公开(公告)号：US07187399B2

公开(公告)日：2007-03-06

申请号：US10898233

申请日：2004-07-26

申请人： Masaru Noguchi ,  Hiromi Ishikawa

发明人： Masaru Noguchi ,  Hiromi Ishikawa

IPC分类号： B41J15/14 ,  B41J27/00

CPC分类号： G03F7/70791 ,  B41J2/465

摘要： In an exposure head of the invention, plural first micro-focusing elements are arranged in a first microlens array so as to correspond to plural micromirrors in a DMD. An aperture array that includes plural apertures arranged so as to respectively correspond to the plural first micro-focusing elements is disposed. The apertures allow only main portions of Fraunhofer diffraction images to be transmitted therethrough. The main portions of the Fraunhofer diffraction images transmitted through the apertures are imaged on an exposure plane by second micro-focusing elements of a second microlens array. According to the exposure head of the invention, cross-talk light and scattered light can be effectively reduced, and beam diameters of beam spots projected on the exposure plane through the apertures can be adjusted to a required size.

摘要翻译： 在本发明的曝光头中，多个第一微焦点元件被布置在第一微透镜阵列中，以对应于DMD中的多个微镜。 布置有包括分别对应于多个第一微聚焦元件的多个孔的孔阵列。 这些孔仅允许弗劳恩霍夫衍射图像的主要部分通过其传播。 通过孔径传播的弗劳恩霍夫衍射图像的主要部分通过第二微透镜阵列的第二微聚焦元件在曝光平面上成像。 根据本发明的曝光头，可以有效地减少串扰光和散射光，并且通过孔径投影在曝光平面上的光束点的光束直径可以被调节到所需的尺寸。

公开(公告)号：US06980348B2

公开(公告)日：2005-12-27

申请号：US10724621

申请日：2003-12-02

申请人： Daisuke Nakaya ,  Takao Ozaki ,  Hiromi Ishikawa

发明人： Daisuke Nakaya ,  Takao Ozaki ,  Hiromi Ishikawa

IPC分类号： B41J2/445 ,  B41J2/46 ,  B41J2/465 ,  B41J2/505 ,  B41J2/51 ,  G06K15/12 ,  H01L21/027 ,  H04N1/04 ,  H04N1/23 ,  G02B26/00

CPC分类号： B41J2/5056 ,  B41J2/46 ,  B41J2/465 ,  B41J25/003 ,  G06K15/1238

摘要： An imaging head faces an imaging surface and is relatively moved along the scanning surface in a predetermined scanning direction. The imaging head includes an imaging element group and an alteration section. The imaging element group is structured by a plurality of imaging elements, which are arranged two-dimensionally in a plane substantially parallel to the imaging surface. The imaging element group generates a group of image pixels at the imaging surface in a two-dimensional arrangement which is inclined, as a whole, at a predetermined inclination angle with respect to the scanning direction. The alteration section alters a number of image pixels in a direction which is inclined from the scanning direction by the inclination angle, on the basis of a difference between the predetermined inclination angle of the imaging element group and an actual inclination angle of the image pixel group.

摘要翻译： 成像头朝向成像表面并且沿预定扫描方向沿着扫描表面相对移动。 成像头包括成像元件组和变更部。 成像元件组由多个成像元件构成，该成像元件在基本上平行于成像表面的平面中二维排列。 成像元件组以二维排列在成像面上产生一组图像像素，该二维排列整体上相对于扫描方向以预定的倾斜角倾斜。 改变部分基于成像元件组的预定倾斜角度和图像像素组的实际倾斜角度之间的差异，将从扫描方向倾斜倾斜角度的方向改变多个图像像素 。

公开(公告)号：US20050254034A1

公开(公告)日：2005-11-17

申请号：US11187998

申请日：2005-07-25

申请人： Toshihiko Ohmori ,  Hiromi Ishikawa

发明人： Toshihiko Ohmori ,  Hiromi Ishikawa

IPC分类号： G02B27/09 ,  G03B27/54

CPC分类号： G02B27/09

摘要： In an illumination optical system constituted to uniformize the intensity distribution of illumination light by use of an optical integrator, the overall length thereof is shortened. The illumination optical system includes: a light source including a laser irradiating illumination light on an illuminated body such as a two-dimensional SLM and an optical integrator; the optical integrator being placed between this light source and the illuminated body and uniformizes the intensity distribution of the illumination light by passing the light through minute cells. In this system, the size of the minute cell of the optical integrator (S1=S2) is 1.5 mm or less.

摘要翻译： 在通过使用光学积分器使照明光的强度分布均匀化的照明光学系统中，其总长度被缩短。 照明光学系统包括：光源，其包括在诸如二维SLM的照明体上的激光照射照明光和光学积分器; 光学积分器被放置在该光源和被照射体之间，并且通过使光通过微细胞而使照明光的强度分布均匀化。 在该系统中，光积分器的微小电极的尺寸（S 1 = S 2）为1.5mm以下。

公开(公告)号：US06876494B2

公开(公告)日：2005-04-05

申请号：US10671833

申请日：2003-09-29

申请人： Hiromi Ishikawa ,  Kazuhiko Nagano

发明人： Hiromi Ishikawa ,  Kazuhiko Nagano

IPC分类号： G02B26/08 ,  G03F7/20 ,  G02B27/10 ,  G02F1/00

CPC分类号： G03F7/70291 ,  G02B26/0841 ,  G03F7/7005 ,  G03F7/70275

摘要： In an image forming apparatus: pixel portions of a spatial light-modulation element are two-dimensionally arranged, and individually modulate portions of light applied to the spatial light-modulation element, according to control signals; a first image-forming optical system is arranged in optical paths of the portions of the light modulated by the pixel portions; a microlens array is arranged in a vicinity of an image-forming plane of the first image-forming optical system, and has microlenses arranged in correspondence with the pixel portions, respectively; and a second image-forming optical system is arranged in optical paths of the portions of the light which have passed through the microlenses, and forms on a predetermined surface an image represented by the portions of the light-modulated by the spatial light-modulation element. Each of the first and second image-forming optical systems forms an image with a magnification power greater than one.

摘要翻译： 在图像形成装置中，空间光调制元件的像素部分被二维排列，并且根据控制信号单独地调制施加到空间光调制元件的光的部分; 第一图像形成光学系统被布置在由像素部分调制的光的部分的光路中; 微透镜阵列布置在第一成像光学系统的图像形成平面附近，并且分别与像素部分对应地布置有微透镜; 并且第二图像形成光学系统被布置在已经通过微透镜的光的部分的光路中，并且在预定表面上形成由空间光调制元件的光调制部分表示的图像 。 第一和第二成像光学系统中的每一个形成具有大于1的放大倍率的图像。

公开(公告)号：US20050024777A1

公开(公告)日：2005-02-03

申请号：US10929507

申请日：2004-08-30

申请人： Takao Kidachi ,  Tadaaki Tomiyama ,  Yoshio Uematsu ,  Hiromi Ishikawa ,  Tatsushi Yoshida ,  Hiroyoshi Yokome ,  Yukihiro Nakamura ,  Hisashi Ohyama ,  Tatsumi Tsuchiya

发明人： Takao Kidachi ,  Tadaaki Tomiyama ,  Yoshio Uematsu ,  Hiromi Ishikawa ,  Tatsushi Yoshida ,  Hiroyoshi Yokome ,  Yukihiro Nakamura ,  Hisashi Ohyama ,  Tatsumi Tsuchiya

IPC分类号： G11B21/21 ,  G11B5/48 ,  G11B21/20

CPC分类号： G11B5/4826 ,  Y10T29/49025 ,  Y10T29/49027 ,  Y10T29/4998 ,  Y10T29/5313 ,  Y10T29/53165 ,  Y10T29/53174 ,  Y10T29/53187 ,  Y10T29/53191 ,  Y10T29/53252 ,  Y10T29/5327

摘要： A base plate and load beam for an HG assembly are formed in series, stacked, and transferred by a transfer system in the form of the stacked-layer series to undergo the necessary assembly processes such as layer joining, slider attachment, and electrical connections between the terminals thereon. When uncompleted HG assemblies are transferred for each of the manufacturing processes, the uncompleted HG assembly is mounted on the assembly jig such as a tray or a block for transference. For this reason, assembling jigs, the number of which is at least equal to the number of the uncompleted HG assemblies remaining at the respective assembly processes would be needed. Accordingly, the efficiency of work space is reduced, and a rise in manufacturing cost is brought about by the need for the assembling jigs.

公开(公告)号：US20050022372A1

公开(公告)日：2005-02-03

申请号：US10929512

申请日：2004-08-30

申请人： Takao Kidachi ,  Tadaaki Tomiyama ,  Yoshio Uematsu ,  Hiromi Ishikawa ,  Tatsushi Yoshida ,  Hiroyoshi Yokome ,  Yukihiro Nakamura ,  Hisashi Ohyama ,  Tatsumi Tsuchiya

发明人： Takao Kidachi ,  Tadaaki Tomiyama ,  Yoshio Uematsu ,  Hiromi Ishikawa ,  Tatsushi Yoshida ,  Hiroyoshi Yokome ,  Yukihiro Nakamura ,  Hisashi Ohyama ,  Tatsumi Tsuchiya

IPC分类号： G11B21/21 ,  G11B5/48 ,  G11B21/20 ,  B23P19/00

CPC分类号： G11B5/4826 ,  Y10T29/49025 ,  Y10T29/49027 ,  Y10T29/4998 ,  Y10T29/5313 ,  Y10T29/53165 ,  Y10T29/53174 ,  Y10T29/53187 ,  Y10T29/53191 ,  Y10T29/53252 ,  Y10T29/5327

摘要： A base plate and load beam for an HG assembly are formed in series, stacked, and transferred by a transfer system in the form of the stacked-layer series to undergo the necessary assembly processes such as layer joining, slider attachment, and electrical connections between the terminals thereon. When uncompleted HG assemblies are transferred for each of the manufacturing processes, the uncompleted HG assembly is mounted on the assembly jig such as a tray or a block for transference. For this reason, assembling jigs, the number of which is at least equal to the number of the uncompleted HG assemblies remaining at the respective assembly processes would be needed. Accordingly, the efficiency of work space is reduced, and a rise in manufacturing cost is brought about by the need for the assembling jigs.

摘要翻译： 用于HG组件的底板和负载梁通过堆叠层系列形式的传送系统串联，堆叠和传送，以进行必要的组装过程，例如层接合，滑块附接和电连接 其上的端子。 当为每个制造过程转移未完成的HG组件时，未完成的HG组件安装在组装夹具上，例如托盘或用于转移的块。 因此，需要组装夹具的数量至少等于在各个组装过程中保留的未完成的HG组件的数量。 因此，减少了工作空间的效率，并且由于需要组装夹具而引起制造成本的上升。

公开(公告)号：US06195189B1

公开(公告)日：2001-02-27

申请号：US09178641

申请日：1998-10-26

申请人： Sumihiro Nishihata ,  Hiromi Ishikawa

发明人： Sumihiro Nishihata ,  Hiromi Ishikawa

IPC分类号： G02B2608

CPC分类号： G02B13/0005

摘要： In a light beam scanning system, a beam shaper shapes light beam emitted from a light source. The shaped light beam is deflected by a deflector to scan a surface in a main scanning direction. A scanning/imaging optical system causes the light beam deflected by the deflector to form an image on the surface and scan the same. The beam shaper includes a diverging optical system which converts the light beam into divergent light. The scanning/imaging optical system consists of first and second lens elements arranged in this order from the light source side and having first to fourth surfaces as numbered from the light source side and satisfies formulae, −1.42 0, fGR2>0  (3) wherein fall, fGF, r1GR, r2GR, r4GR, fGR1 and fGR2 respectively represent the composite focal length of the beam shaper and the scanning/imaging optical system, the focal length of the beam shaper, the radius of curvature of the first surface of the scanning/imaging optical system, the radius of curvature of the second surface of the scanning/imaging optical system, the radius of curvature of the fourth surface of the scanning/imaging optical system, the focal length of the first lens element and the focal length of the second lens element.

摘要翻译： 在光束扫描系统中，光束整形器成形从光源发射的光束。 成形的光束被偏转器偏转以在主扫描方向上扫描表面。 扫描/成像光学系统使由偏转器偏转的光束在表面上形成图像并扫描。 光束整形器包括将光束转换成发散光的发散光学系统。 扫描/成像光学系统由从光源侧依次排列并具有从光源侧编号的第一至第四表面的第一透镜元件和第二透镜元件满足公式，其中，下降fGF，r1GR，r2GR，r4GR， fGR1和fGR2分别表示光束整形器和扫描/成像光学系统的合成焦距，光束整形器的焦距，扫描/成像光学系统的第一表面的曲率半径，曲率半径 扫描/成像光学系统的第二表面，扫描/成像光学系统的第四表面的曲率半径，第一透镜元件的焦距和第二透镜元件的焦距。

公开(公告)号：US4969699A

公开(公告)日：1990-11-13

申请号：US399339

申请日：1989-08-28

申请人： Masaru Noguchi ,  Hiromi Ishikawa

发明人： Masaru Noguchi ,  Hiromi Ishikawa

IPC分类号： B23K26/08 ,  G02B26/10 ,  H04N1/024 ,  H04N1/113

CPC分类号： H04N1/0283 ,  B23K26/08 ,  B23K26/082 ,  G02B26/10 ,  H04N1/024

摘要： A light beam scanning apparatus comprises a plurality of semiconductor lasers, collimator lenses for converting a plurality of laser beams emitted by the semiconductor lasers into parallel rays, a common converging optical system for converging the laser beams to a common spot, and a common light deflector for deflecting and scanning the laser beams. Or, a light beam scanning apparatus comprises a plurality of semiconductor lasers positioned so that laser beams emitted by the semiconductor lasers focus on a common spot, a plurality of converging optical systems respectively positioned so as to correspond to the semiconductor lasers for converging the laser beams to the spot, and a common light deflector for deflecting and scanning the laser beams.

摘要翻译： 光束扫描装置包括多个半导体激光器，用于将由半导体激光器发射的多个激光束转换为平行光的准直透镜，用于将激光束会聚到公共光点的公共会聚光学系统，以及公共光偏转器 用于偏转和扫描激光束。 或者，光束扫描装置包括多个半导体激光器，其被定位成使得由半导体激光器发射的激光束聚焦在公共点上，多个会聚光学系统分别定位成对应于半导体激光器，用于会聚激光束 以及用于偏转和扫描激光束的公共光偏转器。

公开(公告)号：US4626062A

公开(公告)日：1986-12-02

申请号：US574431

申请日：1984-01-27

申请人： Hiromi Ishikawa

发明人： Hiromi Ishikawa

IPC分类号： G02B26/10 ,  H04N1/113

CPC分类号： G02B26/106

摘要： At least one plane diffraction grating is formed on a rotatable plate, and a light beam is made to impinge upon the plane diffraction grating. The first-order diffracted light component and the minus first-order diffracted light component of the light beam diffracted by the plane diffraction grating are reflected by use of many plane reflection surfaces and guided again to the plane diffraction grating so that, after the reflected light beams are diffracted again by the plane diffraction grating, the light beams diffracted again become parallel with the original light beam incident on the plane diffraction grating. The parallel light beams diffracted again are focused by a focusing lens onto a scanning surface, so that the scanning surface is scanned with the focused light spot along a bow-free straight scan line as the rotatable plate is rotated.

摘要翻译： 在可旋转板上形成至少一个平面衍射光栅，使光束撞击平面衍射光栅。 由平面衍射光栅衍射的光束的一级衍射光分量和负一级衍射光分量通过使用许多平面反射表面反射并再次被引导到平面衍射光栅，使得在反射光 光束被平面衍射光栅再次衍射，光束再次衍射成与入射在平面衍射光栅上的原始光束平行。 再次衍射的平行光束被聚焦透镜聚焦到扫描表面上，使得当可旋转板旋转时，扫描表面被沿着无弓直线扫描线的聚焦光点扫描。

公开(公告)号：US20080158532A1

公开(公告)日：2008-07-03

申请号：US11813814

申请日：2006-01-06

申请人： Hiromi Ishikawa

发明人： Hiromi Ishikawa

IPC分类号： G03B27/34 ,  G02B27/10

CPC分类号： G03F7/70916 ,  G02B6/4249 ,  G03F7/70275 ,  G03F7/70291 ,  G03F7/70808

摘要： In an image exposing apparatus that includes: a spatial optical modulation device having multitudes of pixel sections arranged two-dimensionally, each for modulating irradiated light; a light source for irradiating light on the spatial optical modulation device; and an image focusing optical system for focusing an image represented by the light modulated by the spatial optical modulation device on a photosensitive material, which includes image focusing lenses, and a microlens array disposed such that a plurality of microlenses are positioned at the image location of each of the pixel sections focused by the image focusing lenses, degradation in the image quality of an exposed image due to dust adhered to the microlens array is prevented by accommodating the microlens array in a housing having two transparent sections for transmitting the light to be passed through the microlens array and the light passed through the array.

摘要翻译： 一种图像曝光装置，包括：空间光调制装置，其具有二维排列的多个像素部，每个用于调制照射光; 用于在所述空间光调制装置上照射光的光源; 以及用于将由空间光调制装置调制的光表示的图像聚焦在包括图像聚焦透镜的感光材料上的图像聚焦光学系统和布置成使得多个微透镜位于图像位置处的微透镜阵列 通过图像聚焦透镜聚焦的每个像素部分，通过将微透镜阵列容纳在具有两个透明部分的壳体中来防止由于附着在微透镜阵列上的灰尘引起的曝光图像的图像质量的劣化，用于透射要通过的光 通过微透镜阵列和光穿过阵列。