Microwave plasma processing method and apparatus
    51.
    发明授权
    Microwave plasma processing method and apparatus 失效
    微波等离子体处理方法及装置

    公开(公告)号:US5804033A

    公开(公告)日:1998-09-08

    申请号:US29241

    申请日:1993-03-10

    摘要: The present invention relates to a microwave plasma processing method and apparatus. According to the present invention, the microwaves are introduced into the electric discharge means in correspondence with only the traveling direction thereof, whereby uniformity in a plasma density distribution corresponding to the surface to-be-processed of the sample can be sharply enhanced, so that the sample processed by utilizing such plasma can attain an enhanced processing homogeneity within the surface to be processed. In addition, homogeneity and stability of the plasma are improved by inserting a cavity resonator between the microwave generator and plasma processing (plasma generating) chamber, and coupling the cavity resonator and plasma processing chamber such that microwaves substantially only of a desired mode (e.g., TE.sub.11) pass into the plasma processing chamber. Such coupling to provide microwaves substantially only of circular TE.sub.11 mode can be achieved by providing the coupling such that a ratio of diameter of the discharge block, where the plasma is generated, to the diameter of the cavity resonator, is 0.345.

    摘要翻译: 本发明涉及一种微波等离子体处理方法和装置。 根据本发明,微波仅与其行进方向相对应地被引入到放电装置中,从而可以显着提高对应于样品待处理表面的等离子体密度分布的均匀性,使得 通过利用这种等离子体处理的样品可以在被处理表面内获得增强的处理均匀性。 此外,通过在微波发生器和等离子体处理(等离子体产生)室之间插入空腔谐振器,并耦合空腔谐振器和等离子体处理室,使得微波基本上仅仅是期望的模式(例如, TE11)进入等离子体处理室。 通过提供耦合使得产生等离子体的放电块的直径与腔谐振器的直径的比率为0.345,可以实现基本上仅提供圆形TE11模式的微波的这种耦合。

    Microwave plasma processing method and apparatus
    52.
    发明授权
    Microwave plasma processing method and apparatus 失效
    微波等离子体处理方法及装置

    公开(公告)号:US5785807A

    公开(公告)日:1998-07-28

    申请号:US765834

    申请日:1991-09-26

    IPC分类号: H01J37/32 H01L21/302

    摘要: The present invention relates to a microwave plasma processing method and apparatus. More particularly, it relates to a microwave plasma processing method and apparatus of the type wherein a waveguide section includes electric discharge means isolated from a waveguide for the propagation of microwaves and having a plasma generation region therein, which method and apparatus are well suited for subjecting samples, such as semiconductor device substrates, to an etching process, a film forming process, etc. According to the present invention, the microwaves are introduced into the electric discharge means in correspondence with only the traveling direction thereof, whereby uniformity in a plasma density distribution corresponding to the surface to-be-processed of the sample can be sharply enhanced, so that the sample processed by utilizing such plasma can attain an enhanced processing homogeneity within the surface to-be-processed.

    摘要翻译: 本发明涉及一种微波等离子体处理方法和装置。 更具体地说,本发明涉及一种微波等离子体处理方法和装置,其中波导部分包括从波导隔离用于微波传播并在其中具有等离子体产生区域的放电装置,该方法和装置非常适合于 样品,例如半导体器件衬底,蚀刻工艺,成膜工艺等。根据本发明,微波仅与其行进方向相对应地被引入放电装置,从而使等离子体密度 可以大大提高与样品表面对应的分布,使得利用这种等离子体处理的样品能够在待处理的表面内获得增强的加工均匀性。

    Magnetic disk cartridge
    53.
    发明授权
    Magnetic disk cartridge 失效
    磁盘盒

    公开(公告)号:US5761016A

    公开(公告)日:1998-06-02

    申请号:US708304

    申请日:1996-09-04

    申请人: Seiichi Watanabe

    发明人: Seiichi Watanabe

    IPC分类号: G11B23/00 G11B23/03

    CPC分类号: G11B23/0035 G11B23/0312

    摘要: A magnetic disk cartridge includes a magnetic disk, a cassette shell encasing the magnetic disk, and a disk-shaped center core which supports the magnetic disk and is adapted for rotation by a turntable equipped with an annular chucking magnet. A magnetic head access opening is formed in one side surface of the cassette shell, a center portion of the center core is formed with a center hole for engagement by a center locating pin of the turntable, and a peripheral portion of the center core is formed with a step-like annular chucking region whose level differs from that at the mouth of the center hole. The chucking region is adapted to make surface contact with the annular chucking magnet. The structure enables the chucking magnet to strongly attract and reliably secure the center core, thereby preventing slippage during high-speed rotation, and to prevent rotational vibration owing to unbalanced loading.

    摘要翻译: 磁盘盒包括一个磁盘,一个装在磁盘上的磁带盒,以及一个盘形的中心磁芯,它支持磁盘并适用于旋转装置,该旋转台装有环形卡盘磁铁。 在磁带盒外壳的一个侧表面上形成有一个磁头存取开口,中心芯的中心部分形成有一个中心孔,用于与转台中心定位销接合,中心芯的周边部分形成 具有阶梯状环形夹持区域,其水平位置不同于中心孔口。 夹紧区域适于与环形卡盘磁体进行表面接触。 该结构使得夹紧磁体能够强力地吸引并可靠地固定中心芯,从而防止高速旋转期间的滑动,并且防止由于不平衡负载引起的旋转振动。

    Magnetic head device having increased dimensional accuracy and improved
magnetic characteristics
    54.
    发明授权
    Magnetic head device having increased dimensional accuracy and improved magnetic characteristics 失效
    具有增加的尺寸精度和改善的磁特性的磁头装置

    公开(公告)号:US5731938A

    公开(公告)日:1998-03-24

    申请号:US619020

    申请日:1996-03-20

    摘要: A magnetic head device comprising: a magnetic circuit which includes a head core unit, a back core and a coil;the head core unit including a first core made from a magnetic material and a second core made from a magnetic material, and forming a magnetic gap between the first core and the second core; the back core made from a magnetic material and jointed to the first core and the second core so as to form back gaps; the coil arranged on the first core; a first holder which is bonded to the first core and the second core at two locations of the side of the magnetic gap and the side of the back gaps so as to hold the magnetic circuit; and a second holder which is bonded to the first core and the second core at the magnetic gap side so as to hold the magnetic circuit, and which is substantially of a square pillar.

    摘要翻译: 一种磁头装置,包括:磁路,其包括磁头芯单元,后芯和线圈; 所述头芯单元包括由磁性材料制成的第一芯和由磁性材料制成的第二芯,并且在所述第一芯和所述第二芯之间形成磁隙; 所述后芯由磁性材料制成并且接合到所述第一芯和所述第二芯以形成背隙; 所述线圈布置在所述第一芯上; 第一保持器,其在所述磁隙的一侧的两个位置和所述后部间隙的一侧的两个位置处接合到所述第一芯和所述第二芯,以便保持所述磁路; 以及第二保持器,其在磁隙侧接合到第一芯和第二芯,以便保持磁路,并且基本上是方柱。

    Reinforcement for flexible printed circuit board and reinforced flexible
printed circuit board
    55.
    发明授权
    Reinforcement for flexible printed circuit board and reinforced flexible printed circuit board 失效
    柔性印刷电路板和增强柔性印刷电路板的加固

    公开(公告)号:US5583320A

    公开(公告)日:1996-12-10

    申请号:US412452

    申请日:1995-03-29

    摘要: A reinforcement for a flexible printed circuit board, which can sufficiently prevent the flexible printed circuit board thus reinforced from being warped when heated during the assembly process of electronic components or other procedures. The reinforcement according to the present invention is used to adhere to a flexible printed circuit board 1. The reinforcement according to the present invention comprises an internal material 21 having a bending neutral surface at the center of the thickness thereof, and an external material 22 having the same Young's modulus as that of an insulating substrate 11 of the flexible printed circuit board 1, bonded to one side of the internal material 21. The other side of the internal material 21 acts as an adhesive surface to the flexible printed circuit board 1.

    摘要翻译: 用于柔性印刷电路板的加强件,其可以充分防止在电子部件或其它过程的组装过程中加热时由此增强的柔性印刷电路板翘曲。 根据本发明的加强件用于粘附到柔性印刷电路板1.根据本发明的增强件包括内部材料21,其内部材料21具有在其厚度中心的弯曲中性表面,以及外部材料22,其具有 与柔性印刷电路板1的绝缘基板11的杨氏模量相同,粘合到内部材料21的一侧。内部材料21的另一侧用作柔性印刷电路板1的粘合表面。

    Method for molding plastic shutter for magnetic disk cartridge
    56.
    发明授权
    Method for molding plastic shutter for magnetic disk cartridge 失效
    用于成型用于磁盘盒的塑料快门的方法

    公开(公告)号:US5472657A

    公开(公告)日:1995-12-05

    申请号:US281538

    申请日:1994-07-28

    CPC分类号: B29C45/40

    摘要: In a method for injection molding a plastic shutter for a magnetic disk cartridge, the shutter having windows corresponding to an opening formed in a magnetic disk cartridge and being substantially U-shaped in section, the diameter of an injection cylinder for injecting molten resin for forming the shutter is determined according to the following equation:D.sup.2 =A.times.C.times.M / .pi.where D is the diameter (mm) of the injection cylinder, C is the number of the plastic shutters molded simultaneously with one metal mold, M is the volume (cm.sup.3) of the plastic shutter, and A is the cylinder coefficient of the injection cylinder and is limited as follows:130.ltoreq.A.ltoreq.510.The inventive method is considerably stable, being free from the difficulties that short shot occurs with the metal mold, and the resultant shutter is deformed near the gate of the metal mold, or bent in its entirety.

    摘要翻译: 在用于注射成型用于磁盘盒的塑料闸板的方法中,闸门具有与形成在磁盘盒中的开口相对应的窗口,其截面基本上为U形,用于注入用于形成的熔融树脂的注射缸的直径 根据以下公式确定快门:D2 = AxCxM / pi其中D是注射缸的直径(mm),C是与一个金属模具同时模制的塑料百叶窗的数量,M是体积(cm3) ,A是注射缸的气缸系数,并且限制如下:130

    Method and apparatus for molding a magnetic disk cartridge shutter
    57.
    发明授权
    Method and apparatus for molding a magnetic disk cartridge shutter 失效
    用于成型磁盘盒快门的方法和装置

    公开(公告)号:US5389329A

    公开(公告)日:1995-02-14

    申请号:US126655

    申请日:1993-09-27

    摘要: A molding method and a mold for molding a plastic shutter, wherein a plate-like member with a free end is extended into a molding cavity to define an injection together with at least two opposed planar plates. A thrust member, which is movable in the direction of thickness of the plate-like member and which applies a thrust force to the plate-like member, is provided close to the free end of the plate-like member. In a state where the amount of movement of the thrust member is adjusted to within a predetermined range as viewed in the thickness direction of the plate-like member, on the basis of the position where the forward end of the thrust means comes in contact with the plate-like member, molten resin is injected into the injection space, thereby forming the plastic shutter.

    摘要翻译: 一种用于模制塑料快门的模制方法和模具,其中具有自由端的板状构件延伸到模制腔中以与至少两个相对的平面板一起限定注射。 在板状构件的自由端附近设置有能够在板状构件的厚度方向上移动并对板状构件施加推力的推动构件。 在推压构件的移动量被调整到在板状构件的厚度方向上看到的预定范围内的状态下,基于推力装置的前端与 板状构件,熔融树脂被注入到注入空间中,从而形成塑料快门。

    Steels which are useful in fabricating pressure vessels
    58.
    发明授权
    Steels which are useful in fabricating pressure vessels 失效
    可用于制造压力容器的钢

    公开(公告)号:US4375377A

    公开(公告)日:1983-03-01

    申请号:US237958

    申请日:1981-02-25

    IPC分类号: C21D1/28 C21D8/02

    CPC分类号: C21D1/28 C21D8/0263

    摘要: Chromium-molybdenum steels which have high strengths, good hydrogen attack resistivities, good high-temperature ductilities and high creep rupture strength, and which, when formed into steel plates, welded and given a high-temperature strain relief annealing treatment will acquire high resistivity to creep damage, comprises 0.11 to 0.17% of C, 0.50 to 1.20% of Si, 0.46 to 1.00% of Mn, 1.00 to 1.50% of Cr, 0.45 to 0.65% of Mo, 0.00015 to 0.0015% of B, 0.010 to 0.100% of Sol. Al and inevitably entrained impurities, the balance to make up 100% of Fe. Preferably the inevitable nitrogen and phosphorus impurities are kept below 0.0060% of N and 0.010% of P.

    摘要翻译: 具有高强度,良好的氢侵蚀电阻,良好的高温延展性和高蠕变断裂强度的铬钼钢,并且当形成钢板时,焊接并进行高温应变消除退火处理将获得高电阻率 蠕变损伤包括C的0.11〜0.17%,Si:0.50〜1.20%,Mn:0.46〜1.00%,Cr:1.00〜1.50%,Mo:0.45〜0.65%,B:0.00010〜0.115% 的Sol。 Al和不可避免的夹带杂质,余量弥补100%的Fe。 优选地,不可避免的氮和磷杂质保持在N的0.0060%和P.0.010%以下。

    Heavy thick high-strength casting having improved weldability and impact
properties
    59.
    发明授权
    Heavy thick high-strength casting having improved weldability and impact properties 失效
    具有改善焊接性和冲击性能的重型高强度铸件

    公开(公告)号:US4344801A

    公开(公告)日:1982-08-17

    申请号:US236312

    申请日:1981-02-20

    IPC分类号: C21D1/78 C21D9/00

    CPC分类号: C21D1/78

    摘要: A heavy thick steel casting having high mechanical strength with a tensile strength of 80 kg/mm.sup.2 or more, excellent impact properties with a vE.sub.O value of more than 8 kg-m/cm.sup.2 and improved weldability, and also a method of manufacturing the same.In the method, steel containing boron as an essential component and with a Ceq value corresponding to the maximum thickness of the product is cast. The casting is solidified in air, then heated to a temperature of 930.degree. to 1,050.degree. C. for one hour or more, followed by air cooling. Thereafter, the casting is quenched and tempered to thereby impart the casting with the desired characteristics.

    摘要翻译: 具有抗拉强度为80kg / mm 2以上的机械强度高的重型厚钢铸件,vEO值大于8kg-m / cm 2的优异的冲击性能和改善的可焊性,以及其制造方法。 在该方法中,铸造含有硼作为必需组分并且具有对应于产品的最大厚度的Ceq值的钢。 将该铸件在空气中固化,然后加热到930〜1050℃的温度1小时以上,然后冷却。 此后,将铸件淬火和回火,从而赋予铸件所需的特性。