摘要:
An imprint lithography apparatus is disclosed that has a template holder configured to hold an imprint template, a substrate table, and an optical encoder, the optical encoder having a radiation output, a first diffraction grating, and a detector, the radiation output arranged to illuminate a second diffraction grating and the detector positioned to detect radiation diffracted by the first and second diffraction gratings to provide an alignment signal.
摘要:
The present invention relates to a method of manufacturing a replica, which method comprises the provision of a curable resin composition between a mold and a substrate or a blank, carrying out a UV light-initiated or thermal curing treatment and removing the replica thus manufactured from the mold, which replica comprises the substrate and the reproduction of the mold provided thereon. The invention also relates to a replica obtained by carrying out a UV light-initiated or thermal curing treatment of a reactive compound, especially a replica that has a high transparency for low wavelengths, i.e. 190-400 nm.
摘要:
An imprinting method is disclosed which involves irradiating a photo-curable imprintable medium in a flowable state on a substrate with radiation to initiate curing of the medium, after the irradiating, contacting the medium with a template to form an imprint in the medium, allowing the medium to substantially cure such that the medium is in a substantially non-flowable state while the medium is contacted by the template, and separating the template from the medium while the medium is in the substantially non-flowable state.
摘要:
The present invention relates to an optical record carrier for recording and/or information using a radiation beam in the UV wavelength range, in particular having a wavelength in the range from 230 to 270 nm, comprising a substrate layer (S) and an information stack (R) comprising an information layer (P) comprising a material for forming marks and spaces representing an information by irradiation of a UV radiation beam, a transparent cover layer (C) on top of the side of the said record carrier facing the incident UV radiation beam. The cover layer (C) is made of a cured resin composition being a silicon based reactive material, which achieves a high UV transparency required for the recording and/or reading of data. The optical record carrier may further comprise at least one additional information stack and at least one transparent spacer layer for separating the information stacks from each other, said spacer layer (SP) being made of the said resin composition.
摘要:
In a lithographic projection apparatus, a structure surrounds a space between the projection system and a substrate table of the lithographic projection apparatus. A gas seal is formed between said structure and the surface of said substrate to contain liquid in the space.
摘要:
The invention relates to a method of manufacturing a master mold (1), which is used to manufacture an optical information disc, such as a CD or DVD. According to the method, a substrate (3) is provided with a photosensitive layer (5), which is subsequently irradiated by means of a radiation beam (7), which is focused to a scanning spot (11) on said layer by means of an optical lens system (9). A liquid, such as water, is supplied into a gap (53) present between the photosensitive layer and an auxiliary lens (59) of the lens system facing said layer. As a result, the size of the scanning spot is decreased and the information density of the information disc to be manufactured is increased. According to the invention, the liquid is supplied via a supply opening (69) which is positioned immediately adjacent the auxiliary lens (59), in a direction which, viewed from the scanning spot (11), is contrary to a direction (Z) wherein the substrate (3) is moved with respect to the lens system (9). Thus, the liquid supplied via the supply opening is transported immediately and exclusively into said gap (53), so that the amount of liquid to be supplied to fill the gap is limited. The supply opening is formed in a wall portion (65), which extends in an imaginary plane in which also a side wall (63) of the auxiliary lens (59) facing the photosensitive layer is present. As a result, a homogeneous Couette flow of liquid without air inclusions is obtained in the gap. This Couette flow does not cause any undesirable mechanical vibrations of the lens system. The invention further relates to a method of manufacturing an optical information disc, according to which method a master mold (1) is manufactured in a first step, and the information disc is manufactured in a second step by means of a replica process using said master mold. The invention further relates to a device (25) for the manufacture of a master mold by means of a method according to the invention.
摘要:
The invention provides a process and a device for removing gaseous contaminants from a feed gas stream which comprises methane and gaseous contaminants, in which process the feed gas stream is cooled to obtain a slurry which comprises solid contaminant, liquid phase contaminant and a methane enriched gaseous phase, the slurry so obtained is introduced into a cryogenic separation device (4) in which from the top the methane enriched gaseous phase is removed (5), the slurry is diluted with liquid phase contaminant (6) and introduced as suction fluid into an ejector (9) via which it is passed into a heat exchanger (10) arranged outside the separation device and wherein solid contaminant is melted into liquid phase contaminant, part of the liquid phase contaminant so obtained is recycled (6) to dilute the slurry of contaminants inside the separation device and part (13) is introduced into the bottom part of the separation device, liquid phase is withdrawn (14) from the bottom part of the separation device, and part of the withdrawn liquid phase contaminant is recovered as a stream product (16) and part is recycled (17) to the ejector for use a motive fluid.
摘要:
In a lithographic projection apparatus, a structure surrounds a space between the projection system and a substrate table of the lithographic projection apparatus. A gas seal is formed between said structure and the surface of said substrate to contain liquid in the space.
摘要:
In a lithographic projection apparatus, a structure surrounds a space between the projection system and a substrate table of the lithographic projection apparatus. A gas seal is formed between said structure and the surface of said substrate to contain liquid in the space.
摘要:
A lithographic projection apparatus is disclosed in which a space between the projection system and the substrate is filled with a liquid. An edge seal member at least partly surrounds the substrate or other object on a substrate table to prevent liquid loss when edge portions of the substrate or other object are, for example, imaged or illuminated.