公开(公告)号：US06937753B1

公开(公告)日：2005-08-30

申请号：US09561570

申请日：2000-04-29

Applicant: Jeffrey O'Dell ,  Thomas Verburgt ,  Mark Harless ,  Steve Herrmann

Inventor： Jeffrey O'Dell ,  Thomas Verburgt ,  Mark Harless ,  Steve Herrmann

IPC: G01B11/30 ,  G01N21/956 ,  G06T1/00 ,  H01L21/00 ,  H01L21/66 ,  G06K9/00

CPC classification number: G01N21/9501 ,  G01N21/8803 ,  G01N21/8806 ,  G01N2021/8838 ,  G01N2201/06113 ,  G01N2201/0696 ,  G01N2201/0697 ,  G01N2201/12 ,  G06T7/0004 ,  G06T2207/30148 ,  H01L21/67242 ,  H01L21/67271 ,  H01L21/67288 ,  H01L22/12 ,  H01L2924/0002 ,  H04N5/2256 ,  H01L2924/00

Abstract: An automated defect inspection system has been invented and is used on patterned wafers, whole wafers, broken wafers, partial wafers, sawn wafers such as on film frames, JEDEC trays, Auer boats, die in gel or waffle packs, MCMs, etc. and is specifically intended and designed for second optical wafer inspection for such defects as metalization defects (such as scratches, voids, corrosion, and bridging), diffusion defects, passivation layer defects, scribing defects, glassivation defects, chips and cracks from sawing, solder bump defects, and bond pad area defects.

Abstract translation: 已经发明了一种自动化缺陷检测系统，用于图案化的晶片，整个晶片，破碎的晶片，部分晶片，锯片，如胶片框架，JEDEC托盘，Auer船，凝胶或华夫饼包，MCM等，以及 专门用于第二光学晶片检查，用于诸如金属化缺陷（例如划痕，空隙，腐蚀和桥接），扩散缺陷，钝化层缺陷，划线缺陷，玻璃化缺陷，切屑和锯切裂纹等缺陷，焊料凸块 缺陷和焊盘区域缺陷。

公开(公告)号：US20050008218A1

公开(公告)日：2005-01-13

申请号：US10915666

申请日：2004-08-10

Applicant: Jeffrey O'Dell ,  Thomas Verburgt ,  Mark Harless ,  Cory Watkins

Inventor： Jeffrey O'Dell ,  Thomas Verburgt ,  Mark Harless ,  Cory Watkins

IPC: G01B11/30 ,  G01N21/956 ,  G06T1/00 ,  H01L21/00 ,  H01L21/66 ,  G06K9/00 ,  G06K9/62

CPC classification number: G01N21/9501 ,  G01N21/8803 ,  G01N21/8806 ,  G01N2021/8838 ,  G01N2201/06113 ,  G01N2201/0696 ,  G01N2201/0697 ,  G01N2201/12 ,  G06T7/0004 ,  G06T2207/30148 ,  H01L21/67242 ,  H01L21/67271 ,  H01L21/67288 ,  H01L22/12 ,  H01L2924/0002 ,  H04N5/2256 ,  H01L2924/00

Abstract: An automated defect inspection system has been invented and is used on patterned wafers, whole wafers, broken wafers, partial wafers, sawn wafers such as on film frames, JEDEC trays, Auer boats, die in gel or waffle packs, MCMs, etc. and is specifically intended and designed for second optical wafer inspection for such defects as metalization defects (such as scratches, voids, corrosion, and bridging), diffusion defects, passivation layer defects, scribing defects, glassivation defects, chips and cracks from sawing, solder bump defects, and bond pad area defects.

公开(公告)号：US5140463A

公开(公告)日：1992-08-18

申请号：US489942

申请日：1990-03-08

Applicant: Kwong M. Yoo ,  Robert R. Alfano

Inventor： Kwong M. Yoo ,  Robert R. Alfano

IPC: A61B10/00 ,  G01N21/17 ,  G01N21/47 ,  G06T1/00

CPC classification number: G01N21/4795 ,  G01N2021/177 ,  G01N2021/178 ,  G01N2021/1791 ,  G01N2201/0697

Abstract: The quality of image of an object hidden inside a highly scattering semi-opaque disordered medium is improved by using space gate imaging or time gate imaging or space time gate imaging. In space gate imaging, a small segment of the object is illuminated at a time. The scattered light is passed through a spatial noise filter. On the image plane, an aperture is open at the position of the image segment which correspond to the segment of the illuminated object. A full image is obtained by scanning the object segment by segment and simultaneously recording the signal at the corresponding image segment. In time gate imaging, the unscattered (i.e. ballistic) portion of the pulse which contains the information of the image is temporally separated from the other (i.e. scattered) portions which contains the noise using a ultrafast laser pulse and temporal gating devices. The technique is in space-time gate imaging, the two techniques are combined to produce an image with a much higher signal to noise ratio. The time separation between the ballistic and scattered light may be increased by increasing thickness of random medium or by introducing small scatters into the random medium so as to make the medium more random. The signal to noise ratio can also be increased by making the random medium less random (so that there will be less scattered light). In addition, the signal to noise ratio can be increased by introducing an absorbing dye into the medium or by using a wavelength for the light which is in the absorption spectrum of the random medium or by making the medium more ordered (i.e. less random) or by using a pair of parallel polarizers.

公开(公告)号：US4963024A

公开(公告)日：1990-10-16

申请号：US216087

申请日：1988-07-07

Applicant: Bobby L. Ulich

Inventor： Bobby L. Ulich

IPC: G01C3/06 ,  G01N21/49 ,  G01N21/53 ,  G01S17/88 ,  G01S17/89

CPC classification number: G01S17/88 ,  G01N21/49 ,  G01N2021/1765 ,  G01N2021/1782 ,  G01N2021/4709 ,  G01N21/53 ,  G01N2201/0697

Abstract: A system is presented for the remote detection of the diffuse attenuation coefficient or K factor over very large areas and over relatively short time periods; and for determining depth in a body of water or other medium. In accordance with the present invention, a laser is used to generate short pulses of light with pulse widths on the order of nanoseconds. The laser light is expanded by optics and projected into the water or other medium. An intensified CCD (charge coupled device) camera is electronically shuttered after an appropriate time delay such that the image formed by the camera is composed of light backscattered by the water from a layer of range z and a thickness of .DELTA.z. The signal detected by the camera is S.sub.i. If several measurements of S.sub.i are made at known time delay differences such that the differences of range gates z.sub.i are also known, then K can be calculated. The same apparatus can also be used to determine depth by measuring the time delay between the reflection from the surface of the medium and the reflection from the bottom of the medium.

Abstract translation: 提出了一种在非常大的区域和相对较短的时间段内远程检测漫反射衰减系数或K因子的系统; 并用于确定水体或其他介质体内的深度。 根据本发明，使用激光器产生具有大约数毫微秒的脉冲宽度的短脉冲光。 激光通过光学器件扩展并投射到水或其他介质中。 在适当的时间延迟之后，增强的CCD（电荷耦合器件）照相机被电子地切开，使得由照相机形成的图像由来自范围z的水和DELTA z的厚度的水反向散射的光组成。 相机检测到的信号为Si。 如果以已知的时间延迟差进行Si的若干测量，使得范围栅极zi的差异也是已知的，则可以计算K。 也可以通过测量介质表面的反射与来自介质底部的反射之间的时间延迟来确定深度。

公开(公告)号：US4802762A

公开(公告)日：1989-02-07

申请号：US917959

申请日：1986-10-14

Applicant: Ralph H. Hill, Jr.

Inventor： Ralph H. Hill, Jr.

IPC: G01N21/64 ,  G01N21/88 ,  G01J3/30

CPC classification number: G01N21/88 ,  G01N21/6402 ,  G01N2201/0697

Abstract: An optical inspection system for using laser-induced luminescence to detect deterioration of a polymer-based material. The inspection system comprises an excitation means for illuminating a specimen of the polymer material to cause it to produce fluorescent radiation. The spectral representation of the fluorescence produced by the specimen is compared to the spectrum of a reference sample of known quality in order to obtain an indication of the physical characteristics of the specimen.

Abstract translation: 一种使用激光诱导发光来检测基于聚合物的材料的劣化的光学检查系统。 检查系统包括用于照射聚合物材料的样本以使其产生荧光辐射的激发装置。 将样品产生的荧光的光谱表示与已知质量的参考样品的光谱进行比较，以获得样品的物理特性的指示。

公开(公告)号：US12123832B2

公开(公告)日：2024-10-22

申请号：US16323053

申请日：2017-08-01

Applicant: Gunther Krieg

Inventor： Gunther Krieg ,  Dirk Fey ,  Juergen Bohleber ,  Thomas Bohe ,  Bob Ansay ,  Christian Klaus Stein

IPC: G01N21/64 ,  B07C5/342 ,  B29B17/02 ,  G01N21/85

CPC classification number: G01N21/6408 ,  B07C5/3427 ,  B29B17/02 ,  G01N21/85 ,  B29B2017/0279 ,  G01N2021/6419 ,  G01N2021/6421 ,  G01N2021/8592 ,  G01N2201/0697

Abstract: Apparatus and methods for identifying substances in a material include at least one light source configured to irradiate a sample of the material with light of at least one wavelength. A detector is configured to detect light re-emitted or transmitted by the sample. An analysis device analyzes the detected light by UV/VIS spectroscopy, fluorescence spectroscopy, Raman spectroscopy, or absorption spectroscopy, and generates a first identification result for at least one substance of the sample. Further, the analysis device generates a second identification result in response to the first identification result being an ambiguous identification result. The second identification result may be generated by fluorescence light decay time analysis (FLZA). At least one substance is at least partially identified based on the first identification result or based on the first and second identification results.

公开(公告)号：US12066383B2

公开(公告)日：2024-08-20

申请号：US17312961

申请日：2019-12-18

Applicant: Aspida DX Inc.

Inventor： Hardeep Sanghera ,  Ashutosh Shastry ,  David Piehler ,  Yun-Pei Chang

IPC: G01N21/64 ,  B01L3/00

CPC classification number: G01N21/648 ,  B01L3/508 ,  G01N21/6428 ,  B01L2200/025 ,  B01L2200/04 ,  B01L2300/0609 ,  B01L2300/0654 ,  B01L2300/0663 ,  B01L2300/0681 ,  G01N2021/6439 ,  G01N2021/6482 ,  G01N2201/0691 ,  G01N2201/0697

Abstract: Analyte collection and testing systems and methods, and more particularly to testing systems and methods that achieve significant improvements in the detection of fluorescence signals in the reader by modulating the applied optical excitation. Also described herein are optical detection apparatuses and methods for removable photonic chips that do not require translation for calibration when coupling the photonics chip with the sensing system. Also described herein are methods and apparatuses for accurately calibrating a dilution factor when reading from a photonics chip.

公开(公告)号：US11867621B2

公开(公告)日：2024-01-09

申请号：US17439988

申请日：2020-03-18

Applicant: NIKON CORPORATION

Inventor： Akira Tokuhisa

IPC: G01N21/3586

CPC classification number: G01N21/3586 ,  G01N2201/0697 ,  G01N2201/06113

Abstract: A terahertz light detector includes: a light reception unit that receives terahertz light from a measured object; a pulse laser that generates pulse light; an optical member which the pulse light enters; and a control unit that controls the energy of the pulse light which enters the optical member, wherein the optical member has anomalous dispersion, and the light reception unit outputs a signal that is dependent on an intensity of terahertz light when the pulse light emitted from the optical member enters the light reception unit.

公开(公告)号：US20230408410A1

公开(公告)日：2023-12-21

申请号：US18115382

申请日：2023-02-28

Applicant: Electronics and Telecommunications Research Institute

Inventor： Hong-Seok SEO ,  Dong Hoon SONG ,  Jeong Won PARK ,  CHUL HUH

IPC: G01N21/64

CPC classification number: G01N21/6428 ,  G01N2021/6439 ,  G01N2201/08 ,  G01N2201/0612 ,  G01N2201/0697

Abstract: Disclosed is a PCR diagnosis apparatus. This apparatus includes a PCR chip configured to store a PCR sample, a light source part configured to generate laser light to be provided to the PCR sample, an optical modulator provided between the light source part and the PCR chip and configured to selectively provide the laser light to the PCR sample according to a code, a sensor configured to detect fluorescent light generated in the PCR sample by the laser light, and a code generator connected between the optical modulator and the sensor and configured to transmit an orthogonal code to the optical modulator and the sensor.

公开(公告)号：US11733357B2

公开(公告)日：2023-08-22

申请号：US18050962

申请日：2022-10-28

Applicant: TOPCON CORPORATION

Inventor： Yasushi Tanaka ,  Takaaki Saito ,  Ken'ichiro Yoshino ,  Mitsuru Kanokogi

IPC: G01S7/481 ,  G01S7/497 ,  G01J3/10 ,  G01S17/89 ,  G01S17/10 ,  G01S17/42

CPC classification number: G01S7/4817 ,  G01J3/108 ,  G01S7/497 ,  G01S17/10 ,  G01S17/42 ,  G01S17/89 ,  G01N2201/0697 ,  G01S7/4813

Abstract: A 3-dimensional measuring device includes: a light source unit; a projection optical system; a scanning mirror that is provided to be rotatable about a rotating shaft in a state of being inclined with respect to a shaft center of the rotating shaft to radiate a range-finding light within a plane crossing the rotating shaft in a rotary manner; a light-receiving optical system that receives a reflection range-finding light; a reference light optical system that is provided in a range outside a measuring range within a radiation range to receive and reflect the range-finding light as an internal reference light, the reference light optical system being capable of changing a light quantity of the internal reference light; and a light receiving element that receives the reflection range-finding light and the internal reference light.