Plasma processing method and post-processing method
    81.
    发明授权
    Plasma processing method and post-processing method 有权
    等离子体处理方法和后处理方法

    公开(公告)号:US07871532B2

    公开(公告)日:2011-01-18

    申请号:US11354836

    申请日:2006-02-16

    IPC分类号: B23K9/02

    摘要: A plasma processing method for performing a plasma process on a target object placed in a chamber includes a first plasma process of turning a gas containing at least a halogen element into plasma to generate first plasma, thereby processing the target object; a second plasma process, subsequent to the first plasma process, of supplying a gas containing oxygen into the chamber to generate second plasma, thereby processing the chamber and the target object; and a third plasma process, subsequent to the second plasma process, of turning a gas containing at least fluorine into plasma to generate third plasma, thereby processing the target object.

    摘要翻译: 用于对放置在腔室中的目标物体进行等离子体处理的等离子体处理方法包括:将至少含有卤素元素的气体转换成等离子体以产生第一等离子体的第一等离子体处理,从而处理目标物体; 在第一等离子体处理之后的第二等离子体工艺,将含氧气体供应到室中以产生第二等离子体,由此处理室和目标物体; 以及在第二等离子体处理之后的第三等离子体处理将至少含有氟的气体转化为等离子体以产生第三等离子体,由此处理目标物体。

    Process for producing fluoropolymer
    84.
    发明授权
    Process for producing fluoropolymer 失效
    生产含氟聚合物的方法

    公开(公告)号:US07790817B2

    公开(公告)日:2010-09-07

    申请号:US11618088

    申请日:2006-12-29

    IPC分类号: C08F2/00

    摘要: Provided is a process for producing a fluoropolymer containing repeating units based on a fluoromonomer represented by the following formula (m) in an amount of from 5 to 50 mol % based on the entire repeating units in the polymer by polymerization reaction of tetrafluoroethylene and the fluoromonomer, wherein the polymerization reaction is carried out by continuously charging the reactor with tetrafluoroethylene and the fluoromonomer: wherein ml is an integer of from 1 to 6. Also provided is an electrolyte material for an electrolyte fuel cell which can be operated at a high temperature to obtain a high output, wherein the electrolyte material contains the fluoropolymer produced by the process.

    摘要翻译: 本发明提供一种含氟聚合物的制造方法,所述含氟聚合物含有基于由下式(m)表示的含氟单体的重复单元,所述重复单元的量为5-40摩尔%,相对于聚合物中的全部重复单元,四氟乙烯与含氟单体的聚合反应 其中聚合反应是通过用四氟乙烯和含氟单体连续地加入反应器来进行的:其中,ml是1至6的整数。还提供了一种用于电解质燃料电池的电解质材料,其可以在高温至 获得高产量,其中电解质材料含有通过该方法生产的含氟聚合物。

    METHOD FOR PRODUCING ALCOHOL BY HYDROGENATING LACTONE AND CARBOXYLIC ACID ESTER IN LIQUID PHASE
    85.
    发明申请
    METHOD FOR PRODUCING ALCOHOL BY HYDROGENATING LACTONE AND CARBOXYLIC ACID ESTER IN LIQUID PHASE 有权
    通过在液相中氢化柠檬酸和羧酸酯生产醇的方法

    公开(公告)号:US20100113842A1

    公开(公告)日:2010-05-06

    申请号:US12594577

    申请日:2008-04-02

    IPC分类号: C07C31/18 C07C27/04

    摘要: Disclosed is a method for producing an alcohol from a lactone or a carboxylic acid ester, which enables to produce an alcohol from a lactone or a carboxylic acid ester under relatively mild conditions with high yield and high catalytic efficiency. This method also enables to produce an optically active alcohol from an optically active lactone or an optically active carboxylic acid ester. Specifically disclosed is a method for producing an alcohol by hydrogen reducing a lactone or a carboxylic acid ester in the presence of a catalyst containing ruthenium and a phosphine compound represented by the following general formula (1): wherein R1 represents a spacer; R2, R3, R4, R5, R6 and R7 independently represent a hydrogen atom, an alkyl group having 1-12 carbon atoms, an aryl group or a heterocyclic group; and R8, R9, R10, R11, R12 and R13 independently represent an alkyl group having 1-12 carbon atoms, an aryl group or a heterocyclic group.

    摘要翻译: 公开了一种从内酯或羧酸酯制备醇的方法,其能够在相对温和的条件下以高产率和高催化效率从内酯或羧酸酯制备醇。 该方法还能够从光学活性的内酯或光学活性的羧酸酯制备光学活性的醇。 具体公开的是通过在含有钌的催化剂和由以下通式(1)表示的膦化合物的存在下氢还原内酯或羧酸酯来制备醇的方法:其中R1表示间隔基; R2,R3,R4,R5,R6和R7独立地表示氢原子,具有1-12个碳原子的烷基,芳基或杂环基; 并且R 8,R 9,R 10,R 11,R 12和R 13独立地表示具有1-12个碳原子的烷基,芳基或杂环基。

    Ion generating element, ion generator and neutralizer
    86.
    发明授权
    Ion generating element, ion generator and neutralizer 失效
    离子发生元件,离子发生器和中和剂

    公开(公告)号:US07706120B2

    公开(公告)日:2010-04-27

    申请号:US11884488

    申请日:2006-02-20

    IPC分类号: H01T23/00

    CPC分类号: H01T23/00

    摘要: An ion generating element capable of cost reduction and space saving while exhibiting a high generation efficiency of positive ions and negative ions and stabilized generation capacity with less variation, and an ion generator and a neutralizer employing it. The ion generating element comprises a dielectric body having at least two faces, at least two discharge electrodes arranged on the at least two faces of the dielectric body, and an induction electrode arranged in the dielectric body and subjected to the action of the at least two discharge electrodes and is characterized in that positive ions and negative ions are generated on the body, and ions are generated from the at least two faces of the dielectric body through discharge generated because of the potential difference between the discharge electrode of the ion generating element and the induction electrode when a drive voltage is applied between them.

    摘要翻译: 一种离子发生元件,其能够显着提高正离子和负离子的发电效率,并且具有较小变化的稳定的发电容量,并且使用离子发生器和使用其的中和器能够节省成本并节约空间。 离子产生元件包括具有至少两个表面的电介质体,布置在电介质体的至少两个表面上的至少两个放电电极,以及布置在电介质体中并受到至少两个 放电电极,其特征在于,在体上产生正离子和负离子,并且通过由于离子产生元件的放电电极和放电电极之间的电位差而产生的放电产生离子从电介质体的至少两个面产生 当在它们之间施加驱动电压时,感应电极。

    Process for producing electrolyte material for polymer electrolyte fuel cells, and membrane-electrode assembly for polymer electrolyte fuel cells
    87.
    发明授权
    Process for producing electrolyte material for polymer electrolyte fuel cells, and membrane-electrode assembly for polymer electrolyte fuel cells 有权
    用于生产用于聚合物电解质燃料电池的电解质材料的方法和用于聚合物电解质燃料电池的膜 - 电极组件

    公开(公告)号:US07557178B2

    公开(公告)日:2009-07-07

    申请号:US11183748

    申请日:2005-07-19

    IPC分类号: C08J5/20

    摘要: A membrane-electrode assembly for polymer electrolyte fuel cells which is excellent in water repellency and gas diffusivity and which exhibits a high output power density, can be obtained by using, as an electrolyte material for polymer electrolyte fuel cells, a fluoropolymer obtained by contacting a fluoropolymer which is excellent in gas diffusivity and which has alicyclic structures in its main chain and further has sulfonic acid groups, with fluorine gas for fluorination to increase water repellency and stabilize the molecule ends. The above fluoropolymer is preferably made of a copolymer comprising repeating units based on the following monomer A and repeating units based on the following monomer B (wherein Y is a fluorine atom or a trifluoromethyl group, m is an integer of from 0 to 3, p is 0 or 1, and n is an integer of from 1 to 12): Monomer A: A perfluoromonomer which gives a polymer having repeating units containing cyclic structures in its main chain by radical polymerization Monomer B: CF2═CF—(OCF2CFY)m—Op—(CF2)n—SO3H.

    摘要翻译: 作为聚合物电解质型燃料电池的电解质材料,可以通过使用通过使聚合物电解质燃料电池接触而获得的含氟聚合物,获得具有优异的防水性和气体扩散性并且显示出高功率密度的聚合物电解质燃料电池用膜电极组件 含氟聚合物,其气体扩散性优异,并且在其主链中具有脂环结构并且还具有磺酸基,氟气用于氟化以增加拒水性并稳定分子末端。 上述含氟聚合物优选由包含以下单体A的重复单元和基于以下单体B的重复单元(其中Y为氟原子或三氟甲基,m为0〜3的整数,p 是0或1,n是1至12的整数):单体A:通过自由基聚合在其主链中产生具有含有环状结构的重复单元的聚合物的全氟单体单体B:CF 2 -CF-(OCF 2 CF 3)m -Op-(CF2)n-SO3H。

    Etching method and apparatus
    88.
    发明授权
    Etching method and apparatus 有权
    蚀刻方法和装置

    公开(公告)号:US07514277B2

    公开(公告)日:2009-04-07

    申请号:US11224949

    申请日:2005-09-14

    IPC分类号: H01L21/302

    摘要: An etching method capable of controlling the film thickness of a hard mask layer uniformly is provided. A plasma etching is performed on a native oxide film by using an etching gas containing, for example, CF4 and Ar while a thickness of a silicon nitride film is being monitored and the etching is finished when the thickness of the silicon nitride film reaches a predetermined value. Then, a plasma etching is performed on a silicon substrate by employing an etching gas containing, for example, Cl2, HBr and Ar and using the silicon nitride film as a mask while a depth of a trench is being monitored and the etching is finished when the depth of the trench reaches a specified value.

    摘要翻译: 提供了能够均匀地控制硬掩模层的膜厚的蚀刻方法。 通过使用含有例如CF4和Ar的蚀刻气体来进行等离子体蚀刻,同时在氮化硅膜的厚度被监视的同时蚀刻完成,当氮化硅膜的厚度达到预定值时 值。 然后,通过使用包含例如Cl 2,HBr和Ar的蚀刻气体,并且在监测沟槽的深度并且蚀刻完成时,使用氮化硅膜作为掩模,在硅衬底上进行等离子体蚀刻, 沟槽的深度达到规定值。

    Particle monitoring apparatus and vacuum processing apparatus
    89.
    发明授权
    Particle monitoring apparatus and vacuum processing apparatus 有权
    粒子监测装置和真空处理装置

    公开(公告)号:US07417732B2

    公开(公告)日:2008-08-26

    申请号:US11271945

    申请日:2005-11-14

    IPC分类号: G01N15/02

    摘要: A particle monitoring apparatus including a light source configured to emit plural light fluxes, a projecting optical system configured to convert the plural light fluxes into a band-shaped light flux, to lead the band-shaped light flux into a flow passage of a given gas stream, and to partially superpose the plural light fluxes to form a substantially uniform light intensity distribution of the band-shaped light flux in a widthwise direction; a light detector configured to detect intensity of light; and a particle detector configured to determine sizes of the particles passing the light flux based on intensities of the scattered lights detected by the light detector and to count the number of the particles.

    摘要翻译: 一种粒子监测装置,包括配置为发射多个光束的光源,投影光学系统,被配置为将多个光束转换成带状光束,以将带状光束引导到给定气体的流路中 并且部分地叠加多个光束以在宽度方向上形成带状光通量的基本上均匀的光强度分布; 光检测器,被配置为检测光的强度; 以及粒子检测器,被配置为基于由光检测器检测到的散射光的强度来确定通过光通量的粒子的尺寸,并对粒子的数量进行计数。

    Electrolyte material for polymer electrolyte fuel cells, electrolyte membrane and membrane/electrode assembly
    90.
    发明申请
    Electrolyte material for polymer electrolyte fuel cells, electrolyte membrane and membrane/electrode assembly 有权
    用于聚合物电解质燃料电池,电解质膜和膜/电极组件的电解质材料

    公开(公告)号:US20080138685A1

    公开(公告)日:2008-06-12

    申请号:US12010589

    申请日:2008-01-28

    IPC分类号: H01M8/10 C08J5/20

    摘要: To provide a polymer electrolyte material for polymer electrolyte fuel cells, which is an electrolyte material having a high ion exchange capacity and a low resistance, and which has a higher softening temperature than a conventional electrolyte material.An electrolyte material for polymer electrolyte fuel cells, which is made of a polymer containing repeating units based on a fluoromonomer having a radical polymerization reactivity, wherein the repeating units contain, in their side chains, a structure having ionic groups represented in the following formula (α) (provided that in the formula, each of Q1 and Q2 which are independent of each other, is a single bond or a perfluoroalkylene group that may have an etheric oxygen atom, provided that they are not single bonds at the same time, Rf1 is a perfluoroalkyl group which may have an etheric oxygen atom, and X is an oxygen atom, a nitrogen atom or a carbon atom, provided that when X is an oxygen atom, a=0, when X is a nitrogen atom, a=1, and when X is a carbon atom, a=2, and Y is a fluorine atom or a monovalent perfluoro organic group).

    摘要翻译: 本发明提供一种高分子电解质燃料电池用聚合物电解质材料,该高分子电解质材料是具有高离子交换能力和低电阻的电解质材料,其软化温度高于常规电解质材料。 一种用于聚合物电解质燃料电池的电解质材料,其由含有具有自由基聚合反应性的含氟单体的重复单元的聚合物制成,其中重复单元在其侧链中包含具有下式表示的离子基团的结构( α)(条件是在该式中,彼此独立的Q 1和Q 2各自是单键或可具有醚的全氟亚烷基 氧原子,条件是它们不是同时是单键,R f1是可以具有醚性氧原子的全氟烷基,X是氧原子,氮原子或碳原子 条件是当X是氧原子时,a = 0,当X为氮原子时a = 1,当X为碳原子时a = 2,Y为氟原子或1价全氟有机基团) 。