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公开(公告)号：US20110007292A1
公开(公告)日：2011-01-13
申请号：US12920417
申请日：2009-03-03
CPC分类号： G03F7/70958 , G03F7/70033 , G03F7/70916 , G03F7/70983
摘要： A lithographic apparatus includes a plasma source that includes a vessel configured to enclose a plasma formation site, an optical device configured to transfer optical radiation to or from the vessel, and a reflector arranged in an optical path between the optical device and the plasma formation site source. The reflector is configured to reflect the optical radiation between the optical device and the plasma formation site. The reflector is formed, in operation, as a molten metal mirror.
摘要翻译： 光刻设备包括等离子体源，其包括构造成包围等离子体形成位置的容器，被配置为向容器转移光辐射的光学器件和布置在光学器件与等离子体形成部位之间的光路中的反射器 资源。 反射器被配置为反射光学装置和等离子体形成部位之间的光辐射。 反射器在操作中形成为熔融金属镜。
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公开(公告)号：US20100181502A1
公开(公告)日：2010-07-22
申请号：US11634385
申请日：2006-12-06
IPC分类号： G21K5/02
CPC分类号： G03F7/70916 , B82Y10/00 , G03F7/70033 , G03F7/70175 , H05G2/003 , H05G2/005
摘要： A radiation source having self-shading electrodes is disclosed. Debris originating from the electrodes is reduced. The path from the electrodes to the EUV optics is blocked by part of the electrodes themselves (termed self-shading). This may significantly reduce the amount of electrode-generated debris.
摘要翻译： 公开了具有自阴影电极的辐射源。 源自电极的碎片减少。 从电极到EUV光学器件的路径被部分电极自身阻挡（称为自阴影）。 这可能会显着减少电极产生的碎片的数量。
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公开(公告)号：US08665420B2
公开(公告)日：2014-03-04
申请号：US13060581
申请日：2009-07-29
CPC分类号： G03F7/70958 , B82Y10/00 , B82Y40/00 , G03F1/24 , G03F7/70191 , G03F7/70308 , G03F7/70575 , G21K1/062
摘要： A spectral purity filter is configured to reflect extreme ultraviolet radiation. The spectral purity filter includes a substrate, and an anti-reflective coating on a top surface of the substrate. The anti-reflective coating is configured to transmit infrared radiation. The filter also includes a multi-layer stack configured to reflect extreme ultraviolet radiation and to substantially transmit infrared radiation.
摘要翻译： 光谱纯度滤光器被配置为反射极紫外辐射。 光谱纯度滤光器包括基板和在基板顶表面上的抗反射涂层。 抗反射涂层被配置为透射红外辐射。 该滤波器还包括配置成反射极紫外辐射并基本上透射红外辐射的多层叠层。
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64.发明授权Optical element, lithographic apparatus including such an optical element, device manufacturing method, and device manufactured thereby 有权光学元件，包括这种光学元件的光刻设备，器件制造方法以及由此制造的器件公开(公告)号：US08289499B2
公开(公告)日：2012-10-16
申请号：US12495043
申请日：2009-06-30
CPC分类号： G03F7/70958 , G03F7/70575
摘要： Spectral purity of a radiation beam of a first wavelength may be improved by providing an optical element that includes a structure having at least first layer including a first material, which structure is configured to be substantially reflective for a radiation of the first wavelength and substantially transparent or absorptive for a radiation of a second wavelength, a second layer including a second material, the second layer being configured to be substantially reflective, absorptive or scattering for the radiation of the second wavelength, and vacuum between the first layer and the second layer, wherein the first layer is located upstream in the optical path of incoming radiation with respect to the second layer.
摘要翻译： 可以通过提供一种光学元件来改善第一波长的辐射束的光谱纯度，所述光学元件包括具有至少包括第一材料的第一层的结构，该结构被配置为对于第一波长的辐射基本上是反射的，并且基本上透明 或吸收第二波长的辐射，第二层包括第二材料，第二层被配置为对于第二波长的辐射是基本反射的，吸收的或散射的，以及第一层和第二层之间的真空， 其中所述第一层位于相对于所述第二层的入射辐射的光路中的上游。
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公开(公告)号：US08071963B2
公开(公告)日：2011-12-06
申请号：US11645809
申请日：2006-12-27
申请人： Maarten Marinus Johannes Wilhelmus Van Herpen , Derk Jan Wilfred Klunder , Wouter Anthon Soer , Kurt Gielissen
发明人： Maarten Marinus Johannes Wilhelmus Van Herpen , Derk Jan Wilfred Klunder , Wouter Anthon Soer , Kurt Gielissen
IPC分类号： G21G5/00
CPC分类号： G03F7/70916 , G03F7/70858 , H05G2/003 , H05G2/005
摘要： A debris mitigation system for trapping contaminant material coming from a debris-generating radiation source. The system includes a contamination barrier constructed and arranged to rotate about an axis, and a magnet structure constructed and arranged to provide a magnetic field for deflecting charged debris from the radiation source. The magnet structure is constructed and arranged to provide a magnetic field through the contamination barrier. The magnetic field, when passing through the contamination barrier, is oriented along planes generally coinciding with the axis of rotation of the contamination barrier.
摘要翻译： 用于捕集来自碎屑产生辐射源的污染物质的碎片缓解系统。 该系统包括构造和布置成围绕轴线旋转的污染屏障，以及构造和布置成提供用于使来自辐射源的带电碎片偏转的磁场的磁体结构。 磁体结构被构造和布置成通过污染屏障提供磁场。 当通过污染屏障时，磁场沿着通常与污染屏障旋转轴线重合的平面定向。
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公开(公告)号：US20110092956A1
公开(公告)日：2011-04-21
申请号：US12999394
申请日：2009-06-24
IPC分类号： A61M25/00
CPC分类号： A61B1/0051 , A61B1/00094 , A61B1/00156 , A61M25/0069 , A61M25/0105 , A61M2025/0175
摘要： The present invention relates to a catheter comprising a catheter body section (1) and at least one catheter tip section (2). The catheter body section (1) can extend in a longitudinal direction. The at least one catheter tip section (2) may be located on a distal side of the catheter body section (1). In a first operation mode of the catheter usable during insertion thereof, the catheter body section (1) and the at least one catheter tip section (2) can be commonly moved substantially in the longitudinal direction. In a second operation mode of the catheter usable when the catheter has reached a position where it should not be advanced any further, the catheter body section (1) and the at least one catheter tip section (2) may be moved relative to each other, so that the at least one catheter tip section (2) can be separated from the catheter body section (1).
摘要翻译： 本发明涉及包括导管主体部分（1）和至少一个导管末端部分（2）的导管。 导管主体部分（1）可沿纵向方向延伸。 至少一个导管末端部分（2）可以位于导管主体部分（1）的远侧。 在可插入其中的导管的第一操作模式中，导管主体部分（1）和至少一个导管末端部分（2）可以基本上在纵向上移动。 在导管可到达不再进一步推进的位置的导管的第二操作模式中，导管主体部分（1）和至少一个导管末梢部分（2）可相对于彼此移动 ，使得至少一个导管末端部分（2）可以与导管主体部分（1）分离。
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公开(公告)号：US07737418B2
公开(公告)日：2010-06-15
申请号：US11645808
申请日：2006-12-27
IPC分类号： G03F7/20
CPC分类号： H05G2/003 , G03F7/70916
摘要： A debris mitigation system for trapping debris coming from a tin debris-generating radiation source is provided. The debris mitigating system includes a debris barrier comprising a plurality of foils, and a cleaning system constructed and arranged to clean the foils. The cleaning system includes a supply unit to provide a liquid alloy to the foils to dissolve and flush trapped debris from the foils. The alloy includes gallium, indium, tin, or any combination thereof.
摘要翻译： 提供了用于捕获来自产生锡屑的辐射源的碎片的碎片缓解系统。 碎片减轻系统包括包括多个箔片的碎片屏障，以及构造和布置成清洁箔片的清洁系统。 清洁系统包括供应单元，以向箔提供液体合金以溶解和冲洗来自箔的被捕获的碎屑。 合金包括镓，铟，锡或其任何组合。
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68.发明授权Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby 失效辐射发生器件，光刻设备，器件制造方法和由此制造的器件公开(公告)号：US07615767B2
公开(公告)日：2009-11-10
申请号：US11798037
申请日：2007-05-09
IPC分类号： H05G2/00
摘要： A device constructed to generate radiation includes a liquid bath, and a pair of electrodes. At least a part of one of the electrodes is formed by a cable part moveable with respect to the liquid bath. The device also includes an actuator arranged to move the cable part from a liquid-adhering position to an ignition position, and an ignition source configured to trigger a discharge produced radiating plasma from the liquid adherent to the cable part, when the cable part is in the ignition position, by a discharge between the electrodes. The liquid-adhering position is a position for adhering a liquid from the bath to the part of the electrode.
摘要翻译： 构造成产生辐射的装置包括液槽和一对电极。 电极中的至少一部分由可相对于液槽移动的电缆部分形成。 该装置还包括致动器，其被布置成将电缆部分从液体粘附位置移动到点火位置，并且点火源被配置为触发从电极附着于电缆部分的液体辐射等离子体的放电，当电缆部分处于 点火位置，通过电极之间的放电。 液体粘附位置是将液体从熔池粘附到电极的一部分的位置。
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69.发明申请Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby 失效辐射发生器件，光刻设备，器件制造方法和由此制造的器件公开(公告)号：US20080277599A1
公开(公告)日：2008-11-13
申请号：US11798037
申请日：2007-05-09
摘要： A device constructed to generate radiation includes a liquid bath, and a pair of electrodes. At least a part of one of the electrodes is formed by a cable part moveable with respect to the liquid bath. The device also includes an actuator arranged to move the cable part from a liquid-adhering position to an ignition position, and an ignition source configured to trigger a discharge produced radiating plasma from the liquid adherent to the cable part, when the cable part is in the ignition position, by a discharge between the electrodes. The liquid-adhering position is a position for adhering a liquid from the bath to the part of the electrode.
摘要翻译： 构造成产生辐射的装置包括液槽和一对电极。 电极中的至少一部分由可相对于液槽移动的电缆部分形成。 该装置还包括致动器，其被布置成将电缆部分从液体粘附位置移动到点火位置，并且点火源被配置为触发从电极附着于电缆部分的液体辐射等离子体的放电，当电缆部分处于 点火位置，通过电极之间的放电。 液体粘附位置是将液体从熔池粘附到电极的一部分的位置。
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70.发明授权Spectral purity filter, lithographic apparatus, and method for manufacturing a spectral purity filter 有权光谱纯度滤光片，光刻设备和制造光谱纯度滤光片的方法公开(公告)号：US08817237B2
公开(公告)日：2014-08-26
申请号：US13392434
申请日：2010-07-21
CPC分类号： G03F7/70575 , G02B5/1809 , G21K1/10
摘要： A method of forming a spectral purity filter having a plurality of apertures configured to transmit extreme ultraviolet radiation and suppress transmission of a second type of radiation, in which trenches are formed in a base material in a pattern corresponding to the walls to be formed between the apertures. The trenches are filled with a grid material to form walls of the grid material, and the base material is selectively removed until the grid material is exposed and forms the spaces between the walls of the grid material for the apertures.
摘要翻译： 一种形成光谱纯度滤光片的方法，该光谱纯度滤光器具有多个孔，其被配置为透射极紫外辐射并抑制第二类型辐射的透射，其中沟槽以对应于待形成的壁之间的壁的图案形成在基材中 孔。 沟槽填充有栅格材料以形成栅格材料的壁，并且选择性地去除基底材料，直到栅格材料暴露并且在孔的栅格材料的壁之间形成空间。
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