公开(公告)号：US08456882B2

公开(公告)日：2013-06-04

申请号：US13415261

申请日：2012-03-08

申请人： Dmytro Apalkov ,  Vladimir Nikitin ,  David Druist ,  Steven M. Watts

发明人： Dmytro Apalkov ,  Vladimir Nikitin ,  David Druist ,  Steven M. Watts

IPC分类号： G11C5/08 ,  G11C11/06 ,  G11C11/14 ,  G11C11/15

CPC分类号： H01L43/12 ,  G11C11/161 ,  G11C11/1659 ,  G11C11/1675 ,  G11C11/5607 ,  H01L43/08

摘要： A method and system for providing a magnetic junction usable in a magnetic memory are described. The magnetic junction includes first and second pinned layers, first and second nonmagnetic spacer layers, and a free layer. The first pinned layer has a first pinned layer magnetic moment and is nonmagnetic layer-free. The first nonmagnetic spacer layer resides between the first pinned and free layers. The free layer resides between the first and second nonmagnetic spacer layers. The second pinned layer has a second pinned layer magnetic moment and is nonmagnetic layer-free. The second nonmagnetic spacer layer resides between the free and second pinned layers. The first and second pinned layer magnetic moments are antiferromagnetically coupled and self-pinned. The magnetic junction is configured to allow the free layer to be switched between stable magnetic states when a write current is passed through the magnetic junction.

摘要翻译： 描述了一种用于提供可用于磁存储器中的磁结的方法和系统。 磁结包括第一和第二固定层，第一和第二非磁性间隔层和自由层。 第一被钉扎层具有第一钉扎层磁矩并且是非磁性层。 第一非磁性间隔层位于第一被钉扎层和自由层之间。 自由层位于第一和第二非磁性间隔层之间。 第二被钉扎层具有第二钉扎层磁矩并且是非磁性层。 第二非磁性间隔层位于自由和第二被钉扎层之间。 第一和第二钉扎层磁矩是反铁磁耦合和自固定的。 磁结被配置为当写入电流通过磁性结时，允许自由层在稳定的磁状态之间切换。

公开(公告)号：US20130009260A1

公开(公告)日：2013-01-10

申请号：US13517731

申请日：2012-06-14

申请人： Dmytro Apalkov ,  Xueti Tang ,  Mohamad Towfik Krounbi ,  Vladimir Nikitin ,  Alexey Vasilyevitch Khvalkovskiy

发明人： Dmytro Apalkov ,  Xueti Tang ,  Mohamad Towfik Krounbi ,  Vladimir Nikitin ,  Alexey Vasilyevitch Khvalkovskiy

IPC分类号： H01L29/82

CPC分类号： H01L43/10 ,  G11C11/161 ,  G11C11/1675 ,  H01L43/08

摘要： A method and system provide a magnetic junction usable in a magnetic device. The magnetic junction includes a pinned layer, a nonmagnetic spacer layer, and a free layer. The nonmagnetic spacer layer is between the pinned layer and the free layer. The magnetic junction is configured such that the free layer is switchable between a plurality of stable magnetic states when a write current is passed through the magnetic junction. At least one of the free layer and the pinned layer include at least one half-metal.

摘要翻译： 一种方法和系统提供可用于磁性装置的磁结。 磁结包括钉扎层，非磁性间隔层和自由层。 非磁性间隔层位于被钉扎层和自由层之间。 磁结被配置为使得当写入电流通过磁结时，自由层可在多个稳定磁状态之间切换。 自由层和钉扎层中的至少一个包括至少一个半金属。

公开(公告)号：US08065788B2

公开(公告)日：2011-11-29

申请号：US12345781

申请日：2008-12-30

申请人： Unal Murat Guruz ,  Edward Hin Pong Lee ,  Vladimir Nikitin ,  Michael Ming Hsiang Yang ,  Yuan Yao

发明人： Unal Murat Guruz ,  Edward Hin Pong Lee ,  Vladimir Nikitin ,  Michael Ming Hsiang Yang ,  Yuan Yao

IPC分类号： G11B5/127 ,  H04R31/00

CPC分类号： G11B5/1278 ,  G11B5/3163 ,  G11B5/3169 ,  G11B5/3196 ,  G11B5/3967 ,  G11B5/455 ,  Y10T29/49036 ,  Y10T29/49041 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method for manufacturing a magnetic head for magnetic data recording, that allows a lapping termination point to be easily and accurately determined during lapping. The method includes constructing a lapping guide that has an electrically is formed to provide an abrupt change in resistance at a point where lapping should be terminated. This point of abrupt resistance change is located relative to the flare point of the write pole that the distance between the flare point and the air bearing surface can be accurately maintained. This abrupt resistance change also makes it possible to monitor both a stripe height defining rough lapping and an angled kiss lapping process using a single measurement channel.

摘要翻译： 一种用于制造用于磁数据记录的磁头的方法，其允许在研磨期间容易且准确地确定研磨终止点。 该方法包括构建具有电气形成的研磨导向器，以在研磨结束的点处提供电阻的突然变化。 这个突变电阻变化点相对于写极点的闪点定位，可以精确地保持扩口和空气支承表面之间的距离。 这种突然的电阻变化也使得可以使用单个测量通道监测限定粗糙研磨的条纹高度和倾斜吻合研磨过程。

公开(公告)号：US07630177B2

公开(公告)日：2009-12-08

申请号：US11355045

申请日：2006-02-14

申请人： Robert Stanley Beach ,  David Eugene Heim ,  Vladimir Nikitin ,  David John Seagle

发明人： Robert Stanley Beach ,  David Eugene Heim ,  Vladimir Nikitin ,  David John Seagle

IPC分类号： G11B5/39

CPC分类号： G11B5/398 ,  G01R33/09 ,  G11B5/399

摘要： In a tunnel magnetoresistive (TMR) device, free sublayers are separated by an intermediate spacer layer that serves to ensure a uniform circumferential magnetization in the free stack, counterbalancing orange-peel coupling by antiferromagnetic exchange coupling. Thus, a CPP MR device may have a seed stack, a pinned stack on the seed stack, and a tunnel barrier on the pinned stack. A free stack can be on the tunnel barrier, and the free stack can include structure for promoting uniform circumferential magnetization in the free stack.

摘要翻译： 在隧道磁阻（TMR）器件中，自由子层由中间间隔层隔开，中间间隔层用于确保自由堆叠中的均匀圆周磁化，通过反铁磁交换耦合平衡橙皮耦合。 因此，CPP MR装置可以具有种子堆叠，种子堆叠上的钉扎堆叠以及钉扎堆叠上的隧道势垒。 自由堆叠可以在隧道屏障上，并且自由堆叠可以包括用于在自由堆叠中促进均匀周向磁化的结构。

公开(公告)号：US20090057160A1

公开(公告)日：2009-03-05

申请号：US11845222

申请日：2007-08-27

申请人： Donald G. Allen ,  Ming Jiang ,  Jennifer Ai-Ming Loo ,  Aron Neuhaus ,  Vladimir Nikitin ,  Yuan Yao

发明人： Donald G. Allen ,  Ming Jiang ,  Jennifer Ai-Ming Loo ,  Aron Neuhaus ,  Vladimir Nikitin ,  Yuan Yao

IPC分类号： B05D5/12 ,  C25D3/48

CPC分类号： C25D5/022 ,  G11B5/1278 ,  G11B5/17 ,  G11B5/3123

摘要： A method for manufacturing a write head with a helical coil having a very small and well controlled spacing between adjacent coil leads. The method includes forming a first set of coil leads, then conformally depositing a thin layer of electrically insulating material such as alumina over the first set of coil leads and over the substrate. An electrically conductive seed layer is then deposited over the thin layer of non-magnetic, electrically insulating material An electrically conductive material such as Cu is then deposited by electroplating in order to form a second set of electrically conductive leads interspersed within the first set of electrically conductive leads, each of the second set of leads being separated from the second set of leads by a portion of the thin layer of non-magnetic, electrically insulating material.

摘要翻译： 一种用于制造具有螺旋线圈的写入头的方法，所述螺旋线圈在相邻线圈引线之间具有非常小且受控的间隔。 该方法包括形成第一组线圈引线，然后在第一组线圈引线上方和衬底上共形沉积诸如氧化铝之类的电绝缘材料的薄层。 然后将导电种子层沉积在非磁性，电绝缘材料的薄层上。然后通过电镀沉积诸如Cu的导电材料，以便形成散布在第一组电气中的第二组导电引线 导电引线，第二组引线中的每一个通过非磁性，电绝缘材料的薄层的一部分与第二组引线分离。

公开(公告)号：US20080247086A1

公开(公告)日：2008-10-09

申请号：US11644574

申请日：2007-02-08

申请人： Daniel Wayne Bedell ,  David Patrick Druist ,  Edward Hin Pong Lee ,  Vladimir Nikitin

发明人： Daniel Wayne Bedell ,  David Patrick Druist ,  Edward Hin Pong Lee ,  Vladimir Nikitin

IPC分类号： G11B5/33 ,  G11B5/23 ,  B44C1/22 ,  B05D3/14

CPC分类号： G11B5/3123 ,  G11B5/17 ,  G11B5/3136 ,  G11B5/3163

摘要： A method of forming interleaved coils of a write head is disclosed using a combination of non-damascene and damascene processes.

摘要翻译： 使用非镶嵌和镶嵌工艺的组合公开了形成写入头的交错线圈的方法。

公开(公告)号：US20080151424A1

公开(公告)日：2008-06-26

申请号：US11644446

申请日：2006-12-22

申请人： Daniel Wayne Bedell ,  David Patrick Druist ,  Edward Hin Pong Lee ,  Jennifer Ai-Ming Loo ,  Vladimir Nikitin

发明人： Daniel Wayne Bedell ,  David Patrick Druist ,  Edward Hin Pong Lee ,  Jennifer Ai-Ming Loo ,  Vladimir Nikitin

IPC分类号： G11B5/17

CPC分类号： G11B5/3123 ,  Y10T29/49043 ,  Y10T29/4906 ,  Y10T29/49064

摘要： In one embodiment and method of the present invention, a coil of a write head is created by forming a P1 pedestal layer and a back gap layer and further forming a coil pattern consistent with the coil to be formed and insulator spacers dispersed in the coil pattern, using a non-damascene process, thereafter the coil is formed by plating using a damascene process.

摘要翻译： 在本发明的一个实施例和方法中，通过形成P 1基座层和后间隙层，并且进一步形成与要形成的线圈一致的线圈图案，并且将绝缘体间隔物分散在线圈中，形成写入头的线圈 图案，使用非镶嵌工艺，此后通过使用镶嵌工艺的镀层形成线圈。

公开(公告)号：US20080151207A1

公开(公告)日：2008-06-26

申请号：US11644927

申请日：2006-12-21

申请人： Vladimir Nikitin

发明人： Vladimir Nikitin

IPC分类号： G03B27/42 ,  G03C5/00

CPC分类号： G03F7/168 ,  G03F7/0043 ,  G03F7/0047 ,  Y10T29/49043

摘要： A method for a magneto-optical photoresist. The method includes applying a magneto-optical photoresist to a surface, and patterning the magneto-optical photoresist by using a magnetic alignment. The magneto-optical photoresist is also patterned by using a photo exposure, wherein the magnetic alignment provides a photo exposure alignment for the photo exposure.

摘要翻译： 一种用于磁光光刻胶的方法。 该方法包括将磁光光致抗蚀剂施加到表面，并通过使用磁性取向图案化磁光光致抗蚀剂。 磁光光致抗蚀剂也通过使用照相曝光来图案化，其中磁性对准提供用于照相曝光的照相曝光对准。

公开(公告)号：US20080141522A1

公开(公告)日：2008-06-19

申请号：US11611829

申请日：2006-12-15

申请人： Amanda Baer ,  Vladimir Nikitin ,  Aron Pentek ,  Neil Leslie Robertson

发明人： Amanda Baer ,  Vladimir Nikitin ,  Aron Pentek ,  Neil Leslie Robertson

IPC分类号： G11B5/127 ,  B05D5/12 ,  H04R31/00

CPC分类号： G11B5/3166 ,  G11B5/102 ,  G11B5/1278 ,  G11B5/3146 ,  G11B5/3169 ,  G11B5/3173 ,  Y10T29/49032 ,  Y10T29/49041 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： An optical lapping guide for determining an amount of lapping performed on a row of sliders in a process for manufacturing sliders for magnetic data recording. The optical lapping guide is constructed with a front edge that is at an angle with respect to an air bearing surface plane ABS plane, such that a portion of the lapping guides is in front of the ABS and portion of the lapping guide is behind the ABS. As lapping progresses, an increasing amount of the lapping guide will be exposed at the ABS and visible for inspection. Therefore, after a lapping process has been performed, the optical lapping guide can be inspected to determine the amount of material removed by lapping. The greater the amount of the lapping guide that is exposed and visible, the greater the amount of material removed by lapping.

摘要翻译： 光学研磨引导件，用于确定在用于制造用于磁数据记录的滑块的过程中对一排滑块执行的研磨量。 光学研磨引导件的前边缘相对于空气轴承表面平面ABS平面成一定角度，使得研磨导轨的一部分在ABS的前面，研磨导轨的一部分在ABS后面 。 随着研磨的进行，越来越多的研磨导轨将暴露在ABS处并可见以供检查。 因此，在进行研磨处理之后，可以检查光学研磨导向件以确定通过研磨去除的材料的量。 暴露和可见的研磨导轨的量越大，通过研磨去除的材料量就越大。

公开(公告)号：US20080072417A1

公开(公告)日：2008-03-27

申请号：US11525788

申请日：2006-09-21

申请人： Yimin Hsu ,  Vladimir Nikitin ,  Aron Pentek

发明人： Yimin Hsu ,  Vladimir Nikitin ,  Aron Pentek

IPC分类号： G11B5/127

CPC分类号： G11B5/1278 ,  G11B5/3146 ,  G11B5/315 ,  G11B5/3163 ,  Y10T29/49041 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method for manufacturing a write pole for a perpendicular magnetic write head. The method includes forming a mask structure over a full film layer of magnetic write pole material. A layer of hard mask material such as conformally deposited alumina is then deposited full film over the mask and write pole material. An ion mill, such as in an Ar or CHF3 chemistry is then used to preferentially remove horizontally disposed portions of the alumina layer (hard mask layer), thereby forming vertical hard mask walls at the sides of the mask structure. An ion mill is then used to form the write pole, with the alumna side walls providing excellent masking for forming well defined write pole edges. A relatively gentle clean up process can then be performed to remove the remaining mask material and side walls. The use of the alumina side walls eliminated the need to use an alumina hard mask that extends over the entire top of the write pole, Because of this, after forming the write pole, a relatively gentle clean up such as TMAH etch and NMP can be used to remove the remaining mask and alumina walls from the write pole.

摘要翻译： 一种用于制造用于垂直磁写头的写极的方法。 该方法包括在磁性写入磁极材料的全部薄膜层上形成掩模结构。 然后将诸如保形沉积氧化铝的硬掩模材料层沉积在掩模上并写入极材料。 然后使用诸如Ar或CHF 3化学中的离子磨机来优先除去氧化铝层（硬掩模层）的水平设置的部分，从而在掩模结构的侧面形成垂直的硬掩模壁。 然后使用离子磨机形成写柱，校准侧壁为形成良好定义的写极边缘提供了优​​异的掩模。 然后可以执行相对温和的清理过程以除去剩余的掩模材料和侧壁。 使用氧化铝侧壁消除了使用在写入极的整个顶部上延伸的氧化铝硬掩模的需要。因此，在形成写入极之后，可以进行相对温和的清洁，例如TMAH蚀刻和NMP可以 用于从写入极上去除剩余的掩模和氧化铝壁。