公开(公告)号：US5286671A

公开(公告)日：1994-02-15

申请号：US58400

申请日：1993-05-07

申请人： Anthony D. Kurtz ,  Alexander A. Ned

发明人： Anthony D. Kurtz ,  Alexander A. Ned

IPC分类号： H01L21/20 ,  H01L21/306

CPC分类号： H01L21/2007 ,  Y10S148/012

摘要： A method of bonding a first silicon wafer to a second silicon wafer comprises the steps of diffusing a high conductivity pattern into a surface of a first semiconductor wafer, etching a portion of the surface to raise at least a portion of the pattern, providing a second semiconductor wafer having an insulating layer of a silicon compound disposed thereon, contacting the surface of the pattern to the insulating layer, and bonding the first and second semiconductor wafers at an elevated temperature.

摘要翻译： 将第一硅晶片接合到第二硅晶片的方法包括以下步骤：将高导电性图案扩散到第一半导体晶片的表面中，蚀刻表面的一部分以升高图案的至少一部分，从而提供第二硅晶片 半导体晶片具有设置在其上的硅化合物的绝缘层，与图案的表面接触绝缘层，并且在升高的温度下接合第一和第二半导体晶片。

公开(公告)号：US4860442A

公开(公告)日：1989-08-29

申请号：US276879

申请日：1988-11-28

申请人： Roger W. Ainsworth ,  John L. Allen ,  Anthony D. Kurtz

发明人： Roger W. Ainsworth ,  John L. Allen ,  Anthony D. Kurtz

IPC分类号： G01D11/30 ,  G01L19/00 ,  H05K1/02 ,  H05K1/03 ,  H05K1/05 ,  H05K1/18

CPC分类号： H05K1/021 ,  G01D11/30 ,  G01L19/00 ,  H05K1/0306 ,  H05K1/053 ,  H05K1/182 ,  H05K2201/09745 ,  H05K2203/049 ,  Y10T29/49126 ,  Y10T29/4913

摘要： There is disclosed a method of mounting a pressure transducer on a convoluted three-dimensional structure as for example a turbine blade. The method first forms a groove on a surface of a blade. The groove is formed at a given length and depth in order to accommodate a plurality of components. The groove is then filled with a ceramic material so that the top of the groove is aligned with the top surface of the structure. The entire structure is then coated with a first layer of a ceramic material which layer also covers the filled groove. Suitable conductors are then placed on the coated surface so that they span and overlie the groove. The structure is then coated with a second layer of ceramic material and the coating covers the conductors thereby serving to embed the conductors between the first and second layers. A second groove is then formed in the first and second layers which second groove overlies the first groove and which extends into the first groove. The formation of the second groove operates to separate or cut the conductors as overlying the first groove. Then ceramic material from the second layer is removed on each side of the second groove to expose the separated end surfaces of the conductors. The pressure transducer which is an integrated circuit is then placed into the second groove, and one now bonds the component terminals of the pressure transducer to the exposed conductor surfaces. In this manner both the wires leading from the transducer and the transducer itself are beneath the surface of the structure and do not interfere with the surface contours of the structure while further allowing testing of the same in all operating environments.

摘要翻译： 公开了一种将压力传感器安装在例如涡轮叶片的卷积三维结构上的方法。 该方法首先在叶片的表面上形成凹槽。 凹槽以给定的长度和深度形成，以便容纳多个部件。 然后用陶瓷材料填充凹槽，使得凹槽的顶部与结构的顶表面对齐。 然后将整个结构涂覆有第一层陶瓷材料，该层还覆盖填充的凹槽。 然后将合适的导体放置在涂覆的表面上，使得它们跨越并覆盖在凹槽上。 然后将该结构涂覆有第二层陶瓷材料，并且涂层覆盖导体，从而用于将导体嵌入第一和第二层之间。 然后在第一和第二层中形成第二凹槽，其中第二凹槽覆盖第一凹槽并且延伸到第一凹槽中。 第二凹槽的形成用于将导体分隔或切割成覆盖第一凹槽。 然后在第二槽的每一侧去除来自第二层的陶瓷材料，以露出导体的分开的端面。 然后将作为集成电路的压力传感器放置在第二槽中，然后将压力传感器的组件端子连接到暴露的导体表面。 以这种方式，从换能器和换能器本身引出的电线都在结构的表面下方，并且不会干扰结构的表面轮廓，同时还允许在所有操作环境中对其进行测试。

公开(公告)号：US4766763A

公开(公告)日：1988-08-30

申请号：US46167

申请日：1987-05-05

申请人： Anthony D. Kurtz

发明人： Anthony D. Kurtz

IPC分类号： G01L19/04 ,  G01M3/26

CPC分类号： G01M3/26 ,  G01L9/065

摘要： There is disclosed a gas leak detector employing pressure transducers. In one embodiment the pressure in a vessel is monitored by means of a pressure transducer. The output of the pressure transducer is coupled to an operational amplifier whereby the amplifier has a gain which is proportional to 1/T absolute. In this manner, since the gain is inversely proportional to temperature, the amplifier will produce an output which is independent of temperature but which is capable of providing a pressure indication when there is a gas leak in the container.

摘要翻译： 公开了一种使用压力传感器的气体泄漏检测器。 在一个实施例中，通过压力传感器监测容器中的压力。 压力传感器的输出耦合到运算放大器，由此放大器具有与1 / T绝对成比例的增益。 以这种方式，由于增益与温度成反比，所以放大器将产生与温度无关的输出，但是当容器中存在气体泄漏时能够提供压力指示。

公开(公告)号：US3995247A

公开(公告)日：1976-11-30

申请号：US624605

申请日：1975-10-22

申请人： Anthony D. Kurtz

发明人： Anthony D. Kurtz

IPC分类号： G01P15/12 ,  H01L41/10

CPC分类号： G01P15/123

摘要： A transducer or accelerometer employs at least one slot or gap located in a seismic mass of a block-like configuration. The relative displacement of the opposing faces of the block, due to the slot, is monitored by means of a shim or similar metallic member, which spans the slot. Secured to the shim is a piezoresistive strain gage whose size and dimensions become relatively independent of the dimension of the slot, therefore enabling accurate and reliable strain detection without attendant temperature problems.

摘要翻译： 换能器或加速度计采用位于块状构造的地震块中的至少一个槽或间隙。 由于槽而导致的块的相对面的相对位移通过跨越槽的垫片或相似的金属构件来监测。 安装在垫片上的是压阻应变计，其尺寸和尺寸变得相对独立于槽的尺寸，因此能够进行准确可靠的应变检测，而无需伴随着温度问题。

公开(公告)号：US08578782B2

公开(公告)日：2013-11-12

申请号：US13253139

申请日：2011-10-05

申请人： Anthony D. Kurtz ,  Alexander A. Ned ,  Joseph R. VanDeWeert

发明人： Anthony D. Kurtz ,  Alexander A. Ned ,  Joseph R. VanDeWeert

IPC分类号： G01L9/06 ,  G01L15/00 ,  G01M9/06

CPC分类号： G01L9/00 ,  G01L9/065 ,  G01L15/00 ,  G01M9/06

摘要： A system for measuring a multiplicity of pressures as those experienced by a model in a wind tunnel is depicted. The system includes individual sensor devices which are connected to an electronics module. The sensors may be connected to the electronics module via a cable in a first embodiment. In an alternate embodiment, the sensors may be connected to the electronics module via a mating connector located therebetween. A memory component which stores compensation coefficients associated with each of the sensors may also be included in the system to correct errors associated with each sensor. The advantage of the various embodiments is that each sensor does not have any compensation stored thereon and thus, the sensors can be made very small to operate at very high temperatures without any loss of accuracy.

摘要翻译： 描绘了一种用于测量如风洞中的模型所经历的多种压力的系统。 该系统包括连接到电子模块的各个传感器装置。 在第一实施例中，传感器可以经由电缆连接到电子模块。 在替代实施例中，传感器可以经由位于其间的匹配连接器连接到电子模块。 存储与每个传感器相关联的补偿系数的存储器组件也可以被包括在系统中以校正与每个传感器相关联的错误。 各种实施例的优点是每个传感器不存在其上的任何补偿，因此，可以使传感器非常小以在非常高的温度下操作而没有任何精度的损失。

公开(公告)号：US08307713B2

公开(公告)日：2012-11-13

申请号：US12938141

申请日：2010-11-02

申请人： Anthony D. Kurtz ,  Tonghuo Shang ,  Boaz Kochman

发明人： Anthony D. Kurtz ,  Tonghuo Shang ,  Boaz Kochman

IPC分类号： G01L7/08

CPC分类号： G01L7/08 ,  G01L9/06 ,  G01L13/025 ,  G01L19/0609

摘要： A semiconductor filter is provided to operate in conjunction with a differential pressure transducer. The filter receives a high and very low frequency static pressure attendant with a high frequency low dynamic pressure at one end, the filter operates to filter said high frequency dynamic pressure to provide only the static pressure at the other filter end. A differential transducer receives both dynamic and static pressure at one input port and receives said filtered static pressure at the other port where said transducer provides an output solely indicative of dynamic pressure. The filter in one embodiment has a series of etched channels directed from an input end to an output end. The channels are etched pores of extremely small diameter and operate to attenuate or filter the dynamic pressure. In another embodiment, a spiral tubular groove is found between a silicon wafer and a glass cover wafer, an input port of the groove receives both the static and dynamic pressure with an output port of the groove providing only static pressure. The groove filters attenuate dynamic pressure to enable the differential transducer to provide an output only indicative of dynamic pressure by cancellation of the static pressure.

摘要翻译： 提供半导体滤波器以与差压传感器一起操作。 过滤器在一端接收高频，低频静压泵，其一端具有高频低动态压力，滤波器用于过滤所述高频动态压力，仅提供另一过滤端的静压力。 差分换能器在一个输入端口处接收动态和静态压力，并且在另一端口处接收所述过滤的静态压力，其中所述换能器提供仅指示动态压力的输出。 一个实施例中的滤波器具有从输入端指向输出端的一系列蚀刻通道。 通道是非常小直径的蚀刻孔，用于衰减或过滤动态压力。 在另一个实施例中，在硅晶片和玻璃盖晶片之间发现螺旋管状沟槽，槽的输入端口接收静态压力和动态压力，而槽的输出端口仅提供静态压力。 沟槽滤波器衰减动态压力，使得差分换能器仅通过消除静压来提供仅指示动态压力的输出。

公开(公告)号：US08276466B2

公开(公告)日：2012-10-02

申请号：US12751505

申请日：2010-03-31

申请人： Anthony D. Kurtz ,  Nora Kurtz, legal representative ,  Joseph VanDeWeert

发明人： Anthony D. Kurtz ,  Joseph VanDeWeert

IPC分类号： G01D7/00 ,  G01L1/22

CPC分类号： G01L5/0009 ,  F16C19/522 ,  G01L5/0019 ,  G01L5/162

摘要： A two or three axis load cell capable of measuring axial and one or more shear forces is disclosed. The load cell can comprise a force collector connected by one or more connecting rods to one or more cross pieces. The load cell can comprise a single cross piece and can measure an axial force applied to the load cell and at least one component of shear force applied to the load cell. In other embodiments, the load cell can comprise two cross pieces, disposed at disparate angles, to enable the measurement of an axial force and both components of shear force applied to the force collector. The cross pieces are equipped with a means, such as piezoresistive elements to measure their deflection due to the applied forces on the force collector. The connecting rods can be fitted with additional piezoresistors to measure the axial forces on the force collector.

摘要翻译： 公开了能够测量轴向和一个或多个剪切力的两轴或三轴称重传感器。 称重传感器可以包括通过一个或多个连接杆连接到一个或多个横档的力收集器。 测力传感器可以包括单个横截面并且可以测量施加到测力传感器的轴向力和施加到测力传感器的剪切力的至少一个分量。 在其他实施例中，测力传感器可以包括以不同角度设置的两个横截面，以便能够测量施加到力收集器的轴向力和剪切力的两个分量。 十字件配备有诸如压阻元件的装置，以测量由于在力收集器上施加的力而导致的挠曲。 连杆可以安装附加的压电电阻器来测量力收集器上的轴向力。

公开(公告)号：US08237537B2

公开(公告)日：2012-08-07

申请号：US13069222

申请日：2011-03-22

申请人： Anthony D. Kurtz ,  Nora Kurtz, legal representative

发明人： Anthony D. Kurtz

IPC分类号： G01L1/22

CPC分类号： G01L9/04 ,  G01L9/0055 ,  G01L9/06

摘要： A pressure transducer comprising a corrosion resistant metal diaphragm, having an active region, and capable of deflecting when a force is applied to the diaphragm; and a piezoresistive silicon-on-insulator sensor array disposed on a single substrate, the substrate secured to the diaphragm, the sensor array having a first outer sensor near an edge of the diaphragm at a first location and on the active region, a second outer sensor near an edge of the diaphragm at a second location and on the active region, and at least one center sensor substantially overlying a center of the diaphragm, the sensors connected in a bridge array to provide an output voltage proportional to the force applied to the diaphragm. The sensors are dielectrically isolated from the substrate.

摘要翻译： 一种压力传感器，包括具有有源区域的耐腐蚀金属隔膜，并且当向隔膜施加力时能够偏转; 以及设置在单个衬底上的压电硅绝缘体上传感器阵列，所述衬底固定到所述隔膜上，所述传感器阵列在第一位置处和所述有源区域上具有靠近所述隔膜的边缘的第一外部传感器，所述第二外部传感器阵列 在第二位置和有源区域附近的隔膜的边缘附近的传感器以及基本上覆盖隔膜的中心的至少一个中心传感器，所述传感器以桥式阵列连接以提供与施加到所述隔膜的力成比例的输出电压 隔膜 传感器与基板介电隔离。

公开(公告)号：US08181530B2

公开(公告)日：2012-05-22

申请号：US13025257

申请日：2011-02-11

申请人： Anthony D. Kurtz

发明人： Anthony D. Kurtz

IPC分类号： G01L7/00

CPC分类号： G01L19/0084 ,  G01L7/082 ,  G01L19/0645 ,  Y10T29/49007 ,  Y10T29/4998

摘要： An oil-filled pressure transducer having reduced back pressure, comprising an alignment plate having a sensor accommodating aperture, a sensor module inserted into the sensor accommodating aperture, a header surrounding the alignment plate, the header having a protruding top surface, and a diaphragm disposed on the protruding top surface to create a relatively small oil accommodating region between the diaphragm and the sensor. This configuration reduces the oil volume required for operation, which ultimately reduces the back pressure applied against the diaphragm.

摘要翻译： 具有降低的背压的充油压力传感器，包括具有传感器容纳孔的对准板，插入到传感器容纳孔中的传感器模块，围绕对准板的集管，具有突出的顶表面的集管和设置的隔膜 在突出的顶部表面上，以在隔膜和传感器之间产生相对较小的油容纳区域。 该配置减少了操作所需的油量，这最终降低了施加在隔膜上的背压。

公开(公告)号：US20110296924A1

公开(公告)日：2011-12-08

申请号：US13161594

申请日：2011-06-16

申请人： Anthony D. Kurtz ,  Tonghuo Shang ,  Adam Hurst ,  Nora Kurtz

发明人： Anthony D. Kurtz ,  Tonghuo Shang ,  Adam Hurst ,  Nora Kurtz

IPC分类号： G01L11/04 ,  G01R3/00

CPC分类号： G01L19/0609 ,  G01L19/0681 ,  Y10T29/49005 ,  Y10T29/49007

摘要： A pressure transducer assembly for measuring pressures in high temperature environments employing an elongated tube which is terminated at one end by an acoustic micro-filter. The micro-filter is operative to absorb acoustic waves impinging on it with limited or no reflection. To improve the absorption of acoustic waves, the elongated tube may be tapered and/or mounted to a support block and further convoluted to reduce the overall size and mass of the device. A pressure transducer with a diaphragm flush may be mounted to the elongated tube and extend through to the inner wall of the tube. Hot gases propagate through the elongated tube and their corresponding pressures are measured by the transducer. The acoustic filter operates to absorb acoustic waves resultant from the hot gases, therefore enabling the pressure transducer to be mainly responsive to high frequency waves associated with the gas turbine operation.

摘要翻译： 一种用于在高温环境中测量压力的压力传感器组件，其采用细长管，其在一端由声学微滤器终止。 微滤器可以有效或无反射地吸收入射到其上的声波。 为了改善声波的吸收，细长管可以是锥形的和/或安装到支撑块上并进一步卷曲以减小装置的整体尺寸和质量。 具有隔膜齐平的压力传感器可以安装到细长管并延伸到管的内壁。 热气体通过细长管传播，其相应的压力由传感器测量。 声学滤波器用于吸收由热气体产生的声波，因此能够使压力传感器主要响应于与燃气轮机操作相关联的高频波。