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公开(公告)号:US20230262972A1
公开(公告)日:2023-08-17
申请号:US18190253
申请日:2023-03-27
Applicant: Samsung Electronics Co., Ltd.
Inventor: Sangyoun JO , Kohji Kanamori , Kwangyoung Jung , Jeehoon Han
IPC: H10B41/27 , H01L23/528 , H01L23/522 , H10B41/10 , H10B41/40 , H10B43/10 , H10B43/27 , H10B43/40
CPC classification number: H10B41/27 , H01L23/528 , H01L23/5226 , H10B41/10 , H10B41/40 , H10B43/10 , H10B43/27 , H10B43/40
Abstract: A semiconductor device includes a substrate including a first plate portion and a second plate portion, a stack structure including interlayer insulating layers and gate electrodes alternately stacked on the substrate, a first block separation structure on the first plate portion and a second block separation structure on the first plate portion. Each of the first and second block separation structures includes first separation regions, a cell array separation structure including a second separation region connected to the first separation regions and channel structures penetrating the stack structure, wherein the stack structure includes first stack structures separated by the first separation regions of the first block separation structure and extending in the first direction, second stack structures separated by the first separation regions of the second block separation structure, and at least one third stack structure separated from the first and second stack structures by the cell array separation structure.
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公开(公告)号:US11563023B2
公开(公告)日:2023-01-24
申请号:US16792256
申请日:2020-02-16
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Jongseon Ahn , Youngjin Kwon , Jeehoon Han
IPC: H01L27/11582 , H01L27/1157 , H01L27/11565 , H01L29/423
Abstract: A semiconductor device includes a channel structure arranged on a substrate and extending in a first direction perpendicular to a top surface of the substrate, the channel structure including a channel layer and a gate insulating layer; a plurality of insulating layers arranged on the substrate and surrounding the channel structure, the plurality of insulating layers spaced apart from each other in the first direction; a plurality of first gate electrodes surrounding the channel structure; and a plurality of second gate electrodes surrounding the channel structure. Between adjacent insulating layers from among the plurality of insulating layers are arranged a first gate electrode from among the plurality of first gate electrodes spaced apart along the first direction from a second gate electrode from among the plurality of second gate electrodes.
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公开(公告)号:US11552099B2
公开(公告)日:2023-01-10
申请号:US16928306
申请日:2020-07-14
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Kyungdong Kim , Younghwan Son , Jeehoon Han
IPC: H01L27/11582 , H01L27/11519 , H01L27/11526 , H01L27/11565 , H01L27/11573 , H01L27/11556
Abstract: A vertical-type nonvolatile memory device including: a substrate including a cell array area and an extension area, the extension area extending in a first direction from the cell array area and including contacts; a channel structure extending in a vertical direction from the substrate; a first stack structure including gate electrode layers and interlayer insulating layers alternately stacked along sidewalls of the channel structure; a plurality of division areas extending in the first direction and dividing the cell array area and the extension area in a second direction perpendicular to the first direction; in the extension area, two insulating layer dams are arranged between two division areas adjacent to each other; a second stack structure including sacrificial layers and interlayer insulating layers alternately stacked on the substrate between the two insulating layer dams; and an electrode pad connected to a first gate electrode layer in the extension area.
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公开(公告)号:US11515322B2
公开(公告)日:2022-11-29
申请号:US16890500
申请日:2020-06-02
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Seogoo Kang , Daehyun Jang , Jaeryong Sim , Jongseon Ahn , Jeehoon Han
IPC: H01L27/11582 , H01L27/11575 , H01L27/11548 , H01L27/11556
Abstract: A semiconductor device includes a peripheral circuit region including a first substrate and circuit elements on the first substrate; and a memory cell region including a second substrate on an upper portion of the first substrate, gate electrodes spaced apart from each other and vertically stacked on the second substrate, channel structures extending vertically through the gate electrodes to the second substrate, first separation regions penetrating through the gate electrodes between the channel structures and extending in one direction, and a second separation region extending vertically to penetrate through the second substrate from above and having a bent portion due to a change in width.
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公开(公告)号:US20210391260A1
公开(公告)日:2021-12-16
申请号:US17459406
申请日:2021-08-27
Applicant: Samsung Electronics Co., Ltd.
Inventor: Sung-Hun Lee , Seokjung Yun , Chang-Sup Lee , Seong Soon Cho , Jeehoon Han
IPC: H01L23/528 , H01L27/11578 , H01L27/11551 , H01L27/11556 , H01L27/11565 , H01L27/11575 , H01L21/768 , H01L23/522 , H01L27/1157 , H01L27/11582
Abstract: A three-dimensional (3D) semiconductor device includes a stack structure including first and second stacks stacked on a substrate. Each of the first and second stacks includes a first electrode and a second electrode on the first electrode. A sidewall of the second electrode of the first stack is horizontally spaced apart from a sidewall of the second electrode of the second stack by a first distance. A sidewall of the first electrode is horizontally spaced apart from the sidewall of the second electrode by a second distance in each of the first and second stacks. The second distance is smaller than a half of the first distance.
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公开(公告)号:US20210384220A1
公开(公告)日:2021-12-09
申请号:US17406245
申请日:2021-08-19
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: JONGSEON AHN , Jaeryong Sim , Giyong Chung , Jeehoon Han
IPC: H01L27/11582 , H01L27/11524 , H01L27/11556 , H01L27/11529 , H01L23/60 , H01L27/11573 , H01L29/06 , H01L21/311 , H01L27/1157
Abstract: A three-dimensional (3D) semiconductor memory device including; first and second semiconductor layers horizontally spaced apart from each other; a buried insulating layer between the first and second semiconductor layers; a first cell array structure disposed on the first semiconductor layer, and a second cell array structure disposed on the second semiconductor layer; and an isolation structure disposed on the buried insulating layer between the first and second cell array structures, wherein the first cell array structure includes: an electrode structure including electrodes, which are stacked in a direction perpendicular to a top surface of the first semiconductor layer; and a first source structure disposed between the first semiconductor layer and the electrode structure, the first source structure is extended onto the buried insulating layer, and the isolation structure is between the first source structure of the first cell array structure and a second source structure of the second cell array structure.
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公开(公告)号:US11107765B2
公开(公告)日:2021-08-31
申请号:US16853850
申请日:2020-04-21
Applicant: Samsung Electronics Co., Ltd.
Inventor: Sung-Hun Lee , Seokjung Yun , Chang-Sup Lee , Seong Soon Cho , Jeehoon Han
IPC: H01L23/528 , H01L27/11578 , H01L27/11551 , H01L27/11556 , H01L27/11565 , H01L27/11575 , H01L21/768 , H01L23/522 , H01L27/1157 , H01L27/11582
Abstract: A three-dimensional (3D) semiconductor device includes a stack structure including first and second stacks stacked on a substrate. Each of the first and second stacks includes a first electrode and a second electrode on the first electrode. A sidewall of the second electrode of the first stack is horizontally spaced apart from a sidewall of the second electrode of the second stack by a first distance. A sidewall of the first electrode is horizontally spaced apart from the sidewall of the second electrode by a second distance in each of the first and second stacks. The second distance is smaller than a half of the first distance.
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公开(公告)号:US10211154B2
公开(公告)日:2019-02-19
申请号:US15350305
申请日:2016-11-14
Applicant: Samsung Electronics Co., Ltd.
Inventor: Sung-Hun Lee , Seokjung Yun , Chang-Sup Lee , Seong Soon Cho , Jeehoon Han
IPC: H01L23/528 , H01L23/522 , H01L27/115 , H01L27/11578 , H01L27/11551 , H01L27/11556 , H01L21/768 , H01L27/1157 , H01L27/11582 , H01L27/11565 , H01L27/11575
Abstract: A three-dimensional (3D) semiconductor device includes a stack structure including first and second stacks stacked on a substrate. Each of the first and second stacks includes a first electrode and a second electrode on the first electrode. A sidewall of the second electrode of the first stack is horizontally spaced apart from a sidewall of the second electrode of the second stack by a first distance. A sidewall of the first electrode is horizontally spaced apart from the sidewall of the second electrode by a second distance in each of the first and second stacks. The second distance is smaller than a half of the first distance.
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公开(公告)号:US20250071994A1
公开(公告)日:2025-02-27
申请号:US18767830
申请日:2024-07-09
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Kohji Kanamori , Seogoo Kang , Kyungdong Kim , Seunghyun Lee , Junghoon Jun , Jeehoon Han , Taeyoon Hong
Abstract: A semiconductor device includes a gate electrode structure, a memory channel structure, and a first contact plug. The gate electrode structure is disposed on a substrate, and includes gate electrodes spaced apart from each other in a first direction substantially perpendicular to an upper surface of the substrate. Each of the gate electrode extends in a second direction substantially parallel to the upper surface of the substrate. The memory channel structure extends through the gate electrode structure on the substrate. The first contact plug extends in the first direction on the substrate through and contacting a corresponding one of the gate electrodes, and a portion of a sidewall of the first contact plug at substantially the same level as the corresponding one of the gate electrodes is not surrounded by the corresponding one of the gate electrodes.
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公开(公告)号:US12219768B2
公开(公告)日:2025-02-04
申请号:US18613389
申请日:2024-03-22
Applicant: Samsung Electronics Co., Ltd.
Inventor: Younghwan Son , Jeehoon Han
IPC: H10B43/27 , H01L29/417 , H01L29/423 , H10B41/20 , H10B43/20 , H10B43/30 , H10B51/20 , H10K19/00
Abstract: Three-dimensional (3D) semiconductor memory devices are provided. A 3D semiconductor memory device includes an electrode structure on a substrate. The electrode structure includes gate electrodes stacked on the substrate. The gate electrodes include electrode pad regions. The 3D semiconductor memory device includes a dummy vertical structure penetrating one of the electrode pad regions. The dummy vertical structure includes a dummy vertical semiconductor pattern and a contact pattern extending from a portion of the dummy vertical semiconductor pattern toward the substrate.
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