Method of forming a SiGe DIAC ESD protection structure
    71.
    发明授权
    Method of forming a SiGe DIAC ESD protection structure 有权
    形成SiGe DIAC ESD保护结构的方法

    公开(公告)号:US07754540B2

    公开(公告)日:2010-07-13

    申请号:US12395506

    申请日:2009-02-27

    IPC分类号: H01L21/332

    CPC分类号: H01L27/0259

    摘要: A diode for alternating current (DIAC) electrostatic discharge (ESD) protection circuit is formed in a silicon germanium (SiGe) hetrojunction bipolar transistor (HBT) process that utilizes a very thin collector region. ESD protection for a pair of to-be-protected pads is provided by utilizing the base structures and the emitter structures of the SiGe transistors.

    摘要翻译: 用于交流(DIAC)静电放电(ESD)保护电路的二极管形成在利用非常薄的集电极区域的硅锗(SiGe)合金双极晶体管(HBT)工艺中。 通过利用SiGe晶体管的基极结构和发射极结构,提供一对待保护焊盘的ESD保护。

    Programmable ESD protection structure
    72.
    发明授权
    Programmable ESD protection structure 有权
    可编程ESD保护结构

    公开(公告)号:US07705403B1

    公开(公告)日:2010-04-27

    申请号:US11324455

    申请日:2006-01-03

    IPC分类号: H01L23/62

    CPC分类号: H01L27/0262 H01L29/87

    摘要: In a LVTSCR or snapback NMOS ESD structure, low voltage protection as well as higher voltage protection is provided by introducing a floating gate that capacitively couples with the control gate of the ESD structure and programming the floating gate to have different charges on it as desired.

    摘要翻译: 在LVTSCR或快速恢复型NMOS ESD结构中,通过引入与ESD结构的控制栅极电容耦合的浮动栅极,并根据需要对浮动栅极进行编程,从而提供低电压保护以及更高的电压保护。

    Method for forming heat sinks on silicon on insulator wafers
    73.
    发明授权
    Method for forming heat sinks on silicon on insulator wafers 有权
    在绝缘体硅片上形成散热片的方法

    公开(公告)号:US07528012B1

    公开(公告)日:2009-05-05

    申请号:US11508495

    申请日:2006-08-22

    IPC分类号: H01L21/00

    摘要: An apparatus and method for a heat sink to dissipate the heat sourced by the encapsulated transistors in a SOI wafer. The apparatus includes a transistor formed in the active silicon layer of the wafer. The active surface is formed over an oxide layer and a bulk silicon layer. A heat sink is formed in the bulk silicon layer and configured to sink heat through the bulk silicon layer, to the back surface of the wafer. After the transistor is fabricated, the heat sink is formed by masking, patterning and etching the back surface of the wafer to form plugs in the bulk silicon layer. The plug extends through the thickness of the bulk layer to the oxide layer. Thereafter, the plug is filled with a thermally conductive material, such as a metal or DAG (thermally conductive paste). During operation, heat from the transistor is dissipated through the heat sink. In various embodiments of the invention, the plug hole is formed using either an anisotropic plasma or wet etch.

    摘要翻译: 散热器散热由SOI晶片中的封装晶体管产生的热量的装置和方法。 该装置包括形成在晶片的有源硅层中的晶体管。 活性表面形成在氧化物层和体硅层上。 在体硅层中形成散热器,并且构造成将热量通过体硅层吸收到晶片的背面。 在制造晶体管之后,通过掩模,图案化和蚀刻晶片的背面来形成散热器,以在体硅层中形成插塞。 塞子延伸穿过本体层的厚度到氧化物层。 此后,塞子填充有导热材料,例如金属或DAG(导热浆)。 在运行期间,来自晶体管的热量通过散热器消散。 在本发明的各种实施例中,插塞孔使用各向异性等离子体或湿蚀刻形成。

    Silicon controlled rectifier structures with reduced turn on times
    77.
    发明授权
    Silicon controlled rectifier structures with reduced turn on times 有权
    可控硅整流器结构,减少了开启次数

    公开(公告)号:US07126168B1

    公开(公告)日:2006-10-24

    申请号:US10821287

    申请日:2004-04-09

    IPC分类号: H01L29/49

    CPC分类号: H01L27/0262 H01L29/87

    摘要: The turn on time of an electrostatic discharge (ESD) structure, such as a silicon controlled rectifier (SCR), a low-voltage triggering SCR (LVTSCR), and a bipolar SCR (BSCR), is reduced by turning on the structure in two steps: a first step that locally turns on the pnp and npn transistors, and a second step that, over time, fully turns on the structure.

    摘要翻译: 静电放电(ESD)结构的导通时间,例如可控硅整流器(SCR),低电压触发SCR(LVTSCR)和双极SCR(BSCR))通过打开两个结构 步骤:第一步,在本地打开pnp和npn晶体管,第二步,随着时间的推移,完全打开结构。

    Electrostatic discharge (ESD) protection structure
    79.
    发明授权
    Electrostatic discharge (ESD) protection structure 有权
    静电放电(ESD)保护结构

    公开(公告)号:US07067852B1

    公开(公告)日:2006-06-27

    申请号:US09660386

    申请日:2000-09-12

    IPC分类号: H01L29/74 H01L23/62

    摘要: An ESD protection structure includes a semiconductor substrate of a first conductivity type, and first and second well regions of a second conductivity type disposed in the substrate. The first and second well regions are separated by a gap region of the substrate. Also included are first and second floating regions (of the second conductivity type) disposed in the first and second well regions adjacent to the gap region, respectively. The ESD protection structure also includes first and second contact regions of the first conductivity type disposed on the first and second well regions, respectively, and spaced apart from the first and second floating regions, respectively. The ESD protection structure also includes first and second contact regions of the second conductivity type disposed on the first and second well regions, respectively, and spaced apart from the first and second floating regions, respectively.

    摘要翻译: ESD保护结构包括第一导电类型的半导体衬底和设置在衬底中的第二导电类型的第一和第二阱区。 第一和第二阱区域被衬底的间隙区域分开。 还包括设置在与间隙区域相邻的第一和第二阱区域中的第一和第二浮动区域(第二导电类型)。 ESD保护结构还包括分别设置在第一和第二阱区上并分别与第一和第二浮动区分开的第一导电类型的第一和第二接触区域。 ESD保护结构还包括分别设置在第一和第二阱区上并分别与第一和第二浮动区隔开的第二导电类型的第一和第二接触区域。