Exposure apparatus, exposure method, and semiconductor device manufacturing method
    62.
    发明授权
    Exposure apparatus, exposure method, and semiconductor device manufacturing method 失效
    曝光装置,曝光方法以及半导体装置的制造方法

    公开(公告)号:US07692769B2

    公开(公告)日:2010-04-06

    申请号:US11543082

    申请日:2006-10-05

    IPC分类号: G03B27/54 G03B27/72

    CPC分类号: G03F7/70091 G03F7/70566

    摘要: According to an aspect of the invention, there is provided an exposure apparatus including an illumination optical system which forms an effective light source having a first polarization area where a mask pattern is illuminated with polarized light dominated by an electric vector component radial from a center position on an effective light source plane, and a second polarization area where the mask pattern is illuminated with light whose electric vector vibration is not biased in a specific direction; and a projection optical system which projects an image of the mask pattern onto an object to be processed.

    摘要翻译: 根据本发明的一个方面,提供了一种曝光装置,包括照明光学系统,该照明光学系统形成具有第一偏振区域的有效光源,其中掩模图案被以从中心位置为中心的矢量分量为主的偏振光照亮 以及第二极化区域,其中所述掩模图案被电矢量振动在特定方向上没有偏压的光照射; 以及将掩模图案的图像投影到待处理对象上的投影光学系统。

    VACUUM SWITCH
    63.
    发明申请
    VACUUM SWITCH 有权
    真空开关

    公开(公告)号:US20100038343A1

    公开(公告)日:2010-02-18

    申请号:US12534306

    申请日:2009-08-03

    IPC分类号: H01H33/66

    摘要: A vacuum switch means a unit switch section comprising a pair of vacuum main circuit switches, an earth switch, operating rods for operating movable conductors of the main circuit vacuum switch and earth switch, and a molding case covering the main circuit switch, earth switch and the operating rods, wherein the operating rods are connectable with an operating mechanism, and the fixed conductors of the main circuit switch and earth switch are connected with bushing conductors. The main circuit vacuum switches are disposed in separate vacuum chambers. The movable conductors of the main circuit switches and electrically connected to each other via a transition conductor, and the movable conductors are operated synchronously by means of a transition rod connected to the transition conductor.

    摘要翻译: 真空开关是指包括一对真空主电路开关,接地开关,用于操作主电路真空开关和接地开关的可动导体的操作杆的单元开关部分,以及覆盖主电路开关,接地开关和 操作杆,其中操作杆可与操作机构连接,并且主电路开关和接地开关的固定导体与衬套导体连接。 主电路真空开关设置在独立的真空室中。 主电路的可动导体通过过渡导体开关并电连接,可动导体借助与过渡导体连接的过渡棒同步运行。

    PUSH-TYPE SWITCH DEVICE
    64.
    发明申请
    PUSH-TYPE SWITCH DEVICE 有权
    推式开关装置

    公开(公告)号:US20100032277A1

    公开(公告)日:2010-02-11

    申请号:US12534528

    申请日:2009-08-03

    IPC分类号: H01H1/06

    CPC分类号: H01H13/48 H01H2223/054

    摘要: Provided is a push-type switch device including: a switch element in which a dome-shaped reversing spring is accommodated in a switch casing; a holder which is mounted to the outside portion of the switch casing so as to define a position relative to the switch casing and has a perforation hole formed at a position adjacent to a center portion of the reversing spring so as to face the center portion; and a driving protrusion which is inserted through the perforation hole so as to reciprocate and is driven to push the reversing spring, wherein when the holder mounted on an upper portion of the switch casing is attached to a predetermined position of the interconnection substrate, the switch casing is held in the interconnection substrate.

    摘要翻译: 提供一种按钮式开关装置,包括:开关元件,其中圆顶形反转弹簧容纳在开关壳体中; 保持器,其安装到开关壳体的外部,以便限定相对于开关壳体的位置,并且具有形成在与反转弹簧的中心部分相邻的位置处以面向中心部分的穿孔; 以及驱动突起,其穿过所述穿孔插入以便往复运动并被驱动以推动所述反向弹簧,其中当安装在所述开关壳体的上部的所述保持器附接到所述互连基板的预定位置时,所述开关 壳体保持在互连基板中。

    Method for forming misalignment inspection mark and method for manufacturing semiconductor device
    65.
    发明授权
    Method for forming misalignment inspection mark and method for manufacturing semiconductor device 失效
    用于形成不对准检查标记的方法和用于制造半导体器件的方法

    公开(公告)号:US07648885B2

    公开(公告)日:2010-01-19

    申请号:US11491302

    申请日:2006-07-24

    申请人: Takashi Sato

    发明人: Takashi Sato

    IPC分类号: H01L21/76

    摘要: A method for forming a misalignment inspection mark is disclosed. The formation method includes forming a reference layer device pattern and a first mark in a reference layer and forming an overlying layer device pattern and a second mark in a layer over the reference layer, the overlying layer device pattern corresponding to the reference layer. The second mark is formed by forming a second mark area adjacent to the first mark, the second mark area including an arrangement of a plurality of patterns having a line width, a pitch, and a pattern density at least one of which is equivalent to that of the overlying layer device pattern, and removing those of the plurality of patterns which are arranged at boundaries of the second mark area.

    摘要翻译: 公开了一种用于形成不对准检查标记的方法。 形成方法包括在参考层中形成参考层设备图案和第一标记,并在参考层上的层中形成覆盖层设备图案和第二标记,覆盖层设备图案对应于参考层。 通过形成与第一标记相邻的第二标记区域形成第二标记,第二标记区域包括具有线宽,间距和图案密度的多个图案的布置,其中至少其中之一相当于 并且去除布置在第二标记区域的边界处的多个图案的那些图案。

    Method for Producing Long Obliquely Stretched Film
    66.
    发明申请
    Method for Producing Long Obliquely Stretched Film 有权
    生产长斜拉伸薄膜的方法

    公开(公告)号:US20100002170A1

    公开(公告)日:2010-01-07

    申请号:US12085595

    申请日:2006-11-28

    摘要: A long obliquely stretched film is obtained having an orientation axis in a direction with an angle θs of 10° or more and 85° or less from a width direction by grasping both side ends in the width direction of a longitudinally stretched film with an average retardation Re1 by grasping means; stretching the film under a condition that a long obliquely stretched film sample with an average retardation Re2 (Re2 is smaller than Re1) can be obtained and traveling speeds of the grasping means are substantially equal at the film both side ends through a preheating zone, a stretching zone and a fixing zone; releasing the both side ends of the film from the grasping means; and taking it up around a winding core.

    摘要翻译: 通过将纵向拉伸膜的宽度方向上的两个侧端夹持平均延迟,获得长宽方向的拉伸膜,其具有从宽度方向的角度为10°以上且85°以下的方向的取向轴 Re1抓住手段; 在获得具有平均相位差Re2(Re2小于Re1)的长的倾斜拉伸膜样品的条件下拉伸该薄膜,并且夹持装置的移动速度在膜的两侧端部通过预热区域大致相等, 拉伸区和固定区; 从抓握装置释放胶片的两侧端部; 并围绕绕组的核心。

    RECORDING APPARATUS
    67.
    发明申请
    RECORDING APPARATUS 有权
    录音设备

    公开(公告)号:US20090309914A1

    公开(公告)日:2009-12-17

    申请号:US12549226

    申请日:2009-08-27

    申请人: Takashi Sato

    发明人: Takashi Sato

    IPC分类号: B41J29/38

    摘要: A recording apparatus for performing recording by scanning a recording head includes an acquisition unit configured to acquire temperature information of the recording head, a generation unit configured to generate a signal that indicates outputting of an output voltage based on the temperature information, a voltage control unit configured to control a voltage to be output to the recording head based on the signal, and a control unit configured to simultaneously perform preliminary ejection processing in an interval between a previous scan and a next scan of the recording head and output processing of the signal.

    摘要翻译: 用于通过扫描记录头执行记录的记录装置包括获取单元,被配置为获取记录头的温度信息;生成单元,被配置为生成指示基于温度信息输出输出电压的信号;电压控制单元 被配置为基于所述信号控制要输出到所述记录头的电压;以及控制单元,被配置为在所述记录头的先前扫描和下一次扫描之间的间隔中同时执行预备喷射处理,并且输出所述信号的处理。

    Multistage compression type rotary compressor

    公开(公告)号:US07621729B2

    公开(公告)日:2009-11-24

    申请号:US12068603

    申请日:2008-02-08

    IPC分类号: F04C2/00 F03C4/00

    摘要: An object is to provide a high inner pressure type multistage compression rotary compressor capable of avoiding beforehand generation of vane fly of a second rotary compression element and realizing a stabilized operation, the rotary compressor includes a communication path which connects an intermediate pressure region to a region having a low pressure as a suction pressure of a first rotary compression element; and a valve device which opens or closes this communication path, the rotary compressor applies a high pressure as a back pressure of an upper vane, and this valve device opens the communication path in a case where a pressure difference between the intermediate pressure and the low pressure increases a predetermined upper limit value before the intermediate pressure reaches the high pressure.

    Vehicle brake control device
    69.
    发明授权
    Vehicle brake control device 失效
    车辆制动控制装置

    公开(公告)号:US07621603B2

    公开(公告)日:2009-11-24

    申请号:US11709092

    申请日:2007-02-22

    IPC分类号: B60T13/20 B60T8/42 B60T8/60

    摘要: When the ABS control is executed by the ABS control portion, the vehicle brake control device calculates the first rotational speeds of the first and second motors necessary to achieve the corresponding pressure increase rates and calculates the second rotational speeds of the first and second motors as the upper limits caused by the unlocking pressure limits. Then the vehicle brake control device controls current values of the currents to be supplied to the first and second motors so that they are rotated in the rotational speeds obtained within a range from the first rotational speeds to the second rotational speeds.

    摘要翻译: 当由ABS控制部执行ABS控制时,车辆制动控制装置计算实现相应的增压率所需的第一和第二电动机的第一转速,并计算出第一和第二电动机的第二转速为 由解锁压力限制引起的上限。 然后,车辆制动控制装置控制要提供给第一和第二电动机的电流的电流值,使得它们以从第一转速到第二转速的范围内获得的转速旋转。

    Electro-optical device and electronic apparatus
    70.
    发明授权
    Electro-optical device and electronic apparatus 有权
    电光装置和电子设备

    公开(公告)号:US07619256B2

    公开(公告)日:2009-11-17

    申请号:US11730287

    申请日:2007-03-30

    IPC分类号: H01L27/14

    摘要: An electro-optical device includes an element substrate having a plurality of pixel regions; thin-film transistors, arranged in the pixel regions, including gate electrodes, portions of a gate insulating layer, and semiconductor layers; pixel electrodes electrically connected to drain regions of the thin-film transistors; and storage capacitors including lower electrodes and upper electrodes that are opposed to the lower electrodes with insulating layers disposed therebetween, the insulating layers being made of the same material as that for forming the gate insulating layer. The upper electrodes overlap with some of end portions of the lower electrodes. The gate insulating layer has thin portions located in inner portions of regions overlapping with the lower and upper electrodes and thick portions which are located in regions overlapping with the upper electrodes and the end portions of the lower electrodes and which have a thickness greater than that of the thin portions.

    摘要翻译: 电光装置包括具有多个像素区域的元件基板; 布置在像素区域中的薄膜晶体管,包括栅电极,栅极绝缘层的部分和半导体层; 电连接到薄膜晶体管的漏极区域的像素电极; 以及包括与设置在其间的绝缘层相对的下电极的下电极和上电极的存储电容器,所述绝缘层由与用于形成栅极绝缘层的材料相同的材料制成。 上电极与下电极的一些端部重叠。 栅绝缘层具有位于与下电极和上电极重叠的区域的内部的薄部分和位于与上电极和下电极的端部重叠的区域中的厚部分,其厚度大于 薄的部分。