System and method of sensing and removing residual charge from a processed wafer
    51.
    发明授权
    System and method of sensing and removing residual charge from a processed wafer 有权
    从处理的晶片中感测和去除残余电荷的系统和方法

    公开(公告)号:US08111499B2

    公开(公告)日:2012-02-07

    申请号:US12505381

    申请日:2009-07-17

    IPC分类号: H01L21/683 H01T23/00

    摘要: Systems and methods for removing residual charge from a processed wafer are described. Removal of residual charge eliminates de-chucking failure that may break or damage the wafer. Residual charge is removed by applying a reverse polarity discharging DC voltage to an electrode embedded in an electrostatic chuck (ESC) supporting the wafer, and providing an outlet to the residual charge to ground via a lift pin assembly. Lift pin assembly is kept at the same potential with respect to a pedestal of the ESC to avoid sparking during the application of RF power to generate plasma. A residual charge sensor is included to sense and measure the amount of residual charge, so that the parameters of the reverse polarity discharging voltage can be adjusted in a subsequent de-chucking operation.

    摘要翻译: 描述了从处理的晶片去除残余电荷的系统和方法。 去除残留电荷可消除可能破坏或损坏晶片的去夹紧故障。 通过对嵌入在支撑晶片的静电卡盘(ESC)中的电极施加反向极性放电DC电压并且通过升降销组件向剩余电荷提供出口,从而去除残余电荷。 提升销组件相对于ESC的基座保持在相同的电位,以避免在施加RF功率以产生等离子体时产生火花。 包括剩余电荷传感器以感测和测量剩余电荷的量,从而可以在随后的去夹紧操作中调整反极性放电电压的参数。

    Method for forming an opening
    52.
    发明授权
    Method for forming an opening 有权
    形成开口的方法

    公开(公告)号:US08110342B2

    公开(公告)日:2012-02-07

    申请号:US12193052

    申请日:2008-08-18

    IPC分类号: G03F7/26

    摘要: A method for forming an opening is disclosed. First, a semiconductor substrate is provided, in which the semiconductor substrate includes at least one metal interconnects therein. A stacked film is formed on the semiconductor substrate, in which the stacked film includes at least one dielectric layer and one hard mask. The hard mask is used to form an opening in the stacked film without exposing the metal interconnects, and the hard mask is removed thereafter. A barrier layer is later deposited on the semiconductor substrate to cover a portion of the dielectric layer and the surface of the metal interconnects.

    摘要翻译: 公开了一种形成开口的方法。 首先,提供半导体衬底,其中半导体衬底在其中包括至少一个金属互连。 层叠膜形成在半导体基板上,其中层叠膜包括至少一个电介质层和一个硬掩模。 硬掩模用于在不暴露金属互连件的情况下在堆叠膜中形成开口,并且之后去除硬掩模。 稍后在半导体衬底上沉积阻挡层以覆盖电介质层的一部分和金属互连的表面。

    Fabrication of a high fill ratio silicon spatial light modulator
    54.
    发明授权
    Fabrication of a high fill ratio silicon spatial light modulator 有权
    高填充率硅空间光调制器的制造

    公开(公告)号:US07675670B2

    公开(公告)日:2010-03-09

    申请号:US11448148

    申请日:2006-06-05

    IPC分类号: G02B26/00 G02F1/00

    CPC分类号: G02B26/0841

    摘要: A method for forming an optical deflection device includes providing a semiconductor substrate comprising an upper surface region and a plurality of drive devices within one or more portions of the semiconductor substrate. The upper surface region includes one or more patterned structure regions and at least one open region to expose a portion of the upper surface region to form a resulting surface region. The method also includes forming a planarizing material overlying the resulting surface region to fill the at least one open region and cause formation of an upper planarized layer using the fill material. The method further includes forming a thickness of silicon material at a temperature of less than 300 ° C. to maintain a state of the planarizing material.

    摘要翻译: 一种形成光偏转装置的方法包括提供半导体衬底的一个或多个部分内包括上表面区域和多个驱动装置的半导体衬底。 上表面区域包括一个或多个图案化结构区域和至少一个开放区域,以暴露上表面区域的一部分以形成所得表面区域。 该方法还包括形成覆盖所得表面区域的平坦化材料以填充至少一个开放区域,并且使用填充材料形成上部平坦化层。 该方法还包括在小于300℃的温度下形成硅材料的厚度以保持平坦化材料的状态。

    METHOD FOR FORMING AN OPENING
    55.
    发明申请
    METHOD FOR FORMING AN OPENING 有权
    形成开放的方法

    公开(公告)号:US20100040982A1

    公开(公告)日:2010-02-18

    申请号:US12193052

    申请日:2008-08-18

    IPC分类号: G03F7/20

    摘要: A method for forming an opening is disclosed. First, a semiconductor substrate is provided, in which the semiconductor substrate includes at least one metal interconnects therein. A stacked film is formed on the semiconductor substrate, in which the stacked film includes at least one dielectric layer and one hard mask. The hard mask is used to form an opening in the stacked film without exposing the metal interconnects, and the hard mask is removed thereafter. A barrier layer is later deposited on the semiconductor substrate to cover a portion of the dielectric layer and the surface of the metal interconnects.

    摘要翻译: 公开了一种形成开口的方法。 首先,提供半导体衬底,其中半导体衬底在其中包括至少一个金属互连。 层叠膜形成在半导体基板上,其中层叠膜包括至少一个电介质层和一个硬掩模。 硬掩模用于在不暴露金属互连件的情况下在堆叠膜中形成开口,并且之后去除硬掩模。 稍后在半导体衬底上沉积阻挡层以覆盖电介质层的一部分和金属互连的表面。

    Method and a System for Determining Predicted Numbers of Processor Cycles Required for Respective Segments of a Media File for Playback of the Media File
    56.
    发明申请
    Method and a System for Determining Predicted Numbers of Processor Cycles Required for Respective Segments of a Media File for Playback of the Media File 有权
    方法和系统,用于确定用于媒体文件播放的媒体文件的相应段所需的处理器周期的预测数量

    公开(公告)号:US20090112931A1

    公开(公告)日:2009-04-30

    申请号:US12084443

    申请日:2006-11-03

    IPC分类号: G06F7/00 G06F15/18

    摘要: A method of determining predicted numbers of processor cycles required for respective segments of a media file for playback of the media file, a method of playback of a media file, a method of downloading a media file, a device for playback of a media file and a system for downloading a media file. The method comprising performing a bitstream analysis of the media file to determine a number of non-zero IDCT coefficients of the respective segments, input parameters of an MC task function associated with respective segments, or both; and determining the predicted numbers of processor cycles based on the bitstream analysis.

    摘要翻译: 一种确定媒体文件的各个段的媒体文件播放所需的处理器周期的预测数量的方法,媒体文件的回放方法,下载媒体文件的方法,用于播放媒体文件的设备,以及 用于下载媒体文件的系统。 该方法包括执行媒体文件的比特流分析以确定各个段的非零IDCT系数的数目,与各个段相关联的MC任务功能的输入参数,或两者; 以及基于比特流分析来确定预测的处理器周期数。

    High fill ratio silicon spatial light modulator
    57.
    发明授权
    High fill ratio silicon spatial light modulator 有权
    高填充率硅空间光调制器

    公开(公告)号:US07522330B2

    公开(公告)日:2009-04-21

    申请号:US11448149

    申请日:2006-06-05

    IPC分类号: G02B26/00

    CPC分类号: G02B26/0841 G02B26/008

    摘要: An optical deflection device for a display application. The optical deflection device includes a semiconductor substrate including an upper surface region and one or more electrode devices provided overlying the upper surface region. The optical deflection device also includes a hinge device including a silicon material and coupled to the upper surface region. The optical deflection device further includes a spacing defined between the upper surface region and the hinge device and a mirror structure including a post portion coupled to the hinge device and a mirror plate portion coupled to the post portion and overlying the hinge device.

    摘要翻译: 一种用于显示器应用的光学偏转装置。 光偏转装置包括:半导体衬底,包括上表面区域和设置在上表面区域上的一个或多个电极器件。 光学偏转装置还包括铰链装置,其包括硅材料并且连接到上表面区域。 光学偏转装置还包括限定在上表面区域和铰链装置之间的间隔,以及反射镜结构,其包括联接到铰链装置的柱部分和耦合到柱部分并且覆盖铰链装置的镜板部分。

    Mutants of Trichosanthin With Anti-Tumor Activity and Lowered Side-Effects
    58.
    发明申请
    Mutants of Trichosanthin With Anti-Tumor Activity and Lowered Side-Effects 有权
    Trichosanthin突变体具有抗肿瘤活性和降低副作用

    公开(公告)号:US20080261874A1

    公开(公告)日:2008-10-23

    申请号:US11662460

    申请日:2005-08-04

    CPC分类号: C07K14/415

    摘要: The invention provides the mutants and coding genes of trichosanthin (TCS). The mutants thereof are the TCS mutants with the single or double alternation of tyrosine-55 and aspartate-78 (counted from N-terminus), wherein the tyrosine-55 is mutated to an aliphatic amino acid and aspartate-78 is mutated to an amino acid with low hydrophilicity. This invention also relates to the application of TCS mutants and their coding genes in the drug development to treat carcinoma, AIDS and other diseases.

    摘要翻译: 本发明提供了trichosanthin(TCS)的突变体和编码基因。 其突变体是具有酪氨酸-55和天冬氨酸-78(从N末端计数)的单次或双次交替的TCS突变体,其中酪氨酸-55突变为脂族氨基酸,天冬氨酸-78突变为氨基 酸性低亲水性。 本发明还涉及TCS突变体及其编码基因在药物开发中的应用以治疗癌,AIDS和其他疾病。

    Method and system for inter-channel signal redundancy removal in perceptual audio coding
    59.
    发明授权
    Method and system for inter-channel signal redundancy removal in perceptual audio coding 有权
    感知音频编码中信道间信号冗余消除的方法和系统

    公开(公告)号:US06934676B2

    公开(公告)日:2005-08-23

    申请号:US09854143

    申请日:2001-05-11

    IPC分类号: G10L19/00

    CPC分类号: H04H20/89 G10L19/008

    摘要: A method and system for coding audio signals in a multi-channel sound system, wherein a plurality of MDCT units are used to reduce the audio signals for providing a plurality of MDCT coefficients. The MDCT coefficients are quantized according to the masking threshold calculated from a psychoacoustic model and a plurality of INT (integer-to-integer) DCT modules are used to remove the cross-channel redundancy in the quantized MDCT coefficients. The output from the INT-DCT modules is Huffman coded and written to a bitstream for transmission or storage.

    摘要翻译: 一种用于在多声道声音系统中编码音频信号的方法和系统,其中使用多个MDCT单元来减少用于提供多个MDCT系数的音频信号。 根据从心理声学模型计算的掩蔽阈值量化MDCT系数,并且使用多个INT(整数 - 整数)DCT模块来去除量化的MDCT系数中的跨信道冗余。 来自INT-DCT模块的输出被霍夫曼编码并写入比特流以进行传输或存储。