公开(公告)号：US07239070B2

公开(公告)日：2007-07-03

申请号：US11334442

申请日：2006-01-19

申请人： Masato Shimada ,  Yoshinao Miyata ,  Tomoaki Takahashi

发明人： Masato Shimada ,  Yoshinao Miyata ,  Tomoaki Takahashi

IPC分类号： H01L41/047 ,  B41J2/05

CPC分类号： B41J2/161 ,  B41J2/14233 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2002/14241 ,  B41J2002/14419 ,  B41J2002/14491

摘要： A liquid-jet head is provided. In the liquid-jet head, a lower electrode, as a common electrode common to a plurality of piezoelectric elements, is continuously formed as far as an outer region opposite the piezoelectric elements, an auxiliary electrode layer is provided which comprises the same layers as layers constituting a lead-out electrode, and which is electrically connected to the lower electrode located outwardly of the region opposite the piezoelectric elements, a first insulation film at least in the vicinity of an end portion of a passage-forming substrate in a direction parallel to the arrangement of the piezoelectric elements is provided with a penetrated portion in a region opposite the auxiliary electrode layer, and the auxiliary electrode layer is in contact with the lower electrode via the penetrated portion provided in the first insulation film.

摘要翻译： 提供喷液头。 在液体喷射头中，作为与多个压电元件共用的公共电极的下电极连续地形成为与压电元件相对的外部区域，提供辅助电极层，其包括与层相同的层 构成引出电极，并且电连接到位于与压电元件相对的区域外侧的下电极;第一绝缘膜，至少在通道形成基板的端部附近，沿平行于 压电元件的布置在与辅助电极层相对的区域中具有穿透部分，并且辅助电极层经由设置在第一绝缘膜中的穿透部分与下电极接触。

公开(公告)号：US20070074394A1

公开(公告)日：2007-04-05

申请号：US11538382

申请日：2006-10-03

申请人： Yoshinao Miyata ,  Kenichi Kitamura

发明人： Yoshinao Miyata ,  Kenichi Kitamura

IPC分类号： B21D53/76

CPC分类号： B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1629 ,  B41J2002/14241 ,  B41J2002/14419 ,  B41J2002/14491 ,  Y10T29/49401

摘要： A method for manufacturing a liquid jet head is provided which includes a flow channel board having at least pressure-generating chambers communicating with nozzle holes and a pressure generator above one surface that applies pressure for jetting liquid to the pressure-generating chambers, and a silicon single-crystal reservoir board having at least a reservoir section that communicates with the pressure-generating chambers and that is defined by a through hole passing through the reservoir board and a step with a riser formed so as to open up the through hole at one surface. In the method, a mask pattern having an opening is formed on a reservoir-forming board intended for the reservoir board. The opening has a correction pattern on its wall and a dummy mask pattern is formed in the opening. The correction pattern serves to expose a predetermined crystal plane of the reservoir-firming board to define the riser of the step. The dummy mask pattern has a plurality of separate mask portions and serves to substantially match the etching rate of the reservoir-forming board in the region opposing the correction pattern with the etching rate of the reservoir-forming board in the region opposing the opening of the mask pattern. The reservoir-forming board is anisotropically etched through the mask pattern having the correction pattern and the dummy mask pattern, so that the reservoir section having the step is formed.

摘要翻译： 提供了一种制造液体喷射头的方法，其包括至少具有与喷嘴孔连通的压力产生室的流动通道板和在一个表面上的压力发生器，所述压力发生器向压力发生室施加用于将液体喷射的压力，以及硅 单晶储存器板至少具有与压力发生室连通并且由通过储存器板的通孔限定的储存部分和具有形成为在一个表面上打开通孔的立管的台阶 。 在该方法中，在用于储存器板的储存器形成板上形成具有开口的掩模图案。 开口在其壁上具有校正图案，并且在开口中形成虚拟掩模图案。 校正图案用于暴露储层固化板的预定晶面以限定台阶的立管。 虚拟掩模图案具有多个分离的掩模部分，并且用于将与在校正图案相对的区域中的储存器形成板的蚀刻速率与存储器形成板的与开口部的开口相对的区域中的蚀刻速率基本上一致 掩模图案。 通过具有校正图案和伪掩模图案的掩模图案对储层形成板进行各向异性蚀刻，从而形成具有台阶的储存器部分。

公开(公告)号：US07152963B2

公开(公告)日：2006-12-26

申请号：US10909840

申请日：2004-08-03

申请人： Hiroshige Owaki ,  Yoshinao Miyata

发明人： Hiroshige Owaki ,  Yoshinao Miyata

IPC分类号： B41J2/045

CPC分类号： B41J2/14233 ,  B41J2002/14241 ,  B41J2002/14419 ,  B41J2002/14491

摘要： A liquid jet head includes: a passage-forming substrate provided with at least two rows of pressure generating chambers each communicating with a nozzle orifice; and piezoelectric elements for causing pressure change in the pressure generating chambers. The piezoelectric elements are provided on one side of the passage-forming substrate with a vibration plate interposed therebetween. On a joint plate joined to the piezoelectric element side of the passage-forming substrate, driving ICs for driving the piezoelectric elements are provided in regions facing the respective rows of the pressure generating chambers. For each row of the pressure generating chambers, at least one penetrated hole, in which lead electrodes led from the piezoelectric elements are exposed, is provided in a region of the joint plate, the region corresponding to a region between the rows of the pressure generating chambers. A beam portion is formed between the adjacent penetrated holes.

摘要翻译： 液体喷射头包括：通道形成基板，设置有至少两排与喷嘴孔连通的压力产生室; 以及用于在压力发生室中引起压力变化的压电元件。 压电元件设置在通道形成基板的一侧，隔着振动板。 在与通路形成基板的压电元件侧接合的接合板上，在面向压力发生室的各行的区域中设置用于驱动压电元件的驱动IC。 对于压力发生室的每一行，在接合板的区域中设置有从压电元件引出的引线电极露出的至少一个穿透孔，该区域对应于压力产生的行之间的区域 房间。 在相邻的穿透孔之间形成梁部分。

公开(公告)号：US06959490B2

公开(公告)日：2005-11-01

申请号：US10637003

申请日：2003-08-08

申请人： Yoshinao Miyata

发明人： Yoshinao Miyata

IPC分类号： B05B1/14 ,  B41J2/045 ,  B41J2/055 ,  B41J2/16 ,  H05K3/02 ,  G01D15/00 ,  G11B5/127 ,  H01L21/44

CPC分类号： B41J2/1646 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1635 ,  B41J2002/14241 ,  B41J2002/14419 ,  Y10T29/49126 ,  Y10T29/49128 ,  Y10T29/49155 ,  Y10T29/49156

摘要： Disclosed are a method f manufacturing a silicon device and a method of manufacturing a liquid jet head, which are capable of surely preventing damage of a piezoelectric element in manufacturing. In forming a thin-film pattern on one surface of a silicon wafer 100, a first moisture permeation preventive layer 96, which is so as to surround the entire thin-film pattern of the silicon wafer 100, is formed in the same layer as a first conductive layer 96 on the silicon wafer 100, a second moisture permeation preventive layer 114 having a narrower width than the first moisture permeation preventive layer 96 is formed in the same layer as an insulation layer 100 on the first moisture permeation preventive layer 96, and a third moisture permeation preventive layer 121 is formed in the same layer as a second conductive layer 120 on the second moisture permeation preventive layer 114 so as to cover the second moisture permeation preventive layer 114. Thus, a moisture permeation preventive pattern 130 is formed. Thereafter, a sealing plate is joined to the silicon wafer 100 through the moisture permeation preventive pattern 130 interposed therebetween, and a concave portion is formed by etching from the other surface of the silicon wafer 100. Thus, a silicon device is manufactured.

摘要翻译： 公开了制造硅器件的方法和制造液体喷射头的方法，其能够可靠地防止制造中的压电元件的损坏。 在硅晶片100的一个表面上形成薄膜图案时，以与硅晶片100相同的层形成围绕硅晶片100的整个薄膜图案的第一防潮层96 在第一防潮层96上形成与第一防潮层96相比窄的宽度比第一防潮层96窄的第二防潮层114，在第一防潮层96上形成第一导电层96， 第三防潮层121形成在与第二防潮层114上的第二导电层120相同的层中，以覆盖第二防潮层114.因此，形成防潮透射图案130。 此后，通过插入其之间的防湿图案130将密封板接合到硅晶片100，并且通过从硅晶片100的另一表面进行蚀刻形成凹部。因此，制造硅器件。

公开(公告)号：US06878609B2

公开(公告)日：2005-04-12

申请号：US10732272

申请日：2003-12-11

申请人： Akihisa Wanibe ,  Noriaki Okazawa ,  Yoshinao Miyata ,  Toshinao Shinbo ,  Tetsuya Akasu ,  Hisashi Akachi

发明人： Akihisa Wanibe ,  Noriaki Okazawa ,  Yoshinao Miyata ,  Toshinao Shinbo ,  Tetsuya Akasu ,  Hisashi Akachi

IPC分类号： H01L21/306 ,  B32B3/10 ,  B65D65/28 ,  G09F3/00 ,  H01L21/301 ,  H01L21/302 ,  H01L21/304 ,  H01L21/46 ,  H01L21/461 ,  H01L21/78

CPC分类号： H01L21/78 ,  H01L21/3043 ,  Y10T428/15 ,  Y10T428/21 ,  Y10T428/24273

摘要： In order to provide a silicon wafer break pattern that stabilizes the location and shape of the breaks at weak spots of the break pattern and that reduces waste, the through-holes of the break pattern is disposed along a scribe line, a first group of the through-holes are substantially disposed on only a first side of the scribe line, and a second group of the through-holes are substantially disposed on only a second side of the scribe line.

摘要翻译： 为了提供一种硅晶片断裂图案，其使断裂图案的弱点处的断裂位置和形状稳定并且减少浪费，断裂图案的通孔沿着划线设置，第一组 通孔仅基本上设置在划线的第一侧上，第二组通孔基本上仅设置在划线的第二侧。

公开(公告)号：US20050046678A1

公开(公告)日：2005-03-03

申请号：US10909840

申请日：2004-08-03

申请人： Hiroshige Owaki ,  Yoshinao Miyata

发明人： Hiroshige Owaki ,  Yoshinao Miyata

IPC分类号： B41J2/045 ,  B41J2/055 ,  B41J2/14

CPC分类号： B41J2/14233 ,  B41J2002/14241 ,  B41J2002/14419 ,  B41J2002/14491

摘要： A liquid jet head includes: a passage-forming substrate provided with at least two rows of pressure generating chambers each communicating with a nozzle orifice; and piezoelectric elements for causing pressure change in the pressure generating chambers. The piezoelectric elements are provided on one side of the passage-forming substrate with a vibration plate interposed therebetween. On a joint plate joined to the piezoelectric element side of the passage-forming substrate, driving ICs for driving the piezoelectric elements are provided in regions facing the respective rows of the pressure generating chambers. For each row of the pressure generating chambers, at least one penetrated hole, in which lead electrodes led from the piezoelectric elements are exposed, is provided in a region of the joint plate, the region corresponding to a region between the rows of the pressure generating chambers. A beam portion is formed between the adjacent penetrated holes.

摘要翻译： 液体喷射头包括：通道形成基板，设置有至少两排与喷嘴孔连通的压力产生室; 以及用于在压力发生室中引起压力变化的压电元件。 压电元件设置在通道形成基板的一侧，隔着振动板。 在与通路形成基板的压电元件侧接合的接合板上，在面向压力发生室的各行的区域中设置用于驱动压电元件的驱动IC。 对于压力发生室的每一行，在接合板的区域中设置有从压电元件引出的引线电极露出的至少一个穿透孔，该区域对应于压力产生的行之间的区域 房间。 在相邻的穿透孔之间形成梁部分。

公开(公告)号：US06378996B1

公开(公告)日：2002-04-30

申请号：US09712842

申请日：2000-11-15

申请人： Masato Shimada ,  Akira Matsuzawa ,  Yoshinao Miyata ,  Tsutomu Nishiwaki

发明人： Masato Shimada ,  Akira Matsuzawa ,  Yoshinao Miyata ,  Tsutomu Nishiwaki

IPC分类号： B41J2045

CPC分类号： B41J2/1629 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2002/14241 ,  B41J2002/1437 ,  B41J2002/14419 ,  B41J2002/14491

摘要： Disclosed are an ink-jet recording head in which rigidity of a compartment wall is improved and pressure generating chambers are arranged in a high density, a manufacturing method and an ink-jet recording apparatus thereof. An ink-jet recording head includes: a passage-forming substrate 10 having at least silicon layer that consists of single crystal silicon and pressure generating chambers 12 defined thereon, which communicate with a nozzle orifice 21; and a piezoelectric element 300 for generating a pressure change in the pressure generating chamber 12, the piezoelectric element 300 being provided in a region opposite the pressure generating chamber 12 via a vibration plate, which constitutes a portion of the pressure generating chamber 12. The ink-jet recording head further includes a joining plate 20 joined to the passage-forming substrate 10 on the surface where the piezoelectric element 300 is formed, and the nozzle orifice 21 is provided on the joining plate 20.

摘要翻译： 公开了一种喷墨记录头，其中室壁的刚性得到改善，并且压力发生室以高密度排列，其制造方法和喷墨记录装置。喷墨记录头包括：通道 至少具有由限定在其上的单晶硅和压力发生室12构成的硅层的衬底10，其与喷嘴孔21连通; 以及用于在压力发生室12中产生压力变化的压电元件300，压电元件300经由构成压力产生室12的一部分的振动板设置在与压力产生室12相对的区域中。油墨 喷墨记录头还包括在形成压电元件300的表面上连接到通道形成基板10的接合板20，并且喷嘴孔21设置在接合板20上。