公开(公告)号：US09127365B2

公开(公告)日：2015-09-08

申请号：US12032669

申请日：2008-02-16

申请人： Andreas K. Berger ,  Yoshihiro Ikeda ,  Byron H. Lengsfield, III ,  David T. Margulies ,  Ernesto E. Marinero

发明人： Andreas K. Berger ,  Yoshihiro Ikeda ,  Byron H. Lengsfield, III ,  David T. Margulies ,  Ernesto E. Marinero

IPC分类号： C23C14/34 ,  C23C14/56 ,  G11B5/84 ,  G11B5/851 ,  G11B5/66

CPC分类号： C23C14/568 ,  G11B5/66 ,  G11B5/8404 ,  G11B5/851

摘要： Methods of fabricating perpendicular magnetic recording media are disclosed. The multilayer structures of the perpendicular magnetic recording media are fabricated by varying the sputtering conditions (i.e., pressure, sputtering gas, etc) in a single sputtering module so that multiple sputtering modules are not needed to form the multilayer structures. These fabrication methods allow sputtering tools with a limited number of chambers, which were designed for the manufacture of longitudinal media, to be used to efficiently produce perpendicular media architectures which heretofore required a large number of sputtering modules. It is further shown that media structures involving a geometric weak-link architecture are suited for these fabrication techniques.

摘要翻译： 公开了制造垂直磁记录介质的方法。 通过改变单个溅射模块中的溅射条件（即，压力，溅射气体等）来制造垂直磁记录介质的多层结构，从而不需要多个溅射模块来形成多层结构。 这些制造方法允许具有有限数量的腔室的溅射工具，其被设计用于制造纵向介质，以用于有效地产生迄今为止需要大量溅射模块的垂直介质结构。 进一步表明涉及几何弱链结构的介质结构适用于这些制造技术。

公开(公告)号：US20130270221A1

公开(公告)日：2013-10-17

申请号：US13449279

申请日：2012-04-17

申请人： Michael Konrad Grobis ,  Olav Hellwig ,  Ernesto E. Marinero ,  Andrew Thomas McCallum ,  Dieter K. Weller

发明人： Michael Konrad Grobis ,  Olav Hellwig ,  Ernesto E. Marinero ,  Andrew Thomas McCallum ,  Dieter K. Weller

IPC分类号： B05D3/10 ,  C21D9/00

CPC分类号： G11B5/855 ,  C22C1/02 ,  C22C19/07

摘要： A method for making a bit-patterned-media magnetic recording disk with discrete magnetic islands includes annealing the data islands after they have been formed by an etching process. A hard mask, such as a layer of silicon nitride or carbon, may be first formed on the recording layer and a patterned resist formed on the hard mask. The resist pattern is then transferred into the hard mask, which is used as the etch mask to etch the recording layer and form the discrete data islands. After the data islands are formed by the etching process, the patterned recording layer is annealed. The annealing may be done in a vacuum, or in an inert gas, like helium or argon, or in a forming gas such as a reducing atmosphere of argon plus hydrogen. The annealing improves the coercivity, the effective saturation magnetization and the thermal stability of the patterned media.

摘要翻译： 用于制造具有离散磁岛的位图形介质磁记录盘的方法包括在通过蚀刻工艺形成数据岛之后退火数据岛。 可以首先在记录层上形成诸如氮化硅或碳的一层的硬掩模和形成在硬掩模上的图案化抗蚀剂。 然后将抗蚀剂图案转移到硬掩模中，其用作蚀刻掩模以蚀刻记录层并形成离散数据岛。 在通过蚀刻工艺形成数据岛之后，对图案化记录层进行退火。 退火可以在真空中或在诸如氦或氩的惰性气体中进行，或者在形成气体如氩气和氢气的还原气氛中进行。 退火提高了图案化介质的矫顽力，有效饱和磁化强度和热稳定性。

公开(公告)号：US20120315505A1

公开(公告)日：2012-12-13

申请号：US13156272

申请日：2011-06-08

申请人： Ernesto E. Marinero ,  Dieter K. Weller ,  Brian R. York

发明人： Ernesto E. Marinero ,  Dieter K. Weller ,  Brian R. York

IPC分类号： G11B5/66 ,  G11B5/65

CPC分类号： G11B5/66 ,  G11B5/65 ,  G11B5/7325 ,  G11B5/82

摘要： A perpendicular magnetic recording disk has a graded-anisotropy recording layer (RL) formed of at least two ferromagnetically exchange coupled CoPtCr-oxide magnetic layers (MAG1 and MAG2) with two nucleation films (NF1 and NF2) between the magnetic layers. NF1 is a metal film, preferably Ru or a Ru-based alloy like RuCr, sputter deposited on MAG1 at low pressure to a thickness between about 0.1-1.5 nm. NF2 is a metal oxide film, preferably an oxide of Ta, sputter deposited on NF1 at high pressure to a thickness between about 0.2-1.0 nm. MAG2 is sputter deposited over NF2. NF1 and NF2 provide a significant reduction in average grain size in the RL from a graded-anisotropy RL without nucleation films between MAG1 and MAG2, while also assuring that MAG1 and MAG2 are strongly exchange coupled.

摘要翻译： 垂直磁记录盘具有由至少两个铁磁交换的CoPtCr-氧化物磁性层（MAG1和MAG2）与磁性层之间的两个成核膜（NF1和NF2）形成的渐变各向异性记录层（RL）。 NF1是金属膜，优选Ru或Ru基Ru合金，在低压下溅射沉积在MAG1上，厚度在约0.1-1.5nm之间。 NF2是金属氧化物膜，优选Ta的氧化物，在高压下溅射沉积在NF1上，厚度在约0.2-1.0nm之间。 MAG2溅射沉积在NF2上。 NF1和NF2从MAG1和MAG2之间没有成核膜的梯度各向异性RL提供RL中的平均晶粒尺寸的显着降低，同时还确保MAG1和MAG2强烈交换耦合。

公开(公告)号：US08320232B1

公开(公告)日：2012-11-27

申请号：US13188384

申请日：2011-07-21

申请人： Ernesto E. Marinero ,  Dieter K. Weller ,  Brian R. York

发明人： Ernesto E. Marinero ,  Dieter K. Weller ,  Brian R. York

IPC分类号： G11B3/70

CPC分类号： G11B5/855 ,  G11B5/65 ,  G11B5/66 ,  G11B5/746 ,  G11B5/82 ,  G11B2005/0021

摘要： A patterned perpendicular magnetic recording medium has discrete data islands that have first and second ferromagnetic layers (MAG1 and MAG2) with first and second nonmagnetic interlayers (IL1 and IL2) between MAG1 and MAG2. MAG1 and MAG2 may be similar CoPtCr alloys with similar thicknesses, with thicknesses of IL1 and IL2 that assure that MAG1 and MAG2 are strongly exchange coupled. Alternatively, MAG2 may be a “write assist” layer, for example a high-saturation magnetization, magnetically soft material in an exchange-spring structure, with IL1 being very thin so that IL2 functions as the coupling layer between MAG1 and the write-assist MAG2 layer. In an application for thermally-assisted recording (TAR), MAG2 may be the chemically-ordered equiatomic binary alloy FePt or CoPt based on the L10 phase, with high magneto-crystalline anisotropy (Ku).

摘要翻译： 图案化的垂直磁记录介质具有离散数据岛，其具有MAG1和MAG2之间的第一和第二非磁性中间层（IL1和IL2）的第一和第二铁磁层（MAG1和MAG2）。 MAG1和MAG2可以是类似厚度的CoPtCr合金，具有IL1和IL2的厚度，以确保MAG1和MAG2被强耦合。 或者，MAG2可以是写辅助层，例如高饱和磁化，交换弹簧结构中的磁软材料，其中IL1非常薄，使得IL2用作MAG1和写辅助MAG2层之间的耦合层 。 在热辅助记录（TAR）的应用中，MAG2可以是基于L10相的具有高磁结晶各向异性（Ku）的化学有序的等原子二元合金FePt或CoPt。

公开(公告)号：US20110143169A1

公开(公告)日：2011-06-16

申请号：US12639975

申请日：2009-12-16

申请人： Thomas R. Albrecht ,  Michael Konrad Grobis ,  Ernesto E. Marinero ,  Hal J. Rosen ,  Ricardo Ruiz

发明人： Thomas R. Albrecht ,  Michael Konrad Grobis ,  Ernesto E. Marinero ,  Hal J. Rosen ,  Ricardo Ruiz

IPC分类号： G11B5/706 ,  C23C14/34

CPC分类号： G11B5/855 ,  B82Y10/00 ,  G11B5/65 ,  G11B5/7325 ,  G11B5/743 ,  G11B5/82

摘要： A continuous-media perpendicular magnetic recording disk with an oxide-containing granular Co alloy recording layer (RL) having minimal grain size dispersion has an ordered nucleation layer (ONL) formed below RL. The ONL has ordered nucleation sites arranged in a generally repetitive pattern. The nucleation sites are generally surrounded by non-nucleation regions of a different material than the nucleation sites. The Co-alloy grains of the subsequently deposited RL grow on the nucleation sites and the oxide of the RL become generally segregated on the non-nucleation regions. The ordered nucleation sites may be formed of a Ru-containing material and the non-nucleation regions may be formed of an oxide. The ONL is formed by nanoimprint lithography, preferably by a master mold fabricated with a method using self-assembling block copolymers for creating periodic nanometer scale features.

摘要翻译： 具有最小晶粒尺寸分散体的具有含氧化物的颗粒状钴合金记录层（RL）的连续介质垂直磁记录盘具有形成在RL以下的有序成核层（ONL）。 ONL已经订购了以一般重复模式排列的成核位点。 成核位点通常被与成核位点不同的材料的非成核区包围。 随后沉积的RL的Co合金晶粒生长在成核位点，并且RL的氧化物通常在非成核区域上分离。 有序的成核位点可以由含Ru的材料形成，并且非成核区域可以由氧化物形成。 ONL由纳米压印光刻形成，优选通过使用自组装嵌段共聚物制备周期性纳米尺度特征的方法制造的母模。

公开(公告)号：US20110068320A1

公开(公告)日：2011-03-24

申请号：US12563446

申请日：2009-09-21

申请人： Ernesto E. Marinero ,  Simone Pisana

发明人： Ernesto E. Marinero ,  Simone Pisana

IPC分类号： H01L29/66

CPC分类号： H01L29/0665 ,  B82Y10/00 ,  H01L29/0673 ,  H01L29/1606 ,  H01L29/775 ,  H01L29/7781 ,  H01L43/08 ,  H01L43/10 ,  Y10S977/734 ,  Y10S977/738

摘要： An electronic device employing a graphene layer as a charge carrier layer. The graphene layer is sandwiched between layers that are constructed of a material having a highly ordered crystalline structure and a high dielectric constant. The highly ordered crystalline structure of the layers surrounding the graphene layer has low density of charged defects that can lead to scattering of charge carriers in the graphene layer. The high dielectric constant of the layers surrounding the graphene layer also prevents charge carrier scattering by minimizing interaction between the charge carriers and the charged defects in the surrounding layers. An interracial layer constructed of a thin, non-polar, dielectric material can also be provided between the graphene layer and each of the highly ordered crystalline high dielectric constant layers to minimize charge carrier scattering in the graphene layer through remote interfacial phonons.

摘要翻译： 一种使用石墨烯层作为电荷载体层的电子器件。 石墨烯层夹在由具有高度有序结晶结构和高介电常数的材料构成的层之间。 围绕石墨烯层的层的高度有序的结晶结构具有低的带电缺陷密度，这可导致石墨烯层中的载流子的散射。 围绕石墨烯层的层的高介电常数也通过最小化电荷载体和周围层中的带电缺陷之间的相互作用来防止电荷载体的散射。 也可以在石墨烯层和每个高阶结晶高介电常数层之间提供由薄的非极性介电材料构成的界面层，以通过远程界面声子最小化石墨烯层中的载流子散射。

公开(公告)号：US07722967B2

公开(公告)日：2010-05-25

申请号：US11192387

申请日：2005-07-27

申请人： Ernesto E. Marinero ,  Brian R. York

发明人： Ernesto E. Marinero ,  Brian R. York

IPC分类号： G11B5/66

CPC分类号： G11B5/667 ,  G11B5/65 ,  G11B5/7325

摘要： A perpendicular recording medium having an underlayer structure that improves the microstructural properties of the recording layer. A spacer layer is intercalated between the lower and upper hcp metal layers. This results in improvements in microstructure of the upper hcp metal layer and the recording magnetic layer, which in turn results in gains in recording media performance. Further, the thickness of the upper hcp metal layer can be reduced, thereby reducing the distance between the recording layer and the soft underlayer, providing further gains in recording media performance.

摘要翻译： 具有改善记录层的显微组织性质的底层结构的垂直记录介质。 间隔层插入在下部和上部hcp金属层之间。 这导致上部hcp金属层和记录磁性层的微观结构的改善，这又导致记录介质性能的提高。 此外，可以减小上部hcp金属层的厚度，从而减小记录层和软底层之间的距离，从而进一步提高记录介质的性能。

公开(公告)号：US20090205948A1

公开(公告)日：2009-08-20

申请号：US12032669

申请日：2008-02-16

申请人： Andreas K. Berger ,  Yoshihiro Ikeda ,  Byron H. Lengsfield, III ,  David T. Margulies ,  Ernesto E. Marinero

发明人： Andreas K. Berger ,  Yoshihiro Ikeda ,  Byron H. Lengsfield, III ,  David T. Margulies ,  Ernesto E. Marinero

IPC分类号： C23C14/34

CPC分类号： C23C14/568 ,  G11B5/66 ,  G11B5/8404 ,  G11B5/851

摘要： Methods of fabricating perpendicular magnetic recording media are disclosed. The multilayer structures of the perpendicular magnetic recording media are fabricated by varying the sputtering conditions (i.e., pressure, sputtering gas, etc) in a single sputtering module so that multiple sputtering modules are not needed to form the multilayer structures. These fabrication methods allow sputtering tools with a limited number of chambers, which were designed for the manufacture of longitudinal media, to be used to efficiently produce perpendicular media architectures which heretofore required a large number of sputtering modules. It is further shown that media structures involving a geometric weak-link architecture are suited for these fabrication techniques.

摘要翻译： 公开了制造垂直磁记录介质的方法。 通过改变单个溅射模块中的溅射条件（即，压力，溅射气体等）来制造垂直磁记录介质的多层结构，从而不需要多个溅射模块来形成多层结构。 这些制造方法允许具有有限数量的腔室的溅射工具，其被设计用于制造纵向介质，以用于有效地产生迄今为止需要大量溅射模块的垂直介质结构。 进一步表明涉及几何弱链结构的介质结构适用于这些制造技术。

公开(公告)号：US06773764B2

公开(公告)日：2004-08-10

申请号：US10033903

申请日：2002-01-03

申请人： Ernesto E. Marinero ,  Hemantha K. Wickramasinghe

发明人： Ernesto E. Marinero ,  Hemantha K. Wickramasinghe

IPC分类号： B05D306

CPC分类号： G11B5/127 ,  B82Y10/00 ,  B82Y25/00 ,  G11B5/656 ,  G11B5/7325 ,  G11B5/74 ,  G11B5/743 ,  G11B5/82 ,  G11B5/855 ,  G11B9/14 ,  G11B9/1409 ,  G11B9/1472 ,  G11B2005/0002 ,  G11B2005/0005 ,  G11B2005/0021

摘要： A method for patterning a recording medium selectively thermally couples a recording medium and a heat source to alter a chemical composition of the recording medium. An apparatus for patterning a recording medium has a heat source for generating and directing an incident thermal wave to a recording medium so as to alter a chemical composition of the recording medium, and a controller for coordinating a mutual position of the incident thermal wave and the recording medium for inducing a direct thermal coupling between the recording medium and the heat source.

摘要翻译： 图案化记录介质的方法选择性地热连接记录介质和热源以改变记录介质的化学成分。 用于图案化记录介质的装置具有用于产生并引导入射热波到记录介质以便改变记录介质的化学成分的热源，以及用于协调入射热波的相互位置和 用于引起记录介质和热源之间的直接热耦合的记录介质。

公开(公告)号：US09147423B2

公开(公告)日：2015-09-29

申请号：US13449279

申请日：2012-04-17

申请人： Michael Konrad Grobis ,  Olav Hellwig ,  Ernesto E. Marinero ,  Andrew Thomas McCallum ,  Dieter K. Weller

发明人： Michael Konrad Grobis ,  Olav Hellwig ,  Ernesto E. Marinero ,  Andrew Thomas McCallum ,  Dieter K. Weller

IPC分类号： B44C1/22 ,  H01L21/00 ,  G11B5/82 ,  G11B5/855 ,  C22C19/07 ,  C22C1/02

CPC分类号： G11B5/855 ,  C22C1/02 ,  C22C19/07

摘要： A method for making a bit-patterned-media magnetic recording disk with discrete magnetic islands includes annealing the data islands after they have been formed by an etching process. A hard mask, such as a layer of silicon nitride or carbon, may be first formed on the recording layer and a patterned resist formed on the hard mask. The resist pattern is then transferred into the hard mask, which is used as the etch mask to etch the recording layer and form the discrete data islands. After the data islands are formed by the etching process, the patterned recording layer is annealed. The annealing may be done in a vacuum, or in an inert gas, like helium or argon, or in a forming gas such as a reducing atmosphere of argon plus hydrogen. The annealing improves the coercivity, the effective saturation magnetization and the thermal stability of the patterned media.

摘要翻译： 用于制造具有离散磁岛的位图形介质磁记录盘的方法包括在通过蚀刻工艺形成数据岛之后退火数据岛。 可以首先在记录层上形成诸如氮化硅或碳的一层的硬掩模和形成在硬掩模上的图案化抗蚀剂。 然后将抗蚀剂图案转移到硬掩模中，其用作蚀刻掩模以蚀刻记录层并形成离散数据岛。 在通过蚀刻工艺形成数据岛之后，对图案化记录层进行退火。 退火可以在真空中或在诸如氦或氩的惰性气体中进行，或者在形成气体如氩气和氢气的还原气氛中进行。 退火提高了图案化介质的矫顽力，有效饱和磁化强度和热稳定性。