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61.发明申请公开(公告)号：US20090004730A1
公开(公告)日：2009-01-01
申请号：US11908980
申请日：2006-03-17
申请人： Nao Nitta , Shiro Kanegasaki , Akira Yamauchi
发明人： Nao Nitta , Shiro Kanegasaki , Akira Yamauchi
IPC分类号： C12M1/34
摘要： A cell observation support instrument having opposed first and second surface members 115 and 117 and stoppers that are positioned between the first and second surface members 115 and 117 in order to prevent movement of cells. The first and second surface members 115 and 117 form a cell-containing space 110 between opposed surfaces of the members 115 and 117, in order to contain a plurality of cells while allowing movement of the cells. At least one of the first and second surface members 115 and 117 is a member through which an inner side of the cell-containing space 110 can be optically observed from the outside. The stoppers are arranged in the cell-containing space 110, and the number of the stoppers is one or more.
摘要翻译： 电池观察支撑器具具有相对的第一和第二表面构件115和117以及位于第一和第二表面构件115和117之间的止动件，以防止电池移动。 第一和第二表面构件115和117在构件115和117的相对表面之间形成包含细胞的空间110，以便容纳多个单元，同时允许单元的移动。 第一和第二表面构件115和117中的至少一个是可以从外部光学观察细胞容纳空间110的内侧的构件。 止动件布置在容纳细胞的空间110中，止动件的数量为一个或多个。
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公开(公告)号：US20080073027A1
公开(公告)日：2008-03-27
申请号：US11979595
申请日：2007-11-06
申请人： Akira Yamauchi , Mikio Kawakami
发明人： Akira Yamauchi , Mikio Kawakami
CPC分类号： H05K13/0015 , H01L21/681 , H01L23/544 , H01L24/75 , H01L24/81 , H01L2223/54473 , H01L2924/15788 , H05K13/0812 , Y10T29/4913 , Y10T29/49131 , Y10T29/49133 , Y10T29/49137 , Y10T29/53091 , Y10T29/53174 , H01L2924/00
摘要： Positioning recognition marks are read by movable recognition device for positioning objects to be bonded to each other. An alignment method includes a step of reading the recognition marks during movement of the recognition device before its complete stop, and a step of identifying absolute positions of the recognition marks by correcting the mark recognition positions having been read based on a position feedback signal of the moving recognition device. A mounting method using the alignment method is also disclosed. It is possible to maintain a high alignment accuracy, eliminate necessity of assuring a settling time for complete stop of the movable recognition device, and significantly reduce the alignment time and mounting tact.
摘要翻译： 定位识别标记由可移动识别装置读取，用于定位要彼此粘合的对象。 对准方法包括在识别装置在其完全停止之前的移动期间读取识别标记的步骤，以及通过基于所述识别装置的位置反馈信号校正已经读取的标记识别位置来识别识别标记的绝对位置的步骤 移动识别装置。 还公开了使用对准方法的安装方法。 可以保持高的对准精度，消除确保可移动识别装置的完全停止的建立时间的必要性，并且显着地减少对准时间和安装节奏。
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公开(公告)号：US07341877B2
公开(公告)日：2008-03-11
申请号：US11016720
申请日：2004-12-21
申请人： Akira Yamauchi , Yoshiyuki Arai
发明人： Akira Yamauchi , Yoshiyuki Arai
IPC分类号： H01L21/66
CPC分类号： H01L21/67294 , H01L21/67144 , H01L22/20 , H01L23/544 , H01L2223/54473 , H01L2924/0002 , H05K13/08 , H05K13/089 , Y10T29/53178 , H01L2924/00
摘要： A method of accurately calibrating a movement control system of mark recognition means in a chip mounting device, comprising the steps of: recognizing a first recognition mark put on a head (2) and a second recognition mark (13) put on a stage (26) with two-field recognition means (7) so as to calibrate and update the preceding control parameters inputted into the movement control system of the two-field recognition means (7); and, with the head (2) lowered to position the first recognition mark closely to the second recognition mark (13), recognizing both marks with third recognition means (20) when the two-field recognition means (7) is moved back so as to calibrate and update the preceding control parameters inputted into the movement control system of the two-field recognition means (7).
摘要翻译： 一种在芯片安装装置中精确校准标记识别装置的移动控制系统的方法，包括以下步骤：识别放置在平台（26）上的头部（2）和第二识别标记（13）上的第一识别标记 ），用于校准和更新输入到两场识别装置（7）的运动控制系统中的先前控制参数; 并且当头部（2）降低以将第一识别标记定位到第二识别标记（13）时，当两场识别装置（7）被移回时，用第三识别装置（20）识别两个标记，以便 校准和更新输入到两场识别装置（7）的运动控制系统中的先前控制参数。
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公开(公告)号：US07299545B2
公开(公告)日：2007-11-27
申请号：US10509882
申请日：2003-03-27
申请人： Akira Yamauchi , Mikio Kawakami
发明人： Akira Yamauchi , Mikio Kawakami
CPC分类号： H05K13/0015 , H01L21/681 , H01L23/544 , H01L24/75 , H01L24/81 , H01L2223/54473 , H01L2924/15788 , H05K13/0812 , Y10T29/4913 , Y10T29/49131 , Y10T29/49133 , Y10T29/49137 , Y10T29/53091 , Y10T29/53174 , H01L2924/00
摘要： Positioning recognition marks are read by movable recognition device for positioning objects to be bonded to each other. An alignment method includes a step of reading the recognition marks during movement of the recognition device before its complete stop, and a step of identifying absolute positions of the recognition marks by correcting the mark recognition positions having been read based on a position feedback signal of the moving recognition device. A mounting method using the alignment method is also disclosed. It is possible to maintain a high alignment accuracy, eliminate necessity of assuring a settling time for complete stop of the movable recognition device, and significantly reduce the alignment time and mounting tact.
摘要翻译： 定位识别标记由可移动识别装置读取，用于定位要彼此粘合的对象。 对准方法包括在识别装置在其完全停止之前的移动期间读取识别标记的步骤，以及通过基于所述识别装置的位置反馈信号校正已经读取的标记识别位置来识别识别标记的绝对位置的步骤 移动识别装置。 还公开了使用对准方法的安装方法。 可以保持高的对准精度，消除确保可移动识别装置的完全停止的建立时间的必要性，并且显着地减少对准时间和安装节奏。
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公开(公告)号：US20060085965A1
公开(公告)日：2006-04-27
申请号：US10528690
申请日：2003-09-22
申请人： Tadatomo Suga , Toshihiro Ito , Akira Yamauchi
发明人： Tadatomo Suga , Toshihiro Ito , Akira Yamauchi
IPC分类号： B23P11/00
CPC分类号： H01L24/81 , H01L2224/13144 , H01L2224/75 , H01L2224/7501 , H01L2224/751 , H01L2224/81801 , H01L2924/00011 , H01L2924/00014 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01019 , H01L2924/01024 , H01L2924/01033 , H01L2924/01074 , H01L2924/01078 , H01L2924/01079 , H01L2924/014 , H01L2924/14 , Y10T29/49144 , Y10T29/49908 , Y10T29/49924 , Y10T29/5313 , Y10T29/53174 , H01L2224/0401
摘要： A device and method for bonding objects to be bonded each having a metal bonding portion on a substrate, comprising cleaning means for exposing the metal bonding portions to a plasma having an energy enough to etch the surfaces of the metal bonding portions at a depth of 1.6 nm or more over the entire surfaces of the metal bonding portions under a reduced pressure and bonding means for bonding the metal bonding portions of the objects taken out of the cleaning means in an atmospheric air. By using a specific scheme, metal bonding portions after the plasma cleaning can be bonded in the atmospheric air, thereby significantly simplifying the bonding process and the whole device and lowering the cost.
摘要翻译： 一种用于将每个具有金属接合部分的要被接合的物体接合在基板上的装置和方法，包括用于将金属接合部分暴露于等离子体的清洁装置，该等离子体具有足以在深度1.6刻蚀金属接合部分的表面的能量 在减压下的金属接合部的整个表面上的nm以上的粘合装置和用于将从清洁装置中取出的物体的金属接合部分接合在大气中的接合装置。 通过使用具体的方案，等离子体清洗后的金属接合部分可以粘结在大气中，从而大大简化了接合工艺和整个器件，降低了成本。
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公开(公告)号：US20060016555A1
公开(公告)日：2006-01-26
申请号：US10511986
申请日：2003-04-22
申请人： Akira Yamauchi , Katsumi Terada , Satoru Naraba , Takashi Hare
发明人： Akira Yamauchi , Katsumi Terada , Satoru Naraba , Takashi Hare
CPC分类号： H01L24/81 , H01L21/67092 , H01L24/75 , H01L2224/0554 , H01L2224/05568 , H01L2224/05573 , H01L2224/056 , H01L2224/16 , H01L2224/75 , H01L2224/75743 , H01L2224/81203 , H01L2224/81801 , H01L2924/00014 , H01L2924/01004 , H01L2924/01006 , H01L2924/01033 , H01L2924/0105 , H01L2924/01057 , H01L2924/01078 , H01L2924/014 , H01L2924/07802 , H01L2924/07811 , H01L2924/14 , H01L2924/00 , H01L2224/05599 , H01L2224/0555 , H01L2224/0556
摘要： A mounting method and a mounting device, the mounting method comprising the steps of, after positioning objects being bonded relative to each other, moving a movable wall positioned therearound until coming into contact with one object holding means to form a local chamber having a local enclosed space, enclosing both objects in the chamber, reducing the pressure in the chamber, moving the object holding means in a direction for reducing the volume of the chamber and moving the movable wall following the movement of the object holding means, and bonding both objects to each other by pressing, whereby, since the part to be bonded and its vicinity can be locally and efficiently enclosed separably from surroundings, and the local chamber capable of properly varying the shape of the enclosed space can be formed interlockingly with the bonding operation while maintaining the enclosed state even at the time of bonding, a specified mounting can be easily performed by a small device.
摘要翻译： 一种安装方法和安装装置，所述安装方法包括以下步骤：在定位相对于彼此接合的物体之后，移动位于其周围的可移动壁，直到与一个物体保持装置接触以形成具有局部封闭 空间，将两个物体封闭在腔室中，减小腔室中的压力，使物体保持装置沿着减小腔室的体积的方向移动，并且随着物体保持装置的移动移动可移动壁，并且将两个物体粘合到 通过按压，由于可以将局部且有效地围绕周围环境部分地进行局部且有效地密封的部分，并且可以适当地改变封闭空间的形状的局部室与粘合操作互锁地形成，同时保持 封闭状态即使在接合时，也可以通过小型装置容易地进行规定的安装。
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公开(公告)号：US20050274869A1
公开(公告)日：2005-12-15
申请号：US10509882
申请日：2003-03-27
申请人： Akira Yamauchi , Mikio Kawakami
发明人： Akira Yamauchi , Mikio Kawakami
IPC分类号： H01L21/68 , H01L23/544 , H05K13/00 , G02B7/04
CPC分类号： H05K13/0015 , H01L21/681 , H01L23/544 , H01L24/75 , H01L24/81 , H01L2223/54473 , H01L2924/15788 , H05K13/0812 , Y10T29/4913 , Y10T29/49131 , Y10T29/49133 , Y10T29/49137 , Y10T29/53091 , Y10T29/53174 , H01L2924/00
摘要： Positioning recognition marks (A, B, C, D) are read by movable recognition means (5) for positioning objects (2, 4) to be bonded to each other. An alignment method includes a step of reading the recognition marks (A, B, C, D) during movement of the recognition means (5) before its complete stop, and a step of identifying absolute positions of the recognition marks (A, B, C, D) by correcting the mark recognition positions having been read based on a position feedback signal of the moving recognition means (5). A mounting method using the alignment method is also disclosed. It is possible to maintain a high alignment accuracy, eliminate necessity of assuring a settling time for complete stop of the movable recognition means (5), and significantly reduce the alignment time and mounting tact.
摘要翻译： 定位识别标记（A，B，C，D）由可移动识别装置（5）读取，用于定位待彼此粘合的物体（2,4）。 对准方法包括在识别装置（5）完全停止之前移动期间读取识别标记（A，B，C，D）的步骤，以及识别识别标记（A，B， C），D）通过基于移动识别装置（5）的位置反馈信号校正已读取的标记识别位置。 还公开了使用对准方法的安装方法。 可以保持高的对准精度，消除了确保可移动识别装置（5）的完全停止的建立时间的必要性，并且显着减少对准时间和安装节奏。
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公开(公告)号：US20050262869A1
公开(公告)日：2005-12-01
申请号：US10473046
申请日：2002-03-26
申请人： Shinji Tongu , Tomiyuki Matsukiyo , Kazuhei Arita , Yoshihiro Ichino , Masato Ogai , Akira Yamauchi
发明人： Shinji Tongu , Tomiyuki Matsukiyo , Kazuhei Arita , Yoshihiro Ichino , Masato Ogai , Akira Yamauchi
CPC分类号： F25B27/02 , F25B15/06 , F25B49/043 , F25B2315/001 , Y02A30/274 , Y02B30/625 , Y02P80/152
摘要： An air conditioner that comprises an exhaust heat recovery unit 3 for recovering exhaust heat in a heat transfer medium, a heat transfer medium passage 5a in which the heat transfer medium outputted from the exhaust heat recovery unit 3 flows, an auxiliary heating device 7, which is provided in the heat transfer medium passage 5a, for heating the heat transfer medium, an absorption chiller 9, to which the heat transfer medium passage 5a is connected, to be driven by heat of the heat transfer medium, a refrigerant passage 11a, through which a refrigerant outputted from the absorption chiller 9 flows, an indoor unit 13 to which the refrigerant is supplied through the refrigerant passage 11a, a heat transfer medium temperature detecting means 15 for detecting the temperature of the heat transfer medium flowing through the heat transfer medium passage 5a, a refrigerant temperature detecting means 17 for detecting the temperature of the refrigerant flowing through the refrigerant passage 11a, and a control portion 19 for controlling an operation of driving the auxiliary heating device 7. With this configuration, on startup, the control portion 19 controls an operation of driving the auxiliary heating device 7 according to the temperature of the heat transfer medium, which is detected by the heat transfer medium temperature detecting means 15, that when the temperature of the refrigerant, which is detected by the refrigerant temperature detecting means 17, is equal to or lower than a predetermined temperature, the control portion 19 decides that a startup operation is completed. Upon completion of the startup operation, the control portion 19 controls an operation of driving the auxiliary heating device 7 according to the temperature of the refrigerant, which is detected by the refrigerant temperature detecting means 17.
摘要翻译： 一种空气调节器，包括用于回收传热介质中的废热的废热回收单元3，从排气热回收单元3输出的传热介质流过的传热介质通道5a，辅助加热装置7， 设置在传热介质通道5a中，用于加热传热介质，传热介质通道5a连接到其上的吸收式冷却器9将被传热介质的热量驱动，制冷剂通道 如图11a所示，从吸收式制冷机9输出的制冷剂流过制冷剂通路11a供给制冷剂的室内机13，传热介质温度检测机构15，检测传热介质的流动温度 通过传热介质通道5a，用于检测流过制冷剂pa的制冷剂的温度的制冷剂温度检测装置17 以及用于控制驱动辅助加热装置7的操作的控制部分19。 由此，启动时，控制部19根据由传热介质温度检测单元15检测到的传热介质的温度来控制辅助加热装置7的驱动， 由制冷剂温度检测单元17检测到的制冷剂等于或低于预定温度，则控制部分19判定启动操作完成。 在启动操作完成时，控制部分19根据由制冷剂温度检测装置17检测到的制冷剂的温度控制驱动辅助加热装置7的操作。
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公开(公告)号：US20050104230A1
公开(公告)日：2005-05-19
申请号：US11016720
申请日：2004-12-21
申请人： Akira Yamauchi , Yoshiyuki Arai
发明人： Akira Yamauchi , Yoshiyuki Arai
IPC分类号： H01L21/00 , H01L21/66 , H01L23/544 , H05K13/00 , H05K13/08
CPC分类号： H01L21/67294 , H01L21/67144 , H01L22/20 , H01L23/544 , H01L2223/54473 , H01L2924/0002 , H05K13/08 , H05K13/089 , Y10T29/53178 , H01L2924/00
摘要： A method of accurately calibrating a movement control system of mark recognition means in a chip mounting device, comprising the steps of: recognizing a first recognition mark put on a head (2) and a second recognition mark (13) put on a stage (26) with two-field recognition means (7) so as to calibrate and update the preceding control parameters inputted into the movement control system of the two-field recognition means (7); and, with the head (2) lowered to position the first recognition mark closely to the second recognition mark (13), recognizing both marks with third recognition means (20) when the two-field recognition means (7) is moved back so as to calibrate and update the preceding control parameters inputted into the movement control system of the two-field recognition means (7).
摘要翻译： 一种在芯片安装装置中精确校准标记识别装置的移动控制系统的方法，包括以下步骤：识别放置在平台（26）上的头部（2）和第二识别标记（13）上的第一识别标记 ），用于校准和更新输入到两场识别装置（7）的运动控制系统中的先前控制参数; 并且当头部（2）降低以将第一识别标记定位到第二识别标记（13）时，当两场识别装置（7）被移回时，用第三识别装置（20）识别两个标记，以便 校准和更新输入到两场识别装置（7）的运动控制系统中的先前控制参数。
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公开(公告)号：US06892447B1
公开(公告)日：2005-05-17
申请号：US10416452
申请日：2000-11-14
申请人： Akira Yamauchi , Yoshiyuki Arai
发明人： Akira Yamauchi , Yoshiyuki Arai
CPC分类号： H01L21/67294 , H01L21/67144 , H01L22/20 , H01L23/544 , H01L2223/54473 , H01L2924/0002 , H05K13/08 , H05K13/089 , Y10T29/53178 , H01L2924/00
摘要： A method accurately calibrating a movement control system of mark recognition in a chip mounting device, comprising the steps of: recognizing a first recognition mark put on a head (2) and a second recognition mark (13) put on a stage (26) with two-field recognition means (7) so as to calibrate and update the preceding control parameters inputted into the movement control system of the two-field recognition means (7); and, with the head (2) lowered to position the first recognition mark closely to the second recognition mark (13), recognizing both marks with third recognition means (20) when the two-field recognition means (7) is moved back so as to calibrate and update the preceding control parameters inputted into the movement control system of the two-field recognition means (7).
摘要翻译： 一种在芯片安装装置中精确校准标记识别的移动控制系统的方法，包括以下步骤：识别放置在平台（26）上的头部（2）和第二识别标记（13）上的第一识别标记， 双场识别装置（7），用于校准和更新输入到两场识别装置（7）的运动控制系统的先前控制参数; 并且当头部（2）降低以将第一识别标记定位到第二识别标记（13）时，当两场识别装置（7）被移回时，用第三识别装置（20）识别两个标记，以便 校准和更新输入到两场识别装置（7）的运动控制系统中的先前控制参数。
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