摘要:
The present invention is a semiconductor sensor having a semiconductor sensor chip for detecting a physical value applied in a direction perpendicular to the chip surface; and a package for incorporating the semiconductor sensor chip. The main surface for mounting the semiconductor sensor chip is formed at a predetermined angle with respect to the surface of a printed circuit board for mounting the package. The main surface is provided with a plurality of terminals along two opposite sides for connecting with input/output terminals of the semiconductor sensor chip. A bottom surface, perpendicular to the main surface, is provided with a plurality of pins formed along the two sides parallel to the main surface, so that the plurality of pins are inserted into mounting holes formed in the printed circuit board. The plurality of terminals and the plurality of pins are electrically connected, and input/output terminals of the semiconductor sensor chip mounted on the main surface are electrically connected with the plurality of terminals of the package.
摘要:
A sensor chip having a support frame part and sensor structure including at least one displaceable weight part, and a beam part for connecting the weight part to the support frame part. The sensor structure is formed on a silicon substrate through an insulating layer and the insulating layer between the sensor structure and the silicon substrate is removed. The beam part is formed of two parallel beams and the weight part is connected to the support frame part by two parallel beams. At least two semiconductor strain gauges are formed on the surface of the two respective parallel beams. The semiconductor chip may be contained in a package having a main surface for mounting the semiconductor sensor chip formed at a predetermined angle with respect to the surface of a printed circuit board for mounting the package. The main surface is provided with a plurality of terminals along two opposite sides thereof for connecting with input/output terminals of the semiconductor sensor chip. A bottom surface perpendicular to the main surface is provided with a plurality of pins for inserting into mounting holes of the circuit board.
摘要:
A method and apparatus for manufacturing a semiconductor physical quantity sensor according to the present invention achieves the high sensing accuracy and reliability and prevents a sticking phenomenon. Specifically, a semiconductor physical quantity sensor is cleaned by a displacement liquid and is dried while a SOI substrate is revolving. The number of revolutions is determined so that a suction force (Fs), which acts on a silicon substrate by a surface tension of the displacement liquid, a sensor spring force FK and a centrifugal force (Fr) generated by the acceleration in the revolution can satisfy the following condition: (FK+Fr)>FS. In order to prevent the sticking phenomenon after the stop of the spray, the semiconductor physical quantity sensor is dried by spraying an inert gas such as nitrogen including minus ions so that the revolving SOI substrate can eliminate static electricity generated by friction of the air flow.
摘要:
A suspension control system for use with shock absorbers provided between sprung and unsprung masses of an automotive vehicle at the positions of the respective vehicle road wheels for providing variable damping force characteristics. Sprung mass vertical velocities at the respective road wheel positions are derived from a sensed sprung mass vertical behavior. Relative velocities between the sprung and unsprung masses at the respective road wheel positions are derived from the sensed sprung mass vertical behavior with the use of a predetermined transfer function including terms related to damping coefficients of the respective shock absorbers. A control unit is provided for producing control signals based on the derived sprung mass vertical velocities and the derived relative velocities to control the damping force characteristics of the respective shock absorbers. Damping coefficients of the respective shock absorbers are determined based on the corresponding control signals. The terms related to the damping coefficients of the respective shock absorbers are varied according to the determined damping coefficients.
摘要:
In apparatus and method for controlling a damping force characteristic for a vehicular suspension system, a relative velocity between a sprung mass and an unsprung mass is calculated using a predetermined transfer function from a sprung mass vertical velocity derived on the basis of a sprung mass acceleration signal. The predetermined transfer function is, in a embodiment, expressed as G.sub.U(S) =(QS.sup.2 +RS)/(FS.sup.2 +DS +E), wherein Q=-m.sub.1 .multidot.c.sub.2, R=-m.sub.1 .multidot.k.sub.2, F=c.sub.1 .multidot.c.sub.2, D=c.sub.1 .multidot.k.sub.2, E=k.sub.1 .multidot.k.sub.2, S denotes a Laplace operator, c.sub.1 denotes an attenuation constant of each shock absorber, c.sub.2 denotes an attenuation constant of the corresponding one of road wheels, k.sub.1 denotes a spring constant of the shock absorber. k.sub.2 denotes a spring constant of the corresponding one of the road wheels, m.sub.1 denotes the sprung mass, and m.sub.2 denotes the unsprung mass.
摘要:
In apparatus and method for controlling a damping force characteristic of each of front and rear left and right road wheel positioned shock absorbers based on a Sky Hook control theory, rear left and right road wheel position vehicular behaviors are estimated using a predetermined transfer function established between front road wheel position vehicular behaviors and rear road wheel position vehicular behaviors from front left and right road wheel position vehicular behavior related signals with the damping force characteristics of the rear road wheel positioned shock absorbers controlled on the basis of rear road wheel position control signals formed for the rear left and right road wheel positioned shock absorbers on the basis of the estimated rear road wheel position vehicular behaviors.
摘要:
In an apparatus and method for controlling a damping force characteristic of a vehicular shock absorber, a vertical sprung mass velocity signal V.sub.n is determined on the basis of a vertical G sensor output signal as a control signal. A control gain when a control unit changes a damping force characteristic of either an extension stroke side or a compression stroke side of a piston member of the shock absorber according to the control signal is increased as a moving average of peak values of the vertical sprung mass velocity signal V.sub.n is reduced.
摘要:
In an apparatus and method for controlling damping force characteristics of respective vehicular shock absorbers, a control signal V is generated according to a state in which a steering system is operated, the control signal being converted to a drive signal to be input to damping force characteristic changing member (stepping motor and adjuster) so that the damping force characteristic of the corresponding one of the shock absorbers is changed to a desired damping force characteristic. The control signal is a signal synthesized with a bounce rate signal based on a vertical sprung mass velocity signal, a roll rate signal determined on the basis of a difference between both right and left vertical sprung mass velocity signals, a roll rate (displacement) signal determined on the basis of the difference described above, a steering angular displacement signal, and a steering angular velocity signal at a predetermined rate of distribution .eta.. The predetermined rate of distribution (signal systhesis) is varied according to a vehicle speed.
摘要:
An apparatus for controlling damping coefficients for respective vehicular shock absorbers is disclosed in which a plurality of shock absorbers are interposed between predetermined parts of a vehicle body and tire wheel and are provided with damping coefficient changing members, each changing member varying the coefficients of the damping shock absorbers at multiple stages by changing position of an associated actuator, the actuator receiving a signal to change the position of the damping coefficient changing member on the basis of an input signal derived from a sprung mass vertical G sensor. Particularly, a correction portion is provided in a control unit which varies a position change rate of the damping coefficient changing member according to a value of the input signal derived from an input signal sensor, e.g., the sprung mass vertical G sensor.
摘要:
A system for controlling damping force characteristics for respective shock absorbers, each shock absorber being interposed between a sprung mass and an unsprung mass, in which a control signal to control the damping force characteristic at either or both stroke sides of each shock absorber is derived by a control unit on the basis of a signal indicating a sprung mass behavior, a signal indicating a steering angular displacement of a vehicle steering system, and a signal indicating a steering angular velocity of the steering system. In addition, a control equation to determine the control signal value has various coefficients which are zeroed depending on whether a predetermined steering condition is established.