Phase shift mask and method of producing the same

    公开(公告)号:US5811208A

    公开(公告)日:1998-09-22

    申请号:US691369

    申请日:1996-08-02

    IPC分类号: H01L21/027 G03F1/32 G03F9/00

    CPC分类号: G03F1/32

    摘要: A phase shift mask, e.g. a halftone phase shift mask, which need not to form an ultra-fine pattern and is capable of suppressing during exposure the occurrence of a sub-peak of light intensity, which has an adverse effect on the image formation, and which has a light-blocking pattern with a reduced transmittance at a region outside a device pattern area which corresponds to a region subjected to multiple exposure during transfer effected by using the mask. The halftone phase shift mask has on a transparent substrate (101) a halftone phase shift film (102) comprising a single layer or a plurality of layers. The composition of the halftone phase shift film (102) is changed in a region (107) outside a device pattern area on the transparent substrate (101) which corresponds to a multiple-exposure region by a method wherein the region (107) is irradiated with an electromagnetic wave, a particle beam, heat rays, etc., or a method wherein after a region in which the composition is not desired to change has been masked, the whole blank is exposed to an active atmosphere, thereby reducing the transmittance for exposure light at the region (107).

    Solid oxide fuel cell
    53.
    发明授权
    Solid oxide fuel cell 失效
    固体氧化物燃料电池

    公开(公告)号:US07517601B2

    公开(公告)日:2009-04-14

    申请号:US10730013

    申请日:2003-12-09

    IPC分类号: H01M8/10 H01M8/24

    摘要: A fuel cell including at least one single cell C having an electrolyte 3, a fuel electrode 5, and an air electrode 7, wherein the single cell C is supported on a substrate 1 and the electrolyte 3 is disposed on a first surface of the substrate 1, with the fuel electrode 5 and the air electrode 7 disposed on the first surface of the substrate 1 so as to sandwich the electrolyte 3.

    摘要翻译: 一种燃料电池,其包括具有电解质3的至少一个单电池C,燃料电极5和空气电极7,其中单电池C被支撑在基板1上,电解质3设置在基板的第一表面上 如图1所示,燃料电极5和空气电极7设置在基板1的第一表面上,以夹持电解质3。

    Transition metal complex and process for producing optically active alcohol
    54.
    发明授权
    Transition metal complex and process for producing optically active alcohol 有权
    过渡金属络合物和光学活性醇的制备方法

    公开(公告)号:US07473793B2

    公开(公告)日:2009-01-06

    申请号:US11353533

    申请日:2006-02-13

    IPC分类号: C07F15/00 C07C29/14

    摘要: A novel transition metal complex, preferably a ruthenium-phosphine complex or rhodium-phosphine complex, which is effectively usable in various asymmetric syntheses and, in particular, is more effectively usable in the asymmetric hydrogenation of various ketones; and a novel process for producing an optically active alcohol with the complex. The novel transition metal complex includes a ligand obtained by introducing a diarylphosphino group into each of the 2- and 2′-positions of diphenyl ether, benzophenone, benzhydrol, or the like. It preferably further includes an optically active 1,2-diphenylethylenediamine coordinated thereto. The complex preferably is a novel diphosphine-ruthenium-optically active diamine complex or diphosphine-rhodium-optically active diamine complex. The process comprises using the complex as an asymmetric hydrogenation catalyst to conduct the asymmetric hydrogenation of a ketone compound to thereby obtain an optically active alcohol in a high optical purity and a high yield.

    摘要翻译: 一种新颖的过渡金属络合物,优选钌膦络合物或铑 - 膦配合物,其可有效地用于各种不对称合成,特别是更有效地用于各种酮的不对称氢化; 以及用该复合物生产光学活性醇的新方法。 新型过渡金属络合物包括通过将二芳基膦基引入二苯基醚,二苯甲酮,二苯甲醇等的2位和2位中的每一个得到的配位体。 其优选还包括与其配位的光学活性1,2-二苯基乙二胺。 络合物优选为新型二膦 - 钌 - 光学活性二胺络合物或二膦 - 铑光学活性二胺络合物。 该方法包括使用络合物作为不对称氢化催化剂进行酮化合物的不对称氢化,从而获得高光学纯度和高收率的光学活性醇。

    Reflecting plate-equipped planar antenna
    57.
    发明申请
    Reflecting plate-equipped planar antenna 失效
    反射板装平面天线

    公开(公告)号:US20060238432A1

    公开(公告)日:2006-10-26

    申请号:US10530135

    申请日:2004-06-22

    IPC分类号: H01Q9/28

    摘要: A planar antenna fitted with a reflector of small shape and small depth. A reflector 21 of planar shape is provided at the rear face of a radiator 20 of planar shape made of a triangular loop element. The side sections 21b on both sides of the reflector 21 are bent towards the radiator 20 and the separation α2 between the leading edges of the side sections 21b and the side edges of the radiator 20 is thereby reduced. In this way, an excellent electrical characteristic of the planar antenna 2 fitted with a reflector and can be achieved by reducing the separation D2 of the radiator 20 and reflector 21.

    摘要翻译: 一种平面天线,其装配有小形状和小深度的反射器。 平面形状的反射器21设置在由三角形环形元件制成的平面形状的散热器20的后表面。 反射器21的两侧的侧部21b被朝向散热器20弯曲,从而减小侧部21b的前缘与散热器20的侧缘之间的分离α2。 这样,搭载有反射体的平面天线2的电气特性良好,能够减小散热器20和反射体21的分离距离D 2。

    Phase shift layer-containing photomask, and its production and correction
    59.
    发明授权
    Phase shift layer-containing photomask, and its production and correction 失效
    含相移层的光掩模及其生产和校正

    公开(公告)号:US5614336A

    公开(公告)日:1997-03-25

    申请号:US337136

    申请日:1994-11-10

    IPC分类号: G03F1/00 G03F9/00

    摘要: The present invention relates particularly to a process for producing phase shift layer-containing photomasks, which can produce phase shift photomasks through a reduced or limited number of steps to reduce or limit the incidence of phase shifter pattern deficiencies or other defects and at lower costs as well.For instance, a photomask blank of the structure that a substrate is provided thereon with an electrically conductive layer and a light-shielding thin film in this order is used to coat a starting material for spin-on-glass uniformly on a light-shielding pattern formed thereon. A pattern is directly drawn on the coated spin-on-glass layer with energy beams emanating from electron beam exposure hardware, etc., and the substrate is developed with a solvent after pattern drawing with energy beams to wash off an excessive spin-on-glass portion other than the spin-on-glass layer irradiated with the ionizing radiations. Finally, the post-development substrate is baked to form a phase shifter pattern.

    摘要翻译: 本发明特别涉及一种用于生产含相移层的光掩模的方法,其可以通过减少或限制数量的步骤产生相移光掩模,以减少或限制移相器图案缺陷或其它缺陷的发生,并以较低的成本 好。 例如,使用具有依次设置有导电层和遮光薄膜的基板的结构的光掩模坯料,以均匀地在遮光图案上涂布旋涂玻璃原料 形成在其上。 通过电子束曝光硬件等发出的能量束,直接在涂覆的旋涂玻璃层上绘制图案,在用能量束进行图案绘制之后,用溶剂对基板进行显影,以洗涤过量的自旋 - 除了用电离辐射照射的旋涂玻璃层以外的玻璃部分。 最后,烘烤后显影衬底以形成移相器图案。

    Process for producing optically active alpha-hydroxycarboxylates
    60.
    发明授权
    Process for producing optically active alpha-hydroxycarboxylates 失效
    光学活性α-羟基羧酸盐的制备方法

    公开(公告)号:US4965398A

    公开(公告)日:1990-10-23

    申请号:US386480

    申请日:1989-07-28

    CPC分类号: C07C69/732

    摘要: A process for preparing an .alpha.-hydroxycarboxylate represented by formula (I): ##STR1## wherein R.sup.1 represents a hydrogen atom or a lower alkyl group; R.sup.2 represents a lower alkyl group, a phenyl group or a cycloalkyl group, or R.sup.1 and R.sup.2 are bonded to each other to form a five- to seven-membered cycloalkenyl or bicycloalkenyl ring which may be substituted with a lower alkyl group; and R.sup.3 represents a lower alkyl group,which comprises reacting an olefin compound represented by formula (II): ##STR2## wherein R.sup.1 ' represents a hydrogen atom or a lower alkyl group; and R.sup.2 ' represents a lower alkyl group, a phenyl group or a cycloalkyl group, or R.sup.1 ' and R.sup.2 ' are bonded to each other to form a five- to seven-membered cycloalkyl or bicycloalkyl ring which may be substituted with a lower alkyl group,with a glyoxylate represented by formula (III): ##STR3## wherein R.sup.3 is as defined above, in the presence of a binaphthol-titanium complex represented by formula (IV): ##STR4## wherein X represents a chlorine atom or bromine atom.