Positive resist composition
    67.
    发明授权
    Positive resist composition 有权
    正抗蚀剂组成

    公开(公告)号:US07198880B2

    公开(公告)日:2007-04-03

    申请号:US10422789

    申请日:2003-04-25

    IPC分类号: G03F7/004

    摘要: A positive resist composition comprising: (A1) a resin containing at least one type of repeating unit represented by the specific formula and additionally containing at least one type of repeating unit represented by the specific formula, which increases the solubility in an alkali developing solution by the action of an acid, and (B) a compound which is capable of generating an acid by the action of actinic ray or radiation.

    摘要翻译: 正性抗蚀剂组合物包含