公开(公告)号：US07400704B1

公开(公告)日：2008-07-15

申请号：US11537806

申请日：2006-10-02

Applicant: Wenbing Yun ,  David Dean Scott ,  David R. Trapp ,  Frederick William Duewer ,  Yuxin Wang

Inventor： Wenbing Yun ,  David Dean Scott ,  David R. Trapp ,  Frederick William Duewer ,  Yuxin Wang

IPC: G01N23/20 ,  A61B6/08 ,  H05G1/00

CPC classification number: G01N23/04 ,  A61B6/508 ,  G01N2223/505 ,  G01N2223/6113

Abstract: A projection-based x-ray imaging system combines projection magnification and optical magnification in order to ease constraints on source spot size, while improving imaging system footprint and efficiency. The system enables tomographic imaging of the sample especially in a proximity mode where the same is held in close proximity to the scintillator. In this case, a sample holder is provided that can rotate the sample. Further, a z-axis motion stage is also provided that is used to control distance between the sample and the scintillator.

Abstract translation: 基于投影的X射线成像系统结合了投影放大倍数和光学放大倍率，以便减轻源光斑尺寸的限制，同时提高成像系统的覆盖面和效率。 该系统使得样品的层析成像特别是在接近模式下，其中相邻的模式保持在闪烁体附近。 在这种情况下，提供可以旋转样品的样品架。 此外，还提供了用于控制样品和闪烁体之间的距离的z轴运动级。

公开(公告)号：US07388942B2

公开(公告)日：2008-06-17

申请号：US11682503

申请日：2007-03-06

Applicant: Yuxin Wang ,  Wenbing Yun ,  David Dean Scott

Inventor： Yuxin Wang ,  Wenbing Yun ,  David Dean Scott

IPC: A61B6/03

CPC classification number: G01N23/046 ,  A61B6/508 ,  G01N2223/419

Abstract: A projection x-ray imaging system that possibly utilizes a laboratory-based micro-focused x-ray source is disclosed. Techniques for optimizing the system for high quality, three dimensional image formation with tomographic imaging with the potential for high resolution and high throughput are described. It also concerns ways to optimize the system design to obtain improved image quality.

Abstract translation: 公开了可能利用基于实验室的微焦点x射线源的投影X射线成像系统。 描述了用于利用具有高分辨率和高吞吐量的潜力的断层成像优化用于高质量三维图像形成的系统的技术。 它还涉及到优化系统设计以获得改进的图像质量的方法。

公开(公告)号：US07268945B2

公开(公告)日：2007-09-11

申请号：US10683872

申请日：2003-10-10

Applicant: Wenbing Yun ,  Yuxin Wang

Inventor： Wenbing Yun ,  Yuxin Wang

IPC: G02B27/44

CPC classification number: B82Y10/00 ,  B82Y40/00 ,  G03F1/24 ,  G03F1/84 ,  G21K1/06 ,  G21K2207/005

Abstract: An extreme ultraviolet (EUV) AIM tool for both the EUV actinic lithography and high-resolution imaging or inspection is described. This tool can be extended to lithography nodes beyond the 32 nanometer (nm) node covering other short wavelength radiation such as soft X-rays. The metrology tool is preferably based on an imaging optic referred to as an Achromatic Fresnel Optic (AFO). The AFO is a transmissive optic that includes a diffractive Fresnel zone plate lens component and a dispersion-correcting refractive lens component. It retains all of the imaging properties of a Fresnel zone plate lens, including a demonstrated resolution capability of better than 25 nanometers and freedom from image distortion. It overcomes the chromatic aberration of the Fresnel zone plate lens and has a larger usable spectral bandwidth. These optical properties and optical system designs enable the development of the AFO-based AIM tool with improved performance that has advantages compared with an AIM tool based on multilayer reflective mirror optics in both performance and cost.

Abstract translation: 描述了用于EUV光化光刻和高分辨率成像或检查的极紫外（EUV）AIM工具。 该工具可以扩展到覆盖其他短波长辐射（如软X射线）的32纳米（nm）节点之外的光刻节点。 测量工具优选地基于被称为消色差菲涅尔光学（AFO）的成像光学器件。 AFO是包括衍射菲涅耳带平板透镜部件和色散校正折射透镜部件的透射光学器件。 它保留了菲涅耳带状透镜的所有成像特性，包括显示的分辨率优于25纳米，并且不受图像失真的影响。 它克服了菲涅耳带状透镜的色差，并具有较大的可用光谱带宽。 这些光学性质和光学系统设计使得能够开发基于AFO的AIM工具，其性能与性能和成本基于多层反射镜光学的AIM工具相比具有优势。

公开(公告)号：US20050226376A1

公开(公告)日：2005-10-13

申请号：US10990198

申请日：2004-11-16

Applicant: Wenbing Yun ,  Yuxin Wang ,  David Scott

Inventor： Wenbing Yun ,  Yuxin Wang ,  David Scott

IPC: G01J1/42 ,  G01N23/04 ,  G01T1/00 ,  G01T1/20 ,  G01T1/202

CPC classification number: G01T1/202 ,  G01T1/2018 ,  G21K2207/005

Abstract: A digital dual-band detector functions as an imaging platform capable of extracting hard and soft tissue images, for example. The detector has a first detector system comprising a first scintillator for converting x-rays from a sample to an first optical signal, and a first detector for detecting the first optical signal in combination with a second detector system comprising a second scintillator for converting x-rays from the sample and passing through the first scintillator to a second optical signal, and a second detector for detecting the second optical signal. The detector can facilitate the implementation and deployment of recent developments and can permit low cost practical deployment in clinical applications as well as biomedical research applications where significant improvement in spatial resolution and image contrast is required. These improvements include an increase of feature detection sensitivity by more than an order of magnitude, simultaneous imaging of soft and hard (or mineralized) tissue at extremely high time resolution that is not limited by detector readout speed, and an increase in the signal to noise ratio of images by reducing the substantial background resulting from Compton scattering.

Abstract translation: 例如，数字双频带检测器用作能够提取硬和软组织图像的成像平台。 检测器具有第一检测器系统，该第一检测器系统包括用于将来自样品的x射线转换成第一光信号的第一闪烁器，以及用于与第二检测器系统一起检测第一光信号的第一检测器，该第二检测器系统包括第二闪烁器， 来自样品的光并通过第一闪烁体到第二光信号;以及第二检测器，用于检测第二光信号。 检测器可以促进近期发展的实施和部署，并且可以允许临床应用中的低成本实际部署以及需要显着改善空间分辨率和图像对比度的生物医学研究应用。 这些改进包括将特征检测灵敏度提高超过一个数量级，以非常高的时间分辨率同时成像软和硬（或矿化的）组织，其不受检测器读出速度的限制，并且信号与噪声的增加 通过减少由康普顿散射产生的实质背景，图像的比例。