公开(公告)号：US20020040598A1

公开(公告)日：2002-04-11

申请号：US09971711

申请日：2001-10-09

申请人： NGK SPARK PLUG CO., LTD.

发明人： Satoshi Sugaya ,  Tetsuo Yamada ,  Noboru Ishida

IPC分类号： G01N001/00 ,  G01N019/00 ,  H01C007/00

CPC分类号： G01N27/121

摘要： A humidity sensor including an insulating substrate, and a lower electrode formed from a noble metal, a moisture sensitive layer formed of a porous body predominantly containing alumina and containing predetermined amounts of TiO2 and SnO2 and an upper electrode formed of a noble metal porous body successively formed on the insulating substrate. The upper electrode is connected to the moisture sensitive layer and a portion of the insulating substrate. Preferably, the lower electrode is formed of a porous body. More preferably, the lower and upper electrodes are formed from Pt. Furthermore, preferably, a heater and a temperature measurement resistor are provided in the insulating substrate and are located directly below the moisture sensitive layer.

摘要翻译： 一种湿度传感器，包括绝缘基板和由贵金属形成的下电极，由主要含有氧化铝并含有预定量的TiO 2和SnO 2的多孔体形成的湿敏层和由贵金属多孔体形成的上电极 形成在绝缘基板上。 上电极连接到湿敏层和绝缘基板的一部分。 优选地，下电极由多孔体形成。 更优选地，下电极和上电极由Pt形成。 此外，优选地，在绝缘基板中设置加热器和温度测量电阻器，并且位于湿敏层的正下方。

公开(公告)号：US06342295B1

公开(公告)日：2002-01-29

申请号：US09468913

申请日：1999-12-22

申请人： Nobuo Kobayashi

发明人： Nobuo Kobayashi

IPC分类号： B32B516

CPC分类号： G01N27/126 ,  G01N27/121 ,  Y10S428/913 ,  Y10T428/25 ,  Y10T428/31609

摘要： A moisture sensor includes a moisture-sensitive film between a pair of electrodes having conductive particles dispersed in a hygroscopic polymer. The hygroscopic polymer is a polymer comprising a polyether amine, an epoxy compound, and optionally a water-soluble nylon. Alternatively, the hygroscopic polymer is a polyether ester amide and optionally a water-soluble nylon. The sensor enables DC measurement, can detect a humidity in the range of RH 60% to 100%, and ensures high performance stability against repetitive operations.

摘要翻译： 水分传感器包括在具有分散在吸湿性聚合物中的导电颗粒的一对电极之间的湿敏膜。 吸湿性聚合物是包含聚醚胺，环氧化合物和任选的水溶性尼龙的聚合物。 或者，吸湿性聚合物是聚醚酯酰胺和任选的水溶性尼龙。 该传感器可进行直流测量，可以检测RH在60％至100％范围内的湿度，并确保高反应性的稳定性。

公开(公告)号：US20010037681A1

公开(公告)日：2001-11-08

申请号：US09820644

申请日：2001-03-30

申请人： TDK CORPORATION

发明人： Akira Shibue ,  Kenryo Namba

IPC分类号： G01N019/00 ,  G01N001/00

CPC分类号： G01N27/126 ,  G01N27/121 ,  Y10T428/26 ,  Y10T428/265 ,  Y10T428/31663 ,  Y10T428/31938

摘要： A humidity sensor includes a pair of interdigital electrodes disposed on an insulating substrate and defining a gap therebetween, an undercoat layer of silane compound lying on the gap-defining electrodes and substrate, and a humidity sensitive thin film lying thereon. The humidity sensitive thin film is formed of a crosslinked product of a conductive polymer having ethylenically unsaturated groups, and physically bound to the undercoat layer through an interpenetrating polymer network. The sensor is fully resistant to water so that it ensures stable operation over a long time even in a dew condensing atmosphere. The sensor is free of hysteresis and able to measure humidity over a very wide range.

摘要翻译： 湿度传感器包括设置在绝缘基板上并在其间限定间隔的一对叉指电极，位于间隙限定电极和基板上的硅烷化合物的底涂层和位于其上的湿敏薄膜。 湿敏薄膜由具有烯属不饱和基团的导电聚合物的交联产物形成，并通过互穿聚合物网物理结合到底涂层。 传感器完全抵抗水分，即使在结露气氛中也能保证长时间的稳定运行。 传感器没有滞后现象，能够在很宽的范围内测量湿度。

公开(公告)号：US06229318B1

公开(公告)日：2001-05-08

申请号：US09007366

申请日：1998-01-15

申请人： Toshikazu Suda

发明人： Toshikazu Suda

IPC分类号： G01N2704

CPC分类号： G01N27/121

摘要： An electrical resistance type humidity sensor is herein disclosed which comprises a humidity sensor in which electrodes are formed on a woodceramics substrate having linear characteristics with humidity, and a temperature sensor for temperature correction in which electrodes are formed on other woodceramics substrate having the identical characteristics as in the woodceramics humidity sensor and a film coating of a nonhygroscopic material is formed on the surface of the substrate. Thus, a resistance value measured by the woodceramics humidity sensor is corrected on the basis of a resistance value measured by the woodceramics temperature sensor to obtain an output voltage in proportion to a relative humidity. A structure insensitive to a humidity formed from all the same material i.e. woodceramics as in the humidity sensor is utilized as the temperature sensor for the temperature correction to carry out the temperature correction by the temperature sensor, whereby the humidity sensor having the linear characteristics can be obtained.

摘要翻译： 本文公开了一种电阻型湿度传感器，其包括湿度传感器，其中电极形成在具有湿度线性特征的木器陶瓷基板上，以及用于温度校正的温度传感器，其中电极形成在具有与 在木质素湿度传感器中，在基材的表面上形成非吸湿性材料的膜涂层。 因此，基于由木器陶瓷温度传感器测量的电阻值来校正由木材陶瓷湿度传感器测量的电阻值，以获得与相对湿度成比例的输出电压。 作为用于温度校正的温度传感器，利用与湿度传感器中的所有相同材料即木材陶瓷形成的湿度不敏感的结构，由温度传感器进行温度校正，由此具有线性特性的湿度传感器可以是 获得。

公开(公告)号：US6159624A

公开(公告)日：2000-12-12

申请号：US938521

申请日：1997-09-26

申请人： Kiyoshi Ozawa ,  Yoshio Sakka ,  Tetsuo Uchikoshi ,  Muneyuki Amano

发明人： Kiyoshi Ozawa ,  Yoshio Sakka ,  Tetsuo Uchikoshi ,  Muneyuki Amano

IPC分类号： C01G30/00 ,  C01G30/02 ,  C23C24/08 ,  G01N27/02 ,  G01N27/12 ,  G01W1/11 ,  H01M8/02 ,  H01M8/10 ,  B32B9/00

CPC分类号： G01N27/121 ,  C01G30/004 ,  C01P2002/02 ,  C01P2002/72 ,  C01P2004/03 ,  C01P2004/82 ,  C01P2006/40 ,  H01M8/1016 ,  Y02P70/56 ,  Y10T428/249921

摘要： To provide an antimonic acid film having an excellent conductivity and a high response to humidity, and useful as a high-performance humidity sensor, a hydrogen gas sensor or a hydrogen fuel cell, the present invention provides an antimonic acid film comprising single crystals of cubic antimonic acid dispersed in amorphous antimonic acid by causing metallic antimony or an oxygen-containing compound thereof to react with hydrogen peroxide using the resultant reaction solution as the raw material, and forming a film on an insulated substrate.

摘要翻译： 为了提供具有优异的导电性和对湿度的高响应性的锑酸膜，并且可用作高性能湿度传感器，氢气传感器或氢燃料电池，本发明提供了包含立方晶体的单晶的锑酸膜 使用所得反应溶液作为原料，通过使金属锑或其含氧化合物与过氧化氢反应，分散在无定形锑酸中的锑酸，并在绝缘基板上形成膜。

公开(公告)号：US5533393A

公开(公告)日：1996-07-09

申请号：US372577

申请日：1995-01-13

申请人： Ulrich Bonne ,  Nobuaki Honda ,  David Kubisiak ,  Thomas R. Ohnstein

发明人： Ulrich Bonne ,  Nobuaki Honda ,  David Kubisiak ,  Thomas R. Ohnstein

IPC分类号： G01N25/66 ,  G01N27/12 ,  G01L7/00 ,  G01W1/00

CPC分类号： G01N25/66 ,  G01N27/121

摘要： A microsensor system for determining water vapor content of the ambient atmosphere that uses a thin film suspended ceramic diaphragm structure featuring an embedded, patterned thin film heater, temperature sensor and an external film of an hygroscopic salt stabilized in a water-insoluble, crosslinked polymer matrix and contacting a pair of patterned electrodes which are proximate to the heater. The heater controls a selected electrical parameter of the salt to a fixed, predetermined value, as determined by its electrical characteristics. The dew point of the atmosphere is determined based on the dynamic relation with the salt dehydration temperature.

摘要翻译： 一种微传感器系统，用于测定环境大气中的水蒸气含量，该系统使用薄膜悬浮陶瓷膜片结构，其特征在于嵌入的，图案化薄膜加热器，温度传感器和稳定在水不溶性交联聚合物基质中的吸湿盐的外部膜 并接触靠近加热器的一对图案化电极。 加热器将所选择的盐的电参数控制为由其电特性确定的固定的预定值。 基于与盐脱水温度的动态关系确定大气露点。

公开(公告)号：US5273777A

公开(公告)日：1993-12-28

申请号：US681987

申请日：1991-04-08

申请人： David R. Crotzer ,  Roberto Falcone

发明人： David R. Crotzer ,  Roberto Falcone

IPC分类号： G01N27/12 ,  B05D5/12

CPC分类号： G01N27/121 ,  Y10T29/49099

摘要： A method for manufacturing hygristors includes preparing a hygroscopic gel containing a substantially greater proportion of carbon than the prior art, and milling the gel for a period of at least 24 hours to produce a smooth mixture. Substrates are dipped into the milled gel at controlled rates to coat the substrates. The coated substrates are cured under controlled temperature and humidity. Adhesion of the coating is improved by the smoother mixture resulting from the longer milling time, and by the differences in components of the mixture compared to the prior art. Long term stability and dynamic range are both increased.

摘要翻译： 制造茄子的方法包括制备含有比现有技术大得多的碳的吸湿凝胶，并将凝胶研磨至少24小时以产生光滑的混合物。 将底物以受控的速率浸入研磨的凝胶中以涂覆基材。 涂覆的基材在受控的温度和湿度下固化。 通过由较长的研磨时间得到的更平滑的混合物以及与现有技术相比的混合物的组分差异，改善了涂层的附着力。 长期稳定性和动态范围都增加。

公开(公告)号：US5136274A

公开(公告)日：1992-08-04

申请号：US472380

申请日：1990-02-01

申请人： Tadashi Shimomura ,  Hidechika Wakabayashi ,  Yasunobu Shigaki ,  Mitsuzo Arii

发明人： Tadashi Shimomura ,  Hidechika Wakabayashi ,  Yasunobu Shigaki ,  Mitsuzo Arii

IPC分类号： G01N27/12

CPC分类号： G01N27/121

摘要： A chemically and physically stable humidity sensor including a porous sintered body and electrodes, which is formed by bringing a humidity sensor including a porous sintered body and electrodes into contact with a solution of a polyurethane resin.

摘要翻译： 一种包括多孔烧结体和电极的化学和物理稳定的湿度传感器，其通过将包括多孔烧结体和电极的湿度传感器与聚氨酯树脂的溶液接触而形成。

公开(公告)号：US5075667A

公开(公告)日：1991-12-24

申请号：US443362

申请日：1989-11-30

申请人： Satoru Nishiwaki ,  Hiroshi Miyazaki ,  Koji Murakami ,  Yukinobu Takahashi

发明人： Satoru Nishiwaki ,  Hiroshi Miyazaki ,  Koji Murakami ,  Yukinobu Takahashi

IPC分类号： G01N27/12 ,  H01L21/302 ,  H01L21/3065

CPC分类号： G01N27/121

摘要： A humidity sensor and a method for producing the same, in which an insulating film is first formed on a substrate. A first sensing film is formed on a first electrode to be separated by a space from the insulating film. A second sensing film of the same material as the first sensing film is again formed on the first sensing film and the insulating film, the space therebetween being filled with the second sensing film. Thus a uniform surface etching of the second sensing film is effected, to obtain a continuous flat film layer composed of the sensing film and the insulating film with a continuous flat surface, and in which a second electrode is formed on at least the sensing film.

摘要翻译： 一种湿度传感器及其制造方法，其中首先在基板上形成绝缘膜。 第一感测膜形成在第一电极上，与绝缘膜隔开一个空间。 在第一感测膜和绝缘膜上再次形成与第一感测膜相同材料的第二感测膜，其间的空间填充有第二感测膜。 因此，实现第二感测膜的均匀表面蚀刻，以获得由感测膜和具有连续平坦表面的绝缘膜构成的连续平坦膜层，并且其中至少在感测膜上形成第二电极。

公开(公告)号：US5028906A

公开(公告)日：1991-07-02

申请号：US256007

申请日：1988-10-11

申请人： Yoshio Moriya ,  Ryuji Kojima ,  Kentaro Nagano ,  Kazuhiro Ishikura ,  Yasuo Imai ,  Yasunobu Matsushima

发明人： Yoshio Moriya ,  Ryuji Kojima ,  Kentaro Nagano ,  Kazuhiro Ishikura ,  Yasuo Imai ,  Yasunobu Matsushima

IPC分类号： G01N27/12

CPC分类号： G01N27/121

摘要： This invention concerns a humidity sensor wherein a chemical conversion coating, giving attention to the property that it undergoes an impedance decrease with adsorption of moisture, is used as humidity sensing element which is characterizied by an extremely short electrode distance, greatly improved sensitivity, high speed response, stable performance over a long period of time, high reliability and cheaper production cost.The principal point that characterizes the humidity sensor in this invention is that the chemical conversion coating deposited on the metal surface with or without an electrolysis application, is made usable as a humidity sensing element. For the chemical conversion coating, such coatings as phosphate, oxalate, titanium fluoro-complex, chromium phosphate and non-chromium types are used.On top of this chemical conversion coating, application of a humidity sensing film is effected to further improve humidity sensing performance.