摘要:
A nonvolatile semiconductor memory device includes a first insulating layer, charge storage layers, element isolation insulating films, and a second insulating layer formed on the charge storage layers and the element isolation insulating films and including a stacked structure of a first silicon nitride film, first silicon oxide film, intermediate insulating film and second silicon oxide film. The first silicon nitride film has a nitrogen concentration of not less than 21×1015 atoms/cm2. Each element isolation insulating film includes a high-temperature oxide film formed along lower side surfaces of the charge storage layers between the charge storage layers and a coating type insulating film. The first silicon nitride film is formed on an upper surface of the high-temperature oxide film in upper surfaces of the element isolation insulating films and not on the upper surface of the coating type insulating film.
摘要翻译:非易失性半导体存储器件包括第一绝缘层,电荷存储层,元件隔离绝缘膜和形成在电荷存储层和元件隔离绝缘膜上的第二绝缘层,并且包括第一氮化硅膜的堆叠结构,第一 氧化硅膜,中间绝缘膜和第二氧化硅膜。 第一氮化硅膜的氮浓度不小于21×10 15原子/ cm 2。 每个元件隔离绝缘膜包括沿电荷存储层和涂层型绝缘膜之间的电荷存储层的下侧表面形成的高温氧化膜。 第一氮化硅膜形成在元件隔离绝缘膜的上表面的高温氧化膜的上表面上,而不是在涂层型绝缘膜的上表面上。
摘要:
In an electric power steering apparatus including capacitor for smoothing out the voltage of battery and relay including a relay contact disposed at a place upstream of the capacitor, a path is provided for directly conducting a terminal voltage of the capacitor from a downstream side of the relay contact to a system power supply supply that generates a source voltage for a control system including controller and the like, so that the system power supply and the control system that is supplied therefrom with electric power for control purpose are utilized as a discharge circuit. Thus is obtained a simplified configuration of circuit responsible for discharging the capacitor.
摘要:
An operation input device includes a base including at least four elastic engagement receiving portions raised at a periphery of a center thereof; a print substrate configured to be stacked and integrated on the base; an annular operation plate mounted on push button switches of the print substrate and configured to prevent slip-out; an operation dial mounted on the annular operation plate on an axial center; and a fixing tool configured to be inserted to a fit-in hole of the operation hole and engage with at least two elastic engagement receiving portions of the base at an edge on a lower side and with an inner peripheral edge of the operation dial.
摘要:
The present invention provides a novel pyridylaminoacetic acid compound represented by the following formula (1): (wherein R1, R2, R3, Y and Z are as defined in the description and claims), or a pharmacologically acceptable salt thereof. The pyridylaminoacetic acid compound has EP2 agonistic action and is therefore useful as a therapeutic and/or prophylactic agent for respiratory diseases such as asthma or chronic obstructive pulmonary disease.
摘要:
A semiconductor device including a semiconductor substrate having an active region isolated by an element isolation insulating film; a floating gate electrode film formed on a gate insulating film residing on the active region; an interelectrode insulating film formed above an upper surface of the element isolation insulating film and an upper surface and sidewalls of the floating gate electrode film, the interelectrode insulating film being configured by multiple film layers including a high dielectric film having a dielectric constant equal to or greater than a silicon nitride film; a control gate electrode film formed on the interelectrode insulating film; and a silicon oxide film formed between the upper surface of the floating gate electrode film and the interelectrode insulating film; wherein the high dielectric film of the interelectrode insulating film is placed in direct contact with the sidewalls of the floating gate electrode film.
摘要:
According to an aspect of the invention, there is provided a semiconductor device comprising a semiconductor substrate, a first insulating layer formed on the semiconductor substrate, a first conductive layer formed as a floating gate on the first insulating layer, a second insulating layer formed as an interelectrode insulating film on the first conductive layer, and comprising three layers of a first film mainly including silicon and oxygen, a second film mainly including silicon and nitrogen, and a third film mainly including silicon and oxygen, wherein a silicon and nitrogen composition ratio of the second film is in a state in which the silicon is in excess of a stoichiometric composition, and a second conductive layer formed as a control gate on the second insulating film.
摘要:
A nonvolatile semiconductor memory device includes a semiconductor substrate having a plurality of active regions separately formed by a plurality of trenches formed in a surface of the substrate at predetermined intervals, a first gate insulating film formed on an upper surface of the substrate corresponding to each active region, a gate electrode of a memory cell transistor formed by depositing an electrical charge storage layer formed on an upper surface of the gate insulating film, a second gate insulating film and a control gate insulating film sequentially, an element isolation insulating film buried in each trench and formed from a coating type oxide film, and an insulating film formed inside each trench on a boundary between the semiconductor substrate and the element isolation insulating film, the insulating film containing nontransition metal atoms and having a film thickness not more than 5 Å.
摘要:
A nonvolatile semiconductor memory device includes a first dielectric layer formed on the major surface of a semiconductor substrate, a floating gate electrode layer formed on the first dielectric layer, a second dielectric layer obtained by sequentially forming, on the floating gate electrode layer, a lower dielectric film mainly containing silicon and nitrogen, an intermediate dielectric film, and an upper dielectric film mainly containing silicon and nitrogen, a control gate electrode layer formed on the second dielectric layer, and a buried dielectric layer formed by covering the two side surfaces in the gate width direction of the stacked structure including the above-mentioned layers. The nonvolatile semiconductor memory device further includes a silicon oxide film formed near the buried dielectric layer in the interface between the floating gate electrode layer and lower dielectric film.
摘要:
A nonvolatile semiconductor memory device includes a semiconductor substrate, a first insulating layer formed on the semiconductor substrate, a plurality of charge storage layers formed on the first insulating layer, a plurality of element isolation insulating films formed between the charge storage layers respectively, a second insulating layer formed on the charge storage layers and the element isolation insulating films, the second insulating layer including a stacked structure of a first silicon nitride film, a first silicon oxide film, an intermediate insulating film having a relative dielectric constant of not less than 7 and a second silicon oxide film, and a control electrode formed on the second insulating layer. The first silicon nitride film has a nitrogen concentration of not less than 21×1015 atoms/cm2.
摘要翻译:非易失性半导体存储器件包括半导体衬底,形成在半导体衬底上的第一绝缘层,形成在第一绝缘层上的多个电荷存储层,分别形成在电荷存储层之间的多个元件隔离绝缘膜,第二绝缘层 绝缘层,形成在电荷存储层和元件隔离绝缘膜上,第二绝缘层包括第一氮化硅膜,第一氧化硅膜,相对介电常数不小于7的中间绝缘膜的堆叠结构 和第二氧化硅膜,以及形成在第二绝缘层上的控制电极。 第一氮化硅膜的氮浓度不小于21×10 15原子/ cm 2。