摘要:
An oxide film is formed on a target substrate by CVD, in a process field to be selectively supplied with a first process gas including a source gas containing a film source element and no amino group, a second process gas including an oxidizing gas, and a third process gas including a preliminary treatment gas. A first step includes an excitation period of supplying the third process gas excited by an exciting mechanism, thereby performing a preliminary treatment on the target substrate by preliminary treatment gas radicals. A second step performs supply of the first process gas, thereby adsorbing the film source element on the target substrate. A third step includes an excitation period of supplying the second process gas excited by an exciting mechanism, thereby oxidizing the film source element adsorbed on the target substrate by oxidizing gas radicals.
摘要:
The invention provides an illumination optical system that guides light emitted from light source device 1 to DMD 2, the illumination optical system including: light tunnel 20 that uniformizes luminance distribution of light emitted from light source device 1; relay optical system 40 that guides light having uniformized illumination distribution to DMD 2; and shield board 30 disposed on an optical path between light tunnel 20 and relay optical system 40. Shield board 30 is smaller than outlet end face 22 of light tunnel 20 and at the same time has an opening of a shape similar to the image formation area on DMD 2, and is movable in a plane containing the opening.
摘要:
An inter-node connection method and apparatus for at least a first and second nodes respectively connected to private IP address network ends of at least a first and second address translation devices, which translate a private IP address into a global IP address, through global IP address network ends of the first and second address translation devices. Firstly, a control session is established with the first or the second node respectively through the first or the second address translation device; and secondly a connection request frame or a connection reply frame is respectively transferred to the second or the first node by the control session through the second or the first address translation device when the connection request frame or the connection reply frame is received respectively from the first and second nodes by a data session. The second or the first node transmits a data frame toward the first or the second address translation device, which binds an IP address and a port number of the first or the second node included in the data frame respectively to those of the second or the first address translation device for a direct communication between the nodes.
摘要:
A technique for testability of a semiconductor integrated circuit is disclosed. In a first step, a fault simulation is conducted based on a predetermined test pattern to discriminate detectable faults and undetectable faults from each other. In a second step, undetected faults are listed. In a third step, the test conditions for the undetected faults are determined. In a fourth step, a test pattern most likely to meet the test conditions is selected from among a plurality of test patterns. In a fifth step, the registers associated with the undetected faults are replaced with scan registers, while at the same time connecting the scan registers in a scan chain to thereby make up a modified circuit. In a sixth step, a fault simulation is conducted by switching to the test condition at the timing corresponding to the undetected faults using the test pattern for the modified circuit.
摘要:
Disclosed is a fixing roller which comprises a core 16, a porous material layer 22 disposed in surrounding relation to an outer peripheral surface of the core 16, and a thin-walled metal sleeve 26 covering an outer peripheral surface of the porous material layer 22. The porous material layer 22 comprises a closed cell-type silicone elastomer. The present invention provides a fixing roller capable of ensuring enhanced durability and maintaining a usable state over long periods under the condition of being actually driven and rotated.
摘要:
A high-speed routing search is realized by a hierarchical routing table, while a conventional network having a hierarchical network as a backbone performs conventional operations without being aware of the hierarchical backbone network, in a mixed environment of the hierarchical and non-hierarchical networks, by assigning the non-hierarchical network a virtual hierarchy number equivalent to a hierarchy number in the hierarchical network, attaching the virtual hierarchical number to a packet to be relayed at a router located at an entrance from the non-hierarchical network to the hierarchical network, performing hierarchical routing control by the virtual hierarchy number within the hierarchical network, and by removing the virtual hierarchy number from the packet to be relayed at a router located at an exit from the hierarchical network to the non-hierarchical network.
摘要:
In a method for finding a resource and a service conducted in each of relay node relaying a frame, a search table is maintained to register more than one node providing a resource or a service, when an access request including an identification identifying the resource or the service, which the node stops providing, is received, a next transfer node is switched from the node, which stops providing the resource or the service, to an available node providing the resource or the service identified by the identification, by searching for the search table by the identification.
摘要:
In a projection display device that is provided with a relay lens for converting flux that is emitted from a light source to a parallel flux for illuminating an image display element (DMD), and a total internal reflection prism for both directing flux that is emitted from the relay lens to the DMD and directing flux that is reflected by the DMD toward a projection lens, the relay lens is unified with the prism as a lens-integral prism by bonding the relay lens to the total internal reflection surface of the prism.
摘要:
A light flux modulated by a picture is shot out from a liquid crystal projector, and projected on the rear surface of the transparent screen, and a user enjoys the picture from the front side thereof. The sawlike prismatic surface is formed on the rear surface of the transparent screen. Edges of the sawlike prismatic surface form concentric circles centering around a point which is given as an intersection of an optical axis of the projector and a downward extensions of the transparent screen. A face looking downward transmits the light flux incident thereon into the transparent screen efficiently on condition that an angle formed by the incident ray of light and the optical axis of the projector is greater than 40° and less than 90°. A face looking upward totally reflects the ray of light incident thereon to the light-shooting surface, if the aforementioned condition is satisfied.
摘要:
A lens-less projection optical system of the reflection type is provided with four reflecting mirrors, which successively reflect a light flux transmitted through a picture-forming device. The light flux reflected by the fourth reflecting mirrors is projected on the screen. The second reflecting mirror is so situated that its reflecting surface shaped into a convexly curved surface is directed to the light flux reflected from the first reflecting mirror. The third reflecting mirror is so situated that its reflecting surface shaped into a convexly curved surface is directed to the light flux reflected form the second reflecting mirror. The fourth reflecting mirror is so situated that its reflecting surface shaped into a convexly curved surface is directed to the light flux reflected from the third reflecting mirror.