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51.发明授权Exposure apparatus and method using pulsed light and changing means to control both the light intensity and light emission timing 失效使用脉冲光的曝光装置和方法以及用于控制光强度和发光定时的改变装置
公开(公告)号：US5914773A
公开(公告)日：1999-06-22
申请号：US668459
申请日：1996-06-25
CPC分类号： G03F7/70358 , G03F7/70041 , G03F7/70558
摘要： An exposure apparatus and device manufacturing method having structure and steps for projecting, for scan exposure of a substrate through an original, a plurality of light pulses from a pulse light source to the substrate through the original, changing an emitted light intensity of light pulses from the pulse light source during the scan exposure, and changing timing of light emission from the pulse light source during the scan exposure, whereby both the emitted light intensity and the timing of light pulses may be controlled during the scan exposure.
摘要翻译： 一种具有以下步骤的曝光装置和装置的制造方法：用于通过原件将基板通过原稿扫描曝光，将多个光脉冲从脉冲光源投射到基板，通过原稿将光脉冲的发射光强度从 扫描曝光期间的脉冲光源，以及在扫描曝光期间改变来自脉冲光源的发光定时，由此在扫描曝光期间可以控制发射的光强度和光脉冲的定时。
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公开(公告)号：US5883701A
公开(公告)日：1999-03-16
申请号：US717349
申请日：1996-09-20
CPC分类号： G03F7/70691 , G03F7/70358 , G03F9/70
摘要： A scanning projection exposure apparatus includes an illumination optical system for illuminating an original with pulse light, a projection optical system for projecting a pattern of the original, illuminated with the pulse light, onto a substrate, a moving device for moving the original and the substrate relative to each other, a position measuring device for measuring a relative positional relation between the original and the substrate, and a controller for discriminating whether the positional relation measured by the position measuring device is in a predetermined range. The discrimination is performed within a period after the moving device initiates the relative movement of the original and the substrate and before the illumination optical system initiates the projection exposure with the pulse light. The controller stops the projection exposure with the pulse light from the illumination optical system when the positional relation is discriminated as being out of a predetermined range.
摘要翻译： 扫描投影曝光装置包括用于用脉冲光照射原稿的照明光学系统，将用脉冲光照射的原稿图案投影到基板上的投影光学系统，用于移动原稿和基板的移动装置 相对于彼此，用于测量原稿和基板之间的相对位置关系的位置测量装置，以及用于鉴别由位置测量装置测量的位置关系是否在预定范围内的控制器。 在移动装置启动原稿和基板的相对移动之后的周期内，以及在照明光学系统利用脉冲光开始投影曝光之前的时间段内执行辨别。 当位置关系被识别为超出预定范围时，控制器用来自照明光学系统的脉冲光来停止投影曝光。
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53.发明授权Measuring method and apparatus for measuring system having measurement error changeable with time 失效具有随时间变化的测量误差的测量系统的测量方法和装置
公开(公告)号：US5847974A
公开(公告)日：1998-12-08
申请号：US520641
申请日：1995-08-29
IPC分类号： G01B11/00 , G03F7/20 , G03F9/00 , H01L21/027
CPC分类号： G03F7/70616 , G03F7/70633 , G03F9/70
摘要： A method of measuring information related to an object, includes the steps of measuring a change of a measurement error with respect to time, and determining the frequency of measurements for measuring the measurement error, to be done during a measurement period, on the basis of the change in measurement error. Then, in the measurement period, a measured value is corrected by using a latest measurement error.
摘要翻译： 一种测量与物体有关的信息的方法包括以下步骤：测量测量误差相对于时间的变化，以及在测量期间根据测量时间来确定用于测量测量误差的测量频率 测量误差的变化。 然后，在测量期间，通过使用最新的测量误差来校正测量值。
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公开(公告)号：US5757838A
公开(公告)日：1998-05-26
申请号：US658078
申请日：1996-06-04
CPC分类号： G03F7/70358 , G03F7/70041 , G03F7/70558 , H01S3/134 , H01S3/225
摘要： An output control method for an excimer laser includes providing plural light pulses, and changing an emission interval for the light pulses, wherein the emission interval is controlled so that an average laser output of each light pulse becomes higher than that when the emission interval is unchanged.
摘要翻译： 准分子激光器的输出控制方法包括提供多个光脉冲，并且改变光脉冲的发射间隔，其中控制发射间隔使得每个光脉冲的平均激光输出变得高于发射间隔不变时的平均激光输出 。
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