公开(公告)号：US06784508B2

公开(公告)日：2004-08-31

申请号：US09803265

申请日：2001-03-09

申请人： Yoshitaka Tsunashima ,  Seiji Inumiya ,  Yasumasa Suizu ,  Yoshio Ozawa ,  Kiyotaka Miyano ,  Masayuki Tanaka

发明人： Yoshitaka Tsunashima ,  Seiji Inumiya ,  Yasumasa Suizu ,  Yoshio Ozawa ,  Kiyotaka Miyano ,  Masayuki Tanaka

IPC分类号： H01L2978

CPC分类号： H01L21/82345 ,  H01L21/28088 ,  H01L21/28185 ,  H01L21/28194 ,  H01L21/28202 ,  H01L21/28211 ,  H01L21/31604 ,  H01L21/823462 ,  H01L21/823475 ,  H01L29/4966 ,  H01L29/513 ,  H01L29/517 ,  H01L29/518 ,  H01L29/66545 ,  H01L29/6656

摘要： Claimed and disclosed is a semiconductor device including a transistor having a gate insulating film structure containing nitrogen or fluorine in a compound, such as metal silicate, containing metal, silicon and oxygen, a gate insulating film structure having a laminated structure of an amorphous metal oxide film and metal silicate film, or a gate insulating film structure having a first gate insulating film including an oxide film of a first metal element and a second gate insulating film including a metal silicate film of a second metal element.

摘要翻译： 权利要求和公开的是一种半导体器件，包括具有在包含金属，硅和氧的金属硅酸盐的化合物中含有氮或氟的栅极绝缘膜结构的晶体管，具有非晶态金属氧化物层叠结构的栅极绝缘膜结构 膜和金属硅酸盐膜，或具有包括第一金属元素的氧化物膜的第一栅极绝缘膜和包括第二金属元素的金属硅酸盐膜的第二栅极绝缘膜的栅极绝缘膜结构。

公开(公告)号：US08110865B2

公开(公告)日：2012-02-07

申请号：US12888140

申请日：2010-09-22

申请人： Masayuki Tanaka ,  Daisuke Nishida ,  Ryota Fujitsuka ,  Katsuyuki Sekine ,  Akihito Yamamoto ,  Katsuaki Natori ,  Yoshio Ozawa

发明人： Masayuki Tanaka ,  Daisuke Nishida ,  Ryota Fujitsuka ,  Katsuyuki Sekine ,  Akihito Yamamoto ,  Katsuaki Natori ,  Yoshio Ozawa

IPC分类号： H01L29/788

CPC分类号： H01L29/42324 ,  H01L27/115 ,  H01L27/11521 ,  H01L29/7883

摘要： A semiconductor device includes a semiconductor substrate, a first insulating film formed on the semiconductor substrate, a charge storage layer formed on the first insulating film, a second insulating film formed on the charge storage layer, and a control electrode formed on the second insulating film, the second insulating film including a lower silicon nitride film, a lower silicon oxide film formed on the lower silicon nitride film, an intermediate insulating film formed on the lower silicon oxide film and containing a metal element, the intermediate insulating film having a relative dielectric constant of greater than 7, an upper silicon oxide film formed on the intermediate insulating film, and an upper silicon nitride film formed on the upper silicon oxide film.

摘要翻译： 半导体器件包括半导体衬底，形成在半导体衬底上的第一绝缘膜，形成在第一绝缘膜上的电荷存储层，形成在电荷存储层上的第二绝缘膜，以及形成在第二绝缘膜上的控制电极 ，所述第二绝缘膜包括下氮化硅膜，形成在所述下氮化硅膜上的下氧化硅膜，形成在所述下氧化硅膜上并含有金属元素的中间绝缘膜，所述中间绝缘膜具有相对电介质 大于7的常数，形成在中间绝缘膜上的上部氧化硅膜和形成在上部氧化硅膜上的上部氮化硅膜。

公开(公告)号：US20100136780A1

公开(公告)日：2010-06-03

申请号：US12686005

申请日：2010-01-12

申请人： Katsuaki Natori ,  Masayuki Tanaka ,  Akihito Yamamoto ,  Katsuyuki Sekine ,  Ryota Fujitsuka ,  Daisuke Nishida ,  Yoshio Ozawa

发明人： Katsuaki Natori ,  Masayuki Tanaka ,  Akihito Yamamoto ,  Katsuyuki Sekine ,  Ryota Fujitsuka ,  Daisuke Nishida ,  Yoshio Ozawa

IPC分类号： H01L21/28

CPC分类号： H01L27/11568 ,  H01L27/115 ,  H01L27/11521

摘要： A method of manufacturing a semiconductor device comprising a first insulating film formed on a semiconductor substrate, a charge storage layer formed on the first insulating film, a second insulating film formed on the charge storage layer, and a control electrode formed on the second insulating film, wherein forming the second insulating film comprises forming an insulating film containing silicon using source gas not containing chlorine, and forming an insulating film containing oxygen and a metal element on the insulating film containing silicon.

摘要翻译： 一种制造半导体器件的方法，包括形成在半导体衬底上的第一绝缘膜，形成在第一绝缘膜上的电荷存储层，形成在电荷存储层上的第二绝缘膜，以及形成在第二绝缘膜上的控制电极 其中，形成所述第二绝缘膜包括使用不含氯的源气体形成含硅的绝缘膜，以及在含有硅的绝缘膜上形成含有氧和金属元素的绝缘膜。

公开(公告)号：US07612404B2

公开(公告)日：2009-11-03

申请号：US11783933

申请日：2007-04-13

申请人： Akihito Yamamoto ,  Masayuki Tanaka ,  Katsuyuki Sekine ,  Daisuke Nishida ,  Ryota Fujisuka ,  Katsuaki Natori ,  Hirokazu Ishida ,  Yoshio Ozawa

发明人： Akihito Yamamoto ,  Masayuki Tanaka ,  Katsuyuki Sekine ,  Daisuke Nishida ,  Ryota Fujisuka ,  Katsuaki Natori ,  Hirokazu Ishida ,  Yoshio Ozawa

IPC分类号： H01L29/788

CPC分类号： H01L29/7883 ,  H01L27/115 ,  H01L27/11521 ,  H01L29/42336 ,  H01L29/513

摘要： A semiconductor device includes semiconductor substrate, isolation insulating film, nonvolatile memory cells, each of the cells including tunnel insulating film, FG electrode, CG electrode, interelectrode insulating film between the CG and FG electrodes and including a first insulating film and a second insulating film on the first insulating film and having higher permittivity than the first insulating film, the interelectrode insulating film being provided on a side wall of the floating gate electrode in a cross-section view of a channel width direction of the cell, thickness of the interelectrode insulating film increasing from an upper portion of the side wall toward a lower portion of the side wall, thickness of the second insulating film on an upper corner of the FG electrode being thicker than thickness of the second insulating film on the other portions of the side wall in the cross-section view of the channel width direction.

摘要翻译： 半导体器件包括半导体衬底，隔离绝缘膜，非易失性存储单元，每个单元包括隧道绝缘膜，FG电极，CG电极，CG和FG电极之间的电极间绝缘膜，并且包括第一绝缘膜和第二绝缘膜 在第一绝缘膜上并且具有比第一绝缘膜高的介电常数，电极间绝缘膜设置在浮栅电极的侧壁上，在电池的沟道宽度方向的横截面图中，绝缘电极的绝缘层的厚度 膜从侧壁的上部向侧壁的下部增加，FG电极的上角上的第二绝缘膜的厚度比侧壁的其他部分上的第二绝缘膜的厚度厚 在通道宽度方向的横截面视图中。

公开(公告)号：US20090233451A1

公开(公告)日：2009-09-17

申请号：US12471830

申请日：2009-05-26

申请人： Yoshitaka Tsunashima ,  Seiji Ihumiya ,  Yasumasa Suizu ,  Yoshio Ozawa ,  Kiyotaka Miyano ,  Masayuki Tanaka

发明人： Yoshitaka Tsunashima ,  Seiji Ihumiya ,  Yasumasa Suizu ,  Yoshio Ozawa ,  Kiyotaka Miyano ,  Masayuki Tanaka

IPC分类号： H01L21/31

CPC分类号： H01L21/82345 ,  H01L21/28088 ,  H01L21/28185 ,  H01L21/28194 ,  H01L21/28202 ,  H01L21/28211 ,  H01L21/31604 ,  H01L21/823462 ,  H01L21/823475 ,  H01L29/4966 ,  H01L29/513 ,  H01L29/517 ,  H01L29/518 ,  H01L29/66545 ,  H01L29/6656

摘要： Claimed and disclosed is a semiconductor device including a transistor having a gate insulating film structure containing nitrogen or fluorine in a compound, such as metal silicate, containing metal, silicon and oxygen, a gate insulating film structure having a laminated structure of an amorphous metal oxide film and metal silicate film, or a gate insulating film structure having a first gate insulating film including an oxide film of a first metal element and a second gate insulating film including a metal silicate film of a second metal element.

摘要翻译： 权利要求和公开的是一种半导体器件，包括具有在包含金属，硅和氧的金属硅酸盐的化合物中含有氮或氟的栅极绝缘膜结构的晶体管，具有非晶态金属氧化物层叠结构的栅极绝缘膜结构 膜和金属硅酸盐膜，或具有包括第一金属元素的氧化物膜的第一栅极绝缘膜和包括第二金属元素的金属硅酸盐膜的第二栅极绝缘膜的栅极绝缘膜结构。

公开(公告)号：US07372113B2

公开(公告)日：2008-05-13

申请号：US10880508

申请日：2004-07-01

申请人： Masayuki Tanaka ,  Yoshio Ozawa ,  Shigehiko Saida ,  Akira Goda ,  Mitsuhiro Noguchi ,  Yuichiro Mitani ,  Yoshitaka Tsunashima

发明人： Masayuki Tanaka ,  Yoshio Ozawa ,  Shigehiko Saida ,  Akira Goda ,  Mitsuhiro Noguchi ,  Yuichiro Mitani ,  Yoshitaka Tsunashima

IPC分类号： H01L21/314

CPC分类号： H01L21/022 ,  H01L21/0217 ,  H01L21/28176 ,  H01L21/28202 ,  H01L21/28247 ,  H01L21/28282 ,  H01L21/28518 ,  H01L21/3185 ,  H01L21/76838 ,  H01L21/76897 ,  H01L29/513 ,  H01L29/518 ,  H01L29/665 ,  H01L29/6656 ,  H01L29/6659 ,  H01L29/792

摘要： Disclosed is a semiconductor device comprising a semiconductor substrate, a gate electrode, a first insulating film formed between the semiconductor substrate and the gate electrode, and a second insulating film formed along a top surface or a side surface of the gate electrode and including a lower silicon nitride film containing nitrogen, silicon and hydrogen and an upper silicon nitride film formed on the lower silicon nitride film and containing nitrogen, silicon and hydrogen, and wherein a composition ratio N/Si of nitrogen (N) to silicon (Si) in the lower silicon nitride film is higher than that in the upper silicon nitride film.

摘要翻译： 公开了一种半导体器件，包括半导体衬底，栅电极，形成在半导体衬底和栅电极之间的第一绝缘膜，以及沿着栅电极的顶表面或侧表面形成的第二绝缘膜， 包含氮，硅和氢的氮化硅膜和形成在下部氮化硅膜上并含有氮，硅和氢的上部氮化硅膜，并且其中氮（N）与硅（Si）的组成比N / Si在 下氮化硅膜比上述氮化硅膜高。

公开(公告)号：US07368780B2

公开(公告)日：2008-05-06

申请号：US11763070

申请日：2007-06-14

申请人： Masayuki Tanaka ,  Yoshio Ozawa ,  Hirokazu Ishida ,  Katsuaki Natori ,  Seiji Inumiya

发明人： Masayuki Tanaka ,  Yoshio Ozawa ,  Hirokazu Ishida ,  Katsuaki Natori ,  Seiji Inumiya

IPC分类号： H01L29/788

CPC分类号： H01L29/7881 ,  G11C16/0483 ,  H01L21/28273 ,  H01L27/115 ,  H01L27/11521 ,  H01L29/42324 ,  H01L29/513

摘要： A semiconductor memory device includes a semiconductor substrate, an isolation insulation film filled in a plurality of trenches formed in the semiconductor substrate to define a plurality of element formation regions, a floating gate of polysilicon provided on each of the element formation regions through a first insulation film, a second insulation film, provided on the floating gate, containing a metal element, a control gate of polysilicon, provided on the second insulation film, and source/drain regions provided in the semiconductor substrate, both a polysilicon conductive layer containing a metal element and a mutual diffusion layer composed of a silicate layer of a mixed oxide material composed of a silicon element contained in the floating gate and the control gate and a metal element contained in the second insulation film are provided on a surface of each of the floating gate and the control gate, respectively.

摘要翻译： 半导体存储器件包括半导体衬底，隔离绝缘膜，填充在形成于半导体衬底中的多个沟槽中，以限定多个元件形成区域;多晶硅浮置栅极，通过第一绝缘层设置在每个元件形成区域上; 设置在浮置栅极上的第二绝缘膜，包含设置在第二绝缘膜上的金属元件，多晶硅控制栅极和设置在半导体衬底中的源极/漏极区域，包含金属的多晶硅导电层 元件和由浮置栅极中包含的硅元素和控制栅极组成的混合氧化物材料的硅酸盐层和包含在第二绝缘膜中的金属元素构成的互扩散层设置在每个浮动栅极的表面上 门和控制门。

公开(公告)号：US20080017914A1

公开(公告)日：2008-01-24

申请号：US11822437

申请日：2007-07-05

申请人： Katsuaki Natori ,  Masayuki Tanaka ,  Katsuyuki Sekine ,  Hirokazu Ishida ,  Masumi Matsuzaki ,  Yoshio Ozawa

发明人： Katsuaki Natori ,  Masayuki Tanaka ,  Katsuyuki Sekine ,  Hirokazu Ishida ,  Masumi Matsuzaki ,  Yoshio Ozawa

IPC分类号： H01L29/788

CPC分类号： H01L27/115 ,  H01L27/11521

摘要： There is disclosed a semiconductor device including a plurality of memory cell transistors, each memory cell transistor including a floating gate electrode isolated from each other via an isolation insulating film every memory cell transistor, an inter-electrode insulating film comprising a HfxAl1-xOy film (0.8≦x≦0.95) formed on the floating gate electrode, and a control gate electrode formed on the inter-electrode insulating film, wherein the memory cell transistors are arrayed to form a memory cell array.

摘要翻译： 公开了一种包括多个存储单元晶体管的半导体器件，每个存储单元晶体管包括通过每个存储单元晶体管的隔离绝缘膜彼此隔离的浮栅，包括Hf x 形成在浮置栅电极上的Al 1-x O O y O y膜（0.8 <= x <= 0.95），以及形成在栅极上的控制栅电极 - 电极绝缘膜，其中存储单元晶体管被排列以形成存储单元阵列。

公开(公告)号：US20070241388A1

公开(公告)日：2007-10-18

申请号：US11783933

申请日：2007-04-13

申请人： Akihito Yamamoto ,  Masayuki Tanaka ,  Katsuyuki Sekine ,  Daisuke Nishida ,  Ryota Fujitsuka ,  Katsuaki Natori ,  Hirokazu Ishida ,  Yoshio Ozawa

发明人： Akihito Yamamoto ,  Masayuki Tanaka ,  Katsuyuki Sekine ,  Daisuke Nishida ,  Ryota Fujitsuka ,  Katsuaki Natori ,  Hirokazu Ishida ,  Yoshio Ozawa

IPC分类号： H01L29/76

CPC分类号： H01L29/7883 ,  H01L27/115 ,  H01L27/11521 ,  H01L29/42336 ,  H01L29/513

摘要： A semiconductor device includes semiconductor substrate, isolation insulating film, nonvolatile memory cells, each of the cells including tunnel insulating film, FG electrode, CG electrode, interelectrode insulating film between the CG and FG electrodes and including a first insulating film and a second insulating film on the first insulating film and having higher permittivity than the first insulating film, the interelectrode insulating film being provided on a side wall of the floating gate electrode in a cross-section view of a channel width direction of the cell, thickness of the interelectrode insulating film increasing from an upper portion of the side wall toward a lower portion of the side wall, thickness of the second insulating film on an upper corner of the FG electrode being thicker than thickness of the second insulating film on the other portions of the side wall in the cross-section view of the channel width direction.

摘要翻译： 半导体器件包括半导体衬底，隔离绝缘膜，非易失性存储单元，每个单元包括隧道绝缘膜，FG电极，CG电极，CG和FG电极之间的电极间绝缘膜，并且包括第一绝缘膜和第二绝缘膜 在第一绝缘膜上并且具有比第一绝缘膜高的介电常数，电极间绝缘膜设置在浮栅电极的侧壁上，在电池的沟道宽度方向的横截面图中，绝缘电极的绝缘层的厚度 膜从侧壁的上部向侧壁的下部增加，FG电极的上角上的第二绝缘膜的厚度比侧壁的其他部分上的第二绝缘膜的厚度厚 在通道宽度方向的横截面视图中。

公开(公告)号：US20070183208A1

公开(公告)日：2007-08-09

申请号：US11653278

申请日：2007-01-16

申请人： Masayuki Tanaka ,  Ryota Fujitsuka ,  Katsuyuki Sekine ,  Yoshio Ozawa ,  Daisuke Nishida

发明人： Masayuki Tanaka ,  Ryota Fujitsuka ,  Katsuyuki Sekine ,  Yoshio Ozawa ,  Daisuke Nishida

IPC分类号： G11C11/34 ,  G11C16/04 ,  G11C16/06

CPC分类号： G11C16/3418 ,  G11C16/0483 ,  G11C16/3427 ,  G11C16/3454

摘要： A plurality of memory cell transistors each of which has a gate structure having a floating gate electrode formed of a first conductive film and stacked on an element region surrounded by an element isolation region on a silicon substrate with a first insulating film disposed therebetween and a control gate electrode formed of a second conductive film and stacked on the first conductive film with a second insulating film with a large dielectric constant disposed therebetween are arranged in a memory cell array. A detrap pulse supply circuit generates and supplies a detrap pulse signal to the control gate electrode of the memory cell transistor to extract charges from the second insulating film after data is written into each of the memory cell transistors.

摘要翻译： 多个存储单元晶体管，每个存储单元晶体管具有栅极结构，该栅极结构具有由第一导电膜形成并浮置在由硅衬底上的元件隔离区域围绕的元件区域上的浮置栅电极，其间设置有第一绝缘膜， 在存储单元阵列中布置由第二导电膜形成的层叠在具有介电常数大的第二绝缘膜的第一导电膜上的栅电极。 去除脉冲电源电路产生并提供去除脉冲信号到存储单元晶体管的控制栅电极，以便在将数据写入每个存储单元晶体管之后从第二绝缘膜提取电荷。