公开(公告)号：US11177140B2

公开(公告)日：2021-11-16

申请号：US17346574

申请日：2021-06-14

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Brian Cronquist ,  Deepak Sekar

IPC: H01L23/498 ,  H01L21/48 ,  H01L23/34 ,  H01L27/02 ,  H01L21/8234 ,  H01L27/06 ,  H01L27/098 ,  H01L23/522 ,  H01L23/367 ,  H01L27/092 ,  H01L25/00 ,  H01L23/60 ,  H01L25/065 ,  H01L23/373

Abstract: A 3D semiconductor device, the device including: a first level, wherein said first level comprises a first layer, said first layer comprising first transistors, and wherein said first level comprises a second layer, said second layer comprising first interconnections; a second level overlaying said first level, wherein said second level comprises a third layer, said third layer comprising second transistors, and wherein said second level comprises a fourth layer, said fourth layer comprising second interconnections; and a plurality of connection paths, wherein said plurality of connection paths provides connections from a plurality of said first transistors to a plurality of said second transistors, wherein said second level is bonded to said first level, wherein said bonded comprises oxide to oxide bond regions, wherein said bonded comprises metal to metal bond regions, wherein said second level comprises at least one Electrostatic discharge (ESD) circuit.

公开(公告)号：US20210343570A1

公开(公告)日：2021-11-04

申请号：US17372776

申请日：2021-07-12

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Brian Cronquist ,  Deepak C. Sekar

IPC: H01L21/683 ,  H01L21/822 ,  H01L23/525 ,  H01L27/10 ,  H01L27/105 ,  H01L27/108 ,  H01L27/112 ,  H01L29/66 ,  H01L21/74 ,  H01L27/02 ,  H01L27/11 ,  H01L27/118 ,  H01L21/762 ,  H01L21/768 ,  H01L21/8238 ,  H01L27/11551 ,  H01L29/792 ,  H01L27/092 ,  H01L27/11526 ,  H01L27/11529 ,  H01L29/423 ,  H01L29/78 ,  H01L27/06 ,  H01L27/12 ,  H01L29/788 ,  H01L21/84 ,  H01L27/11578 ,  H01L27/11573 ,  G11C8/16 ,  H01L23/48 ,  H01L25/065 ,  H01L23/00 ,  H01L25/00 ,  H01L23/367

Abstract: A method for producing a 3D memory device, the method comprising: providing a first level comprising a first single crystal layer; forming first alignment marks and control circuits comprising first single crystal transistors, wherein said control circuits comprise at least two metal layers; forming at least one second level above said control circuits; performing a first etch step within said second level; forming at least one third level above said at least one second level; performing a second etch step within said third level; and performing additional processing steps to form a plurality of first memory cells within said second level and a plurality of second memory cells within said third level, wherein said first etch step comprises performing a lithography step aligned to said first alignment marks.

公开(公告)号：US20210335751A1

公开(公告)日：2021-10-28

申请号：US17372476

申请日：2021-07-11

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Jin-Woo Han ,  Brian Cronquist

IPC: H01L23/00 ,  H01L25/065 ,  H01L25/00

Abstract: A method to construct a 3D system, the method including: providing a base wafer; transferring a first memory wafer on top of the base wafer; thinning the first memory wafer, thus forming a thin first memory wafer; transferring a second memory wafer on top of the thin first memory wafer; thinning the second memory wafer, thus forming a thin second memory wafer; and transferring a memory control wafer on top of the thin second memory wafer; where the transferring a memory control wafer includes bonding of the memory control wafer to the thin second memory wafer, and where the bonding includes oxide to oxide and conductor to conductor bonding.

公开(公告)号：US11152386B2

公开(公告)日：2021-10-19

申请号：US16483431

申请日：2018-02-03

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Jin-Woo Han ,  Eli Lusky

IPC: H01L29/76 ,  H01L27/11556 ,  H01L21/28 ,  H01L27/11582 ,  H01L29/423

Abstract: A 3D memory device, the device including: a first vertical pillar; a second vertical pillar, where the first vertical pillar and the second vertical pillar function as a source or a drain for a plurality of overlaying horizontally-oriented memory transistors, where the plurality of overlaying horizontally-oriented memory transistors are self-aligned being formed following the same lithography step; and memory control circuits, where the memory control circuits are disposed at least partially directly underneath the plurality of overlaying horizontally-oriented memory transistors, or are disposed at least partially directly above the plurality of overlaying horizontally-oriented memory transistors.

公开(公告)号：US20210313345A1

公开(公告)日：2021-10-07

申请号：US17346295

申请日：2021-06-14

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Jin-Woo Han ,  Eli Lusky

IPC: H01L27/11582 ,  H01L27/11556 ,  H01L27/11519 ,  H01L27/11524 ,  H01L27/11529 ,  H01L27/11565 ,  H01L27/1157 ,  H01L27/11573 ,  G11C7/18

Abstract: A 3D memory device, the device including: a plurality of memory cells, where each memory cell of the plurality of memory cells includes at least one memory transistor, where each of the at least one memory transistor includes a source, a drain, and a channel; and a plurality of bit-line pillars, where each bit-line pillar of the plurality of bit-line pillars is directly connected to a plurality of the source or the drain, where the bit-line pillars are vertically oriented, where the channel is horizontally oriented, and where the channel is isolated from another channel disposed directly above the channel.

公开(公告)号：US20210305063A1

公开(公告)日：2021-09-30

申请号：US17346574

申请日：2021-06-14

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Brian Cronquist ,  Deepak Sekar

IPC: H01L21/48 ,  H01L23/498 ,  H01L23/34 ,  H01L27/02 ,  H01L21/8234 ,  H01L27/06 ,  H01L27/098 ,  H01L23/522 ,  H01L23/367 ,  H01L27/092 ,  H01L25/00 ,  H01L23/60 ,  H01L25/065

Abstract: A 3D semiconductor device, the device including: a first level, wherein said first level comprises a first layer, said first layer comprising first transistors, and wherein said first level comprises a second layer, said second layer comprising first interconnections; a second level overlaying said first level, wherein said second level comprises a third layer, said third layer comprising second transistors, and wherein said second level comprises a fourth layer, said fourth layer comprising second interconnections; and a plurality of connection paths, wherein said plurality of connection paths provides connections from a plurality of said first transistors to a plurality of said second transistors, wherein said second level is bonded to said first level, wherein said bonded comprises oxide to oxide bond regions, wherein said bonded comprises metal to metal bond regions, wherein said second level comprises at least one Electrostatic discharge (ESD) circuit.

公开(公告)号：US11121246B2

公开(公告)日：2021-09-14

申请号：US17222784

申请日：2021-04-05

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach

IPC: H01L29/78 ,  G11C11/4097 ,  H01L27/108 ,  H01L27/24 ,  H01L27/11 ,  G11C16/02 ,  G11C11/404 ,  H01L27/11578 ,  H01L27/115 ,  G11C16/04 ,  G11C11/412

Abstract: A 3D semiconductor device including: a first level including a first single-crystal layer, a plurality of first transistors, and at least one metal layer, the metal layer overlaying the first single crystal layer with interconnects between the first transistors forming control circuits; a second level overlaying the metal layer, a plurality of second transistors, and a plurality of first memory cells including at least one of the second transistors; a third level overlaying the second level and including a plurality of third transistors, including second memory cells each including at least one third transistor, where at least one of the second memory cells is at least partially atop of the control circuits, where the control circuits are connected so to control second transistors and third transistors, where the second level is bonded to the third level and to the first level, where the bonded includes oxide to oxide bonds; and a fourth level above the third level, including a second single-crystal layer.

公开(公告)号：US20210280499A1

公开(公告)日：2021-09-09

申请号：US17313986

申请日：2021-05-06

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Deepak C. Sekar ,  Brian Cronquist

IPC: H01L23/48 ,  H01L27/06 ,  H01L27/088 ,  H01L27/11551 ,  H01L27/108 ,  H01L29/732 ,  H01L27/11526 ,  H01L27/118 ,  H01L29/10 ,  H01L29/808 ,  H01L27/11573 ,  H01L29/66 ,  H01L27/02 ,  H01L27/11578 ,  H01L29/78 ,  H01L21/74 ,  H01L23/544 ,  H01L23/34 ,  H01L23/50

Abstract: A 3D semiconductor device, the device including: a first level including single crystal first transistors, and a first metal layer, where the first level is overlaid by a first isolation layer; a second level including second transistors, where the first isolation layer is overlaid by the second level, and where the second level is overlaid by a second isolation layer; a third level including single crystal third transistors, where the second isolation layer is overlaid by the third level, where the third level is overlaid by a third isolation layer, where the third level is bonded to the second isolation layer, and where the bonded includes at least one oxide to oxide bond.

公开(公告)号：US11107721B2

公开(公告)日：2021-08-31

申请号：US17145338

申请日：2021-01-10

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Brian Cronquist ,  Deepak C. Sekar

IPC: H01L27/11521 ,  H01L27/11524 ,  H01L27/11529 ,  H01L27/11551 ,  H01L27/11578 ,  H01L21/683 ,  H01L21/74 ,  H01L21/762 ,  H01L21/768 ,  H01L21/822 ,  H01L21/8238 ,  H01L21/84 ,  H01L23/48 ,  H01L23/525 ,  H01L27/02 ,  H01L27/06 ,  H01L27/092 ,  H01L27/10 ,  H01L27/105 ,  H01L27/108 ,  H01L27/11 ,  H01L27/112 ,  H01L27/11526 ,  H01L27/11573 ,  H01L27/118 ,  H01L27/12 ,  H01L29/423 ,  H01L29/66 ,  H01L29/78 ,  H01L29/788 ,  H01L29/792 ,  G11C8/16 ,  H01L23/367 ,  H01L25/065 ,  H01L25/00 ,  H01L23/00

Abstract: A 3D semiconductor device, the device including: a first level including a single crystal layer and a plurality of first transistors; a first metal layer including interconnects between the plurality of first transistors, where the interconnects between the plurality of first transistors includes forming a plurality of logic gates; a plurality of second transistors atop at least a portion of the first metal layer, where at least six of the plurality of first transistors are connected in series forming at least a portion of a NAND logic structure, where the plurality of second transistors are vertically oriented transistors, and where the plurality of second transistors are at least partially directly atop of the NAND logic structure; and a second metal layer atop at least a portion of the plurality of second transistors, where the second metal layer is aligned to the first metal layer with less than 150 nm misalignment, and where at least one of the second transistors is a junction-less transistor.

公开(公告)号：US11094576B1

公开(公告)日：2021-08-17

申请号：US17246639

申请日：2021-05-01

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Brian Cronquist ,  Deepak C. Sekar

IPC: H01L21/683 ,  H01L21/74 ,  H01L21/762 ,  H01L21/768 ,  H01L21/822 ,  H01L21/8238 ,  H01L21/84 ,  H01L23/48 ,  H01L23/525 ,  H01L27/02 ,  H01L27/06 ,  H01L27/092 ,  H01L27/10 ,  H01L27/105 ,  H01L27/108 ,  H01L27/11 ,  H01L27/112 ,  H01L27/11526 ,  H01L27/11529 ,  H01L27/11551 ,  H01L27/11573 ,  H01L27/11578 ,  H01L27/118 ,  H01L27/12 ,  H01L29/423 ,  H01L29/66 ,  H01L29/78 ,  H01L29/788 ,  H01L29/792 ,  G11C8/16 ,  H01L23/367 ,  H01L25/065 ,  H01L25/00 ,  H01L23/00

Abstract: A method for producing a 3D memory device, the method including: providing a first level including a first single crystal layer; forming first alignment marks and control circuits including first single crystal transistors; forming at least one second level above the first level; performing a first etch step including etching first holes within the second level; forming at least one third level above the at least one second level; performing a second etch step including etching second holes within the third level; and performing additional processing steps to form a plurality of first memory cells within the second level and a plurality of second memory cells within the third level, where the etching first holes includes performing a lithography step aligned to the first alignment marks.