Method for forming deposited film
    51.
    发明授权
    Method for forming deposited film 失效
    沉积膜形成方法

    公开(公告)号:US4683145A

    公开(公告)日:1987-07-28

    申请号:US722134

    申请日:1985-04-11

    摘要: A method of forming a deposited film comprises forming a gaseous atmosphere of at least one silicon compound selected from those having the formula (A), (B) or (C) as shown below in a deposition chamber in which a substrate is arranged, and exciting and decomposing said compound by utilization of light energy thereby to form a desired film containing silicon atoms on said substrate: ##STR1## wherein l represents 3, 4 or 5; and R represents H or SiH.sub.3 ; ##STR2## wherein R.sup.1 and R.sup.2 independently represent H or an alkyl group having 1 to 3 carbon atoms; m an integer of 3 to 7; and n an integer of 1 to 11;R.sup.1 --(Si.multidot.R.sup.2 R.sup.3).sub.p --R.sup.4 (c)wherein R.sup.1 and R.sup.4 independently represent a phenyl or naphthyl group which may be substituted with halogens, or an alkyl group having 1 to 11 carbon atoms; R.sup.2 and R.sup.3 independently represent H or CH.sub.3 ; and p represents an integer of 3 to 7.

    摘要翻译: 形成沉积膜的方法包括在其中布置基材的沉积室中形成选自具有如下所示的式(A),(B)或(C)的那些的至少一种硅化合物的气态气氛,以及 通过利用光能来激发和分解所述化合物,从而在所述基底上形成含有硅原子的所需膜;(A)其中l代表3,4或5; R表示H或SiH 3; (B)其中R1和R2独立地表示H或具有1至3个碳原子的烷基; m为3〜7的整数; n为1〜11的整数。 R1-(SixR2R3)p-R4(c)其中R1和R4独立地表示可被卤素取代的苯基或萘基或具有1至11个碳原子的烷基; R2和R3独立地表示H或CH3; p表示3〜7的整数。

    Support member
    53.
    发明授权
    Support member 失效
    支持会员

    公开(公告)号:US4078935A

    公开(公告)日:1978-03-14

    申请号:US573232

    申请日:1975-04-30

    IPC分类号: G03C1/85 G03C1/78 G03C1/96

    CPC分类号: G03C1/853 Y10T428/256

    摘要: A support member comprising a polymer material and a transparent and electrically conductive metal oxide semi-conductor layer on the polymer material. Alternatively, the support member comprises a polymer material, and a transparent and electrically conductive metal oxide semi-conductor layer and a metal fluoride layer on the polymer material. The support member can be used as a support for a photographic member.

    摘要翻译: 支撑构件,其包括聚合物材料和在聚合物材料上的透明和导电的金属氧化物半导体层。 或者,支撑构件包括聚合物材料,以及在聚合物材料上的透明和导电的金属氧化物半导体层和金属氟化物层。 支撑构件可以用作照相构件的支撑。