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62 条记录 (耗时 0.038 秒)

    SYSTEM, METHOD AND APPARATUS FOR WAVELENGTH-CODED MULTI-FOCAL MICROSCOPY
    51.
    发明申请
    SYSTEM, METHOD AND APPARATUS FOR WAVELENGTH-CODED MULTI-FOCAL MICROSCOPY 有权
    用于波长编码的多焦点显微镜的系统，方法和装置

    公开(公告)号：US20120327489A1

    公开(公告)日：2012-12-27

    申请号：US13500464

    申请日：2010-10-08

    申请人： George Barbastathis ,  Yuan Luo ,  Se Baek Oh

    发明人： George Barbastathis ,  Yuan Luo ,  Se Baek Oh

    IPC分类号： G03H1/04 ,  G02B5/32

    CPC分类号： G03H1/2286 ,  G02B5/32 ,  G03H1/0248 ,  G03H1/041 ,  G03H1/28 ,  G03H2001/0033 ,  G03H2001/0072 ,  G03H2001/0264 ,  G03H2001/0268 ,  G03H2001/2244 ,  G03H2001/266 ,  G03H2210/45 ,  G03H2223/55

    摘要： A volume holographic imaging system, apparatus, and/or method enables the projection of a two-dimensional (2D) slice of a four-dimensional (4D) probing object. A 4D probing source object is illuminated to emit or scatter an optical field. A holographic element having one or more recorded holograms receives and diffracts the optical field into a diffracted plane beam having spectral information. A 4-f telecentric relay system includes a pupil filter on the relayed conjugate plane of the volume hologram and images the pupil of the volume hologram onto the front focal plane of the collector lens. A collector lens focuses the diffracted plane beam to a 2D slice of the 4D probing source object. The focused 2D slice is projected onto a 2D imaging plane. The holographic element may have multiple multiplexed holograms that are arranged to diffract light from the corresponding slice of the 4D probing source object.

    摘要翻译： 体积全息成像系统，装置和/或方法使得能够投影四维（4D）探测对象的二维（2D）切片。 4D探测源对象被照亮以发射或散射光场。 具有一个或多个记录的全息图的全息元件接收并将光场衍射成具有光谱信息的衍射平面光束。 4-f远心继电器系统包括在体积全息图的中继共轭平面上的瞳孔滤光片，并将体积全息图的瞳孔成像到收集透镜的前焦平面上。 收集透镜将衍射平面光束聚焦到4D探测源对象的2D切片。 聚焦的2D切片投影到2D成像平面上。 全息元件可以具有多个多路复用全息图，其被布置为衍射来自4D探测源对象的相应切片的光。

    System and method for holographic fabrication and replication of diffractive optical elements for maskless lithography
    54.
    发明授权
    System and method for holographic fabrication and replication of diffractive optical elements for maskless lithography 有权
    用于无掩模光刻的衍射光学元件的全息制造和复制的系统和方法

    公开(公告)号：US07160673B2

    公开(公告)日：2007-01-09

    申请号：US10677804

    申请日：2003-10-02

    申请人： Rajesh Menon ,  Dario Gil ,  David J. Carter ,  George Barbastathis ,  Henry I. Smith

    发明人： Rajesh Menon ,  Dario Gil ,  David J. Carter ,  George Barbastathis ,  Henry I. Smith

    IPC分类号： G02B3/08

    CPC分类号： G03F7/70291 ,  G03F7/0005 ,  G03F7/0757 ,  G03F7/2059 ,  G03F7/70275

    摘要： A method is disclosed for forming an array of focusing elements for use in a lithography system. In accordance with an embodiment, the method includes the steps of providing a master element that includes at least one diffractive pattern at a first location with respect to a target surface, illuminating the master element to produce a first diffractive pattern on the target surface at the first location, moving the master element with respect to the target surface to a second location with respect to the target surface, and illuminating the master element to produce a second diffractive pattern on the target surface at the second location.

    摘要翻译： 公开了一种用于形成用于光刻系统的聚焦元件阵列的方法。 根据实施例，该方法包括以下步骤：提供在相对于目标表面的第一位置处包括至少一个衍射图案的主元件，照亮主元件以在目标表面上产生第一衍射图案 第一位置，将主元件相对于目标表面移动到相对于目标表面的第二位置，并且照亮主元件以在第二位置处在目标表面上产生第二衍射图案。

    System and method for providing fast, low voltage integrated optical elements
    56.
    发明申请
    System and method for providing fast, low voltage integrated optical elements 有权
    用于提供快速，低电压集成光学元件的系统和方法

    公开(公告)号：US20050271324A1

    公开(公告)日：2005-12-08

    申请号：US11110511

    申请日：2005-04-20

    申请人： Gregory Nielson ,  George Barbastathis

    发明人： Gregory Nielson ,  George Barbastathis

    IPC分类号： G02B6/12 ,  G02B6/26 ,  G02B6/28 ,  G02B6/293 ,  G02B6/35

    CPC分类号： G02B6/3508 ,  G02B6/12007 ,  G02B6/2773 ,  G02B6/28 ,  G02B6/3504 ,  G02B6/3536 ,  G02B6/356 ,  G02B6/357 ,  G02B6/3584 ,  G02B6/3594 ,  G02B6/3596

    摘要： A switching system is disclosed for an optical signal. The switching system includes a first optical waveguide coupled to a first electrode, a second electrode, and a second optical waveguide. The second optical waveguide is coupled to a movable electrode. The movable electrode is supported by a support structure and is positioned with respect to the first and second electrodes so that the position of the movable electrode may be selectively placed in either a first closed state or a second open state defined by the first and second electrodes under application of a voltage with respect to one of the first and second electrodes. The first closed state provides that the first and second optical waveguides are sufficiently close to each other to provide optical coupling therebetween while the second open state provides that the first and second optical communication channels are not sufficiently close to each other to provide optical coupling therebetween, or provide some different amount of optical coupling than in the first closed state.

    摘要翻译： 公开了一种用于光信号的交换系统。 开关系统包括耦合到第一电极，第二电极和第二光波导的第一光波导。 第二光波导耦合到可动电极。 可移动电极由支撑结构支撑并且相对于第一和第二电极定位，使得可动电极的位置可以选择性地放置在由第一和第二电极限定的第一闭合状态或第二开放状态 在相对于所述第一和第二电极之一施加电压的情况下。 第一闭合状态规定，第一和第二光波导彼此充分接近以在其间提供光耦合，而第二开放状态规定第一和第二光通信通道彼此之间不足够靠近以提供光耦合， 或提供与第一关闭状态相比不同量的光耦合。

    System and method for proximity effect correction in imaging systems
    58.
    发明申请
    System and method for proximity effect correction in imaging systems 失效
    成像系统中邻近效应校正的系统和方法

    公开(公告)号：US20050224725A1

    公开(公告)日：2005-10-13

    申请号：US10823458

    申请日：2004-04-13

    申请人： Rajesh Menon ,  Dario Gil ,  George Barbastathis ,  Henry Smith

    发明人： Rajesh Menon ,  Dario Gil ,  George Barbastathis ,  Henry Smith

    IPC分类号： G03F1/14 ,  G03F7/20 ,  H01J37/304

    CPC分类号： H01J37/304 ,  G03F1/78 ,  G03F7/70383 ,  G03F7/70441 ,  G03F7/70558 ,  H01J2237/31769

    摘要： A system and method are disclosed for providing error correction in an imaging system. The system includes an error determination unit for determining an amount of error associated with a spot at (x,y) in a binary pattern to be imaged, a determination unit for determining the location of a nearest exposed spot at (xi, yi) for each spot at (x,y), and a dose modification unit for modifying an exposure dose at the nearest exposed spot at (xi, yi) for each spot at (x,y).

    摘要翻译： 公开了一种用于在成像系统中提供纠错的系统和方法。 该系统包括：误差确定单元，用于确定与待成像的二进制图案中的（x，y）处的斑点相关联的误差量;确定单元，用于确定最近的曝光光斑在（x i）处的位置， （x，y）处的每个斑点的剂量修改单元，以及用于修改在（x，y）处最近的曝光点的曝光剂量的剂量修改单元 （x，y）的每个点的平均值。

    Adjustable focusing composite for use in an optical profilometer system and method
    59.
    发明授权
    Adjustable focusing composite for use in an optical profilometer system and method 有权
    可调聚焦复合材料用于光学轮廓仪系统和方法

    公开(公告)号：US06943968B2

    公开(公告)日：2005-09-13

    申请号：US10423670

    申请日：2003-04-25

    申请人： Gregory N. Nielson ,  George Barbastathis

    发明人： Gregory N. Nielson ,  George Barbastathis

    IPC分类号： G01B11/24 ,  G01B11/30 ,  G02B7/02

    CPC分类号： G01B11/303 ,  G01B11/24

    摘要： An adjustable lens is disclosed for use in an optical profilometer system. The adjustable lens includes a plurality of elements that are mutually spaced from another in a first position and provides a first focal point for an incident electromagnetic field having a first frequency incident at a first angle with respect to the plurality of elements. The adjustable lens also includes an actuation unit for changing the focal point of the plurality of elements to provide a second focal point for the incident electromagnetic field having the first frequency incident at the first angle with respect to the plurality of elements.

    摘要翻译： 公开了用于光学轮廓仪系统中的可调透镜。 可调节透镜包括多个元件，其在第一位置与另一个相互间隔开并且提供用于入射电磁场的第一焦点，该第一焦点具有相对于多个元件以第一角入射的第一频率。 可调透镜还包括用于改变多个元件的焦点的致动单元，以提供具有相对于多个元件以第一角入射的第一频率的入射电磁场的第二焦点。