Devices featuring silicone elastomers

    公开(公告)号:US5217811A

    公开(公告)日:1993-06-08

    申请号:US944026

    申请日:1992-09-11

    CPC classification number: C08K5/5419 Y10T428/31663

    Abstract: Devices are described in which certain crosslinked silicone polymers are incorporated. These polymers have various functions such as encapsulating agents, surface protective agents or agents to index match optical components (e.g. optical fiber, optical waveguide, etc.) to other optical devices or articles. The polymer is a vinyl-terminated dimethyldiphenylsiloxane copolymer crosslinked with tri- or tetrafunctional silanes in the presence of a platinum catalyst. The phenyl group content of the crosslinked silicone copolymer is adjusted to change the index of refraction of the polymer to the optimum for the particular application contemplated. Polymer preparation procedures are described which yield good optical quality for the polymer as well as optimum physical and chemical properties.

    Method of repairing a defective photomask
    65.
    发明授权
    Method of repairing a defective photomask 失效
    修复缺陷光掩模的方法

    公开(公告)号:US4200668A

    公开(公告)日:1980-04-29

    申请号:US939607

    申请日:1978-09-05

    Abstract: A method of repairing pin holes in a defective photomask such as one comprising a patterned chromium film on a glass substrate comprises depositing an adhesion promoting film such as siloxane on the surface of the photomask, then depositing a solvent soluble layer such as a photoresist layer over the adhesion promoting layer, a window is then formed through the layers and underlying photomask in the area of the pin hole by burning through these layers by means of a laser. The exposed areas of the window are etched and a metallic film is deposited over the exposed surfaces. Finally, the photomask is treated with solvent for removing the solvent soluble photoresist which also causes the metal film deposited thereon to be removed in all areas except the area of the window.

    Abstract translation: 在玻璃基板上包括图案化铬膜的缺陷光掩模修复针孔的方法包括在光掩模的表面上沉积粘附促进膜如硅氧烷,然后将诸如光致抗蚀剂层的溶剂可溶层沉积在 然后通过用激光烧穿这些层,在针孔的区域中通过层和底层光掩模形成粘合促进层,窗口。 蚀刻窗口的暴露区域,并在暴露的表面上沉积金属膜。 最后,用溶剂处理光掩模以除去溶剂可溶性光致抗蚀剂,这也使得沉积在其上的金属膜在除了窗口区域之外的所有区域中被除去。

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