公开(公告)号：US07739351B2

公开(公告)日：2010-06-15

申请号：US10808212

申请日：2004-03-23

申请人： Taras Shkvarchuk ,  Alexander Lerner ,  Thomas Nabiel Boulos

发明人： Taras Shkvarchuk ,  Alexander Lerner ,  Thomas Nabiel Boulos

IPC分类号： G06F15/16

CPC分类号： H04L63/20 ,  H04L12/5601 ,  H04L63/10 ,  H04L67/02 ,  H04L67/28 ,  H04L67/2823 ,  H04L67/42 ,  H04L2012/5619 ,  H04L2012/5629

摘要： Methods and apparatus, including computer program products, implementing and using techniques for selectively accessing one or more web services from a client machine, the one or more web services and the client machine being accessible over a network. A request for information is received from a client machine with a conversion engine. The request is received over a synchronous interface. The request is processed in the conversion engine. The processed request is transmitted over an asynchronous interface from the conversion engine to at least one web service. Methods and apparatus, including computer program products, for converting a web service description language file for a synchronous web service into a web service description language file for an asynchronous client machine are also described.

摘要翻译： 包括计算机程序产品，用于从客户机选择性地访问一个或多个web服务的实现和使用技术的方法和装置，所述一个或多个web服务和所述客户端机器可通过网络访问。 从具有转换引擎的客户机接收到信息请求。 通过同步接口接收请求。 请求在转换引擎中处理。 经处理的请求通过异步接口从转换引擎传输到至少一个Web服务。 还描述了用于将用于同步web服务的web服务描述语言文件转换成用于异步客户机的web服务描述语言文件的方法和装置，包括计算机程序产品。

公开(公告)号：US20050234928A1

公开(公告)日：2005-10-20

申请号：US10808212

申请日：2004-03-23

申请人： Taras Shkvarchuk ,  Alexander Lerner ,  Thomas Boulos

发明人： Taras Shkvarchuk ,  Alexander Lerner ,  Thomas Boulos

IPC分类号： G06F17/00 ,  H04L29/08

CPC分类号： H04L63/20 ,  H04L12/5601 ,  H04L63/10 ,  H04L67/02 ,  H04L67/28 ,  H04L67/2823 ,  H04L67/42 ,  H04L2012/5619 ,  H04L2012/5629

摘要： Methods and apparatus, including computer program products, implementing and using techniques for selectively accessing one or more web services from a client machine, the one or more web services and the client machine being accessible over a network. A request for information is received from a client machine with a conversion engine. The request is received over a synchronous interface. The request is processed in the conversion engine. The processed request is transmitted over an asynchronous interface from the conversion engine to at least one web service. Methods and apparatus, including computer program products, for converting a web service description language file for a synchronous web service into a web service description language file for an asynchronous client machine are also described.

摘要翻译： 包括计算机程序产品，用于从客户机选择性地访问一个或多个web服务的实现和使用技术的方法和装置，所述一个或多个web服务和所述客户端机器可通过网络访问。 从具有转换引擎的客户机接收到信息请求。 通过同步接口接收请求。 请求在转换引擎中处理。 经处理的请求通过异步接口从转换引擎传输到至少一个Web服务。 还描述了用于将用于同步web服务的web服务描述语言文件转换成用于异步客户机的web服务描述语言文件的方法和装置，包括计算机程序产品。

公开(公告)号：US06918864B1

公开(公告)日：2005-07-19

申请号：US09580880

申请日：2000-05-30

申请人： Brian J. Brown ,  Michael Sugarman ,  Makoto Inagawa ,  Daniel D. Ramar ,  Alexander Lerner

发明人： Brian J. Brown ,  Michael Sugarman ,  Makoto Inagawa ,  Daniel D. Ramar ,  Alexander Lerner

IPC分类号： H01L21/00 ,  A01B29/00

CPC分类号： H01L21/67057

摘要： A roller assembly is provided. The roller assembly comprises a groove that the includes two opposing surfaces. The roller assembly comprises either frictional surfaces positioned along the groove, or O-ring(s) coupled to the groove. The frictional surfaces may be a plurality of holes at spaced intervals along the opposing surfaces of the groove, a plurality of holes, each hole sized so as to extend into the two opposing surfaces, at spaced intervals along the opposing surfaces of the groove, or may be a bead-blasted surface or a knurled surface positioned along the opposing surfaces of the groove.

摘要翻译： 提供辊组件。 辊组件包括一个包括两个相对表面的槽。 辊组件包括沿着凹槽定位的摩擦表面或耦合到凹槽的O形环。 所述摩擦表面可以是沿所述槽的相对表面间隔开的多个孔，多个孔，每个孔的尺寸设计成沿所述槽的相对表面以间隔开的间隔延伸到所述两个相对的表面中，或者 可以是沿着凹槽的相对表面定位的喷砂表面或滚花表面。

公开(公告)号：US20050109373A1

公开(公告)日：2005-05-26

申请号：US11028929

申请日：2005-01-04

申请人： Brian Brown ,  Michael Sugarman ,  Markoto Inagawa ,  Daniel Ramar ,  Alexander Lerner

发明人： Brian Brown ,  Michael Sugarman ,  Markoto Inagawa ,  Daniel Ramar ,  Alexander Lerner

IPC分类号： H01L21/00 ,  B08B7/00

CPC分类号： H01L21/67057

摘要： A roller assembly is provided. The roller assembly comprises a groove that includes two opposing surfaces. The roller assembly comprises either frictional surfaces positioned along the groove, or O-ring(s) coupled to the groove. The frictional surfaces may be a plurality of holes at spaced intervals along the opposing surfaces of the groove, a plurality of holes, each hole sized so as to extend into the two opposing surfaces, at spaced intervals along the opposing surfaces of the groove, or may be a bead-blasted surface or a knurled surface positioned along the opposing surfaces of the groove.

摘要翻译： 提供辊组件。 辊组件包括包括两个相对表面的凹槽。 辊组件包括沿着凹槽定位的摩擦表面或耦合到凹槽的O形环。 所述摩擦表面可以是沿所述槽的相对表面间隔开的多个孔，多个孔，每个孔的尺寸设计成沿所述槽的相对表面以间隔开的间隔延伸到所述两个相对的表面中，或者 可以是沿着凹槽的相对表面定位的喷砂表面或滚花表面。

公开(公告)号：US06725869B2

公开(公告)日：2004-04-27

申请号：US09816807

申请日：2001-03-23

申请人： John M. White ,  Alexander Lerner

发明人： John M. White ,  Alexander Lerner

IPC分类号： B08B312

CPC分类号： H01L21/67057 ,  B08B3/12 ,  B08B11/02 ,  Y10S134/902

摘要： A method and apparatus is provided that may protect a fragile component (such as a quartz plate) positioned within a megasonic tank from impact by falling objects. The megasonic tank may include a barrier (such as one or more extended rollers, quartz bars, or a net) that is configured to protect the fragile component.

摘要翻译： 提供了一种方法和装置，其可以保护位于兆声波箱内的易碎部件（例如石英板）免受掉落的物体的撞击。 兆声波箱可以包括被配置为保护脆弱部件的屏障（例如一个或多个延伸辊，石英条或网）。

公开(公告)号：US06720263B2

公开(公告)日：2004-04-13

申请号：US09981505

申请日：2001-10-16

申请人： Donald J. K. Olgado ,  Joseph J. Stevens ,  Alexander Lerner

发明人： Donald J. K. Olgado ,  Joseph J. Stevens ,  Alexander Lerner

IPC分类号： H01L21302

CPC分类号： H01L21/32115 ,  C25F7/00 ,  H01L21/32134 ,  H01L21/6708 ,  H01L21/7684

摘要： A non-contact apparatus and method for removing a metal layer from a substrate are provided. The apparatus includes a rotatable anode substrate support member configured to support a substrate in a face-up position and to electrically contact the substrate positioned thereon. A pivotally mounted cathode fluid dispensing nozzle assembly positioned above the anode substrate support member is also provided. A power supply in electrical communication with the anode substrate support member and the cathode fluid dispensing nozzle is provided, and a system controller configured to regulate at least one of a rate of rotation of the anode substrate support member, a radial position of the cathode fluid dispensing nozzle, and an output power of the power supply is provided. The method provides for the removal of a metal layer from a substrate by rotating the substrate in a face up position on a rotatable substrate support member. A cathode fluid dispensing nozzle is positioned over a central portion of the substrate and a metal removing solution is dispensed from the cathode fluid dispensing nozzle onto the central portion of the substrate. An electrical bias is applied between the substrate and the cathode fluid dispensing nozzle, which operates to deplate the metal layer below the fluid dispensing nozzle.

摘要翻译： 提供了一种用于从基板去除金属层的非接触式设备和方法。 该装置包括可旋转的阳极基板支撑构件，其构造成将基板支撑在面朝上的位置并且电接触定位在其上的基板。 还提供了一种位于阳极基板支撑构件上方的枢转安装的阴极流体分配喷嘴组件。 提供与阳极基板支撑构件和阴极流体分配喷嘴电连通的电源，以及系统控制器，被配置为调节阳极基板支撑构件的旋转速率，阴极流体的径向位置 分配喷嘴，并且提供电源的输出功率。 该方法通过在可旋转的基板支撑构件上面向上的位置旋转基板来提供从基板移除金属层。 阴极流体分配喷嘴位于衬底的中心部分上方，金属去除溶液从阴极流体分配喷嘴分配到衬底的中心部分上。 在衬底和阴极流体分配喷嘴之间施加电偏压，其用于使流体分配喷嘴下方的金属层脱落。