Abstract:
Disclosed is a method of forming a floating gate in a date flash memory device on which first and second polysilicon films are stacked. After the first polysilicon film is formed, a SiH4 gas is introduced to decompose SiH4 and SiO2 into Si and H2 and Si and O2. A N2 anneal process is then implemented so that the decomposed H2 gas and O2 gas react to a N2 gas and are then outgassed. Next, a SiH4 gas and a PH3 gas are introduced to form the second polysilicon film. A native oxide film within the interface of the first polysilicon film and the second polysilicon film is removed to improve characteristics of the data flash memory device.
Abstract:
A method for fabricating a flash memory device begins with forming in sequence a tunnel oxide layer, a floating gate, an oxide-nitride-oxide (ONO) layer, a control gate, and a hard mask nitride layer on a silicon substrate. The hard mask nitride layer, the control gate, the ONO layer, and the floating gate are then patterned in sequence. Next, a sealing nitride layer is formed on a lateral side of the patterned structure. Also, in order to form a spacer, a first insulating layer is deposited on an entire resultant structure and then selectively patterned. Thereafter, second, third and fourth insulating layers are formed in sequence on the entire resultant structure including the spacer, and a photo resist pattern is then formed on the fourth insulating layer to define a metal contact area.
Abstract:
A cylindrical storage electrode in a semiconductor device is manufactured by forming a contact hole in a poly oxide film and by forming a first thin film on the film and in the hole. Next, a core oxide film and an anti-reflective coating film are formed on the first thin film to determine the height of the cylinder. A pattern is then formed by etching the anti-reflective coating film, core oxide film and the first thin film such that the poly oxide film is exposed. A second thin film is formed on the overall resultant structure, and a tungsten silicide layer is formed on the second thin film. Inner and outer walls of the cylinder are then formed by blanket-etching the tungsten silicide film and the second thin film such that the core oxide film is exposed. After the core oxide film is removed, a selective metastable polysilicon (SMPS) process is performed so that different grain growths are generated at the inner and outer walls of the cylinder. A storage electrode is then formed by annealing the cylinder. By depositing an amorphous silicon film on the inner wall of the cylinder-type capacitor and Si-rich tungsten silicide film on the outer wall, the surface area of the inner wall expands through normal SMPS and a rugged tungsten silicide film is formed on the outer wall. Spacing between cells is preserved, while generation of a bridge is prevented.
Abstract:
An RF cavity filter is disclosed. The disclosed filter includes: a housing having at least one cavity defined; a cover coupled to an upper portion of the housing; at least one resonator contained within the at least one cavity; at least one hole formed in the cover; at least one grounding bolt configured to be inserted into the hole, having a screw thread formed on a part of an outer perimeter, and having a center hole in a center portion; and at least one tuning bolt inserted into the housing through the center hole along a screw thread formed on an inner perimeter of the center hole, where the grounding bolt has a flange part formed on a lower portion that is in contact with the tuning bolt and a lower portion of the cover.
Abstract:
Nano-sized titanium nitride powder can be prepared by a simple process comprising subjecting mixed powder of titanium trichloride and lithium nitride to high-energy ball milling using a plurality of balls in an airtight reactor vessel under an inert gas atmosphere to form composite powder, and recovering the titanium nitride powder therefrom.
Abstract:
There is provided a fabrication method for an AA stacked graphene-diamond hybrid material by converting, through a high temperature treatment on diamond, a diamond surface into graphene. According to the present invention, if various types of diamond are maintained at a certain temperature having a stable graphene phase (approximately greater than 1200° C.) in a hydrogen gas atmosphere, two diamond {111} lattice planes are converted into one graphene plate (2:1 conversion), whereby the diamond surface is converted into graphene in a certain thickness, thus to fabricate the AA stacked graphene-diamond hybrid material.
Abstract:
A wide-band antenna using coupling matching is disclosed. The antenna may include a first conductive element, which is electrically connected with a ground; a second conductive element, which is electrically connected with a power feed point and formed parallel to the first conductive element with a particular distance in-between; and a third conductive element for emitting an RF signal that extends from the first conductive element, where the first conductive element and the second conductive element have a particular length such that progressive waves are generated and sufficient coupling is achieved. According to certain aspects of the present invention, a internal type multi-band antenna having wide-band characteristics can be provided, by using coupling matching for multi-band design.
Abstract:
Provided is an image processing apparatus and method for preventing degradation of image quality occurring when a bit-format of an image is converted. When a raw image is converted to an image having specific color resolution, the image to be converted can maintain an image close to the raw image by obtaining errors between pixels of the raw image and the image to be converted and minimizing the errors between the raw image and the image to be converted using an error diffusion scheme.