公开(公告)号：US08124181B2

公开(公告)日：2012-02-28

申请号：US11907968

申请日：2007-10-18

申请人： Kazuhide Hasebe ,  Takehiko Fujita ,  Shigeru Nakajima ,  Jun Ogawa

发明人： Kazuhide Hasebe ,  Takehiko Fujita ,  Shigeru Nakajima ,  Jun Ogawa

IPC分类号： C23C16/40

CPC分类号： H01L21/67109 ,  H01L21/02238 ,  H01L21/02255 ,  H01L21/31662

摘要： An oxidation method includes supplying oxidizing and deoxidizing gases to a process field by spouting the gases in lateral directions respectively from first and second groups of gas spouting holes. Each group of holes is disposed adjacent to target substrates on one side of the process field and arrayed over a length corresponding to the process field in a vertical direction. Gases are exhausted through an exhaust port disposed opposite to the first and second groups of gas spouting holes with the process field interposed therebetween and present over a length corresponding to the process field in the vertical direction. This causes the gases to flow along the surfaces of the target substrates, thus forming gas flows parallel with the target substrates. The process field is heated by a heater disposed around the process container to generate oxygen radicals and hydroxyl group radicals within the process field.

摘要翻译： 氧化方法包括通过分别从第一和第二组气体喷射孔喷射气体在横向方向向工艺场提供氧化和脱氧气体。 每组孔与过程场一侧的目标衬底相邻设置，并且在垂直方向上排列在对应于过程场的长度上。 气体通过与第一和第二组气体喷射孔相对设置的排气口排出，其中过程场介于它们之间并且在垂直方向上存在超过对应于过程场的长度。 这使得气体沿着目标基板的表面流动，从而形成与目标基板平行的气体流。 工艺场由设置在加工容器周围的加热器加热，以在工艺场内产生氧自由基和羟基自由基。

公开(公告)号：US08109636B2

公开(公告)日：2012-02-07

申请号：US11806004

申请日：2007-05-29

申请人： Jun Ogawa

发明人： Jun Ogawa

IPC分类号： G03B21/14

CPC分类号： H04N9/317 ,  G02B27/0927 ,  G02B27/0988 ,  G02B27/0994 ,  G03B21/005

摘要： The invention provides an illumination optical system that guides light emitted from light source device 1 to DMD 2, the illumination optical system including: light tunnel 20 that uniformizes luminance distribution of light emitted from light source device 1; relay optical system 40 that guides light having uniformized illumination distribution to DMD 2; and shield board 30 disposed on an optical path between light tunnel 20 and relay optical system 40. Shield board 30 is smaller than outlet end face 22 of light tunnel 20 and at the same time has an opening of a shape similar to the image formation area on DMD 2, and is movable in a plane containing the opening.

摘要翻译： 本发明提供一种照明光学系统，其将从光源装置1发射的光引导到DMD2，所述照明光学系统包括使从光源装置1发射的光的亮度分布均匀化的光通道20; 将具有均匀照明分布的光引导到DMD 2的中继光学系统40; 以及设置在光通道20和中继光学系统40之间的光路上的屏蔽板30.屏蔽板30小于光通道20的出口端面22，并且同时具有与图像形成区域类似的形状的开口 在DMD 2上，并且可在包含开口的平面中移动。

公开(公告)号：US20100289200A1

公开(公告)日：2010-11-18

申请号：US12086481

申请日：2006-11-21

申请人： Satoshi Fukui ,  Jun Ogawa ,  Mitsugi Yamaguchi ,  Tetsuo Oka ,  Tomoe Sasahara ,  Shinsuke Miyazaki

发明人： Satoshi Fukui ,  Jun Ogawa ,  Mitsugi Yamaguchi ,  Tetsuo Oka ,  Tomoe Sasahara ,  Shinsuke Miyazaki

IPC分类号： B25B11/00

CPC分类号： H02K55/02 ,  F16C32/0438 ,  H02K49/108 ,  Y10T29/53961

摘要： Provided is a noncontact apparatus for performing rotating process to a subject to be processed, without contaminating environment in an airtight container. A spin head (1) is held on a holder (7) in an airtight container, a pinning force is generated between the spin head (1) and a Type-II superconductor (11), and the spin head 1 is floated by lifting the Type-II superconductor (11) by a lifting means (22). Then, rotating force generated by a noncontact rotating power transmitting body (18) arranged in the internal center of the Type-II superconductor (11) is subsequently generated on the side of the spin head (1) and the spin head (1) is rotated in conjunction with a driving motor (19).

摘要翻译： 本发明提供一种用于对待处理对象进行旋转处理而不污染气密容器中的环境的非接触式装置。 旋转头（1）被保持在密封容器中的保持器（7）上，在旋转头（1）和II型超导体（11）之间产生锁定力，并且旋转头1通过提升 II型超导体（11）通过提升装置（22）。 然后，随后在旋转头（1）的一侧产生由配置在II型超导体（11）的内部中心的非接触旋转动力传递体（18）产生的旋转力，旋转头（1）为 与驱动马达（19）一起旋转。

公开(公告)号：US07758920B2

公开(公告)日：2010-07-20

申请号：US11496436

申请日：2006-08-01

申请人： Kazuhide Hasebe ,  Mitsuhiro Okada ,  Pao-Hwa Chou ,  Jun Ogawa ,  Chaeho Kim ,  Kohei Fukushima ,  Toshiki Takahashi ,  Jun Sato

发明人： Kazuhide Hasebe ,  Mitsuhiro Okada ,  Pao-Hwa Chou ,  Jun Ogawa ,  Chaeho Kim ,  Kohei Fukushima ,  Toshiki Takahashi ,  Jun Sato

IPC分类号： C23C16/00 ,  H01L21/00

CPC分类号： C23C16/4412 ,  C23C16/345 ,  C23C16/452 ,  C23C16/45527 ,  C23C16/45546 ,  C23C16/45578 ,  H01L21/0217 ,  H01L21/0228 ,  H01L21/3141 ,  H01L21/3185

摘要： A silicon-containing insulating film is formed on a target substrate by CVD, in a process field to be selectively supplied with a purge gas, a first process gas containing a silane family gas, and a second process gas containing a gas selected from the group consisting of nitriding, oxynitriding, and oxidizing gases. This method alternately includes first to fourth steps. The first, second, third, and fourth steps perform supply of the first process gas, purge gas, second process gas, and purge gas, respectively, while stopping supply of the other two gases. The process field is continuously vacuum-exhausted over the first to fourth steps through an exhaust passage provided with an opening degree adjustment valve. An opening degree of the valve in the first step is set to be 5 to 95% of that used in the second and fourth steps.

摘要翻译： 通过CVD在目标基板上形成含硅绝缘膜，在选择性地供给吹扫气体的工艺领域中，含有硅烷族气体的第一工艺气体和含有选自下组的气体的第二工艺气体 由氮化，氮氧化和氧化气体组成。 该方法交替地包括第一至第四步骤。 第一，第二，第三和第四步骤分别在停止供应其他两种气体的同时分别供应第一处理气体，吹扫气体，第二处理气体和吹扫气体。 通过设置有开度调节阀的排气通道，在第一至第四步骤中连续抽真空排气。 第一步骤中的阀的开度设定为第二和第四步骤中使用的阀门的开启度的5至95％。

公开(公告)号：US20100088764A1

公开(公告)日：2010-04-08

申请号：US12633899

申请日：2009-12-09

申请人： Jun Ogawa

发明人： Jun Ogawa

IPC分类号： G06F21/20 ,  G06F15/16

CPC分类号： H04L63/0263 ,  H04L63/0236 ,  H04L63/1408

摘要： An apparatus relays packets transferred over a network and discards an attack packet detected among the packets. The apparatus includes: an inspection-packet outputting unit that outputs, when detecting the attack packet, an inspection packet in which a transmission-source address contained in the attack packet is set as a destination address and a destination address contained in the attack packet is set as a transmission-source address; a filter table storing unit that stores, when acquiring a response packet for the inspection packet, a transmission-source address, a destination address, and identification information of an interface, which has received the response packet, that are contained in the response packet, in a filter table in an associated manner; and a transfer control unit that determines whether to transfer a packet as a transfer object based on the filter table.

摘要翻译： 一个设备中继通过网络传输的数据包，并丢弃在数据包中检测到的攻击包。 该装置包括：检查分组输出单元，当检测到攻击分组时，输出检测分组，其中包含在攻击分组中的发送源地址被设置为目的地地址，并且包含在攻击分组中的目的地地址是 设置为传输源地址; 滤波器表存储单元，其在获取所述检查包的响应包时，存储包含在所述响应包中的已经接收到所述响应包的接口的发送源地址，目的地地址和标识信息， 在相关联的过滤表中; 以及传送控制单元，其基于所述过滤表来确定是否传送作为传送对象的分组。

公开(公告)号：US20100078149A1

公开(公告)日：2010-04-01

申请号：US12444625

申请日：2007-10-30

申请人： Masaki Yoshimitsu ,  Jun Ogawa

发明人： Masaki Yoshimitsu ,  Jun Ogawa

IPC分类号： F28F9/00 ,  B62D25/08

CPC分类号： B62D25/084 ,  B60K11/04 ,  B62D21/152

摘要： A heat exchanger supporting structure supports a heat exchanger (a radiator 2) on a vehicle body at a vehicle front side. The heat exchanger (the radiator 2) is capable of moving a predetermined distance toward a vehicle rear side, maintaining a support state relative to a vehicle body, when external force acts on the heat exchanger from the vehicle front side.

摘要翻译： 热交换器支撑结构在车辆前侧的车身上支撑热交换器（散热器2）。 当外部力从车辆前方作用在热交换器上时，热交换器（散热器2）能够朝向车辆后方移动预定距离，保持相对于车身的支撑状态。

公开(公告)号：US07668675B2

公开(公告)日：2010-02-23

申请号：US12129179

申请日：2008-05-29

申请人： Toshio Takita ,  Jun Ogawa ,  Yoshihiro Tamura

发明人： Toshio Takita ,  Jun Ogawa ,  Yoshihiro Tamura

IPC分类号： G01R25/04

CPC分类号： H03L7/08 ,  H03K5/19

摘要： In a semiconductor integrated circuit, a counter counts the number of high-speed clock signals that have been generated in a predetermined number of clock cycles of a low-speed clock signal. In synchronization with the low-speed clock signal, the semiconductor integrated circuit compares the counter value and a predetermined value, and judges whether the frequency of the high-speed clock signal has reaches a predetermined frequency. Since variations in the frequency become smaller as the oscillation of a high-speed oscillator stabilizes, the semiconductor integrated circuit detects that the oscillation is stable when the semiconductor integrated circuit has judged affirmatively a plurality of times.

摘要翻译： 在半导体集成电路中，计数器对在低速时钟信号的预定数量的时钟周期中产生的高速时钟信号的数量进行计数。 与低速时钟信号同步，半导体集成电路将计数器值和预定值进行比较，判断高速时钟信号的频率是否达到预定频率。 由于随着高速振荡器的振荡稳定，频率的变化变小，当半导体集成电路多次判断时，半导体集成电路检测到振荡稳定。

公开(公告)号：US07303286B2

公开(公告)日：2007-12-04

申请号：US11649072

申请日：2007-01-03

申请人： Naofumi Ishikura ,  Jun Ogawa

发明人： Naofumi Ishikura ,  Jun Ogawa

IPC分类号： G03B21/28 ,  G03B21/00 ,  G03B21/20 ,  G02B3/06 ,  G02B5/04 ,  G02F1/00 ,  H04N5/74

CPC分类号： H04N9/3114 ,  G02B5/04 ,  G02B26/0833 ,  H04N5/7458

摘要： In a projection display device that is provided with a relay lens for converting flux that is emitted from a light source to a parallel flux for illuminating an image display element (DMD), and a total internal reflection prism for both directing flux that is emitted from the relay lens to the DMD and directing flux that is reflected by the DMD toward a projection lens, the relay lens is unified with the prism as a lens-integral prism by bonding the relay lens to the total internal reflection surface of the prism.

公开(公告)号：US20070220615A1

公开(公告)日：2007-09-20

申请号：US11487982

申请日：2006-07-18

申请人： Jun Ogawa

发明人： Jun Ogawa

IPC分类号： G06F17/30

CPC分类号： H04L63/1416

摘要： Provided is a frame relay device that relays a frame that is transferred from a terminal to a network, the frame relay device including: a determination section that determines whether or not an inspection of security of the frame from the terminal is necessary before frame transmission from the terminal to the network starts; a decision section that decides that the inspection of the security is not conducted on the frame from the terminal in an inspection device, and decides that the inspection of the security is not conducted on the frame from the terminal in the inspection device in a case where the inspection of the security is necessary; and an output section that outputs an instruction based on the decision result to the inspection device.

摘要翻译： 提供了一种帧中继装置，其将从终端传送到网络的帧进行中继，所述帧中继装置包括：确定部，其在帧发送之前确定是否需要对来自终端的帧的安全性进行检查 终端到网络启动; 决定部，其判定在检查装置中不在终端的框架上进行安全检查，并且在检查装置的终端的框架上判定不进行安全检查， 检查安全是必要的; 以及输出部，其将基于所述判定结果的指示输出到所述检查装置。

公开(公告)号：US07178920B2

公开(公告)日：2007-02-20

申请号：US10916173

申请日：2004-08-11

申请人： Naofumi Ishikura ,  Jun Ogawa

发明人： Naofumi Ishikura ,  Jun Ogawa

IPC分类号： G03B21/28 ,  G03B21/00 ,  G03B21/20 ,  G02B3/06 ,  G02B5/04 ,  G02F1/00 ,  H04N5/74

CPC分类号： H04N9/3114 ,  G02B5/04 ,  G02B26/0833 ,  H04N5/7458

摘要： In a projection display device that is provided with a relay lens for converting flux that is emitted from a light source to a parallel flux for illuminating an image display element (DMD), and a total internal reflection prism for both directing flux that is emitted from the relay lens to the DMD and directing flux that is reflected by the DMD toward a projection lens, the relay lens is unified with the prism as a lens-integral prism by bonding the relay lens to the total internal reflection surface of the prism.

摘要翻译： 在设置有用于将从光源发射的光束转换成用于照射图像显示元件（DMD）的平行磁通的中继透镜的投影显示装置和用于引导从 中继透镜到DMD并且引导由DMD反射的通量朝向投影透镜，中继透镜通过将中继透镜粘合到棱镜的全内反射表面而与棱镜一体​​化为透镜一体棱镜。