Process for smoothing a rough surface on a substrate by dry etching
    53.
    发明授权
    Process for smoothing a rough surface on a substrate by dry etching 失效
    通过干法蚀刻来平滑基板上粗糙表面的工艺

    公开(公告)号:US06858537B2

    公开(公告)日:2005-02-22

    申请号:US10218055

    申请日:2002-08-12

    申请人: Peter D. Brewer

    发明人: Peter D. Brewer

    摘要: A process for smoothing a rough surface on a substrate, such as a diamond or silicon carbide substrate, said rough surface including protruding peak portions separated by valleys, said smoothing comprising (a) depositing a coating on said rough surface so as to adhere to and to fill at least the valleys of said rough surface, (b) mechanically polishing the thus coated rough surface so as to achieve a smooth coated surface, and (c) dry etching the smooth coated surface, such as by PACE, so as to remove the remaining coating and at least protruding peak portions of the substrate so as to achieve a smooth surface on the substrate, wherein in the mechanical polishing step (b) the coating is removed at a rate of reduction of thickness greater than the rate at which the substrate is subject to reduction of thickness by the mechanical polishing, and in the dry etching step (c) the coating and substrate are removed at substantially the same or a similar rate of reduction of thickness, and, if necessary, steps (a), (b) and (c) are repeated, or the coating and substrate are removed in separate, alternate preferential etching steps.

    摘要翻译: 一种用于平滑诸如金刚石或碳化硅衬底的衬底上的粗糙表面的工艺,所述粗糙表面包括由谷分开的突出的峰部分,所述平滑化包括(a)在所述粗糙表面上沉积涂层以粘附到 以至少填充所述粗糙表面的谷部,(b)机械抛光由此涂覆的粗糙表面,以便实现光滑的涂覆表面,和(c)例如通过PACE干燥蚀刻光滑涂覆表面,以便去除 剩余的涂层和至少突出的基板的峰部分,以便在基板上实现光滑的表面,其中在机械抛光步骤(b)中,以大于其的 基板通过机械抛光进行厚度减小,在干法蚀刻步骤(c)中,以基本上相同或相似的厚度减小速率除去涂层和基板,如果 必要时,重复步骤(a),(b)和(c),或者在单独的交替优先蚀刻步骤中除去涂层和基底。

    Millimeter wave imaging array
    54.
    发明授权
    Millimeter wave imaging array 失效
    毫米波成像阵列

    公开(公告)号:US06828556B2

    公开(公告)日:2004-12-07

    申请号:US10256335

    申请日:2002-09-26

    IPC分类号: H01Q2100

    CPC分类号: H01L27/14649

    摘要: A focal plane array for millimeter wave imaging comprising a three dimensional stack of antenna elements and radiometer microwave monolithic integrated circuits (MMICs) embedded in polymer dielectric layers built on top of a silicon substrate. Each radiometer MMIC and antenna element comprise a radiometer pixel. The silicon substrate contains integrated circuits to collect and process the signals from each radiometer pixel and generate a full-frame video signal. The array can be fabricated on a single silicon wafer or can be constructed from structures fabricated on multiple silicon wafers.

    摘要翻译: 一种用于毫米波成像的焦平面阵列,包括天线元件的三维叠层和嵌入在硅衬底顶部的聚合物电介质层中的辐射计微波单片集成电路(MMIC)。 每个辐射计MMIC和天线元件包括辐射计像素。 硅衬底包含集成电路以收集和处理来自每个辐射计像素的信号并产生全帧视频信号。 阵列可以在单个硅晶片上制造,或者可以由在多个硅晶片上制造的结构构造。