摘要:
A phase shift mask, e.g. a halftone phase shift mask, which need not to form an ultra-fine pattern and is capable of suppressing during exposure the occurrence of a sub-peak of light intensity, which has an adverse effect on the image formation, and which has a light-blocking pattern with a reduced transmittance at a region outside a device pattern area which corresponds to a region subjected to multiple exposure during transfer effected by using the mask. The halftone phase shift mask has on a transparent substrate (101) a halftone phase shift film (102) comprising a single layer or a plurality of layers. The composition of the halftone phase shift film (102) is changed in a region (107) outside a device pattern area on the transparent substrate (101) which corresponds to a multiple-exposure region by a method wherein the region (107) is irradiated with an electromagnetic wave, a particle beam, heat rays, etc., or a method wherein after a region in which the composition is not desired to change has been masked, the whole blank is exposed to an active atmosphere, thereby reducing the transmittance for exposure light at the region (107).
摘要:
A method for producing an optically active fluorine-containing oxeten, the method being provided to include the steps of causing a fluorine-containing α-ketoester and an internal alkyne to react with each other in the presence of a transition metal complex that has an optically active ligand.
摘要:
A fuel cell including at least one single cell C having an electrolyte 3, a fuel electrode 5, and an air electrode 7, wherein the single cell C is supported on a substrate 1 and the electrolyte 3 is disposed on a first surface of the substrate 1, with the fuel electrode 5 and the air electrode 7 disposed on the first surface of the substrate 1 so as to sandwich the electrolyte 3.
摘要:
A novel transition metal complex, preferably a ruthenium-phosphine complex or rhodium-phosphine complex, which is effectively usable in various asymmetric syntheses and, in particular, is more effectively usable in the asymmetric hydrogenation of various ketones; and a novel process for producing an optically active alcohol with the complex. The novel transition metal complex includes a ligand obtained by introducing a diarylphosphino group into each of the 2- and 2′-positions of diphenyl ether, benzophenone, benzhydrol, or the like. It preferably further includes an optically active 1,2-diphenylethylenediamine coordinated thereto. The complex preferably is a novel diphosphine-ruthenium-optically active diamine complex or diphosphine-rhodium-optically active diamine complex. The process comprises using the complex as an asymmetric hydrogenation catalyst to conduct the asymmetric hydrogenation of a ketone compound to thereby obtain an optically active alcohol in a high optical purity and a high yield.
摘要:
There are provided a gas barrier laminated film, which is transparent while possessing excellent gas barrier properties and, at the same time, has excellent impact resistance, and a process for producing the same. The gas barrier laminated film comprises a base material, a vapor deposited film of an inorganic oxide provided on the base material, and a gas barrier coating film provided on the vapor deposited film. The gas barrier laminated film is characterized in that the base material on its side where the vapor deposited film is provided, has been subjected to pretreatment or primer coating treatment, and the gas barrier coating film has been formed by coating a gas barrier coating liquid onto the inorganic oxide film and then heating the coating.
摘要:
The solid oxide fuel cell of the present invention has a substrate (1); an electrolyte (3) that is disposed on one surface of the substrate (1); and at least one electrode element E having an anode (5) and a cathode (7) disposed on the same surface of the electrolyte (3) with a predetermined space therebetween.
摘要:
A planar antenna fitted with a reflector of small shape and small depth. A reflector 21 of planar shape is provided at the rear face of a radiator 20 of planar shape made of a triangular loop element. The side sections 21b on both sides of the reflector 21 are bent towards the radiator 20 and the separation α2 between the leading edges of the side sections 21b and the side edges of the radiator 20 is thereby reduced. In this way, an excellent electrical characteristic of the planar antenna 2 fitted with a reflector and can be achieved by reducing the separation D2 of the radiator 20 and reflector 21.
摘要:
An apparatus for bending a workpiece comprises a stretching device for stretching the workpiece. In the process for bending the workpiece, an inclination angle made by a direction a tension force is acted to the workpiece and a direction a stretching forth is applied to the workpiece by the stretching member is detected. The tension force acted to the workpiece is controlled in such a manner that the stretching force from the stretching member is controlled in consideration of the inclination angle. Accordingly, the amount of the spring back after bending is uniform and an accuracy of the dimension of the bent workpiece is improved.
摘要:
The present invention relates particularly to a process for producing phase shift layer-containing photomasks, which can produce phase shift photomasks through a reduced or limited number of steps to reduce or limit the incidence of phase shifter pattern deficiencies or other defects and at lower costs as well.For instance, a photomask blank of the structure that a substrate is provided thereon with an electrically conductive layer and a light-shielding thin film in this order is used to coat a starting material for spin-on-glass uniformly on a light-shielding pattern formed thereon. A pattern is directly drawn on the coated spin-on-glass layer with energy beams emanating from electron beam exposure hardware, etc., and the substrate is developed with a solvent after pattern drawing with energy beams to wash off an excessive spin-on-glass portion other than the spin-on-glass layer irradiated with the ionizing radiations. Finally, the post-development substrate is baked to form a phase shifter pattern.
摘要:
A process for preparing an .alpha.-hydroxycarboxylate represented by formula (I): ##STR1## wherein R.sup.1 represents a hydrogen atom or a lower alkyl group; R.sup.2 represents a lower alkyl group, a phenyl group or a cycloalkyl group, or R.sup.1 and R.sup.2 are bonded to each other to form a five- to seven-membered cycloalkenyl or bicycloalkenyl ring which may be substituted with a lower alkyl group; and R.sup.3 represents a lower alkyl group,which comprises reacting an olefin compound represented by formula (II): ##STR2## wherein R.sup.1 ' represents a hydrogen atom or a lower alkyl group; and R.sup.2 ' represents a lower alkyl group, a phenyl group or a cycloalkyl group, or R.sup.1 ' and R.sup.2 ' are bonded to each other to form a five- to seven-membered cycloalkyl or bicycloalkyl ring which may be substituted with a lower alkyl group,with a glyoxylate represented by formula (III): ##STR3## wherein R.sup.3 is as defined above, in the presence of a binaphthol-titanium complex represented by formula (IV): ##STR4## wherein X represents a chlorine atom or bromine atom.