liftoff mask layer and the mask layer removed, leaving a structure having tapered edges.
摘要翻译： 某些MEMS器件包括被图案化以具有渐缩边缘的层。 用于形成具有渐缩边缘的层的一种方法包括使用蚀刻引导层。 用于形成具有锥形边缘的层的另一种方法包括沉积一层，其中上部可以比下部更快的速度进行刻蚀。 用于形成具有渐缩边缘的层的另一种方法包括使用多个迭代蚀刻。 用于形成具有锥形边缘的层的另一种方法包括使用具有包括负角度的孔的剥离掩模层，使得可以在剥离掩模层上沉积一层，并且去除掩模层，留下具有渐缩边缘的结构。
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公开(公告)号：US20090308452A1
公开(公告)日：2009-12-17
申请号：US12544580
申请日：2009-08-20
申请人： Teruo Sasagawa , Lior Kogut , Ming-Hau Tung
发明人： Teruo Sasagawa , Lior Kogut , Ming-Hau Tung
CPC分类号： G02B26/001 , H01L27/142 , H01L31/072 , H01L31/0725 , Y02E10/50
摘要： Embodiments of the present invention relate to interferometric display devices comprising an interferometric modulator and a solar cell and methods of making thereof. In some embodiments, the solar cell is configured to provide energy to the interferometric modulator. The solar cell and the interferometric modulator may be formed above the same substrate. A layer of the solar cell may be shared with a layer of the interferometric modulator.
摘要翻译： 本发明的实施例涉及包括干涉式调制器和太阳能电池的干涉式显示装置及其制造方法。 在一些实施例中，太阳能电池被配置为向干涉式调制器提供能量。 太阳能电池和干涉式调制器可以形成在同一衬底上方。 太阳能电池的一层可以与干涉式调制器的一层共享。
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60.发明授权Method and apparatus for providing back-lighting in an interferometric modulator display device 失效在干涉式调制器显示装置中提供背光的方法和装置公开(公告)号：US07603001B2
公开(公告)日：2009-10-13
申请号：US11357702
申请日：2006-02-17
CPC分类号： G02B26/001
摘要： Methods and apparatus for providing light in an interferometric modulator device are provided. In one embodiment, a microelectromechanical system (MEMS) is provided that includes a transparent substrate and a plurality of interferometric modulators. The interferometric modulators include an optical stack coupled to the transparent substrate, a reflective layer over the optical stack, and one or more posts to support the reflective and to provide a path for light from a backlight for lighting the interferometric modulators.
摘要翻译： 提供了用于在干涉式调制器装置中提供光的方法和装置。 在一个实施例中，提供了包括透明基板和多个干涉式调制器的微机电系统（MEMS）。 干涉式调制器包括耦合到透明衬底的光学叠层，光学叠层上的反射层，以及支撑反射层的一个或多个柱，以及为来自背光源的光提供用于点亮干涉式调制器的路径。
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