利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

72 条记录 (耗时 0.03 秒)

    Roller that avoids substrate slippage
    1.
    发明授权
    Roller that avoids substrate slippage 失效
    避免衬底滑动的滚子

    公开(公告)号：US06918864B1

    公开(公告)日：2005-07-19

    申请号：US09580880

    申请日：2000-05-30

    申请人： Brian J. Brown ,  Michael Sugarman ,  Makoto Inagawa ,  Daniel D. Ramar ,  Alexander Lerner

    发明人： Brian J. Brown ,  Michael Sugarman ,  Makoto Inagawa ,  Daniel D. Ramar ,  Alexander Lerner

    IPC分类号： H01L21/00 ,  A01B29/00

    CPC分类号： H01L21/67057

    摘要： A roller assembly is provided. The roller assembly comprises a groove that the includes two opposing surfaces. The roller assembly comprises either frictional surfaces positioned along the groove, or O-ring(s) coupled to the groove. The frictional surfaces may be a plurality of holes at spaced intervals along the opposing surfaces of the groove, a plurality of holes, each hole sized so as to extend into the two opposing surfaces, at spaced intervals along the opposing surfaces of the groove, or may be a bead-blasted surface or a knurled surface positioned along the opposing surfaces of the groove.

    摘要翻译： 提供辊组件。 辊组件包括一个包括两个相对表面的槽。 辊组件包括沿着凹槽定位的摩擦表面或耦合到凹槽的O形环。 所述摩擦表面可以是沿所述槽的相对表面间隔开的多个孔，多个孔，每个孔的尺寸设计成沿所述槽的相对表面以间隔开的间隔延伸到所述两个相对的表面中，或者 可以是沿着凹槽的相对表面定位的喷砂表面或滚花表面。

    Roller that avoids substrate slippage
    2.
    发明申请
    Roller that avoids substrate slippage 审中-公开
    避免衬底滑动的滚子

    公开(公告)号：US20060189465A1

    公开(公告)日：2006-08-24

    申请号：US11413257

    申请日：2006-04-28

    申请人： Brian Brown ,  Michael Sugarman ,  Makoto Inagawa ,  Daniel Ramar ,  Alexander Lerner

    发明人： Brian Brown ,  Michael Sugarman ,  Makoto Inagawa ,  Daniel Ramar ,  Alexander Lerner

    IPC分类号： F16C13/00 ,  B25F5/02

    CPC分类号： H01L21/67057

    摘要： A roller assembly is provided. The roller assembly comprises a groove that includes two opposing surfaces. The roller assembly comprises either frictional surfaces positioned along the groove, or O-ring(s) coupled to the groove. The frictional surfaces may be a plurality of holes at spaced intervals along the opposing surfaces of the groove, a plurality of holes, each hole sized so as to extend into the two opposing surfaces, at spaced intervals along the opposing surfaces of the groove, or may be a bead-blasted surface or a knurled surface positioned along the opposing surfaces of the groove.

    摘要翻译： 提供辊组件。 辊组件包括包括两个相对表面的凹槽。 辊组件包括沿着凹槽定位的摩擦表面或联接到凹槽的O形环。 所述摩擦表面可以是沿所述槽的相对表面间隔开的多个孔，多个孔，每个孔的尺寸设计成沿所述槽的相对表面以间隔开的间隔延伸到所述两个相对的表面中，或者 可以是沿着凹槽的相对表面定位的喷砂表面或滚花表面。

    Spin-rinse-dryer
    3.
    发明授权
    Spin-rinse-dryer 失效

    公开(公告)号：US06516816B1

    公开(公告)日：2003-02-11

    申请号：US09544660

    申请日：2000-04-06

    申请人： Anwar Husain ,  Brian J. Brown ,  David G. Andeen ,  Svetlana Sherman ,  John M. White ,  Michael Sugarman ,  Makoto Inagawa ,  Manoocher Birang

    发明人： Anwar Husain ,  Brian J. Brown ,  David G. Andeen ,  Svetlana Sherman ,  John M. White ,  Michael Sugarman ,  Makoto Inagawa ,  Manoocher Birang

    IPC分类号： B08B302

    CPC分类号： H01L21/67028 ,  Y10S134/902

    摘要： An inventive vertical spin-dryer is provided. The inventive spin-dryer may have a shield system positioned to receive fluid displaced from a substrate vertically positioned within the spin-dryer. The shield system may have one or more shields positioned to at least partially reflect fluid therefrom as the fluid impacts the shield. The one or more shields are angled to encourage the flow of fluid therealong, and are preferably hydrophilic to prevent droplets from forming. Preferably the shield system has three shields positioned in a horizontally and vertically staggered manner so that fluid is transferred from a substrate facing surface of a first shield to the top or non-substrate-facing surface of an adjacent shield, etc. A pressure gradient may be applied across the interior of the spin-dryer to create an air flow which encourages fluid to travel along the shield system in a desired direction. A sensor adapted to facilitate desired flywheel position, an openable gripper having a remote actuator, a radiused gripper and a source of inert drying gas are also provided in individual embodiments.

    Spin-rinse-dryer
    4.
    发明授权
    Spin-rinse-dryer 失效
    旋转干燥机

    公开(公告)号：US07226514B2

    公开(公告)日：2007-06-05

    申请号：US10309832

    申请日：2002-12-04

    申请人： Anwar Husain ,  Brian J. Brown ,  David G. Andeen ,  Svetlana Sherman ,  John M. White ,  Michael Sugarman ,  Makoto Inagawa ,  Manoocher Birang

    发明人： Anwar Husain ,  Brian J. Brown ,  David G. Andeen ,  Svetlana Sherman ,  John M. White ,  Michael Sugarman ,  Makoto Inagawa ,  Manoocher Birang

    IPC分类号： B08B3/02

    CPC分类号： H01L21/67028 ,  Y10S134/902

    摘要： An inventive vertical spin-dryer is provided. The inventive spin-dryer may have a shield system positioned to receive fluid displaced from a substrate vertically positioned within the spin-dryer. The shield system may have one or more shields positioned to at least partially reflect fluid therefrom as the fluid impacts the shield. The one or more shields are angled to encourage the flow of fluid therealong, and are preferably hydrophilic to prevent droplets from forming. Preferably the shield system has three shields positioned in a horizontally and vertically staggered manner so that fluid is transferred from a substrate facing surface of a first shield to the top or non-substrate-facing surface of an adjacent shield, etc. A pressure gradient may be applied across the interior of the spin-dryer to create an air flow which encourages fluid to travel along the shield system in a desired direction. A sensor adapted to facilitate desired flywheel position, an openable gripper having a remote actuator, a radiused gripper and a source of inert drying gas are also provided in individual embodiments.

    摘要翻译： 提供了一种创造性的垂直旋转干燥器。 本发明的旋转干燥器可以具有屏蔽系统，其被定位成接收从垂直定位在旋转干燥器内的衬底移位的流体。 屏蔽系统可以具有一个或多个屏蔽件，其定位成当流体冲击屏蔽时至少部分地反射流体。 一个或多个屏蔽件成角度以促使其流体流动，并且优选是亲水的以防止液滴形成。 优选地，屏蔽系统具有以水平和垂直交错方式定位的三个屏蔽件，使得流体从第一屏蔽件的面向基板的表面转移到相邻屏蔽件的顶部或非基板面向表面等。压力梯度可以 施加在旋转干燥器的内部以产生鼓风流体沿着屏蔽系统沿所需方向行进的空气流。 在各个实施例中还提供了适于促进期望的飞轮位置的传感器，具有远程致动器的可打开夹具，圆角夹持器和惰性干燥气体源。

    Ganged scanning of multiple magnetrons, especially two level folded magnetrons
    7.
    发明授权
    Ganged scanning of multiple magnetrons, especially two level folded magnetrons 有权
    组合扫描多个磁控管，特别是两个级别的磁控管

    公开(公告)号：US08961756B2

    公开(公告)日：2015-02-24

    申请号：US11780757

    申请日：2007-07-20

    申请人： Makoto Inagawa ,  Hien Minh Huu Le ,  Akihiro Hosokawa ,  Bradley O. Stimson ,  John M. White

    发明人： Makoto Inagawa ,  Hien Minh Huu Le ,  Akihiro Hosokawa ,  Bradley O. Stimson ,  John M. White

    IPC分类号： C23C14/35 ,  H01J37/34

    CPC分类号： H01J37/3408 ,  H01J37/3455

    摘要： A magnetron assembly including one or more magnetrons each forming a closed plasma loop on the sputtering face of the target. The target may include multiple strip targets on which respective strip magnetrons roll and are partially supported on a common support plate through a spring mechanism. The strip magnetron may be a two-level folded magnetron in which each magnetron forms a folded plasma loop extending between lateral sides of the strip target and its ends meet in the middle of the target. The magnets forming the magnetron may be arranged in a pattern having generally uniform straight portions joined by curved portion in which extra magnet positions are available near the corners to steer the plasma track. Multiple magnetrons, possibly flexible, may be resiliently supported on a scanned support plate and individually partially supported by rollers on the back of one or more targets.

    摘要翻译： 磁控管组件包括一个或多个磁控管，每个磁控管在靶的溅射面上形成封闭的等离子体环。 目标可以包括多个条带目标，相应的带状磁控管在其上滚动并且通过弹簧机构部分地支撑在公共支撑板上。 带状磁控管可以是两级折叠​​磁控管，其中每个磁控管形成在条带靶的侧面之间延伸的折叠等离子体环，并且其端部在目标的中间相遇。 形成磁控管的磁体可以布置成具有通过弯曲部分连接的具有大致均匀的直线部分的图案，其中在角附近提供额外的磁体位置以引导等离子体轨道。 多个可能是柔性的磁控管可以弹性地支撑在扫描的支撑板上，并且单独部分地由一个或多个靶的背面上的辊支撑。

    Target Cooling Through Gun Drilled Holes
    8.
    发明申请
    Target Cooling Through Gun Drilled Holes 审中-公开
    目标通过枪钻孔冷却

    公开(公告)号：US20120175250A1

    公开(公告)日：2012-07-12

    申请号：US13420996

    申请日：2012-03-15

    申请人： Yoshiaki Tanase ,  Makoto Inagawa ,  Akihiro Hosokawa

    发明人： Yoshiaki Tanase ,  Makoto Inagawa ,  Akihiro Hosokawa

    IPC分类号： C23C14/34 ,  B23P11/00

    CPC分类号： C23C14/3407 ,  H01J37/3408 ,  H01J37/3497 ,  Y10T29/49826

    摘要： A sputter target assembly particularly useful for a large panel plasma sputter reactor having a target assembly sealed both to the main processing chamber and a vacuum pumped chamber housing a moving magnetron. The target assembly to which target tiles are bonded includes an integral plate with parallel cooling holes drilled parallel to the principal faces. The ends of the holes may be sealed and vertically extending slots arranged in two staggered groups on each side and machined down to respective pairs of cooling holes on opposite sides of the backing plate in pairs. Four manifolds tubes are sealed to the four groups of slots and provide counter-flowing coolant paths.

    摘要翻译： 特别适用于具有密封于主处理室的目标组件和容纳移动磁控管的真空抽吸室的大型面板等离子体溅射反应器的溅射靶组件。 目标瓦片被粘合到的目标组件包括具有平行于主面钻出的平行冷却孔的整体板。 孔的端部可以是密封的，并且垂直延伸的槽在每侧上布置成两个交错的组，并且被成对地加工成在背板的相对侧上的相应的一对冷却孔。 四个歧管管被密封到四组槽，并提供反向流动的冷却剂路径。