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61.发明申请公开(公告)号：US20060198049A1
公开(公告)日：2006-09-07
申请号：US11213863
申请日：2005-08-30
CPC分类号： G11B5/1278 , G11B5/3116 , Y10T29/49032 , Y10T29/49034 , Y10T29/49041 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A magnetic head comprises: an encasing layer made of a nonmagnetic material and having a groove that opens in the top surface; a nonmagnetic metal layer made of a nonmagnetic metal material, disposed on the top surface of the encasing layer, and having a penetrating opening that is contiguous to the groove; and a pole layer made of a magnetic metal material and encased in the groove of the encasing layer and in the opening of the nonmagnetic metal layer. The pole layer has an end face located in a medium facing surface, the end face having a first portion and a second portion that is located farther from a substrate than the first portion and connected to the first portion. The first portion has a width that decreases as the distance from the substrate decreases. The second portion has a uniform width that defines the track width. In the medium facing surface, the nonmagnetic metal layer exists on both sides of the second portion, the sides being opposed to each other in the direction of track width.
摘要翻译： 磁头包括：由非磁性材料制成并具有在顶表面上开口的凹槽的封装层; 由非磁性金属材料制成的非磁性金属层，设置在所述封装层的顶表面上，并且具有与所述凹槽相邻的穿透开口; 以及由磁性金属材料制成并封装在封装层的凹槽中和非磁性金属层的开口中的极层。 极层具有位于介质相对表面中的端面，端面具有第一部分和第二部分，其位于比第一部分更远离基板并且连接到第一部分。 第一部分具有随着距离衬底的距离减小而减小的宽度。 第二部分具有定义轨道宽度的均匀宽度。 在面向介质的表面中，非磁性金属层存在于第二部分的两侧，侧面在轨道宽度方向上彼此相对。
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62.发明申请公开(公告)号：US20060174475A1
公开(公告)日：2006-08-10
申请号：US11050892
申请日：2005-02-07
CPC分类号： G11B5/3173 , G11B5/3166 , G11B5/3169 , G11B5/39 , G11B5/3903 , Y10T29/49032 , Y10T29/49037 , Y10T29/49043 , Y10T29/49048
摘要： A method of manufacturing magnetic heads comprises the step of: fabricating a magnetic head substructure by forming components of a plurality of magnetic heads on a single substrate, wherein a plurality of rows of pre-head portions that will be the respective magnetic heads later are aligned in the substructure; and fabricating the magnetic heads by separating the pre-head portions from one another through cutting the substructure. In the substructure first resistor elements and second resistor elements are formed. Each of the first resistor elements has a resistance that varies depending on the location of an end of an MR element located in a medium facing surface along the direction orthogonal to the medium facing surface. Each of the second resistor elements has a resistance that varies depending on the location of an end face of a track width defining portion located in the medium facing surface along the direction orthogonal to the medium facing surface. The medium facing surfaces are formed while monitoring the resistance values of the first and second resistor elements.
摘要翻译： 一种制造磁头的方法包括以下步骤：通过在单个基板上形成多个磁头的部件来制造磁头子结构，其中随后将成为相应磁头的多行预磁头部分对准 在子结构中; 以及通过切割子结构将前头部彼此分开来制造磁头。 在子结构中，形成第一电阻元件和第二电阻元件。 每个第一电阻器元件具有根据位于面向介质的表面中的MR元件沿着与介质面对表面正交的方向的端部的位置而变化的电阻。 每个第二电阻器元件具有根据位于介质相对表面中的轨道宽度限定部分的端面沿着与面向介质的表面正交的方向的位置而变化的电阻。 在监测第一和第二电阻元件的电阻值的同时形成面向介质的表面。
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63.发明授权公开(公告)号：US07369361B2
公开(公告)日：2008-05-06
申请号：US11050892
申请日：2005-02-07
CPC分类号： G11B5/3173 , G11B5/3166 , G11B5/3169 , G11B5/39 , G11B5/3903 , Y10T29/49032 , Y10T29/49037 , Y10T29/49043 , Y10T29/49048
摘要： A method of manufacturing magnetic heads comprises the step of: fabricating a magnetic head substructure by forming components of a plurality of magnetic heads on a single substrate, wherein a plurality of rows of pre-head portions that will be the respective magnetic heads later are aligned in the substructure; and fabricating the magnetic heads by separating the pre-head portions from one another through cutting the substructure. In the substructure first resistor elements and second resistor elements are formed. Each of the first resistor elements has a resistance that varies depending on the location of an end of an MR element located in a medium facing surface along the direction orthogonal to the medium facing surface. Each of the second resistor elements has a resistance that varies depending on the location of an end face of a track width defining portion located in the medium facing surface along the direction orthogonal to the medium facing surface. The medium facing surfaces are formed while monitoring the resistance values of the first and second resistor elements.
摘要翻译： 一种制造磁头的方法包括以下步骤：通过在单个基板上形成多个磁头的部件来制造磁头子结构，其中随后将成为相应磁头的多行预磁头部分对准 在子结构中; 以及通过切割子结构将前头部彼此分开来制造磁头。 在子结构中，形成第一电阻元件和第二电阻元件。 每个第一电阻器元件具有根据位于面向介质的表面中的MR元件沿着与介质面对表面正交的方向的端部的位置而变化的电阻。 每个第二电阻器元件具有根据位于介质相对表面中的轨道宽度限定部分的端面沿着与面向介质的表面正交的方向的位置而变化的电阻。 在监测第一和第二电阻元件的电阻值的同时形成面向介质的表面。
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64.发明授权公开(公告)号：US11410688B1
公开(公告)日：2022-08-09
申请号：US17347992
申请日：2021-06-15
申请人： Yoshitaka Sasaki , Hiroyuki Ito , Shigeki Tanemura , Hironori Araki , Yoji Nomura , Yukinori Ikegawa , Weihao Xu
发明人： Yoshitaka Sasaki , Hiroyuki Ito , Shigeki Tanemura , Hironori Araki , Yoji Nomura , Yukinori Ikegawa , Weihao Xu
IPC分类号： G11B11/105 , G11B5/127 , G11B7/1387 , G11B5/60 , G11B5/00 , G11B5/48
摘要： A thermally-assisted magnetic recording head includes a medium facing surface, a main pole, a waveguide, and a plasmon generator. A second metal layer of the plasmon generator includes a second front end facing the medium facing surface. A third metal layer of the plasmon generator includes a narrow portion located on the second metal layer. The narrow portion includes a front end face located in the medium facing surface and configured to generate near-field light from a surface plasmon, and a rear end opposite the front end face. The rear end is located farther from the medium facing surface than is the second front end.
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公开(公告)号：US10803888B1
公开(公告)日：2020-10-13
申请号：US16574880
申请日：2019-09-18
申请人： Yoshitaka Sasaki , Hiroyuki Ito , Kazuki Sato , Shigeki Tanemura , Hironori Araki , Yoji Nomura , Tetsuya Roppongi , Atsushi Yamaguchi
发明人： Yoshitaka Sasaki , Hiroyuki Ito , Kazuki Sato , Shigeki Tanemura , Hironori Araki , Yoji Nomura , Tetsuya Roppongi , Atsushi Yamaguchi
摘要： A manufacturing method for a magnetic head includes the steps of: forming a main pole; forming a spin torque oscillator; and forming a trailing shield. The step of forming the spin torque oscillator includes: a step of forming a layered film; a step of forming an interposition layer; a step of forming a mask; a first etching step of etching a portion of the interposition layer using the mask; a second etching step of etching a portion of the layered film using the mask and the interposition layer as an etching mask; a step of removing the interposition layer and the mask; and a patterning step of patterning the layered film into the spin torque oscillator.
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公开(公告)号：US10062402B1
公开(公告)日：2018-08-28
申请号：US15830818
申请日：2017-12-04
申请人： Hironori Araki , Yoshitaka Sasaki , Hiroyuki Ito , Shigeki Tanemura , Seiichiro Tomita , Masakazu Okada
发明人： Hironori Araki , Yoshitaka Sasaki , Hiroyuki Ito , Shigeki Tanemura , Seiichiro Tomita , Masakazu Okada
CPC分类号： G11B5/6088 , G11B5/1278 , G11B5/3116 , G11B5/314 , G11B2005/0021 , H01P1/174 , H01P3/16
摘要： A manufacturing method for a waveguide includes forming a core including a first layer and a second layer. The first layer has a top surface including a first region with which a bottom surface of the second layer is in contact, and a second region with which the bottom surface of the second layer is not in contact. Forming the core includes the steps of: forming an initial first layer; forming an etching stopper layer on the second region of the initial first layer; forming an initial second layer on the initial first layer and the etching stopper layer; etching the initial second layer and the initial first layer so as to make the initial first layer into the first layer; and etching the initial second layer until the etching stopper layer is exposed, so as to make the initial second layer into the second layer.
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67.发明授权公开(公告)号：US09812156B2
公开(公告)日：2017-11-07
申请号：US14600460
申请日：2015-01-20
申请人： Yoshitaka Sasaki , Hiroyuki Ito , Shigeki Tanemura , Hideo Mamiya , Hironori Araki , Seiichiro Tomita
发明人： Yoshitaka Sasaki , Hiroyuki Ito , Shigeki Tanemura , Hideo Mamiya , Hironori Araki , Seiichiro Tomita
CPC分类号： G11B5/314 , G11B5/012 , G11B5/127 , G11B5/1272 , G11B5/6088 , G11B2005/0021
摘要： A thermally-assisted magnetic recording head includes a main pole and a plasmon generator. The main pole has a front end face located in the medium facing surface. The plasmon generator has a near-field light generating surface located in the medium facing surface. The front end face of the main pole includes a first end face portion and a second end face portion. The second end face portion is located farther from the near-field light generating surface than is the first end face portion, and is greater than the first end face portion in width in the track width direction. The first end face portion and the near-field light generating surface are equal in width.
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68.发明授权公开(公告)号：US08921232B2
公开(公告)日：2014-12-30
申请号：US14189574
申请日：2014-02-25
IPC分类号： H01L21/302 , H01L21/461 , G11B5/31 , B44C1/22 , G11B7/22
CPC分类号： G11B5/31 , B44C1/22 , G02B6/1226 , G11B5/3163 , G11B7/22 , G11B2005/0021
摘要： A method of taper-etching a layer to be etched that is made of a dielectric material and has a top surface. The method includes the steps of: forming an etching mask with an opening on the top surface of the layer to be etched; and taper-etching a portion of the layer to be etched, the portion being exposed from the opening, by reactive ion etching so that a groove having two wall faces intersecting at a predetermined angle is formed in the layer to be etched. The step of taper-etching employs an etching gas containing a first gas contributing to the etching of the layer to be etched and a second gas contributing to the deposition of a sidewall protective film, and changes, during the step, the ratio of the flow rate of the second gas to the flow rate of the first gas so that the ratio increases.
摘要翻译： 对由电介质材料制成并具有顶表面的被蚀刻层进行锥形蚀刻的方法。 该方法包括以下步骤：在待蚀刻层的顶表面上形成具有开口的蚀刻掩模; 并且通过反应离子蚀刻使待蚀刻的层的一部分从开口暴露出来，使得在待蚀刻的层中形成具有与预定角度相交的两个壁面的凹槽。 锥蚀刻的步骤使用包含有助于蚀刻被蚀刻层的第一气体的蚀刻气体和有助于沉积侧壁保护膜的第二气体，并且在该步骤期间改变流动比 第二气体与第一气体的流量的比率使得该比率增加。
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公开(公告)号：US08691102B1
公开(公告)日：2014-04-08
申请号：US13731754
申请日：2012-12-31
申请人： Hironori Araki , Yoshitaka Sasaki , Hiroyuki Ito , Yukinori Ikegawa , Seiichiro Tomita , Shigeki Tanemura
发明人： Hironori Araki , Yoshitaka Sasaki , Hiroyuki Ito , Yukinori Ikegawa , Seiichiro Tomita , Shigeki Tanemura
IPC分类号： C03C15/00
CPC分类号： G11B5/314 , G11B5/3163 , G11B5/6088 , G11B2005/0021
摘要： A method of manufacturing a plasmon generator includes the steps of: forming an etching mask on a dielectric layer; forming an accommodation part by etching the dielectric layer using the etching mask; and forming the plasmon generator to be accommodated in the accommodation part. The step of forming the etching mask includes the steps of: forming a patterned layer on an etching mask material layer, the patterned layer having a first opening that has a sidewall; forming a structure by forming an adhesion film on the sidewall, the structure having a second opening smaller than the first opening; and etching a portion of the etching mask material layer exposed from the second opening.
摘要翻译： 一种制造等离子体发生器的方法包括以下步骤：在电介质层上形成蚀刻掩模; 通过使用蚀刻掩模蚀刻电介质层来形成容纳部分; 以及形成要容纳在容纳部分中的等离子体发生器。 形成蚀刻掩模的步骤包括以下步骤：在蚀刻掩模材料层上形成图案化层，所述图案化层具有具有侧壁的第一开口; 通过在侧壁上形成粘合膜来形成结构，该结构具有比第一开口小的第二开口; 并蚀刻从第二开口露出的蚀刻掩模材料层的一部分。
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70.发明授权公开(公告)号：US08619518B1
公开(公告)日：2013-12-31
申请号：US13586351
申请日：2012-08-15
申请人： Yoshitaka Sasaki , Hiroyuki Ito , Hironori Araki , Shigeki Tanemura , Kazuki Sato , Ryuji Fujii
发明人： Yoshitaka Sasaki , Hiroyuki Ito , Hironori Araki , Shigeki Tanemura , Kazuki Sato , Ryuji Fujii
IPC分类号： G11B11/00
CPC分类号： G11B5/6088 , G11B5/3116 , G11B5/314 , G11B5/3163 , G11B2005/0021
摘要： A thermally assisted magnetic head includes a main magnetic pole layer, a near-field light generating layer having a generating end part generating near-field light arranged within a medium-opposing surface, and an optical waveguide guiding light to the near-field light generating layer. The optical waveguide has a waveguide end face arranged within the medium-opposing surface and an upper end face on a side closer to the main magnetic pole layer. The thermally assisted magnetic head has an interposed layer which is in direct contact with an outer surface of the optical waveguide. The near-field light generating layer has a near-field light generating part having the generating end part and an expanded part connected with the near-field light generating part. The expanded part has a base part arranged above the upper end face of the optical waveguide and extended base part connected with the base part.
摘要翻译： 一种热辅助磁头包括主磁极层，具有产生在介质相对表面内布置的近场光的产生端部分的近场光产生层和将光引导到近场光产生 层。 光波导具有布置在介质相对表面内的波导端面和更靠近主磁极层的一侧的上端面。 热辅助磁头具有与光波导的外表面直接接触的中间层。 近场光产生层具有具有发光端部的近场光产生部和与近场光产生部连接的扩展部。 扩展部具有布置在光波导的上端面上方的基部和与基部连接的延伸基部。
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