Semiconductor sensor chip and method for producing the chip, and semiconductor sensor and package for assembling the sensor
    71.
    发明授权
    Semiconductor sensor chip and method for producing the chip, and semiconductor sensor and package for assembling the sensor 失效
    半导体传感器芯片及其制造方法,以及用于组装传感器的半导体传感器和封装

    公开(公告)号:US06494092B2

    公开(公告)日:2002-12-17

    申请号:US09957241

    申请日:2001-09-21

    IPC分类号: G01P102

    摘要: The present invention is a semiconductor sensor having a semiconductor sensor chip for detecting a physical value applied in a direction perpendicular to the chip surface; and a package for incorporating the semiconductor sensor chip. The main surface for mounting the semiconductor sensor chip is formed at a predetermined angle with respect to the surface of a printed circuit board for mounting the package. The main surface is provided with a plurality of terminals along two opposite sides for connecting with input/output terminals of the semiconductor sensor chip. A bottom surface, perpendicular to the main surface, is provided with a plurality of pins formed along the two sides parallel to the main surface, so that the plurality of pins are inserted into mounting holes formed in the printed circuit board. The plurality of terminals and the plurality of pins are electrically connected, and input/output terminals of the semiconductor sensor chip mounted on the main surface are electrically connected with the plurality of terminals of the package.

    摘要翻译: 本发明是具有半导体传感器芯片的半导体传感器,用于检测在垂直于芯片表面的方向上施加的物理值; 以及用于并入半导体传感器芯片的封装。 用于安装半导体传感器芯片的主表面相对于用于安装封装的印刷电路板的表面以预定角度形成。 主表面沿着两个相对侧设置有多个端子,用于连接半导体传感器芯片的输入/输出端子。 垂直于主表面的底面设置有沿着平行于主表面的两侧形成的多个销,使得多个销插入形成在印刷电路板中的安装孔中。 多个端子和多个引脚电连接,并且安装在主表面上的半导体传感器芯片的输入/输出端子与封装的多个端子电连接。

    Semiconductor sensor chip and method for producing the chip, and semiconductor sensor and package for assembling the sensor
    72.
    发明授权
    Semiconductor sensor chip and method for producing the chip, and semiconductor sensor and package for assembling the sensor 失效
    半导体传感器芯片及其制造方法,以及用于组装传感器的半导体传感器和封装

    公开(公告)号:US06332359B1

    公开(公告)日:2001-12-25

    申请号:US09241096

    申请日:1999-02-01

    IPC分类号: G01P1512

    摘要: A sensor chip having a support frame part and sensor structure including at least one displaceable weight part, and a beam part for connecting the weight part to the support frame part. The sensor structure is formed on a silicon substrate through an insulating layer and the insulating layer between the sensor structure and the silicon substrate is removed. The beam part is formed of two parallel beams and the weight part is connected to the support frame part by two parallel beams. At least two semiconductor strain gauges are formed on the surface of the two respective parallel beams. The semiconductor chip may be contained in a package having a main surface for mounting the semiconductor sensor chip formed at a predetermined angle with respect to the surface of a printed circuit board for mounting the package. The main surface is provided with a plurality of terminals along two opposite sides thereof for connecting with input/output terminals of the semiconductor sensor chip. A bottom surface perpendicular to the main surface is provided with a plurality of pins for inserting into mounting holes of the circuit board.

    摘要翻译: 一种具有支撑框架部分和传感器结构的传感器芯片,所述传感器芯片包括至少一个位移重量部分和用于将所述重量部分连接到所述支撑框架部分的梁部分。 传感器结构通过绝缘层形成在硅衬底上,并且去除传感器结构和硅衬底之间的绝缘层。 梁部分由两个平行的梁形成,重物部分通过两个平行的梁连接到支撑框架部分。 在两个相应的平行光束的表面上形成至少两个半导体应变计。 半导体芯片可以包含在具有用于安装相对于用于安装封装的印刷电路板的表面的预定角度的半导体传感器芯片的主表面的封装中。 主表面沿其两个相对侧设置有多个端子,用于连接半导体传感器芯片的输入/输出端子。 垂直于主表面的底表面设置有多个插脚插入电路板的安装孔中。

    Semiconductor dynamic quantity-sensor and method of manufacturing the same
    73.
    发明授权
    Semiconductor dynamic quantity-sensor and method of manufacturing the same 有权
    半导体动态量传感器及其制造方法

    公开(公告)号:US06281033B1

    公开(公告)日:2001-08-28

    申请号:US09471712

    申请日:1999-12-23

    IPC分类号: H01L2100

    摘要: A method and apparatus for manufacturing a semiconductor physical quantity sensor according to the present invention achieves the high sensing accuracy and reliability and prevents a sticking phenomenon. Specifically, a semiconductor physical quantity sensor is cleaned by a displacement liquid and is dried while a SOI substrate is revolving. The number of revolutions is determined so that a suction force (Fs), which acts on a silicon substrate by a surface tension of the displacement liquid, a sensor spring force FK and a centrifugal force (Fr) generated by the acceleration in the revolution can satisfy the following condition: (FK+Fr)>FS. In order to prevent the sticking phenomenon after the stop of the spray, the semiconductor physical quantity sensor is dried by spraying an inert gas such as nitrogen including minus ions so that the revolving SOI substrate can eliminate static electricity generated by friction of the air flow.

    摘要翻译: 根据本发明的用于制造半导体物理量传感器的方法和装置实现了高感测精度和可靠性并且防止了粘附现象。 具体地说,半导体物理量传感器被置换液体清洗并在SOI衬底旋转的同时被干燥。 确定转数,使得通过位移液的表面张力作用在硅衬底上的吸力(Fs),传感器弹簧力FK和由转速加速度产生的离心力(Fr)可以 满足以下条件:(FK + Fr)> FS。 为了防止喷雾停止后的粘附现象,通过喷射含有负离子的氮等惰性气体使半导体物理量传感器干燥,使得回转SOI基板能够消除由空气流的摩擦产生的静电。

    Automotive vehicle suspension control system
    74.
    发明授权
    Automotive vehicle suspension control system 失效
    汽车悬架控制系统

    公开(公告)号:US5890081A

    公开(公告)日:1999-03-30

    申请号:US676810

    申请日:1996-07-08

    申请人: Mitsuo Sasaki

    发明人: Mitsuo Sasaki

    摘要: A suspension control system for use with shock absorbers provided between sprung and unsprung masses of an automotive vehicle at the positions of the respective vehicle road wheels for providing variable damping force characteristics. Sprung mass vertical velocities at the respective road wheel positions are derived from a sensed sprung mass vertical behavior. Relative velocities between the sprung and unsprung masses at the respective road wheel positions are derived from the sensed sprung mass vertical behavior with the use of a predetermined transfer function including terms related to damping coefficients of the respective shock absorbers. A control unit is provided for producing control signals based on the derived sprung mass vertical velocities and the derived relative velocities to control the damping force characteristics of the respective shock absorbers. Damping coefficients of the respective shock absorbers are determined based on the corresponding control signals. The terms related to the damping coefficients of the respective shock absorbers are varied according to the determined damping coefficients.

    摘要翻译: 一种悬挂控制系统,用于在相应车辆车轮的位置处的机动车辆的簧上和非簧载之间提供的减震器,用于提供可变的阻尼力特性。 相应的车轮位置处的弹簧质量垂直速度是从感测到的弹簧质量垂直行为导出的。 使用包括与相应减震器的阻尼系数有关的术语的预定传递函数,从感测到的悬挂质量垂直行为导出相应车轮位置处的簧上和非簧载质量之间的相对速度。 提供控制单元,用于根据得到的悬挂质量垂直速度和导出的相对速度产生控制信号,以控制各个减震器的阻尼力特性。 基于相应的控制信号确定各减震器的阻尼系数。 与相应的减震器的阻尼系数有关的术语根据确定的阻尼系数而变化。

    Apparatus and method for controlling damping force characteristic of
vehicular suspension system
    75.
    发明授权
    Apparatus and method for controlling damping force characteristic of vehicular suspension system 失效
    用于控制车辆悬挂系统阻尼力特性的装置和方法

    公开(公告)号:US5808890A

    公开(公告)日:1998-09-15

    申请号:US536745

    申请日:1995-09-29

    申请人: Mitsuo Sasaki

    发明人: Mitsuo Sasaki

    摘要: In apparatus and method for controlling a damping force characteristic for a vehicular suspension system, a relative velocity between a sprung mass and an unsprung mass is calculated using a predetermined transfer function from a sprung mass vertical velocity derived on the basis of a sprung mass acceleration signal. The predetermined transfer function is, in a embodiment, expressed as G.sub.U(S) =(QS.sup.2 +RS)/(FS.sup.2 +DS +E), wherein Q=-m.sub.1 .multidot.c.sub.2, R=-m.sub.1 .multidot.k.sub.2, F=c.sub.1 .multidot.c.sub.2, D=c.sub.1 .multidot.k.sub.2, E=k.sub.1 .multidot.k.sub.2, S denotes a Laplace operator, c.sub.1 denotes an attenuation constant of each shock absorber, c.sub.2 denotes an attenuation constant of the corresponding one of road wheels, k.sub.1 denotes a spring constant of the shock absorber. k.sub.2 denotes a spring constant of the corresponding one of the road wheels, m.sub.1 denotes the sprung mass, and m.sub.2 denotes the unsprung mass.

    摘要翻译: 在用于控制车辆悬架系统的阻尼力特性的装置和方法中,使用来自基于弹簧质量加速度信号导出的悬挂质量垂直速度的预定传递函数来计算簧上质量和非簧载质量之间的相对速度 。 在一个实施例中,预定传递函数表示为GU(S)=(QS2 + RS)/(FS2 + DS + E),其中Q = -m1xc2,R = -m1xk2,F = c1xc2,D = c1xk2, E = k1xk2,S表示拉普拉斯算子,c1表示每个减震器的衰减常数,c2表示相应的一个车轮的衰减常数,k1表示减震器的弹簧常数。 k2表示相应的一个车轮的弹簧常数,m1表示弹簧质量,m2表示非簧载质量。

    Apparatus and method for controlling damping force characteristic of
vehicle suspension system
    76.
    发明授权
    Apparatus and method for controlling damping force characteristic of vehicle suspension system 失效
    控制车辆悬架系统阻尼力特性的装置及方法

    公开(公告)号:US5794168A

    公开(公告)日:1998-08-11

    申请号:US541706

    申请日:1995-10-10

    摘要: In apparatus and method for controlling a damping force characteristic of each of front and rear left and right road wheel positioned shock absorbers based on a Sky Hook control theory, rear left and right road wheel position vehicular behaviors are estimated using a predetermined transfer function established between front road wheel position vehicular behaviors and rear road wheel position vehicular behaviors from front left and right road wheel position vehicular behavior related signals with the damping force characteristics of the rear road wheel positioned shock absorbers controlled on the basis of rear road wheel position control signals formed for the rear left and right road wheel positioned shock absorbers on the basis of the estimated rear road wheel position vehicular behaviors.

    摘要翻译: 在基于Sky Hook控制理论的用于控制前后左右车轮定位减震器的阻尼力特性的装置和方法中,使用预定的传递函数来估计后左右车轮位置车辆行为, 前车轮位置车辆行为和后车轮位置车辆行为从前左右车轮位置车辆行为相关信号,后轮车轮定位减震器的阻尼力特性基于形成的后轮车轮位置控制信号 基于估计后车轮位置车辆行为的后左右车轮定位减震器。

    Apparatus and method for controlling damping force characteristic of
vehicular shock absorber
    77.
    发明授权
    Apparatus and method for controlling damping force characteristic of vehicular shock absorber 失效
    用于控制车辆减震器阻尼力特性的装置和方法

    公开(公告)号:US5572426A

    公开(公告)日:1996-11-05

    申请号:US305282

    申请日:1994-09-12

    IPC分类号: B60G17/015 F16F9/50

    摘要: In an apparatus and method for controlling a damping force characteristic of a vehicular shock absorber, a vertical sprung mass velocity signal V.sub.n is determined on the basis of a vertical G sensor output signal as a control signal. A control gain when a control unit changes a damping force characteristic of either an extension stroke side or a compression stroke side of a piston member of the shock absorber according to the control signal is increased as a moving average of peak values of the vertical sprung mass velocity signal V.sub.n is reduced.

    摘要翻译: 在用于控制车辆缓冲器的阻尼力特性的装置和方法中,基于作为控制信号的垂直G传感器输出信号来确定垂直悬挂质量速度信号Vn。 当控制单元根据控制信号改变减震器的活塞构件的延伸冲程侧或压缩冲程侧的阻尼力特性时的控制增益作为垂直悬挂质量的峰值的移动平均值而增加 速度信号Vn减小。

    Apparatus and method for controlling damping force characteristic of
vehicular shock absorber
    78.
    发明授权
    Apparatus and method for controlling damping force characteristic of vehicular shock absorber 失效
    用于控制车辆减震器阻尼力特性的装置和方法

    公开(公告)号:US5485377A

    公开(公告)日:1996-01-16

    申请号:US304229

    申请日:1994-09-12

    摘要: In an apparatus and method for controlling damping force characteristics of respective vehicular shock absorbers, a control signal V is generated according to a state in which a steering system is operated, the control signal being converted to a drive signal to be input to damping force characteristic changing member (stepping motor and adjuster) so that the damping force characteristic of the corresponding one of the shock absorbers is changed to a desired damping force characteristic. The control signal is a signal synthesized with a bounce rate signal based on a vertical sprung mass velocity signal, a roll rate signal determined on the basis of a difference between both right and left vertical sprung mass velocity signals, a roll rate (displacement) signal determined on the basis of the difference described above, a steering angular displacement signal, and a steering angular velocity signal at a predetermined rate of distribution .eta.. The predetermined rate of distribution (signal systhesis) is varied according to a vehicle speed.

    摘要翻译: 在用于控制各个车辆减震器的阻尼力特性的装置和方法中,根据操纵转向系统的状态产生控制信号V,将控制信号转换为输入到阻尼力特性的驱动信号 (步进电动机和调节器),使得相应的一个减震器的阻尼力特性变为期望的阻尼力特性。 控制信号是基于垂直弹簧质量速度信号的反弹速率信号合成的信号,基于左右垂直悬挂质量速度信号之间的差确定的滚动速率信号,滚动速率(位移)信号 基于上述差异,以预定分配速度eta的转向角位移信号和转向角速度信号来确定。 预定的分配速率(信号合成)根据车速而变化。

    Apparatus for controlling damping coefficient for vehicular shock
absorber
    79.
    发明授权
    Apparatus for controlling damping coefficient for vehicular shock absorber 失效
    用于控制车辆减震器阻尼系数的装置

    公开(公告)号:US5446663A

    公开(公告)日:1995-08-29

    申请号:US991629

    申请日:1992-12-11

    IPC分类号: B60G17/015 B60G17/00

    摘要: An apparatus for controlling damping coefficients for respective vehicular shock absorbers is disclosed in which a plurality of shock absorbers are interposed between predetermined parts of a vehicle body and tire wheel and are provided with damping coefficient changing members, each changing member varying the coefficients of the damping shock absorbers at multiple stages by changing position of an associated actuator, the actuator receiving a signal to change the position of the damping coefficient changing member on the basis of an input signal derived from a sprung mass vertical G sensor. Particularly, a correction portion is provided in a control unit which varies a position change rate of the damping coefficient changing member according to a value of the input signal derived from an input signal sensor, e.g., the sprung mass vertical G sensor.

    摘要翻译: 公开了一种用于控制相应的车辆减震器的阻尼系数的装置,其中多个减震器被插入在车体的预定部分和轮胎车轮之间,并且设置有阻尼系数改变构件,每个改变构件改变阻尼系数 通过改变相关联的致动器的位置在多个阶段的减震器,致动器基于从簧上质量垂直G传感器导出的输入信号接收信号以改变阻尼系数改变构件的位置。 特别地,在控制单元中提供校正部分,该控制单元根据从输入信号传感器(例如,悬挂质量垂直G传感器)导出的输入信号的值来改变阻尼系数改变构件的位置变化率。

    System for controlling damping force characteristic of shock absorber of
vehicle
    80.
    发明授权
    System for controlling damping force characteristic of shock absorber of vehicle 失效
    用于控制车辆减震器阻尼力特性的系统

    公开(公告)号:US5440488A

    公开(公告)日:1995-08-08

    申请号:US120404

    申请日:1993-09-14

    IPC分类号: B60G17/015 B60G17/016

    摘要: A system for controlling damping force characteristics for respective shock absorbers, each shock absorber being interposed between a sprung mass and an unsprung mass, in which a control signal to control the damping force characteristic at either or both stroke sides of each shock absorber is derived by a control unit on the basis of a signal indicating a sprung mass behavior, a signal indicating a steering angular displacement of a vehicle steering system, and a signal indicating a steering angular velocity of the steering system. In addition, a control equation to determine the control signal value has various coefficients which are zeroed depending on whether a predetermined steering condition is established.

    摘要翻译: 一种用于控制各个减震器的阻尼力特性的系统,每个减震器介于弹簧质量块和簧下质量块之间,其中控制每个减震器的一侧或两侧的阻尼力特性的控制信号是通过 基于指示弹簧质量行为的信号的控制单元,指示车辆转向系统的转向角位移的信号和指示转向系统的转向角速度的信号。 此外,用于确定控制信号值的控制方程式具有根据是否建立了预定的转向条件而被归零的各种系数。