公开(公告)号：US07841085B2

公开(公告)日：2010-11-30

申请号：US11538382

申请日：2006-10-03

申请人： Yoshinao Miyata ,  Kenichi Kitamura

发明人： Yoshinao Miyata ,  Kenichi Kitamura

IPC分类号： B21D53/76 ,  H01S4/00 ,  H01L21/00

CPC分类号： B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1629 ,  B41J2002/14241 ,  B41J2002/14419 ,  B41J2002/14491 ,  Y10T29/49401

摘要： A method for manufacturing a liquid jet head is provided which includes a flow channel board having at least pressure-generating chambers communicating with nozzle holes and a pressure generator above one surface that applies pressure for jetting liquid to the pressure-generating chambers, and a silicon single-crystal reservoir board having at least a reservoir section that communicates with the pressure-generating chambers and that is defined by a through hole passing through the reservoir board and a step with a riser formed so as to open up the through hole at one surface. In the method, a mask pattern having an opening is formed on a reservoir-forming board intended for the reservoir board. The opening has a correction pattern on its wall and a dummy mask pattern is formed in the opening. The correction pattern serves to expose a predetermined crystal plane of the reservoir-firming board to define the riser of the step. The dummy mask pattern has a plurality of separate mask portions and serves to substantially match the etching rate of the reservoir-forming board in the region opposing the correction pattern with the etching rate of the reservoir-forming board in the region opposing the opening of the mask pattern. The reservoir-forming board is anisotropically etched through the mask pattern having the correction pattern and the dummy mask pattern, so that the reservoir section having the step is formed.

摘要翻译： 提供了一种制造液体喷射头的方法，其包括至少具有与喷嘴孔连通的压力产生室的流动通道板和在一个表面上的压力发生器，所述压力发生器向压力发生室施加用于将液体喷射的压力，以及硅 单晶储存器板至少具有与压力发生室连通并且由通过储存器板的通孔限定的储存部分和具有形成为在一个表面上打开通孔的立管的台阶 。 在该方法中，在用于储存器板的储存器形成板上形成具有开口的掩模图案。 开口在其壁上具有校正图案，并且在开口中形成虚拟掩模图案。 校正图案用于暴露储层固化板的预定晶面以限定台阶的立管。 虚拟掩模图案具有多个分离的掩模部分，并且用于将与在校正图案相对的区域中的储存器形成板的蚀刻速率与存储器形成板的与开口部的开口相对的区域中的蚀刻速率基本上一致 掩模图案。 通过具有校正图案和伪掩模图案的掩模图案对储层形成板进行各向异性蚀刻，从而形成具有台阶的储存器部分。

公开(公告)号：US20070074394A1

公开(公告)日：2007-04-05

申请号：US11538382

申请日：2006-10-03

申请人： Yoshinao Miyata ,  Kenichi Kitamura

发明人： Yoshinao Miyata ,  Kenichi Kitamura

IPC分类号： B21D53/76

CPC分类号： B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1629 ,  B41J2002/14241 ,  B41J2002/14419 ,  B41J2002/14491 ,  Y10T29/49401

摘要： A method for manufacturing a liquid jet head is provided which includes a flow channel board having at least pressure-generating chambers communicating with nozzle holes and a pressure generator above one surface that applies pressure for jetting liquid to the pressure-generating chambers, and a silicon single-crystal reservoir board having at least a reservoir section that communicates with the pressure-generating chambers and that is defined by a through hole passing through the reservoir board and a step with a riser formed so as to open up the through hole at one surface. In the method, a mask pattern having an opening is formed on a reservoir-forming board intended for the reservoir board. The opening has a correction pattern on its wall and a dummy mask pattern is formed in the opening. The correction pattern serves to expose a predetermined crystal plane of the reservoir-firming board to define the riser of the step. The dummy mask pattern has a plurality of separate mask portions and serves to substantially match the etching rate of the reservoir-forming board in the region opposing the correction pattern with the etching rate of the reservoir-forming board in the region opposing the opening of the mask pattern. The reservoir-forming board is anisotropically etched through the mask pattern having the correction pattern and the dummy mask pattern, so that the reservoir section having the step is formed.

摘要翻译： 提供了一种制造液体喷射头的方法，其包括至少具有与喷嘴孔连通的压力产生室的流动通道板和在一个表面上的压力发生器，所述压力发生器向压力发生室施加用于将液体喷射的压力，以及硅 单晶储存器板至少具有与压力发生室连通并且由通过储存器板的通孔限定的储存部分和具有形成为在一个表面上打开通孔的立管的台阶 。 在该方法中，在用于储存器板的储存器形成板上形成具有开口的掩模图案。 开口在其壁上具有校正图案，并且在开口中形成虚拟掩模图案。 校正图案用于暴露储层固化板的预定晶面以限定台阶的立管。 虚拟掩模图案具有多个分离的掩模部分，并且用于将与在校正图案相对的区域中的储存器形成板的蚀刻速率与存储器形成板的与开口部的开口相对的区域中的蚀刻速率基本上一致 掩模图案。 通过具有校正图案和伪掩模图案的掩模图案对储层形成板进行各向异性蚀刻，从而形成具有台阶的储存器部分。

公开(公告)号：US08348394B2

公开(公告)日：2013-01-08

申请号：US13029974

申请日：2011-02-17

申请人： Yoshinao Miyata

发明人： Yoshinao Miyata

IPC分类号： B41J2/045 ,  B41J2/14 ,  B41J2/16

CPC分类号： B41J2/14233 ,  B41J2002/14491

摘要： A discrete element electrode terminal and a driving IC are formed between piezoelectric element rows. A circuit substrate is placed at a side opposite to a flow path substrate side of the driving IC. An input pad is formed on an elastic film at a position corresponding to an inter terminal of the driving IC. An output terminal of the driving IC is electrically bonded to the discrete element electrode terminal, the input terminal of the driving IC is electrically bonded to the input pad, and the input pad is electrically bonded to a substrate terminal of the circuit substrate.

摘要翻译： 离散元件电极端子和驱动IC形成在压电元件列之间。 电路基板被放置在与驱动IC的流路基板侧相反的一侧。 在对应于驱动IC的内部端子的位置处，在弹性膜上形成输入焊盘。 驱动IC的输出端子与离散元件电极端子电连接，驱动IC的输入端子电连接到输入焊盘，并且输入焊盘电连接到电路基板的基板端子。

公开(公告)号：US07891782B2

公开(公告)日：2011-02-22

申请号：US12405913

申请日：2009-03-17

申请人： Hiroshige Owaki ,  Yoshinao Miyata ,  Toshiaki Kori ,  Satoshi Nakajima

发明人： Hiroshige Owaki ,  Yoshinao Miyata ,  Toshiaki Kori ,  Satoshi Nakajima

IPC分类号： B41J2/045 ,  B41J2/05

CPC分类号： B41J2/14233 ,  B41J2002/14241 ,  B41J2002/14491 ,  B41J2202/11 ,  Y10T29/49002

摘要： A liquid injecting head includes a flow path forming substrate in which a pressure generating chamber communicated with a nozzle opening that injects liquid is formed, a pressure generating element that is formed so as to apply pressure to the pressure generating chamber for injecting the liquid, a lead electrode that is connected to the pressure generating element, a wiring substrate having flexibility that is connected to the lead electrode, and a support member that is bonded to the wiring substrate. A fixing opening formed by perforating the wiring substrate in the thickness direction is disposed, and the wiring substrate and the support member are bonded together through an adhesive agent disposed inside the fixing opening.

摘要翻译： 液体注入头包括：流路形成基板，其中形成有与喷射液体的喷嘴开口连通的压力产生室;形成为向压力发生室施加压力以用于喷射液体的压力产生元件， 连接到压力产生元件的引线电极，具有连接到引线电极的柔性的布线基板和结合到布线基板的支撑部件。 布置通过沿着厚度方向对布线基板进行穿孔而形成的固定开口，并且布线基板和支撑部件通过设置在固定开口内的粘合剂粘接在一起。

公开(公告)号：US20060192817A1

公开(公告)日：2006-08-31

申请号：US11350884

申请日：2006-02-10

申请人： Yoshinao Miyata

发明人： Yoshinao Miyata

IPC分类号： B41J2/045

CPC分类号： B41J2/14233 ,  B41J2002/14241 ,  B41J2002/14491

摘要： The present invention includes a passage-forming substrate on which pressure generating chambers communicating with nozzle orifices ejecting a liquid are respectively formed separately from each other, and actuator devices each including a vibration plate provided on the passage-forming substrate, wherein, a protective plate is jointed to a side of the passage-forming substrate, the side facing the actuator devices, and driver circuits for driving the actuator devices are provided on the protective plate, and wherein each of the driver circuits is provided with individual terminals to which individual electrodes of the respective actuator devices are electrically connected, and connection terminals to which an external wiring line is directly connected, and each of the driver circuits is also provided with a common terminal electrically connected to a common electrode common to more than one of the actuator devices, and with a common connection terminal which is connected to the common terminal through a conductive wiring line and to which an external wiring line is directly connected.

公开(公告)号：US06886923B2

公开(公告)日：2005-05-03

申请号：US10464810

申请日：2003-06-19

申请人： Yoshinao Miyata

发明人： Yoshinao Miyata

IPC分类号： B41J2/14 ,  B41J2/045

CPC分类号： B41J2/14233 ,  B41J2002/14241 ,  B41J2002/14491 ,  H01L2224/48091 ,  H01L2224/4813 ,  H01L2924/19107 ,  H01L2924/00014

摘要： Disclosed is a liquid-jet head and a Liquid-jet apparatus, which are capable of reliably supplying a driving voltage to a driving IC, increasing the number of arrays of nozzle orifices, and being made small-sized. The liquid-jet head comprises a passage-forming substrate in which a pressure generating chamber communicating with an nozzle orifice is defined, and piezoelectric elements; each piezoelectric element being provided in the passage-forming substrate via a vibration plate, wherein a joint plate, on which a driving IC and a wiring pattern are provided, to an upper portion of which is connected an external wiring, is joined to the piezoelectric element side of the passage-forming substrate, a plurality of driving voltage supply pads, to which a driving voltage to be distributed to each piezoelectric element is supplied, are provided on the driving IC along a long direction of the driving IC, the adjacent driving voltage supply pads being electrically connected by a connection wiring formed of a conductive wire, and the driving voltage supply pad in an end portion of the driving IC in the long direction thereof and the wiring pattern being electrically connected by the connection wiring.

摘要翻译： 公开了一种液体喷射头和液体喷射装置，其能够可靠地向驱动IC提供驱动电压，增加喷嘴孔的阵列数量并被制成小尺寸。 液体喷射头包括通道形成基板，其中限定了与喷嘴孔连通的压力产生室和压电元件; 每个压电元件经由振动板设置在通道形成基板中，其中连接有外部布线的上部连接有驱动IC和布线图案的接合板连接到压电元件 沿着驱动IC的长边方向，在驱动IC上设置多个驱动电压供给焊盘，在该驱动电压供给焊盘上分配有各个压电元件的驱动电压被供给到驱动IC上，相邻的驱动 电压供给垫通过由导线形成的连接布线和驱动IC的长度方向上的驱动电压焊盘电连接，并且布线图案通过连接布线电连接。

公开(公告)号：US06840601B2

公开(公告)日：2005-01-11

申请号：US10395856

申请日：2003-03-25

申请人： Yoshinao Miyata

发明人： Yoshinao Miyata

IPC分类号： B41J2/045 ,  B41J2/055 ,  B41J2/14 ,  B41J2/16 ,  H01L41/09 ,  H01L41/18 ,  H01L41/187

CPC分类号： B41J2/1629 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1631 ,  B41J2/1635 ,  B41J2/1646 ,  B41J2002/14241 ,  B41J2002/14419 ,  B41J2002/14491

摘要： Disclosed are a liquid-jet recording head and a liquid-jet recording apparatus, which are capable of retaining a fine liquid ejecting characteristic and obtaining a stable liquid ejecting characteristic. The liquid-jet recording head, which is provided with a passage-forming substrate formed with pressure generating chambers 12 to communicate with nozzle orifices, and piezoelectric elements provided on one side of the passage-forming substrate through a vibration plate to generate pressure changes inside the pressure generating chambers, includes an insulation layer continuously provided at least in a region opposing to the vicinity of longitudinal end portions of the piezoelectric elements along a direction of arrangement of the piezoelectric elements, the insulation layer also having a penetrated portion in a region opposing to a common electrode provided in common to the plurality of piezoelectric elements, and a connective wiring layer continuously provided on the insulation layer to be electrically connected to the common electrode via the penetrated portion. Accordingly, a resistance value of the common electrode is substantially reduced.

摘要翻译： 公开了一种液体喷射记录头和液体喷射记录装置，其能够保持微细的液体喷射特性并获得稳定的液体喷射特性。 液体喷射记录头设置有形成有与喷嘴孔连通的压力产生室12的通道形成基板和通过振动板设置在通道形成基板的一侧上的压电元件，以在内部产生压力变化 压力发生室包括至少在与压电元件的布置方向相对的压电元件的纵向端部附近的区域中连续设置的绝缘层，该绝缘层还具有与相对的区域相对的区域中的穿透部分 连接到与多个压电元件共同设置的公共电极，以及连接地设置在绝缘层上以经由穿透部分电连接到公共电极的连接布线层。 因此，公共电极的电阻值显着降低。

公开(公告)号：US06137511A

公开(公告)日：2000-10-24

申请号：US832626

申请日：1997-04-04

申请人： Yutaka Furuhata ,  Yoshinao Miyata

发明人： Yutaka Furuhata ,  Yoshinao Miyata

IPC分类号： B41J2/175 ,  B41J2/045 ,  B41J2/055 ,  B41J2/14 ,  B41J2/16

CPC分类号： B41J2/1629 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1631 ,  B41J2/1645 ,  B41J2002/14387

摘要： An ink jet recording head which can compensate for shortage of mechanical strength of an ink reservoir by preventing the piezoelectric film on an ink reservoir from cracking or being broken due to the vibration of a piezoelectric film or flowing or mechanical vibration of ink. The ink reservoir has at least two plane orientations at its bottom and is given different depths.

摘要翻译： 一种喷墨记录头，其可以通过防止由于压电膜的振动或油墨的流动或机械振动而导致油墨储存器上的压电膜破裂或破裂，从而补偿油墨储存器的机械强度不足。 墨水储存器在其底部具有至少两个平面取向并且被赋予不同的深度。

公开(公告)号：US5984459A

公开(公告)日：1999-11-16

申请号：US144459

申请日：1998-09-01

申请人： Tetsushi Takahashi ,  Yoshinao Miyata ,  Shiro Yazaki

发明人： Tetsushi Takahashi ,  Yoshinao Miyata ,  Shiro Yazaki

IPC分类号： B41J2/14 ,  B41J2/045

CPC分类号： B41J2/14233 ,  B41J2002/14387 ,  B41J2002/14491 ,  B41J2202/11

摘要： An ink-jet printing head and an ink-jet printing apparatus using the same, the ink-jet head comprising a piezoelectric element, a vibrating plate constituting a part of a pressure generating chamber communicating with a nozzle aperture, a lower electrode, a piezoelectric layer, and an upper electrode, wherein said vibrating plate in an area opposite to the vicinity of at least one end in the longitudinal direction of a piezoelectric active part which is an area in which said piezoelectric layer substantially drives said vibrating plate is convex on the reverse side to said piezoelectric element.

摘要翻译： 喷墨打印头和使用其的喷墨打印装置，喷墨头包括压电元件，构成与喷嘴孔连通的压力产生室的一部分的振动板，下电极，压电 层和上电极，其中所述振动板在与所述压电层基本上驱动所述振动板的区域中的压电有源部分的纵向方向上的至少一端附近相反的区域中是凸起的 与所述压电元件相反。

公开(公告)号：US5922218A

公开(公告)日：1999-07-13

申请号：US795565

申请日：1997-02-06

申请人： Yoshinao Miyata ,  Tsutomu Nishiwaki

发明人： Yoshinao Miyata ,  Tsutomu Nishiwaki

IPC分类号： B41J2/14 ,  B41J2/16 ,  B44C1/22 ,  H01L21/00

CPC分类号： B41J2/1629 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1635 ,  B41J2/1646 ,  B41J2002/14387 ,  Y10T29/42

摘要： In an ink jet head having: a nozzle plate in which a plurality of nozzle openings are formed; a flow path substrate comprising a reservoir to which ink is externally supplied, and a plurality of pressure chambers which are connected to the reservoir via an ink supply port and which respectively communicate with the nozzle openings; an elastic film which pressurizes ink in the pressure chambers; and driving means located at a position opposing the respective pressure chambers for causing the elastic film to conduct flexural deformation, the pressure chambers are arranged in a single-crystal silicon substrate of a (110) lattice plane and along a lattice orientation.

摘要翻译： 在具有：喷嘴板的喷墨头中形成有多个喷嘴孔; 流路基板，其包括从外部供给油墨的储存器，以及多个压力室，其经由供墨口连接到所述储存器并分别与所述喷嘴开口连通; 对压力室内的油墨进行加压的弹性膜; 以及驱动装置，位于与相应的压力室相对的位置，以使弹性膜发生弯曲变形，压力室被布置在（110）晶格平面的单晶硅衬底中并且沿着<112>晶格取向。