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公开(公告)号：US06661499B2
公开(公告)日：2003-12-09
申请号：US10226347
申请日：2002-08-23
IPC分类号： G03B2772
CPC分类号： G02B17/0892 , G02B13/143 , G02B17/08 , G03F7/70108 , G03F7/70225 , G03F7/70275 , G03F7/70566
摘要： A projection exposure apparatus (10) for forming an image of a pattern present on a first object such as a reticle (R) onto a second object, such as a wafer (W). The apparatus comprises along three optical axes (AZ1, AX, AZ2), an illumination optical system capable of illuminating the reticle with partially polarized light, and a catadioptric projection optical system (40-70) arranged adjacent the reticle and opposite the illumination optical system. The catadioptric projection optical system comprises one or more substantially spherical mirrors (48), a plurality of refractive members (42, 48, 72, 74), and one or more plane mirrors (60, 66). The plane mirrors are designed and arranged so as to allow a substantially unpolarized image of the reticle pattern, which is illuminated with partially polarized light, to be formed on the wafer.
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公开(公告)号：US06642994B2
公开(公告)日：2003-11-04
申请号：US09870718
申请日：2001-06-01
申请人： Takashi Mori , Tetsuo Takahashi , Hiroshi Nakamura , Yuji Kudo , Taro Ogata
发明人： Takashi Mori , Tetsuo Takahashi , Hiroshi Nakamura , Yuji Kudo , Taro Ogata
IPC分类号： G03B2742
CPC分类号： G03F7/70075 , G03F7/2022 , G03F7/70091 , G03F7/70858 , G03F7/70925
摘要： Optical exposure apparatus and methods of using same, for patterning a workpiece and photo-cleaning the optical components in the apparatus, which can be contaminated by moisture and organic compounds in the atmosphere. The apparatus comprises an illumination optical system having a light source and one or more optical components, and a projection lens having an object plane and an image plane and one or more optical components. The optical exposure apparatus includes an exposure optical path or an exposure light beam through a predetermined space in the optical exposure system. An optical path deflection member for deflecting light is introduced into the exposure optical path so as to create a second optical path that differs from the exposure optical path. Also disclosed is a method of photo-cleaning the aforementioned optical components, including the steps of forming an exposure optical path and then changing this path to create a second optical path that differs from the exposure optical path. An additional method of photo-cleaning a projection lens is disclosed, including the steps of providing an illumination light beam along an optical axis, providing and inserting a photo-cleaning optical member having refractive power into the beam, and refracting the beam so as to illuminate the lens surfaces comprising the projection lens.
摘要翻译： 光学曝光装置及其使用方法，用于图案化工件并对设备中的光学部件进行光洁化，其可被大气中的水分和有机化合物污染。 该装置包括具有光源和一个或多个光学部件的照明光学系统以及具有物平面和图像平面以及一个或多个光学部件的投影透镜。 光学曝光装置包括通过光学曝光系统中的预定空间的曝光光路或曝光光束。 用于偏转光的光路偏转构件被引入到曝光光路中，以便产生与曝光光路不同的第二光路。 还公开了一种对上述光学部件进行光洁化的方法，包括以下步骤：形成曝光光路，然后改变该光路以产生不同于曝光光路的第二光路。 公开了一种附加的照片清洁投影透镜的方法，包括以下步骤：沿着光轴提供照明光束，提供并将具有屈光力的光清洁光学构件插入到光束中，并折射光束，以便 照亮包括投影透镜的透镜表面。
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73.发明授权公开(公告)号：US06466303B1
公开(公告)日：2002-10-15
申请号：US09330442
申请日：1999-06-11
IPC分类号： G03B2754
CPC分类号： G02B17/0892 , G02B13/143 , G02B17/08 , G03F7/70108 , G03F7/70225 , G03F7/70275 , G03F7/70566
摘要： A projection exposure apparatus (10) for forming an image of a pattern present on a first object such as a reticle (R) onto a second object, such as a wafer (W). The apparatus comprises along three optical axes (AZ1, AX, AZ2), an illumination optical system capable of illuminating the reticle with partially polarized light, and a catadioptric projection optical system (40-70) arranged adjacent the reticle and opposite the illumination optical system. The catadioptric projection optical system comprises one or more substantially spherical mirrors (48), a plurality of refractive members (42, 48, 72, 74), and one or more plane mirrors (60, 66). The plane mirrors are designed and arranged so as to allow a substantially unpolarized image of the reticle pattern, which is illuminated with partially polarized light, to be formed on the wafer.
摘要翻译： 一种投影曝光装置（10），用于将存在于诸如光罩（R）的第一物体上的图案的图像形成在诸如晶片（W）的第二物体上。 该装置包括沿着三个光轴（AZ1，AX，AZ2），能够以部分偏振光照射掩模版的照明光学系统，以及布置在掩模版附近并与照明光学系统相对的反射折射投射光学系统（40-70） 。 反折射投影光学系统包括一个或多个基本上为球面的反射镜（48），多个折射构件（42,48,72,74）和一个或多个平面镜（60,66）。 平面镜被设计和布置为允许在晶片上形成用部分偏振光照射的标线图案的基本非偏振图像。
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公开(公告)号：US06268904B1
公开(公告)日：2001-07-31
申请号：US09195880
申请日：1998-11-19
申请人： Takashi Mori , Tetsuo Takahashi , Hiroshi Nakamura , Yuji Kudo , Taro Ogata
发明人： Takashi Mori , Tetsuo Takahashi , Hiroshi Nakamura , Yuji Kudo , Taro Ogata
IPC分类号： G03B2742
CPC分类号： G03F7/70075 , G03F7/2022 , G03F7/70091 , G03F7/70858 , G03F7/70925
摘要： Optical exposure apparatus and methods of using same, for patterning a workpiece and photo-cleaning the optical components in the apparatus, which can be contaminated by moisture and organic compounds in the atmosphere. The apparatus comprises an illumination optical system having a light source and one or more optical components, and a projection lens having an object plane and an image plane and one or more optical components. The optical exposure apparatus includes an exposure optical path or an exposure light beam through a predetermined space in the optical exposure system. An optical path deflection member for deflecting light is introduced into the exposure optical path so as to create a second optical path that differs from the exposure optical path. Also disclosed is a method of photo-cleaning the aforementioned optical components, including the steps of forming an exposure optical path and then changing this path to create a second optical path that differs from the exposure optical path. An additional method of photo-cleaning a projection lens is disclosed, including the steps of providing an illumination light beam along an optical axis, providing and inserting a photo-cleaning optical member having refractive power into the beam, and refracting the beam so as to illuminate the lens surfaces comprising the projection lens.
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公开(公告)号：US06175800B1
公开(公告)日：2001-01-16
申请号：US09296067
申请日：1999-04-21
IPC分类号： G06F16500
CPC分类号： G01C21/3679
摘要： A route along which a user can use facilities set as stopovers is searched; when the user sets facilities relevant to a toll road as a stopover of a route to a destination, only links of toll roads around the facilities are set as target links, and a route passing via nodes of links in the neighborhood of the facilities is searched by a processor.
摘要翻译： 搜索用户可以使用设置为中途停留的设施的路线; 当用户设置与收费公路相关的设施作为到达目的地的路线的中途停留时，仅设置设施周围的收费公路的链接被设置为目标链路，并且搜索经过设施附近的链路节点的路线 由处理器。
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76.发明授权公开(公告)号：US06169754A
公开(公告)日：2001-01-02
申请号：US08863675
申请日：1997-05-27
申请人： Toshiki Sugawara , Masaki Ohira , Yukio Nakano , Takashi Mori
发明人： Toshiki Sugawara , Masaki Ohira , Yukio Nakano , Takashi Mori
IPC分类号： H04J304
CPC分类号： H04J3/1611 , H04J2203/0057 , H04J2203/0089 , H04Q11/0478
摘要： In a synchronous multiplex network including a plurality of multiplex transmission apparatuses, an overhead is passed through intervening multiplex transmission apparatuses such that administration and maintenance operation information is transmitted and received through the overhead between arbitrary multiplex transmission apparatuses. The multiplex transmission apparatus receives a multiplexed signal comprising a payload having a plurality of main signals multiplexed therein and overhead bytes including a plurality of administration and maintenance operation information, performs termination processing for the administration and maintenance operation information and transmission processing for the payload, thereafter converts the multiplexed signal into a different multiplexed signal comprising a payload which has been processed for transmission and a plurality of administration and maintenance operation information, and transmits the different multiplexed signal.
摘要翻译： 在包括多个多路传输装置的同步多路复用网络中，通过中间多路复用传输装置进行开销，从而通过任意多路复用传输装置之间的开销发送和接收管理和维护操作信息。 多路复用发送装置接收包含多路复用的多个主信号的有效载荷和包含多个管理维护操作信息的开销字节的多路复用信号，执行管理和维护操作信息的终止处理以及有效负载的发送处理 将多路复用的信号转换为包括已经被处理以进行传输的有效载荷和多个管理和维护操作信息的不同复用信号，并发送不同的复用信号。
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公开(公告)号：US5978733A
公开(公告)日：1999-11-02
申请号：US986388
申请日：1997-12-08
IPC分类号： G01C21/34 , G06F165/00
CPC分类号： G01C21/3614 , G01C21/34
摘要： A route search apparatus according to the present invention comprises: a storage device that stores link positional information of individual links and link connection information between the links, a minimum unit of road on a map being referred to as a link; a departure point specification device that specifies a point of departure on the map; a destination specification device that specifies a destination on the map; and a control device that selects a start point link that is to constitute a start point of a route search based upon the point of departure specified by the departure point specification device and the link positional information, selects an end point link that is to constitute an end point of the route search based upon the destination specified by the destination specification device and the link positional information, and performs a route search between the start point link and the end point link based upon the link connection information. And the control device selects a plurality of the start point links and a plurality of the end point links.
摘要翻译： 根据本发明的路径搜索装置包括：存储装置，其存储各个链路的链路位置信息和链路之间的链路连接信息，地图上的最小路单元被称为链路; 指定地图上出发点的出发点指定装置; 指定地图上的目的地的目的地规格设备; 以及控制装置，其基于由出发点指定装置指定的出发点和链接位置信息来选择构成路线搜索的起始点的起点链接，选择构成一个 基于由目的地指定装置指定的目的地的路线搜索的终点和链接位置信息，并且基于链接连接信息在起始点链接和终点链接之间执行路线搜索。 并且控制装置选择多个起始点链接和多个终点链接。
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公开(公告)号：US5760963A
公开(公告)日：1998-06-02
申请号：US619252
申请日：1996-03-21
申请人： Takashi Mori
发明人： Takashi Mori
CPC分类号： G02B3/0062 , G02B13/143 , G02B5/0236 , G03F7/70058 , G03F7/70075 , G02B3/0012 , G02B3/0068
摘要： A fly-eye lens in accordance with the present invention comprises a plurality of lens elements which are arranged in two-dimensionally close contact with each other so as to connect light-entering and light-exit surfaces of the lens elements to each other, while at least three refractive surfaces with a predetermined refractive power are disposed between the light-entering and light-exit surfaces in each of the lens elements. Here, each of the plurality of lens elements has an identical focal length f and, concering a bundle of rays which enters each of the lens elements in parallel to its optical axis with a maximum incident height h.sub.max and then is emitted therefrom with an exit angle .theta..sub.max, substantially satisfies a conditional expression: h.sub.max =f.multidot.sin .theta..sub.max Accordingly, the plurality of lens elements substantially satisfy a sine condition, whereby the fly-eye lens forms a perfect diffusing surface light source.
摘要翻译： 根据本发明的蝇眼透镜包括彼此二维紧密接触地布置的多个透镜元件，以便将透镜元件的光进入和光出射表面彼此连接，同时 具有预定屈光力的至少三个折射表面设置在每个透镜元件中的光入射表面和光出射表面之间。 这里，多个透镜元件中的每一个都具有相同的焦距f，并且使具有最大入射高度hmax的平行于其光轴进入每个透镜元件的一束光束协调一致，然后从出射角 θmax基本上满足条件表达式：hmax =fxsinθmax因此，多个透镜元件基本上满足正弦条件，由此，飞眼透镜形成完美的漫射面光源。
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79.发明授权Precision symbol discrimination timing detection (clock recovery) system for multi-carrier modulation signal 失效用于多载波调制信号的精确符号鉴别定时检测（时钟恢复）系统
公开(公告)号：US5745535A
公开(公告)日：1998-04-28
申请号：US553063
申请日：1995-11-03
申请人： Takashi Mori
发明人： Takashi Mori
CPC分类号： H04L27/2657 , H04L27/2662 , H04L27/2675
摘要： A provisional symbol discrimination timing detection unit detects a provisional symbol discrimination timing of a received signal modulated by a multi-subcarrier modulation scheme. A provisional symbol extraction unit demodulates the received signal and outputs, as a provisional demodulated symbol, a demodulated signal value of the provisional symbol discrimination timing of the demodulated signal for each subcarrier, demodulated signal being obtained by quadrature-demodulating the received signal. A phase difference detection unit detects a phase difference between the phase of the output provisional demodulated symbol of the received signal at a predetermined position and the phase of a reference symbol at this position. A symbol discrimination timing correction unit obtains a time difference between the provisional discrimination timing and the reference symbol discrimination timing on the basis of a subcarrier frequency and the detected phase difference for each subcarrier and corrects the provisional symbol discrimination timing on the basis of the time difference.
摘要翻译： 临时符号鉴别定时检测单元检测由多子载波调制方案调制的接收信号的临时符号鉴别定时。 临时符号提取单元对接收到的信号进行解调，并且作为临时解调符号输出每个子载波的解调信号的临时符号鉴别定时的解调信号值，通过对接收信号进行正交解调获得的解调信号。 相位差检测单元检测在预定位置处的接收信号的输出临时解调符号的相位与该位置处的参考符号的相位之间的相位差。 符号鉴别定时校正单元根据子载波频率和检测到的每个子载波的相位差来获得临时鉴别定时和参考符号鉴别定时之间的时间差，并且基于时间差校正临时符号鉴别定时 。
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公开(公告)号：US5713660A
公开(公告)日：1998-02-03
申请号：US334665
申请日：1994-11-04
申请人： Takashi Mori , Hideki Komatsuda , Noriaki Yamamoto
发明人： Takashi Mori , Hideki Komatsuda , Noriaki Yamamoto
CPC分类号： G03F7/70091 , G02B19/0028 , G02B19/0047
摘要： An illumination optical apparatus according to the present invention comprises a light source, a collector mirror having an ellipsoidal surface of revolution for reflecting and collecting light from the light source, a collimator lens for converting the light collected by the collector mirror into nearly parallel beams, an optical integrator for producing a plurality of light source images from the beams outgoing from the collimator lens, and a condenser lens for condensing light from the plurality of light source images to illuminate a body to be illuminated in a superimposed manner. Wherein the collimator lens is arranged to satisfy the following condition, R.sub.max
摘要翻译： 根据本发明的照明光学装置包括光源，具有用于反射和收集来自光源的光的旋转椭圆面的集光镜，用于将由集光镜收集的光转换成几乎平行的光束的准直透镜， 用于从来自准直透镜的光束产生多个光源图像的光学积分器，以及用于聚集来自多个光源图像的光的聚光镜，以照亮重叠的被照明体。 其中准直透镜被设置为满足以下条件，Rmax
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