公开(公告)号：US4676709A

公开(公告)日：1987-06-30

申请号：US769709

申请日：1985-08-26

申请人： Anthony C. Bonora ,  Andrew W. O'Sullivan

发明人： Anthony C. Bonora ,  Andrew W. O'Sullivan

IPC分类号： H01L21/677 ,  B65G65/00

CPC分类号： H01L21/67781 ,  H01L21/67766 ,  H01L21/67772 ,  Y10S414/139 ,  Y10S414/14

摘要： Disclosed is a manipulator for removing a cassette holding articles, such as semiconductor wafers, to be processed from a container supported on a processing station in a standard mechanical interface (SMIF) system. The container is supported on an interface port on the canopy of the processing station and has a removeable door on which the cassette is supportable. A first platform is transportable along a shaft below the interface port and is operable to mate with the interface port and receive the cassette from the container. The first platform is transported down the shaft, thereby removing the cassette from the container. A second platform mounted in the shaft includes a manipulator arm which swings to engage the cassette on the first platform and support the cassette off of the first platform. The manipulator arm then pivots to transport the cassette to a location in the processing station away from the shaft. The first platform is then transported back up the shaft to the interface port to seal the container to prevent particulate contamination. The manipulator arm and the second platform after placing the cassette at a location in the processing station away from the shaft, are then positioned completely inside the shaft to minimize the space taken up in the processing station by the manipulator.

摘要翻译： 公开了一种用于从在标准机械接口（SMIF）系统中的处理站上支撑的容器中移除待加工物品的诸如半导体晶片的盒子的机械手。 容器被支撑在处理站的顶盖上的接口端口上，并且具有可拆卸的门，盒可以在其上支撑。 第一平台沿着接口端口下方的轴可运输，并且可操作以与接口端口配合并从容器接收盒。 第一平台沿着轴传送，从而将盒从容器中取出。 安装在所述轴中的第二平台包括操纵臂，所述操纵臂摆动以将所述盒接合在所述第一平台上并将所述盒支撑离开所述第一平台。 操纵臂然后枢转以将盒运送到加工站中远离轴的位置。 然后将第一平台从轴传回到接口端口以密封容器以防止颗粒污染。 然后，在将盒子放置在远离轴的处理站中的位置处的操纵臂和第二平台完全位于轴内部，以最小化由操纵器在处理站中占据的空间。

公开(公告)号：US4458152A

公开(公告)日：1984-07-03

申请号：US376299

申请日：1982-05-10

申请人： Anthony C. Bonora

发明人： Anthony C. Bonora

IPC分类号： B65H7/14 ,  G01P13/00 ,  H01L21/00 ,  H01L21/677

CPC分类号： H01L21/67265 ,  B65H7/14 ,  G01P13/00 ,  H01L21/67778 ,  Y10S414/137

摘要： Infrared radiation is focused to a line at a site at which a semiconductor wafer is expected to appear when a wafer is transferred with, i.e., loaded onto or unloaded from, a semiconductor wafer conveyor. A cylindrical lens of selected focal length is positioned to receive and focus to a line at an image plane radiation reflected by a wafer arriving at the site. An apertured stop defines an opening at the image plane to pass reflected radiation to an infrared sensor positioned on the side of the stop opposite the cylindrical lens.

摘要翻译： 红外辐射聚焦到当半导体晶片预期在半导体晶片传送带被转移，即加载或卸载晶片时出现半导体晶片的位置的线。 所选焦距的圆柱形透镜被定位成在到达该位置的晶片反射的图像平面上接收和聚焦于线。 有孔止动件限定了图像平面处的开口，以将反射的辐射传递到位于与柱面透镜相对的止挡侧的红外传感器。

公开(公告)号：US4026574A

公开(公告)日：1977-05-31

申请号：US633588

申请日：1975-11-19

申请人： Anthony C. Bonora ,  Lawrence L. Ray

发明人： Anthony C. Bonora ,  Lawrence L. Ray

IPC分类号： B62H1/02

CPC分类号： B62H1/02

摘要： A kickstand for supporting a parked two-wheeled vehicle and a footrest for supporting the feet of the vehicle operator when the vehicle is in motion is provided by a single device comprising a lever pivoted about an axis parallel to the longitudinal axis of the vehicle on a horizontal beam rigidly affixed to the vehicle frame. The center of gravity of the lever portion is located relative to the pivot axis so that the lever portion is stable both when pivoted to contact the ground for vehicle support and when pivoted to a position parallel to the beam to act as a footrest.

摘要翻译： 用于支撑停放的两轮车辆的支架和用于在车辆运动时支撑车辆操作者脚部的搁脚板由单个装置提供，该装置包括围绕平行于车辆的纵向轴线的轴线枢转的杆 水平梁刚性地固定在车架上。 杠杆部分的重心相对于枢转轴线定位，使得当枢转以接触车辆支撑的地面并且当枢转到平行于梁的位置以用作搁脚板时，杠杆部分是稳定的。

公开(公告)号：US09190304B2

公开(公告)日：2015-11-17

申请号：US13475723

申请日：2012-05-18

申请人： Robert B. MacKnight ,  Anthony C. Bonora

发明人： Robert B. MacKnight ,  Anthony C. Bonora

IPC分类号： B65G65/00 ,  B65G1/04 ,  H01L21/677 ,  H01L21/67

CPC分类号： H01L21/67276 ,  B65G2201/0297 ,  H01L21/67724 ,  H01L21/67736

摘要： A workpiece container storage and handling system includes a base, a number of wheels connected to the base, and a container handling system connected to the base. The wheels provide for movement of the base. The container handling system is defined to hold at least two containers in a vertically overlying orientation relative to each other. The container handling system is defined to provide for controlled vertical travel of the at least two containers in unison relative to the base. Also, the container handling system is defined to provide for controlled and independent horizontal travel of each of the at least two containers relative to the base.

摘要翻译： 工件容器储存和处理系统包括基座，连接到基座的多个轮子以及连接到基座的容器处理系统。 轮子提供底座的运动。 容器处理系统被定义成相对于彼此保持至少两个容器的垂直方向。 容器处理系统被定义为提供至少两个容器相对于底座一致的受控垂直行进。 此外，容器处理系统被定义为提供所述至少两个容器中的每一个相对于底座的受控和独立的水平行进。

公开(公告)号：US20140262979A1

公开(公告)日：2014-09-18

申请号：US13830692

申请日：2013-03-14

申请人： Anthony C. Bonora ,  Brian Compian ,  Jeff P. Henderson ,  Robert W. Carlson

发明人： Anthony C. Bonora ,  Brian Compian ,  Jeff P. Henderson ,  Robert W. Carlson

IPC分类号： B25J11/00 ,  B25J15/00 ,  B07C5/00

CPC分类号： B07C5/3412 ,  B07C5/00 ,  B07C2501/0063 ,  B25J15/0028 ,  B25J15/022 ,  G01N35/04 ,  G01N2035/0418 ,  G01N2035/0425 ,  H01L21/67271 ,  H01L21/67721 ,  H01L21/67766 ,  H01L21/67772 ,  H01L21/67778 ,  H01L21/67781 ,  H01L21/68707

摘要： A tray engine includes a vertical drive column, a rotation mechanism for rotating the vertical drive column, and an end effector attached to the vertical drive column. The end effector includes an end effector base attached to the vertical drive column. The end effector further includes a slide attached to the end effector base to support a tray, when present. The slide enables the tray to slide along a length of the end effector base. The tray engine includes a drive mechanism attached to the end effector base for moving along the length of the end effector base to enable the tray, when present, to slide linearly along the length and load or unload the tray to or from the slide.

摘要翻译： 托盘发动机包括垂直驱动柱，用于旋转垂直驱动柱的旋转机构和附接到垂直驱动柱的端部执行器。 末端执行器包括附接到垂直驱动柱的端部执行器底座。 末端执行器还包括当存在时附接到端部执行器底座以支撑托盘的滑块。 滑块使托盘能够沿着末端执行器底座的长度滑动。 托盘发动机包括附接到端部执行器底座的驱动机构，用于沿着端部执行器底座的长度移动，以使得托盘当存在时沿着长度线性地滑动并且将托盘装载或卸载到滑动件上。

公开(公告)号：US20120321423A1

公开(公告)日：2012-12-20

申请号：US13475723

申请日：2012-05-18

申请人： Robert B. MacKnight ,  Anthony C. Bonora

发明人： Robert B. MacKnight ,  Anthony C. Bonora

IPC分类号： B66F9/12 ,  B65G1/06 ,  B66F9/06

CPC分类号： H01L21/67276 ,  B65G2201/0297 ,  H01L21/67724 ,  H01L21/67736

摘要： A workpiece container storage and handling system includes a base, a number of wheels connected to the base, and a container handling system connected to the base. The wheels provide for movement of the base. The container handling system is defined to hold at least two containers in a vertically overlying orientation relative to each other. The container handling system is defined to provide for controlled vertical travel of the at least two containers in unison relative to the base. Also, the container handling system is defined to provide for controlled and independent horizontal travel of each of the at least two containers relative to the base.

摘要翻译： 工件容器储存和处理系统包括基座，连接到基座的多个轮子以及连接到基座的容器处理系统。 轮子提供底座的运动。 容器处理系统被定义成相对于彼此保持至少两个容器的垂直方向。 容器处理系统被定义为提供至少两个容器相对于底座一致的受控垂直行进。 此外，容器处理系统被定义为提供所述至少两个容器中的每一个相对于底座的受控和独立的水平行进。

公开(公告)号：US20120189408A1

公开(公告)日：2012-07-26

申请号：US13436304

申请日：2012-03-30

申请人： Anthony C. Bonora

发明人： Anthony C. Bonora

IPC分类号： H01L21/677 ,  B65D25/10

CPC分类号： H01L21/67766 ,  H01L21/68707

摘要： An end effector having a first arm and a second arm extending from an end effector support body is provided. The first arm and the second arm each have support extensions for supporting a peripheral region of a substrate on opposing sides of a diameter of the substrate. The height of support contacts on opposing sides of the diameter is different relative to a horizontal datum plane. In one embodiment, the end effector includes additional arms extending from the end effector support body. A system for supporting a substrate is provided also.

摘要翻译： 提供具有从端部执行器支撑体延伸的第一臂和第二臂的端部执行器。 第一臂和第二臂各具有支撑延伸部，用于在衬底的直径的相对侧上支撑衬底的周边区域。 在直径的相对侧上的支撑触点的高度相对于水平基准平面是不同的。 在一个实施例中，末端执行器包括从末端执行器支撑体延伸的附加臂。 还提供了用于支撑衬底的系统。

公开(公告)号：US07798759B2

公开(公告)日：2010-09-21

申请号：US11433980

申请日：2006-05-15

申请人： Anthony C. Bonora ,  Michael Krolak ,  Roger G. Hine

发明人： Anthony C. Bonora ,  Michael Krolak ,  Roger G. Hine

IPC分类号： B65G1/00

CPC分类号： H01L21/67715 ,  H01L21/67727 ,  H01L21/6773 ,  H01L21/67733 ,  H01L21/67736 ,  H01L21/67766 ,  H01L21/67769 ,  H01L21/67775 ,  Y10S414/14

摘要： The present invention generally comprises an apparatus for transporting containers between a first transport system and a second transport system. In one embodiment, the first transport system comprises a ceiling-based conveyor and the second transport system comprises a floor-based conveyor. The present invention may further include storage shelves, preferably substantially horizontally aligned about a common vertical plane with a section of one of the transport systems. The transport system may be located either directly above the uppermost storage shelf or beneath the lowermost storage shelf in order to add storage capacity within the fab. A vertical module transports containers between the transport systems and the at least one storage shelf.

摘要翻译： 本发明通常包括用于在第一输送系统和第二输送系统之间输送容器的装置。 在一个实施例中，第一输送系统包括基于天花板的输送机，第二输送系统包括基于地板的输送机。 本发明还可以包括存储架，优选地基本上水平地围绕公共垂直平面对准，其中一个传送系统的一部分。 运输系统可以位于最上面的储物架的正上方，或者位于最下面的储物架之下，以便增加储存容量。 垂直模块在运输系统和至少一个存储架之间运输容器。

公开(公告)号：US20100080672A1

公开(公告)日：2010-04-01

申请号：US12456645

申请日：2009-06-19

申请人： Anthony C. Bonora ,  Joseph Fatula ,  Roumen Iliev Deyanov ,  Hiroshi Ito ,  Roger G. Hine

发明人： Anthony C. Bonora ,  Joseph Fatula ,  Roumen Iliev Deyanov ,  Hiroshi Ito ,  Roger G. Hine

IPC分类号： H01L21/677 ,  B65G15/20 ,  B65G15/22

CPC分类号： H01L21/67706 ,  H01L21/6773 ,  H01L21/67736 ,  H01L21/67775

摘要： A direct load system and conveyor is disclosed. The direct load system includes a load port for moving containers in a vertical orientation between a lower position near the conveyor and up to an upper position proximate to a load port door. The load port includes a single arm that moves a support in a vertical configuration, such that moving the single arm allows for the support to be lowered to the conveyor in a nested location between beams of the conveyor. The conveyor includes a single slot in a beam that allows the single arm to pass, and allows the support to be placed in the nested location, which is below a conveyor path defined by the belts of the conveyor. If a container is to be lifted off of the belts, the single arm raises up from the nested location, to then raise the container up and off of the conveyor and to the load port door. The single arm and interface with the conveyor slot can be used by other tools, such as stockers or tools that need to directly access a conveyor used to transport containers (e.g., wafers, etc.) to locations/tools of a fabrication facility. In alternate embodiments, it is possible to replace the belt with conveying wheels.

摘要翻译： 公开了一种直接负载系统和输送机。 直接负载系统包括用于在垂直方向移动容器的装载端口，其位于靠近输送机的下部位置和靠近装载端口门的上部位置之间。 负载端口包括单个臂，其以垂直构造移动支撑件，使得移动单臂允许支撑件在输送机的梁之间的嵌套位置中降低到输送机。 输送机包括梁中的单个槽，其允许单臂通过，并且允许支撑件被放置在嵌套位置，该嵌套位置位于由输送机的带定义的传送路径的下方。 如果一个集装箱要从皮带上提起，那么单臂从嵌套的位置上升，然后将容器从输送机上升起并离开装载口门。 单个臂和输送机槽的接口可以被其他工具使用，例如储存器或工具，其需要直接访问用于将容器（例如，晶片等）运送到制造设施的位置/工具的输送机。 在替代实施例中，可以用输送轮代替带。

公开(公告)号：US07669903B2

公开(公告)日：2010-03-02

申请号：US11870560

申请日：2007-10-11

申请人： Anthony C. Bonora ,  Roger G. Hine

发明人： Anthony C. Bonora ,  Roger G. Hine

IPC分类号： B25J15/06

CPC分类号： H01L21/6838 ,  Y10S294/902 ,  Y10S414/141

摘要： The present invention comprises a vacuum end effector having workpiece supports that work in conjunction with distorted workpiece surfaces. In one embodiment, each workpiece support has the ability to gimbal and conform the workpiece surface in contact with an outer edge of the support. Each workpiece support preferably provides a knife-like contact edge to minimize the contact area between the support and the workpiece while still providing an effective vacuum area to hold the wafer securely on the support. In another embodiment, each workpiece support is replaceable without having to remove the end effector from the robot assembly.

摘要翻译： 本发明包括具有工件支撑件的真空端部执行器，其与变形的工件表面一起工作。 在一个实施例中，每个工件支撑件具有万向架和使工件表面与支撑件的外边缘接触的能力。 每个工件支撑件优选地提供刀形接触边缘以最小化支撑件和工件之间的接触面积，同时仍然提供有效的真空区域以将晶片牢固地保持在支撑件上。 在另一个实施例中，每个工件支撑件是可更换的，而不必从机器人组件移除端部执行器。